Resin sample conveying device for polishing resin online monitoring

Abstract

The utility model discloses a resin sample conveying device for polishing resin on-line monitoring, which comprises a support frame, a material storage cylinder, a connecting shaft and a mounting ring, two groups of scrapers are arranged on the outer side of the mounting ring, a limiting groove is formed in the mounting ring, a threaded rod is arranged in a movable frame in a threaded penetrating manner, and the threaded rod is connected with the connecting shaft. A tooth groove is formed in the assembling plate in a penetrating mode, and a tooth ring is arranged on the outer side of the connecting shaft. A threaded rod is reversely rotated, so that a tooth groove formed in an assembling plate sleeves the outer side of a gear ring in a meshed mode, when a motor operates, rotation of a connecting shaft can drive the assembling plate to rotate, a scraping plate making contact with the inner wall of a storage barrel rotates, and at the moment, along with rotation of a mounting ring, a blocking column can rotate in a limiting groove; the inner wall of the material storage barrel can be scraped and cleaned by rotating two groups of scraping plates in the material storage barrel, so that the influence on normal operation of the device due to accumulation of residual resin sample scraps on the inner side of the material storage barrel is avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to a feeding technology field, concretely relates to a resin sample conveying device for polishing resin on -line monitoring. BACKGROUND

[0002] In the industry such as semiconductor manufacturing, the quality of polishing resin directly affects the performance and quality of the final product, therefore, it is very important to monitor the polishing resin on -line, through real -time monitoring, the change of resin quality can be found in time, production parameters are adjusted, the stability and consistency of product quality are ensured, and the resin sample conveying device is a kind of equipment for transporting resin sample in production environment, and is usually used for quality control and laboratory analysis.

[0003] At present, the resin sample conveying device for polishing resin on -line monitoring in the prior art may have resin sample debris remaining inside the conveying device after use, the remaining resin sample debris may accumulate inside the conveying device, affecting the normal operation of the device, for example, the debris may block the conveying pipeline, causing the sample to be unable to be conveyed smoothly, or increasing the wear of the conveying device, reducing the service life of the equipment, in order to reduce the influence of resin sample debris, the conveying device needs to be cleaned and maintained regularly. SUMMARY

[0004] The utility model discloses a resin sample conveying device for polishing resin on -line monitoring, to solve the problem in prior art.

[0005] The utility model discloses the technical scheme that adopts to solve its technical problem is:

[0006] A resin sample conveying device for polishing resin on -line monitoring, including support frame, storage tube, connecting shaft and mounting ring, the outside of mounting ring is provided with two groups of scrapers, and the inside of storage tube is contacted with scraper, the inside of mounting ring is opened and is limited to groove, and the limit groove is " convex " character, the inside of limit groove is movably provided with two groups of blocking columns, the top of blocking column is provided with connecting rod, the top of connecting rod is provided with moving frame, the inside of moving frame is provided with threaded rod that is penetrated, the inside of mounting ring is provided with assembly plate, the inside of assembly plate is penetrated and is provided with tooth slot, the outside of connecting shaft is provided with tooth ring, and tooth ring can be inserted into tooth slot.

[0007] Preferably, the storage tube is arranged at the top of the support frame, the bottom end of the storage tube is provided with a ball valve, the bottom end of the ball valve is provided with an ejector, and the bottom end of the support frame is provided with four groups of rollers.

[0008] Preferably, the inside of the storage tube is provided with a mounting plate, the two connecting rods are movably penetrated into the mounting plate, and the bottom end of the threaded rod is rotatably connected to the top end of the mounting plate.

[0009] Preferably, the top end of the mounting plate is provided with a motor, the output end of the motor is connected with the top end of the connecting shaft, and the connecting shaft is movably penetrated through the inside of the mounting plate.

[0010] Preferably, the outside of the connecting shaft is provided with stirring blades, the inside of the stirring blades is screw-penetratedly provided with bolts, and the bolts are screw-inserted into the inside of the connecting shaft.

