Square silicon core polishing and repairing machine

Abstract

The utility model provides a square silicon core polishing and repairing machine, and relates to the technical field of polishing and repairing machines. Comprising a workbench, a polishing wheel and a liquid storage shell, a first rolling shaft is rotationally arranged in a second mounting shell, a motor is arranged on the back face of the second mounting shell, and a second rolling shaft is rotationally arranged in a third mounting shell. The square silicon core placed at the top end of the workbench can be supported in a rolling mode through two sets of second rolling shafts, the using positions of the first rolling shafts can be flexibly adjusted through second electric push rods, and the first combination plates and the second combination plates can be driven to move downwards in the direction of the second rolling shafts through operation of the first electric push rods; when the motor operates to drive the first rolling shaft to rotate, the rotation of the first rolling shaft can drive the rectangular square silicon core to linearly move at the top end of the working table, the square silicon core needing to be polished is moved to the polishing wheel, the labor output is reduced, and meanwhile the polishing efficiency is improved. And the use safety of the polishing and repairing machine is also effectively improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a grinding and repairing machine, in particular to a square silicon core grinding and repairing machine, and belongs to the technical field of grinding and repairing machines. BACKGROUND

[0002] Square silicon core refers to silicon material used in semiconductor manufacturing process, especially the core part in preparing polycrystalline silicon or single crystal silicon. The square silicon core is usually processed by cutting and annealing process of silicon core round bar. In the production of polycrystalline silicon, the silicon core is used as a carrier. Through electric heating in the chemical vapor deposition (CVD) reactor, the surface of the silicon rod is maintained at a certain temperature range, and the silicon-containing gas and reducing gas are introduced into the furnace to achieve the reaction condition. The elemental silicon is deposited on the surface of the silicon rod to realize the growth of the polycrystalline silicon rod. The main function of the square silicon core grinding and repairing machine is to accurately grind and repair the end of the silicon core to ensure the quality and size accuracy of the silicon core. This equipment is widely used in the semiconductor and solar cell industries because the quality of the silicon core directly affects the subsequent production process and product performance.

[0003] At present, the surface of the square silicon core is prone to long bumps due to processing defects and other conditions, and the surface needs to be ground flat. Most of them are conveyed manually, and the silicon bumps on the surface are polished and ground flat by a polishing wheel. Long bumps may cause the flatness of the square silicon core surface to decrease, affecting its adhesion to other materials. In some applications that require high-precision surfaces, such as photolithography process in semiconductor manufacturing, uneven surface may cause the precision of the photolithography pattern to decrease, thereby affecting the subsequent chip manufacturing process. Therefore, we provide a square silicon core grinding and repairing machine to solve the above problems. UTILITY MODEL CONTENTS

[0004] To solve the above problems, the utility model provides a square silicon core grinding and repairing machine to solve the above problems, and the specific technical scheme is as follows:

[0005] The square silicon core grinding and repairing machine comprises a workbench, a polishing wheel and a liquid storage shell. The back of the workbench is provided with two groups of first electric push rods. The output end of the first electric push rod is provided with a first telescopic rod. The top end of the first telescopic rod is provided with a first combination plate. The front of the first combination plate is movably provided with a second combination plate. The top end of the first combination plate is provided with a second electric push rod. The output end of the second electric push rod is provided with a second telescopic rod. The second telescopic rod is connected with the second combination plate. The bottom end of the second combination plate is provided with a second mounting shell. A first roller is rotatably arranged in the second mounting shell. The back of the second mounting shell is provided with a motor. The motor is connected with one end of the first roller. The top inner wall of the workbench is provided with a third mounting shell. A second roller is rotatably arranged in the third mounting shell. The top end of the second roller is flush with the upper surface of the workbench. The second roller is located below the first roller.

[0006] Preferably, a through slot is formed in the interior of the workbench, a flow guide shell is arranged on the top inner wall of the workbench, and the flow guide shell is in communication with the interior of the liquid storage shell.

[0007] Preferably, a mounting shell is arranged on the top inner wall of the workbench, the polishing wheel is arranged in the interior of the mounting shell, and the polishing wheel is movably arranged in the through slot and substantially flush with the upper surface of the workbench.

[0008] Preferably, a connecting shell is arranged on the back of the workbench, the liquid storage shell is arranged on the bottom inner wall of the connecting shell, and two groups of filter screens are detachably arranged in the interior of the liquid storage shell.

