Three-beam combined structure force transducer for polishing and grinding

Abstract

A three-beam combined structure force cell sensor for polishing and grinding relates to the technical field of force cell structures and comprises a sensor elastic body, two isolation holes are formed in the side wall of the sensor elastic body side by side, a main deformation beam is formed in the area between the two isolation holes, and an auxiliary beam is formed in the area outside the two isolation holes. And a metal strain gauge is arranged on the main deformation beam. According to the utility model, the problems of weak unbalance loading resistance and low overload capacity of a force transducer in the prior art due to relatively concentrated deformation beams are solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to force measuring structure technical field, concretely relates to polishing and polishing use three beam combination structure force measuring sensor. BACKGROUND

[0002] On most of the current polishing machines, the installation surface of the polishing head and the force measuring sensor is relatively far, generally about 200-500mm, which is to prevent dust and water, and on the other hand, to improve the space for the installation and space rotation of the polishing piece, such height requires very high lateral force resistance of the sensor;

[0003] Such application scenarios require the sensor to have the following characteristics at the same time: first, strong bending moment resistance; second, long-term dust and oil mist prevention; third, high dynamic response frequency; fourth, high accuracy; and fifth, good eccentricity resistance of the sensor. However, the single-dimensional force measuring sensor or multi-dimensional force measuring sensor of the existing conventional structure is difficult to meet the above requirements.

[0004] The prior art discloses a patent with publication number CN220296763U, which includes: an upper pressing plate, a bottom plate, a sensor elastic body, and a shell. The upper pressing plate, the sensor elastic body, and the bottom plate are arranged and connected from top to bottom. The shell is arranged outside the sensor elastic body. The lower end of the shell is connected with the bottom plate. A gap is formed between the upper end of the shell and the upper pressing plate. A blind hole for installing a strain gauge is formed on one vertical side wall of the sensor elastic body. The ability to resist lateral force is improved, which helps to avoid being broken by excessive bending moment force.

[0005] The existing device gradually exposes the deficiencies of the prior art with use, mainly in the following aspects:

[0006] The conventional force measuring sensor has the problems of weak eccentric load resistance and low overload capacity due to the concentrated deformation beam.

[0007] In summary, the prior art has obvious inconvenience and defects in actual use, so it is necessary to improve. UTILITY MODEL CONTENT

[0008] In view of the defects in the prior art, the utility model provides a three-beam combined structure force measuring sensor for polishing and polishing, which solves the problem of weak eccentric load resistance and low overload capacity of the conventional force measuring sensor due to the concentrated deformation beam.

[0009] To achieve the above purpose, the utility model provides the following technical scheme:

[0010] The utility model provides a three-beam combined structure force sensor for polishing and grinding, which comprises a sensor elastic body, two isolation holes are arranged side by side on the side wall of the sensor elastic body, a main deformation beam is formed through the area between the two isolation holes, auxiliary beams are formed through the areas outside the two isolation holes,

[0011] A metal strain gauge is arranged on the main deformation beam.

[0012] As an optimized scheme, the isolation hole comprises two vertical hole sections arranged side by side and a horizontal hole section connected between the two vertical hole sections.

[0013] As an optimized scheme, a sunken groove for reducing the strength of the main deformation beam is arranged on the main deformation beam.

[0014] As an optimized scheme, a mounting groove for mounting the metal strain gauge is arranged on the main deformation beam, a countersunk step is arranged at the groove opening of the mounting groove, and a cover plate is buckled through the countersunk step.

[0015] As an optimized scheme, two internal threading holes are arranged side by side in the horizontal direction in the mounting groove.

[0016] As an optimized scheme, the sensor elastic body is in the shape of a cuboid.

[0017] As an optimized scheme, the upper end surface of the sensor elastic body is an upper fixed step, and an even number of upper fixed threaded holes are arranged side by side on the upper fixed step.

[0018] As an optimized scheme, the lower end surface of the sensor elastic body is a lower fixed step, and an even number of lower fixed threaded holes are arranged side by side on the lower fixed step.

[0019] As an optimized scheme, a circuit board placing groove is arranged on the side wall of the sensor elastic body.

[0020] As an optimized scheme, a first threading hole connected with the mounting groove is arranged on the lower fixed step,

[0021] As an optimized scheme, a threading groove connected with the first threading hole is arranged on the lower fixed step, and a second threading hole connected with the circuit board placing groove is arranged at the other end of the threading groove.

[0022] As an optimized scheme, a screw thread hole connected with the circuit board placing groove is arranged on the end surface of the sensor elastic body opposite to the circuit board placing groove, a wire locking nut is connected through the screw thread hole, and a sensor lead wire is inserted into the wire locking nut.

