Cleaning equipment and cleaning system

Abstract

The utility model discloses cleaning equipment and a cleaning system.The cleaning equipment comprises a first tank body and a circulating device, a cleaning tank is arranged in the first tank body and used for containing cleaning liquid and a workpiece to be cleaned, and the workpiece is provided with a hollow cavity; the circulating device is connected to the first tank body, one end of the circulating device communicates with the cleaning tank, the other end of the circulating device is suitable for being detachably connected with the workpiece and communicates with one end of the hollow cavity, the other end of the hollow cavity communicates with the cleaning tank, and the circulating device is used for driving the cleaning liquid to circularly flow between the cleaning tank and the hollow cavity. And furthermore, the cleaning liquid can be driven by the circulating device to circularly flow between the cleaning tank and the hollow cavity of the workpiece, so that the inner wall and the outer wall of the workpiece can be ensured to be in full contact with the cleaning liquid, the workpiece can be cleaned in all directions by using the cleaning liquid, and the cleaning effect and the cleaning efficiency of the workpiece can be improved.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of cleaning devices, and particularly relates to a cleaning device and a cleaning system. BACKGROUND

[0002] The gas deposition technology is a technology for changing the composition of a workpiece surface by using physical and chemical processes in a gas phase to form a metal or compound coating layer with special properties on the surface of the workpiece, and is widely applied to various surface coating processes, for example, can be applied to a coating process for forming a passivation film layer on the surface of a silicon substrate in the photovoltaic field.

[0003] In the gas deposition equipment, a gas inlet pipe is used to introduce process gas into a coating chamber to realize coating operation, in which process, a film layer is deposited on the outer surface and inner wall of the gas inlet pipe, and with the increase of the number of processes, the deposited film layer on the gas inlet pipe becomes thicker and thicker, and slagging problems are prone to occur, which seriously affects the coating effect. Therefore, the gas inlet pipe needs to be replaced after being used for a period of time, and the replaced gas inlet pipe is directly scrapped without being reused, causing great waste. CONTENT OF THE UTILITY MODEL

[0004] The application aims to provide a cleaning device and a cleaning system, which can solve the problem of lack of cleaning device for the gas inlet pipe in the related art and waste caused by direct scrapping of the replaced gas inlet pipe.

[0005] To solve the above technical problems, the application is implemented as follows:

[0006] In a first aspect, an embodiment of the application provides a cleaning device, comprising:

[0007] A first tank body, wherein a cleaning tank is arranged in the first tank body, and the cleaning tank is used for accommodating a cleaning liquid and a workpiece to be cleaned, and the workpiece has a hollow cavity;

[0008] A circulating device, wherein one end of the circulating device is connected with the cleaning tank, and the other end of the circulating device is adapted to be detachably connected with the workpiece and is connected with one end of the hollow cavity, and the other end of the hollow cavity is connected with the cleaning tank, and the circulating device is used for driving the cleaning liquid to flow circularly between the cleaning tank and the hollow cavity.

[0009] Optionally, the circulating device comprises a connecting head, a first pipeline, a second pipeline and a driving member, the connecting head is arranged on the inner wall of the cleaning tank, and the connecting head is adapted to be detachably connected with one end of the workpiece.

[0010] The first pipeline is connected with the connector, and the second pipeline is communicated with the cleaning tank; the driving member is connected with the first pipeline and the second pipeline respectively, and is used for driving the cleaning liquid to flow circularly between the first pipeline and the second pipeline.

[0011] Optionally, the circulating device further comprises a manifold pipe, the inner wall of the cleaning tank is provided with a plurality of connectors, the manifold pipe is installed on the first tank body, and the plurality of connectors are connected with the manifold pipe respectively; and the first pipeline is connected with the manifold pipe.

[0012] Optionally, the circulating device further comprises a third pipeline and a switch member, the third pipeline is connected with the first pipeline and / or the second pipeline, and the third pipeline is adapted to be connected with an external air source; and the switch member is arranged in the third pipeline and is used for controlling the opening and closing of the third pipeline.

[0013] Optionally, the cleaning equipment further comprises a fixing frame, the fixing frame is arranged in the cleaning tank, the fixing frame is detachably connected with the first tank body, the fixing frame is provided with a clamping groove, and the workpiece is at least partially clamped in the clamping groove.

[0014] Optionally, the fixing frame is provided in plurality, the plurality of fixing frames are arranged at intervals in the cleaning tank, and the workpiece is clamped and fixed with the plurality of fixing frames.

[0015] Optionally, the cleaning tank has a tank opening and a tank bottom arranged oppositely, along the direction from the tank opening to the tank bottom, the fixing frame comprises at least two layers of fixing portions arranged at intervals, and each fixing portion is provided with at least one clamping groove.

[0016] Optionally, the cleaning equipment further comprises a second tank body, the second tank body is arranged opposite to the first tank body, the second tank body is provided with a containing groove, the containing groove is communicated with the cleaning tank, and the containing groove is used for storing the cleaning liquid.

[0017] Optionally, the cleaning equipment further comprises an ultrasonic vibration device, the ultrasonic vibration device is connected with the first tank body and is used for driving the first tank body to vibrate.