[0011] Preferably, the top end of the mounting plate is provided with two groups of guide rods, the two groups of guide rods are movably penetrated through the inside of the moving frame, and the moving frame is in the shape of a "U".

[0012] The utility model discloses the beneficial effect is:

[0013] 1. The application is provided with a scraper and other components, and by reversing the threaded rod, the moving frame drives the connecting rod and the blocking column to move downward, so that the tooth grooves formed in the assembled plate are engaged with the outside of the tooth ring. When the motor is running, the rotation of the connecting shaft can drive the assembled plate to rotate, and the scraper in contact with the inner wall of the storage cylinder rotates. At this time, with the rotation of the mounting ring, the blocking column can rotate in the limiting groove. The rotation of the two scrapers in the storage cylinder can scrape and clean the inner wall of the storage cylinder, avoiding the accumulation of residual resin sample debris on the inside of the storage cylinder, which affects the normal operation of the device.

[0014] 2. The application is provided with a stirring blade and other components, and by running the motor, the connecting shaft drives the stirring blade to rotate in the inside of the storage cylinder, which can realize the stirring of the resin sample in the inside of the storage cylinder. With the rotation of the stirring blade, the resin sample stored in the inside of the storage cylinder can be pushed to flow downward. The bolt screw-penetrates the inside of the stirring blade and is screw-inserted into the inside of the connecting shaft, which facilitates the disassembly and assembly of the stirring blade in the later stage. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is a whole front structure schematic view of the utility model;

[0016] Figure 2 It is a whole side structure schematic view of the utility model;

[0017] Figure 3 It is a storage cylinder shearing structure schematic view of the utility model;

[0018] Figure 4 It is a mounting plate bottom end structure schematic view of the utility model;

[0019] Figure 5 It is a scraper shearing structure schematic view of the utility model;

[0020] Figure 6 It is a tooth ring and tooth groove explosion structure schematic view of the utility model;

[0021] Figure 7 For the utility model Figure 4 Local structure amplification A place schematic view of the part of the structure;

[0022] Figure 8 For the utility model Figure 5 Local structure amplification A place schematic view of the part of the structure;

[0023] Marked as:

[0024] 1, support frame; 2, storage cylinder; 3, ball valve; 4, injector; 5, roller; 6, mounting plate; 7, motor; 8, connecting shaft; 9, stirring blade; 10, bolt; 11, gear ring; 12, mounting ring; 13, scraper; 14, limiting groove; 15, assembly plate; 16, gear slot; 17, moving frame; 18, connecting rod; 19, blocking column; 20, threaded rod; 21, guide rod. DETAILED DESCRIPTION

[0025] In order to make the above content, purpose and beneficial effects of the utility model more obvious and easy to understand, the specific embodiments of the utility model will be described in detail below in conjunction with the drawings. In the following description, a lot of specific details are set forth in order to fully understand the utility model. However, the utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the utility model, so the utility model is not limited by the specific embodiments disclosed below.

[0026] It should be noted that, unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the utility model belongs. The terms used in the specification of the utility model herein are only for the purpose of describing specific embodiments and are not intended to limit the utility model. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0027] As Figures 1-8The utility model provides a kind of resin sample conveying device for polishing resin online monitoring, including support frame 1, storage cylinder 2, connecting shaft 8 and mounting ring 12, two groups of scrapers 13 are provided on the outside of mounting ring 12, and the inside of storage cylinder 2 is contacted with scraper 13, the inside of mounting ring 12 is opened to limit slot 14, and limit slot 14 is "convex" shape, the inside of limit slot 14 is movably provided with two groups of blocking columns 19, the top of blocking column 19 is provided with connecting rod 18, the top of connecting rod 18 is provided with moving frame 17, the inside of moving frame 17 is screw-threaded and is provided with threaded rod 20, the inside of mounting ring 12 is provided with assembly plate 15, the inside of assembly plate 15 is penetrated and is provided with tooth slot 16, the outside of connecting shaft 8 is provided with gear ring 11, and gear ring 11 can be movably inserted into tooth slot 16, the top of mounting plate 6 is provided with two groups of guide rods 21, two groups of guide rods 21 movably penetrate the inside of moving frame 17, and moving frame 17 is "U" shape.

