Tool jig facilitating installation of target material

Abstract

The utility model relates to the technical field of target material installation, in particular to a tool jig convenient for target material installation, which comprises a tool jig main body, a base, rollers and a lifting structure, the bases are connected to the four corners of the tool jig body respectively, the rollers are arranged below the bases, and the lifting structure is arranged at the top end of the tool jig body. The lifting structure comprises a clamping block, a first fixing hole, a second fixing hole, a sliding rail, a limiting sliding groove, a supporting rod, a round hole, an adjusting screw, a fixing rod and a fixing structure. The fixing structure comprises an adjusting screw, a fixing rod, a square fixing frame, a third fixing hole and a fourth fixing hole. Limiting is carried out through mutual connection of a sliding rail and an adjusting screw, a supporting rod lifts a fixing frame in the vertical direction, so that a target fixed to the fixing frame is lifted, installation and adjustment in the vertical direction are facilitated, a movable base is designed and installed, the target can be stably fixed to the fixing frame during transportation, operation is convenient and easy, and the target conveying efficiency is improved. And the application requirements of actual production are met.

Description

TECHNICAL FIELD

[0001] The utility model relates to target material installation technical field, concretely is a work tool convenient for target material installation. BACKGROUND

[0002] At present, the target material used in PVD magnetron sputtering machine needs to be replaced regularly, but the target material is about 30Kg heavy, and needs manpower to install on the machine. The target material is circular, and only one person can install it by grabbing two T-shaped handles, which has a certain installation height, is heavy, has high installation difficulty, and has a certain risk of falling and personal injury.

[0003] The Chinese patent document with the existing publication number CN206088739U discloses a target material installation jig, which proposes that the target material is used as a coating film consumable material and has a certain service life, and needs to be replaced regularly. The replacement operation time determines the equipment movement to a great extent, and then determines the equipment capacity. At present, the target material installation operation is mainly completed by lifting and supporting the target material with a crown block. The current target material installation jig has one fixed jig for the upper and lower parts of the target material, and a hoisting device is installed on the upper jig to realize the hoisting operation of dismounting and installing the target material. The whole process of the current jig operation needs the crown block, and the different position requirements of the jig and the target material during the installation and dismounting process of the target material need to be realized by moving the crown block. The operation progress is limited by the use of the crown block, and when multiple chambers are operated, the operation must be performed in sequence, which greatly reduces the operation progress.

[0004] The solution is that the target material installation jig provided by the utility model lifts the target material fixing frame unit with the crown block to hoist the target material to the target material bearing unit located at the operation position, and then moves the target material bearing unit with the moving mechanism to realize the different position requirements during the dismounting and installation process of the target material. After the crown block completes the hoisting of the target material to the target material bearing unit, the use of the crown block ends. The crown block is only responsible for hoisting and transporting, and is no longer responsible for the position requirements of the hoisting during the dismounting and installation of the target material. The crown block can be used to hoist another target material during the dismounting and installation process of the target material, which can save operation time and improve operation efficiency. Therefore, the utility model can reduce the use time of the bottleneck equipment crown block during the installation of the target material, and then realize the rapid dismounting and installation of the target material, reduce the time of the target material exchange operation, and further improve the equipment movement and increase the equipment capacity.

[0005] In the above-mentioned scheme, the linkage cooperation of the crown block device is used to improve the production efficiency, which is consistent with the prior art. The transportation and installation cost is too large, the structure of the crown block itself is complex, the operation difficulty is strong, and the use will greatly reduce the fault tolerance.

[0006] Therefore, the utility model provides a work tool convenient for target material installation to solve the above-mentioned problems. UTILITY MODEL CONTENT

[0007] The utility model discloses a kind of work jigs facilitating target material installation, to solve the problems raised in the above background art.