[0009] Preferably, a connecting plate is arranged on one side of the connecting shell, a pump body is arranged on the top end of the connecting plate, a liquid delivery pipe is arranged on the connecting end of the pump body, a connecting seat is arranged on the top end of the connecting shell, the liquid delivery pipe is in communication with the interior of the connecting seat, and a liquid spraying pipe is arranged in the interior of the top end of the connecting seat.

[0010] Preferably, a controller is arranged on the top end of the connecting plate and located on one side of the pump body.

[0011] Preferably, two guide rods are arranged on the back of the second combination plate and movably arranged in the first combination plate, two groups of second through slots are formed in the top of the workbench, and the second rollers are movably arranged in the second through slots.

[0012] Compared with the prior art, the utility model has the following beneficial effects:

[0013] 1、The utility model discloses a workbench, which comprises a workbench, a first roller, a second roller, a first electric push rod, a second electric push rod, a first combination plate, a second combination plate, a polishing wheel, a liquid storage shell, a pump body, a liquid delivery pipe, a connecting seat and a liquid spraying pipe.

[0014] 2、The utility model discloses a cooling liquid can fall to the flow guide shell in one -way through -slot after using, can make cooling liquid flow to the inside of the liquid storage shell with flow guide shell, realizes the effect that cooling liquid circulates and utilizes, the cooling liquid that returns to the inside of liquid storage shell can utilize two groups of filter screen and filters the impurity in the cooling liquid, avoids the damage that impurity causes pump body, and the filter screen is inserted in the inside of liquid storage shell, is convenient for the dismounting cleaning of filter screen later period. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is whole front structure schematic diagram of the utility model;

[0016] Figure 2 It is whole back structure schematic diagram of the utility model;

[0017] Figure 3 It is workbench shearing structure schematic diagram of the utility model;

[0018] Figure 4 It is flow guide shell shearing structure schematic diagram of the utility model;

[0019] Figure 5 It is one -numbered roller and two -numbered roller structure schematic diagram of the utility model;

[0020] Figure 6 It is one -numbered combination board and two -numbered combination board structure schematic diagram of the utility model.

[0021] BRIEF DESCRIPTION OF DRAWINGS: 1, workbench;2, one -way through -slot;3, two -way through -slot;4, flow guide shell;5, one -numbered installation shell;6, polishing wheel;7, connecting shell;8, liquid storage shell;9, filter screen;10, connecting plate;11, pump body;12, infusion tube;13, connecting seat;14, liquid injection pipe;15, controller;16, one -numbered electric push rod;17, one -numbered telescopic link;18, one -numbered combination board;19, two -numbered combination board;20, guide rod;21, two -numbered electric push rod;22, two -numbered telescopic link;23, two -numbered installation shell;24, one -numbered roller;25, motor;26, three -numbered installation shell;27, two -numbered roller. DETAILED DESCRIPTION

[0022] The utility model will be further explained in connection with the drawings.

[0023] Please refer to Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 、 Figure 5 And Figure 6 , square silicon core polishes repair machine;

[0024] The utility model provides a kind of polishing machine, including workbench 1, polishing wheel 6 and liquid storage shell 8, the back of workbench 1 is provided with two groups of first electric push rod 16, the output of first electric push rod 16 is provided with first telescopic rod 17, the top of first telescopic rod 17 is provided with first combination plate 18, the front of first combination plate 18 is movably provided with second combination plate 19, the top of first combination plate 18 is provided with second electric push rod 21, the output of second electric push rod 21 is provided with second telescopic rod 22, and second telescopic rod 22 is connected with second combination plate 19, the bottom of second combination plate 19 is provided with second mounting shell 23, the inside of second mounting shell 23 is rotatably provided with one roller 24, the back of second mounting shell 23 is provided with motor 25, and motor 25 is connected with one end of one roller 24, the top inner wall of workbench 1 is provided with third mounting shell 26, the inside of third mounting shell 26 is rotatably provided with second roller 27, and the top of second roller 27 is flush with the upper surface of workbench 1, second roller 27 is below one roller 24, the back of second combination plate 19 is provided with two guide rods 20, and guide rod 20 is movably inserted in first combination plate 18, the top of workbench 1 is provided with two groups of second through slot 3, and second roller 27 is movably located in second through slot 3.