[0023] Compared with the prior art, the utility model has the beneficial effects that:

[0024] The sensor of the patent is an integrated structure, and the innovative adoption of a double auxiliary beam, a main deformation beam and a three-beam combined structure greatly solves the problem that the anti-unbalance load capacity and the overload capacity of a conventional force sensor are relatively weak due to the relatively concentrated deformation beam; meanwhile, the adoption of the double cantilever beams symmetrically distributed on the outer side as auxiliary beams and the shear beam with relatively strong anti-interference capacity as the main deformation beam in the middle, the three-beam combined structure makes the precision, the bending moment resistance capacity and the dynamic response frequency of the sensor greatly improved.

[0025] When the customer uses it, the lower fixed step of the sensor elastic body is fixed on the machine table, and the upper fixed step of the sensor elastic body is connected to the force receiving end; when the upper fixed step is subjected to pressure, the two groups of auxiliary beams and the main deformation beam are deformed, the metal strain gauge attached to the main deformation beam generates corresponding resistance change, and outputs corresponding voltage signals through the internal Wheatstone bridge circuit and the sensor lead-out line. BRIEF DESCRIPTION OF DRAWINGS

[0026] In order to more clearly illustrate the specific embodiment of the present application or the technical scheme in the prior art, the drawings needed to be used in the specific embodiment or the prior art description will be briefly introduced below. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn according to the actual scale.

[0027] Figure 1 It is an explosion schematic view of the embodiment one of the present application;

[0028] Figure 2 It is a structural schematic view of the circuit board placing groove of the present application;

[0029] Figure 3 It is a structural schematic view of the lower fixed step of the present application;

[0030] Figure 4 It is a structural schematic view of the embodiment two of the present application;

[0031] Figure 5 It is a structural schematic view of the embodiment three of the present application;

[0032] Figure 6 It is a structural schematic view of the embodiment four of the present application;

[0033] Figure 7 It is a structural schematic view of the embodiment five of the present application;

[0034] Figure 8 It is a structural schematic view of the embodiment six of the present application.

[0035] In the figure: 1-sensor elastomer; 2-isolation hole; 3-assistant beam; 4-main deformation beam; 5-metal strain gauge; 6-cover plate; 7-mounting groove; 8-countersunk step; 9-upper fixed step; 10-upper fixed threaded hole; 11-lower fixed step; 12-lower fixed threaded hole; 13-internal threading hole; 14-first threading hole; 15-circuit board placing groove; 16-second threading hole; 17-threaded hole; 18-thread locking nut; 19-sensor lead; 20-countersunk groove; 21-threading groove; 22-through hole structure; 23-semicircular notch. DETAILED DESCRIPTION

[0036] The embodiments of the technical scheme of the utility model will be described in detail below with reference to the drawings. The following embodiments are only used to more clearly illustrate the technical scheme of the utility model, and therefore only serve as examples, and cannot limit the protection scope of the utility model.

[0037] Example one,

[0038] As Figures 1 to 3 shown, the three-beam combined structure force sensor for polishing and grinding comprises a sensor elastomer 1, two isolation holes 2 are arranged side by side on the side wall of the sensor elastomer 1, a main deformation beam 4 is formed through the area between the two isolation holes 2, and an assistant beam 3 is formed through the area outside the two isolation holes 2,

[0039] The main deformation beam 4 is provided with a metal strain gauge 5.

[0040] The isolation hole 2 comprises two vertical hole sections arranged side by side and a horizontal hole section connected between the two vertical hole sections.

[0041] The main deformation beam 4 is provided with a countersunk groove 20 for reducing the strength of the main deformation beam 4.

[0042] The main deformation beam 4 is provided with a mounting groove 7 for mounting the metal strain gauge 5, the mounting groove 7 is provided with a countersunk step 8 at the groove opening, and the cover plate 6 is buckled through the countersunk step 8.

[0043] The opposite side walls of the sensor elastomer 1 are respectively provided with mounting grooves 7, and each mounting groove 7 is respectively provided with a metal strain gauge 5.

[0044] The mounting groove 7 is provided with two internal threading holes 13 parallel along the horizontal direction, and the internal threading holes 13 are used for bridging threading of the two metal strain gauges 5.

[0045] The sensor elastomer 1 is in the shape of a cuboid.

[0046] The upper end surface of the sensor elastomer 1 is an upper fixed step 9, and an even number of upper fixed threaded holes 10 are arranged side by side on the upper fixed step 9.

[0047] The lower end face of the sensor elastic body 1 is a lower fixed step 11, and an even number of lower fixed threaded holes 12 are arranged side by side on the lower fixed step 11.

[0048] A circuit board placing groove 15 is arranged on the side wall of the sensor elastic body 1.

[0049] A first threading hole 14 connected with the mounting groove 7 is arranged on the lower fixed step 11,

[0050] A threading groove 21 connected with the first threading hole 14 is arranged on the lower fixed step 11, and a second threading hole 16 connected with the circuit board placing groove 15 is arranged at the other end of the threading groove 21.