[0028] Further, threaded rod 20 is rotatably arranged at the top of mounting plate 6 by bearing, and the outside of threaded rod 20 is screw-threaded and provided with moving frame 17, and the inside of moving frame 17 is movably penetrated by two groups of guide rods 21, during the rotation of threaded rod 20, two groups of guide rods 21 can move up and down the moving frame 17, two groups of connecting rods 18 play a connecting role, connecting rod 18 is used to connect between moving frame 17 and blocking column 19, two groups of blocking columns 19 are movably located in the "convex" shape limit slot 14, two groups of blocking columns 19 can move in the inside of limit slot 14, and the transverse section of limit slot 14 is "convex" shape, which can limit two groups of blocking columns 19.

[0029] Further, when moving frame 17 drives blocking column 19 to move up by rotating threaded rod 20, tooth slot 16 penetrated and provided in the inside of assembly plate 15 moves up on the outside of connecting shaft 8, so that tooth slot 16 is disengaged from gear ring 11, after the use of conveying device, threaded rod 20 is reversed, moving frame 17 drives connecting rod 18 and blocking column 19 to move down, so that tooth slot 16 penetrated and provided in the inside of assembly plate 15 is engaged and sleeved on the outside of gear ring 11, when motor 7 operates, the rotation of connecting shaft 8 can drive assembly plate 15 to rotate, so that scraper 13 in contact with the inner wall of storage cylinder 2 rotates, at this time, with the rotation of mounting ring 12, blocking column 19 can rotate in the inside of limit slot 14, by the rotation of two groups of scrapers 13 in the inside of storage cylinder 2, the inner wall of storage cylinder 2 can be scraped and cleaned, to avoid the accumulation of residual resin sample debris on the inside of storage cylinder 2, which affects the normal operation of the device.

[0030] Further, the support frame 1 is provided with four groups of rollers 5 at the bottom end, the inside of the storage cylinder 2 is provided with a mounting plate 6, two groups of connecting rods 18 are movably penetrated in the mounting plate 6, the bottom end of the threaded rod 20 is rotatably connected with the top end of the mounting plate 6, the top end of the mounting plate 6 is provided with a motor 7, the output end of the motor 7 is connected with the top end of a connecting shaft 8, the connecting shaft 8 is movably penetrated in the inside of the mounting plate 6, the outside of the connecting shaft 8 is provided with a stirring blade 9, the inside of the stirring blade 9 is screw-penetrated with a bolt 10, and the bolt 10 is screw-inserted in the inside of the connecting shaft 8.

[0031] Further, the support frame 1 is a main support component of the resin sample conveying device for online monitoring of polishing resin, the rollers 5 at the bottom end of the support frame 1 are used to facilitate the movement of the use position of the conveying device, the inside of the storage cylinder 2 is used to store an appropriate amount of resin sample, the motor 7 is operated to drive the connecting shaft 8 to rotate the stirring blade 9 in the inside of the storage cylinder 2, so that the resin sample in the inside of the storage cylinder 2 can be stirred, and as the stirring blade 9 rotates, the resin sample stored in the inside of the storage cylinder 2 can be pushed to flow downward, the bolt 10 is screw-penetrated in the inside of the stirring blade 9 and screw-inserted in the inside of the connecting shaft 8, so that the stirring blade 9 can be disassembled in the later period, and by controlling the opening degree of the ball valve 3, the flow speed of the resin sample into the injector 4 can be controlled.

[0032] The electrical equipment in the application is a common electrical equipment in the prior art, and the model or internal structure thereof will not be described in detail, and it can also be replaced by other power sources.