[0025] Two groups of third mounting shell 26 are bolted in the top inside of workbench 1, and the third mounting shell 26 after installation is below second through slot 3, the third mounting shell 26 after installation can rotatably support second roller 27 in second through slot 3, the top of second roller 27 is flush with the upper surface of workbench 1, and the square silicon core placed on the top of workbench 1 can be rotatably supported by two groups of second roller 27, the outer surfaces of second roller 27 and one roller 24 are wrapped with rubber sleeves, for protecting the contact surface with square silicon core, by the operation of first electric push rod 16, first telescopic rod 17 can drive first combination plate 18 and second combination plate 19 to move downwards towards second roller 27 until one roller 24 in the inside of second mounting shell 23 contacts with the upper surface of rectangular square silicon core, by the operation of second electric push rod 21, second telescopic rod 22 can drive second combination plate 19 and second mounting shell 23 to move linearly, to flexibly adjust the use position of one roller 24, in the process of linear movement of second combination plate 19, guide rod 20 can move linearly in the inside of first combination plate 18, and guide rod 20 can linearly limit second combination plate 19 to approach or move away from first combination plate 18, by the contact of the lower surface of rectangular square silicon core with second roller 27 and the contact of one roller 24 with the upper surface of rectangular square silicon core, when motor 25 drives one roller 24 to rotate, the rotation of one roller 24 can drive rectangular square silicon core to move linearly on the top of workbench 1, the front of second mounting shell 23 is slightly longer, can limit rectangular square silicon core in movement, so that square silicon core passes through polishing wheel 6.

[0026] Please refer toFigure 1 、 Figure 2 、 Figure 3 、 Figure 4 、 Figure 5 and Figure 6 , square silicon core polishing repair machine;

[0027] The inside of the workbench 1 is provided with a No. 1 through slot 2, the top inner wall of the workbench 1 is provided with a flow guide shell 4, and the flow guide shell 4 is through with the inside of the liquid storage shell 8, the top inner wall of the workbench 1 is provided with a No. 1 installation shell 5, the polishing wheel 6 is rotationally arranged in the inside of the No. 1 installation shell 5, the polishing wheel 6 is movably located in the No. 1 through slot 2 and is basically flat with the upper surface of the workbench 1, the back of the workbench 1 is provided with a connecting shell 7, the liquid storage shell 8 is arranged on the bottom inner wall of the connecting shell 7, the inside of the liquid storage shell 8 is detachably provided with two groups of filter screens 9, one side of the connecting shell 7 is provided with a connecting plate 10, the top end of the connecting plate 10 is provided with a pump body 11, the connecting end of the pump body 11 is provided with a liquid delivery pipe 12, the top end of the connecting shell 7 is provided with a connecting seat 13, the liquid delivery pipe 12 is through with the inside of the connecting seat 13, the top end of the connecting seat 13 is provided with a liquid spraying pipe 14, the top end of the connecting plate 10 is provided with a controller 15, and the controller 15 is located on one side of the pump body 11.

[0028] The workbench 1 is the main combined part of the square silicon core polishing repair machine, the No. 1 installation shell 5 is bolted on the top inner wall of the workbench 1, the polishing wheel 6 is rotationally arranged in the inside of the No. 1 installation shell 5, and the output end of the drive motor on one side of the No. 1 installation shell 5 is connected with one end of the polishing wheel 6, the polishing wheel 6 is rotationally arranged in the inside of the No. 1 through slot 2, and is flat with the upper surface of the workbench 1, after the rectangular square silicon core contacts with the polishing wheel 6, the polishing wheel 6 can contact and polish the silicon nodules on the surface of the square silicon core, and the polishing wheel 6 cannot contact the square silicon core in the place without nodules, so as to ensure the flatness of the square silicon core;