[0008] To achieve the above object, the utility model provides the following technical scheme: a kind of work jigs facilitating target material installation, including work jig main body, base, gyro wheel, clamping block, first fixed hole, second fixed hole, slide rail and lifting structure;The base is connected to each of the four corners of the work jig main body, and the gyro wheel is arranged below the base, and the lifting structure is arranged at the top end of the work jig main body;The work jig main body is provided with connecting slide rail, and the first fixed hole is symmetrically arranged on the upper end of the clamping block, and the second fixed hole is arranged on the lower end of the clamping block, the clamping block is movably arranged on the slide rail, and the slide rail is matched with the clamping block.

[0009] Preferably, the lifting structure includes a clamping block, a first fixed hole, a second fixed hole, a slide rail, a limiting sliding groove, a support rod, a circular hole, an adjusting screw, a fixed rod and a fixed structure.

[0010] Preferably, the lifting structure includes a limiting sliding groove, a support rod, a circular hole, an adjusting screw, a fixed rod and a fixed structure.

[0011] Preferably, the clamping block moves horizontally under the limiting action of the adjusting screw and the fixed hole through the slide rail.

[0012] Preferably, the lifting structure is consistent in structure and symmetrically distributed, and supports the fixed structure.

[0013] Preferably, the number of adjusting screws, fixed rods, third fixed holes and fourth fixed holes in the fixed structure is equal, and the positions correspond to each other, which supports the square fixed frame.

[0014] Compared with the prior art, the utility model has the beneficial effects that: the work jig facilitating target material installation designed by the utility model mainly adjusts the horizontal and vertical installation direction of the target material during installation through the joint action between the slide rail and the support rod, and a movable base is installed, which facilitates the transportation of the target material and saves manpower, and meets the application requirements of actual production. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is a structure schematic view of the work jig facilitating target material installation of the utility model.

[0016] Figure 2The utility model provides a kind of main view structural schematic drawing of work tool convenient to target material installation.

[0017] Figure 3 The utility model provides a kind of lifting structural schematic drawing of work tool convenient to target material installation.

[0018] Figure 4 The utility model provides a kind of plan view structural schematic drawing of work tool convenient to target material installation.

[0019] Figure 5 The utility model provides a kind of fixed structural schematic drawing of work tool convenient to target material installation.

[0020] In the drawing: work tool main body 1, base 2, gyro wheel 3, clamping block 4, first fixed hole 41, second fixed hole 42, sliding rail 5, limit sliding slot 51, support rod 6, round hole 61, adjusting screw 7, fixed rod 8, square fixed frame 9, third fixed hole 91, fourth fixed hole 92. Specific implementation

[0021] In order to make the purpose, technical scheme of the utility model clear, complete description, and the more clear and apparent advantage, the following will be further detailed with the drawings to the utility model embodiment.It should be understood that the specific embodiments described here are part of the embodiments of the utility model, not all embodiments, only to explain the embodiments of the utility model, and not for the purpose of limiting the embodiments of the utility model, all other embodiments obtained by the ordinary skill in the art without creative labor are within the scope of the utility model protection, the following will be clear, complete description to the technical scheme in the embodiment of the utility model.

[0022] Embodiment one

[0023] Please refer to Figures 1 to 5 The utility model provides a kind of technical scheme: a kind of work tool convenient to target material installation, including work tool main body 1, base 2, gyro wheel 3, the four corners of work tool main body 1 are each connected to set up base 2, the bottom of base 2 is all set up gyro wheel 3, when using, work tool main body can be directly moved, and work tool main body 1 top end is provided with lifting structure;Lifting structure includes clamping block 4, first fixed hole 41, second fixed hole 42, sliding rail 5, limit sliding slot 51, support rod 6, round hole 61, adjusting screw 7, fixed rod 8 and fixed structure;Work tool main body 1 is provided with connecting sliding rail 5, the upper end of clamping block 4 is symmetrically provided with first fixed hole 41, sliding rail 5 is adapted to be connected with clamping block 4, adjusting screw 7 is adapted to be penetrated with second fixed hole 42, limit sliding slot 51 is built-in rubber pad, adjusting screw 7 penetration end and limit sliding slot 51 interact, support rod 6 both ends are symmetrically provided with round hole 61, and fixed rod 8 penetrates first fixed hole 41;Support rod 6 is connected with fixed structure.