[0033] The working principle of the resin sample conveying device for online monitoring of polishing resin is as follows:

[0034] The resin sample can be stored in the inside of the storage cylinder 2, the stirring blade 9 is driven to rotate in the inside of the storage cylinder 2 by the motor 7 running and the connecting shaft 8, the resin sample stored in the inside of the storage cylinder 2 can be stirred, and the resin sample stored in the inside of the storage cylinder 2 can be pushed to flow downwards along with the rotation of the stirring blade 9, the flow speed of the resin sample to the injector 4 can be controlled by controlling the opening degree of the ball valve 3, after the conveying device is used, the toothed groove 16 in the assembled plate 15 is engaged with the outside of the tooth ring 11 by reversing the threaded rod 20, moving the connecting rod 18 and the blocking column 19 downwards, the motor 7 is operated, the connecting shaft 8 is rotated to drive the assembled plate 15 to rotate, the scraper 13 in contact with the inner wall of the storage cylinder 2 is rotated, at this time, the blocking column 19 can be rotated in the limiting groove 14 along with the rotation of the mounting ring 12, the two groups of scrapers 13 are rotated in the inside of the storage cylinder 2, the inner wall of the storage cylinder 2 can be scraped and cleaned, the residual resin sample debris in the inside of the storage cylinder 2 can be avoided to accumulate and affect the normal operation of the device.

[0035] The above-described specific embodiments further illustrate the purpose, technical solutions and beneficial effects of the present application, and it should be understood that the above-described specific embodiments are only specific embodiments of the present application and are not used to limit the present application, and any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A resin sample delivery device for on-line monitoring of polishing resins, comprising a support frame (1), a reservoir (2), a connecting shaft (8) and a mounting ring (12), characterized in that: The outer side of the mounting ring (12) is provided with two groups of scrapers (13), and the scraper (13) is in contact with the inner side of the storage cylinder (2), the inside of the mounting ring (12) is provided with a limiting groove (14), and the limiting groove (14) is in the shape of "convex", the inside of the limiting groove (14) is movably provided with two groups of blocking columns (19), the top end of the blocking column (19) is provided with a connecting rod (18), the top end of the connecting rod (18) is provided with a moving frame (17), the inside of the moving frame (17) is threaded through a threaded rod (20), the inner side of the mounting ring (12) is provided with an assembly plate (15), the inside of the assembly plate (15) is through a gear slot (16), the outer side of the connecting shaft (8) is provided with a gear ring (11), and the gear ring (11) can be movably inserted into the gear slot (16).

2. The resin sample delivery device for on-line monitoring of polishing resin according to claim 1, characterized by: The storage cylinder (2) is arranged at the top end of the support frame (1), the bottom end of the storage cylinder (2) is provided with a ball valve (3), the bottom end of the ball valve (3) is provided with a sprayer (4), and the bottom end of the support frame (1) is provided with four groups of rollers (5).

3. The resin sample delivery device for on-line monitoring of polishing resin according to claim 1, characterized by: The inner side of the storage cylinder (2) is provided with a mounting plate (6), two groups of the connecting rod (18) movably penetrate into the mounting plate (6), and the bottom end of the threaded rod (20) is rotatably connected with the top end of the mounting plate (6).

4. The resin sample delivery device for on-line monitoring of polishing resin according to claim 3, characterized in that: The top end of the mounting plate (6) is provided with a motor (7), the output end of the motor (7) is connected with the top end of the connecting shaft (8), and the connecting shaft (8) movably penetrates into the inside of the mounting plate (6).

5. The resin sample delivery device for on-line monitoring of polishing resins according to claim 4, characterized in that: The outer side of the connecting shaft (8) is provided with a stirring blade (9), the inside of the stirring blade (9) is threaded through a bolt (10), and the bolt (10) is threaded into the inside of the connecting shaft (8).

6. The resin sample delivery device for on-line monitoring of polishing resin according to claim 3, characterized by: The top end of the mounting plate (6) is provided with two groups of guide rods (21), and two groups of the guide rods (21) movably penetrate into the inside of the moving frame (17), and the moving frame (17) is in the shape of "U".

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