[0029] The liquid storage shell 8 is arranged on the bottom inner wall of the connecting shell 7, the inside of the liquid storage shell 8 is used for storing a proper amount of cooling liquid, the pipeline of the input end of the pump body 11 is inserted into the inside of the liquid storage shell 8, when the cooling liquid stored in the inside of the liquid storage shell 8 is pumped by the pump body 11, the cooling liquid can be delivered into the connecting seat 13 by the liquid delivery pipe 12, the inside of the connecting seat 13 is provided with a valve, the connecting seat 13 is through with the liquid delivery pipe 12 and the liquid spraying pipe 14, the cooling liquid after being pressurized by the pump body 11 can be sprayed to the polishing wheel 6 and the square silicon core polishing position through the liquid spraying pipe 14, the polishing wheel 6 and the square silicon core polishing position are cooled and protected, the used cooling liquid can fall into the flow guide shell 4 through the first through slot 2, the cooling liquid can be guided into the inside of the liquid storage shell 8 by the flow guide shell 4, the effect of recycling the cooling liquid is realized, the cooling liquid flowing back to the inside of the liquid storage shell 8 can be filtered by the two groups of filter screens 9, the damage of impurities to the pump body 11 is avoided, the filter screens 9 are inserted into the inside of the liquid storage shell 8, the filter screens 9 are convenient to disassemble and clean in the later period, the controller 15 is used for electrically connecting with the electrical elements in the polishing and repairing machine, the operation of the electrical elements in the polishing and repairing machine can be controlled by the controller 15.

[0030] The electrical equipment in the application is a common electrical equipment in the prior art, and the type or internal structure of the electrical equipment will not be described in detail, and the electrical equipment can also be replaced by other power sources.

[0031] The technical principles of the utility model are described above in combination with specific embodiments. These descriptions are only for explaining the principles of the utility model, and cannot be interpreted as limiting the protection scope of the utility model in any way. Based on the above explanations, other specific embodiments of the utility model can be conceived by those skilled in the art without creative labor, and these embodiments will fall within the protection scope of the claims of the utility model.

Claims

1. A square silicon core polishing repair machine, comprising a workbench (1), a polishing wheel (6) and a liquid storage shell (8), characterized in that: The back of the workbench (1) is provided with two groups of first electric push rods (16), the output end of the first electric push rod (16) is provided with a first telescopic rod (17), the top end of the first telescopic rod (17) is provided with a first combination plate (18), the front of the first combination plate (18) is movably provided with a second combination plate (19), the top end of the first combination plate (18) is provided with a second electric push rod (21), the output end of the second electric push rod (21) is provided with a second telescopic rod (22), and the second telescopic rod (22) is connected with the second combination plate (19), the bottom end of the second combination plate (19) is provided with a second mounting shell (23), the inside of the second mounting shell (23) is rotatably provided with a first roller (24), the back of the second mounting shell (23) is provided with a motor (25), and one end of the motor (25) is connected with the first roller (24), the top inner wall of the workbench (1) is provided with a third mounting shell (26), the inside of the third mounting shell (26) is rotatably provided with a second roller (27), and the top end of the second roller (27) is flush with the upper surface of the workbench (1), and the second roller (27) is located below the first roller (24).

2. The silicon square core polishing repair machine according to claim 1, characterized in that: The inside of the workbench (1) is provided with a first through groove (2), the top inner wall of the workbench (1) is provided with a flow guide shell (4), and the flow guide shell (4) is through with the inside of the liquid storage shell (8).

3. The silicon square core polishing repair machine according to claim 2, characterized in that: The top inner wall of the workbench (1) is provided with a first mounting shell (5), the polishing wheel (6) is rotatably arranged in the inside of the first mounting shell (5), and the polishing wheel (6) is movably arranged in the first through groove (2) and is basically flush with the upper surface of the workbench (1).

4. The silicon square core polishing repair machine according to claim 3, characterized in that: The back of the workbench (1) is provided with a connecting shell (7), the liquid storage shell (8) is arranged on the bottom inner wall of the connecting shell (7), and the inside of the liquid storage shell (8) is detachably provided with two groups of filter screens (9).

5. The silicon square core polishing repair machine according to claim 4, characterized in that: One side of the connecting shell (7) is provided with a connecting plate (10), the top end of the connecting plate (10) is provided with a pump body (11), the connecting end of the pump body (11) is provided with a liquid delivery pipe (12), the top end of the connecting shell (7) is provided with a connecting seat (13), the liquid delivery pipe (12) is through with the inside of the connecting seat (13), and the top end of the connecting seat (13) is provided with a liquid spraying pipe (14).

6. The silicon square core polishing repair machine according to claim 5, characterized in that: The top end of the connecting plate (10) is provided with a controller (15), and the controller (15) is located on one side of the pump body (11).

7. The silicon square core polishing repair machine according to claim 1, characterized in that: The back of the second combination plate (19) is provided with two guide rods (20), and the guide rods (20) are movably inserted into the first combination plate (18), the top of the workbench (1) is provided with two groups of second through grooves (3), and the second roller (27) is movably arranged in the second through groove (3).

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