[0024] Embodiment two

[0025] On the basis of embodiment one, refer to Figures 3-5 , the fixed structure includes adjusting screw 7, fixed rod 8, square fixed frame 9, third fixed hole 91, fourth fixed hole 92;Two groups of third fixed holes 91 are symmetrically arranged at the top of the square fixed frame 9, and two pairs of fourth fixed holes 92 are symmetrically arranged on the inner side of the square fixed frame 9, the fourth fixed hole 92 is embedded with the fixed rod 8, the clamping block 4 moves horizontally under the limiting action of the adjusting screw 7 and the fixed hole 41 through the slide rail 5, and the lifting structure is consistent and symmetrically distributed, and acts on the fixed structure, and the number of adjusting screw 7, fixed rod 8, third fixed hole 91 and fourth fixed hole 92 in the fixed structure is equal, and the positions are corresponding to each other, and the square fixed frame 9 is supported.

[0026] When installing, the adjusting screw 7 is rotated and locked in the limiting sliding groove 51, under the action of the four groups of lifting structures, the fixed structure can be lifted to the required height at will, which is convenient for the installation of the target material, and the four groups of adjusting screws 7 on the fixed frame are used for fixing the target material, which is convenient for the transportation of the target material.

[0027] Although the embodiments of the utility model have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to these embodiments without departing from the principles and spirits of the utility model, and the scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. A tooling fixture for easy target installation, characterized in that: Including tool jig body (1), base (2), roller (3), clamping block (4), slide rail (5) and lifting structure; The bottom end of the four corners of the tool jig body (1) is connected with the base (2), the roller (3) is connected below the base (2), the top end of the tool jig body (1) is connected with the lifting structure, and the slide rail (5) is connected on the tool jig body (1). The first fixed hole (41) is symmetrically arranged on the upper end of the clamping block (4), and the second fixed hole (42) is arranged on the lower end of the clamping block (4), and the clamping block (4) is movably arranged on the slide rail (5).

2. The work holder according to claim 1, wherein: The lifting structure includes a limiting sliding groove (51), a supporting rod (6), a circular hole (61), an adjusting screw (7), a fixed rod (8) and a fixed structure; the adjusting screw (7) is adapted to penetrate the second fixed hole (42), the slide rail (5) is provided with a limiting sliding groove (51) on the side surface, and a rubber pad is arranged in the limiting sliding groove (51); the penetrating end of the adjusting screw (7) is in extrusion connection with the limiting sliding groove (51); the supporting rod (6) is symmetrically provided with a circular hole (61) at both ends; and the fixed rod (8) penetrates the first fixed hole (41); the supporting rod (6) is connected with the fixed structure.

3. The work tool of claim 2, wherein: The fixed structure includes an adjusting screw (7), a fixed rod (8), a square fixed frame (9), a third fixed hole (91) and a fourth fixed hole (92); two groups of third fixed holes (91) are symmetrically arranged at the top end of the square fixed frame (9); two pairs of fourth fixed holes (92) are symmetrically arranged on the inner side of the square fixed frame (9); and the fourth fixed hole (92) is inlaid with the fixed rod (8).

4. The work holder for facilitating target material installation according to claim 2, wherein: The clamping block (4) moves horizontally under the limiting action of the adjusting screw (7) and the fixed hole (41) through the slide rail (5).

5. The work holder for facilitating target material installation according to claim 2, wherein: The supporting rods (6) are identical in structure and symmetrically distributed, and jointly support the fixed structure.

6. The work holder for facilitating target material installation according to claim 3, wherein: The number of adjusting screws (7), fixed rods (8), third fixed holes (91) and fourth fixed holes (92) in the fixed structure is equal, and the positions correspond to each other, which supports the square fixed frame (9).

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