[0051] A screw thread hole 17 is arranged on the end face of the sensor elastic body 1 opposite to the circuit board placing groove 15, and a wire locking nut 18 is connected through the screw thread hole 17, and a sensor lead wire 19 is inserted into the wire locking nut 18.

[0052] The working principle of the device is as follows:

[0053] When the customer uses it, the lower fixed step 11 of the sensor elastic body 1 is fixed on the machine table, and the upper fixed step 9 of the sensor elastic body 1 is connected to the stress end. When the upper fixed step 9 is subjected to pressure, the two groups of auxiliary beams 3 and the main deformation beam 4 are deformed, and the metal strain gauge 5 attached to the main deformation beam 4 generates a corresponding resistance change. Through the internal Wheatstone bridge circuit, a corresponding voltage signal is output, and the signal is output through the sensor lead wire 19.

[0054] Example two,

[0055] As shown in Figure 4 , the difference between this embodiment and example one is that the groove for reducing the strength of the main deformation beam is cancelled.

[0056] Example three,

[0057] As shown in Figure 5 , the difference between this embodiment and example one is that the plane where the internal threading hole is arranged and the internal threading hole are removed, and a through hole structure 22 is used instead, and the metal strain gauge is attached to the left and right circular arc faces.

[0058] Example four,

[0059] As shown in Figure 6 , the difference between this embodiment and example three is that the groove for reducing the strength of the main deformation beam is cancelled.

[0060] Example five,

[0061] As shown in Figure 7 , the difference between this embodiment and example one is that a semicircular notch 23 connected with the vertical hole section is added around the main deformation beam.

[0062] Example six,

[0063] As Figure 8 shown, the difference between this embodiment and example five is that the notches which reduce the strength of the main deformation beam are removed.

[0064] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, and are not limited thereto; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that the technical solutions recorded in the foregoing embodiments can still be modified, or some or all of the technical features can be replaced by equivalents; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application, and they should be covered in the scope of the claims and the description of the present application.

Claims

1. A three-beam combined structure force transducer for polishing and grinding, characterized in that: The sensor elastomer (1) is provided with two isolation holes (2) on the side wall, and a main deformation beam (4) is formed by the area between the two isolation holes (2), and an auxiliary beam (3) is formed by the area outside the two isolation holes (2), The main deformation beam (4) is provided with a metal strain gauge (5).

2. The three-beam combined structure force transducer for polishing and grinding according to claim 1, characterized in that: The isolation hole (2) comprises two vertical hole sections arranged side by side, and a horizontal hole section connected between the two vertical hole sections.

3. The three-beam combined structure force transducer for polishing and grinding according to claim 1, characterized in that: The main deformation beam (4) is provided with a sunken groove (20) for reducing the strength of the main deformation beam (4).

4. The three-beam combined structure force transducer for polishing and grinding according to claim 1, characterized in that: The main deformation beam (4) is provided with a mounting groove (7) for mounting the metal strain gauge (5), and the mounting groove (7) is provided with a countersunk step (8) at the groove opening, and a cover plate (6) is buckled through the countersunk step (8).

5. The three-beam combined structure force transducer for polishing and grinding according to claim 4, characterized in that: The mounting groove (7) is provided with two internal threading holes (13) arranged side by side in the horizontal direction.

6. The three-beam combined structure force transducer for polishing and grinding according to claim 1, characterized in that: The sensor elastomer (1) is in the shape of a cuboid.

7. The three-beam combined structure force transducer for polishing and grinding according to claim 4, characterized in that: The upper end surface of the sensor elastomer (1) is an upper fixed step (9), and an even number of upper fixed threaded holes (10) are arranged side by side on the upper fixed step (9), and the lower end surface of the sensor elastomer (1) is a lower fixed step (11), and an even number of lower fixed threaded holes (12) are arranged side by side on the lower fixed step (11).

8. The three-beam combined structure force transducer for polishing and grinding according to claim 7, characterized in that: The side wall of the sensor elastomer (1) is provided with a circuit board placing groove (15).

9. The three-beam combined structure force transducer for polishing and grinding according to claim 8, characterized in that: The lower fixed step (11) is provided with a first threading hole (14) connected to the mounting groove (7), and a threading groove (21) connected to the first threading hole (14) is arranged on the lower fixed step (11), and the other end of the threading groove (21) is provided with a second threading hole (16) connected to the circuit board placing groove (15).

10. The three-beam combined structure force transducer for polishing and grinding according to claim 8, characterized in that: The sensor elastomer (1) is provided with a threaded hole (17) connected and communicated on the end surface opposite to the circuit board placing groove (15), and a wire locking nut is connected through the threaded hole (17), and a sensor lead wire (19) is inserted and arranged in the wire locking nut (18).

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