[0018] Optionally, the cleaning equipment further comprises a heating device, the heating device is connected with the first tank body and is used for heating the cleaning liquid in the cleaning tank.

[0019] In the second aspect, the embodiments of the present application provide a cleaning system, which comprises an auxiliary straightening device and the cleaning equipment of the first aspect; the cleaning equipment is used for cleaning a workpiece, and the auxiliary straightening device is used for straightening and correcting the cleaned workpiece.

[0020] In the present application, by arranging the circulating device in the first tank body, during the cleaning operation, the workpiece is placed in the cleaning tank of the first tank body, and the workpiece is connected with one end of the circulating device, and the other end of the circulating device is communicated with the cleaning tank. Further, the cleaning liquid can be driven by the circulating device to enter the hollow cavity of the workpiece, and then flow back to the cleaning tank through the circulating device, so that the cleaning liquid can circulate between the cleaning tank and the hollow cavity of the workpiece. In this way, it can be ensured that the inner and outer walls of the workpiece can be fully contacted with the cleaning liquid, so as to utilize the cleaning liquid to clean the workpiece in all directions, thereby improving the cleaning effect and cleaning efficiency of the workpiece.

[0021] Additional aspects and advantages of the present application will be in part apparent and in part pointed out hereinafter. BRIEF DESCRIPTION OF DRAWINGS

[0022] The above and / or additional aspects and advantages of the present application will become apparent and be readily appreciated from the following description, including the accompanying drawings, wherein:

[0023] Figure 1 is a schematic view of a cleaning device according to an embodiment of the present application;

[0024] Figure 2 is a schematic view of a cleaning device according to an embodiment of the present application;

[0025] Figure 3 is a schematic view of another cleaning device according to an embodiment of the present application;

[0026] Figure 4 is a schematic view of a first tank body according to an embodiment of the present application;

[0027] Figure 5 is a schematic view of a first tank body according to an embodiment of the present application;

[0028] Figure 6 is a schematic view of a fixing frame according to an embodiment of the present application;

[0029] Figure 7 is a schematic view of an auxiliary clamping device according to an embodiment of the present application.

[0030] Reference Signs:

[0031] 1: first tank; 11: cleaning tank; 12: workpiece; 13: cover plate; 2: circulating device; 21: connector; 22: first pipeline; 23: second pipeline; 24: driving member; 25: manifold; 26: third pipeline; 27: switch member; 3: fixing frame; 30: fixing portion; 31: clamping groove; 4: ultrasonic vibration device; 5: heating device; 6: second tank; 61: accommodating groove; 7: auxiliary clamping device; 71: roller row; 72: mounting base. DETAILED DESCRIPTION

[0032] The embodiments of the present application will be described in detail below with reference to the drawings, in which the same or similar components have the same reference numerals throughout the several figures and any reference numerals. The embodiments described below with reference to the drawings are merely exemplary for explaining the present application and should not be construed as limiting the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work under the premise that the present application falls within the scope of protection.

[0033] The terms "first", "second" in the description of the present application and claims can explicitly or implicitly include one or more features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise specified. In addition, "and / or" in the specification and claims means at least one of the connected objects, and the character " / ", generally indicates that the front and rear associated objects are in an "or" relationship.

[0034] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be construed as limiting the present application.

[0035] In the description of the present application, it should be noted that, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting" should be understood in a broad sense, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0036] The cleaning equipment and cleaning system provided in this application will be described in detail below with reference to the accompanying drawings, through specific embodiments and application scenarios.

[0037] like Figures 1 to 3 As shown, a cleaning device according to some embodiments of this application includes: a first tank 1 and a circulation device 2. The first tank 1 is provided with a cleaning tank 11 for containing cleaning fluid and a workpiece 12 to be cleaned. The workpiece 12 has a hollow cavity. The circulation device 2 is connected to the first tank 1. One end of the circulation device 2 is connected to the cleaning tank 11, and the other end of the circulation device 2 is adapted to be detachably connected to the workpiece 12 and connected to one end of the hollow cavity. The other end of the hollow cavity is connected to the cleaning tank 11. The circulation device 2 is used to drive the cleaning fluid to circulate between the cleaning tank 11 and the hollow cavity.

[0038] In this embodiment of the application, by setting a circulation device 2 in the first tank 1, during the cleaning operation, the workpiece 12 is placed in the cleaning tank 11 of the first tank 1, and the workpiece 12 is connected to one end of the circulation device 2. The other end of the circulation device 2 is connected to the cleaning tank 11. Then, the circulation device 2 can drive the cleaning fluid from the cleaning tank 11 into the hollow cavity of the workpiece 12, and then flow back to the cleaning tank 11 through the circulation device 2. This allows the cleaning fluid to circulate between the cleaning tank 11 and the hollow cavity of the workpiece 12, which ensures that the inner and outer walls of the workpiece 12 can fully contact the cleaning fluid, so as to use the cleaning fluid to clean the workpiece 12 in all directions, thereby improving the cleaning effect and cleaning efficiency of the workpiece 12.

[0039] It is understood that the cleaning equipment in this application embodiment can be used to clean workpieces 12 with hollow cavities, such as pipes. When the workpiece 12 is placed in the cleaning solution in the cleaning tank 11, impurities on the surface of the workpiece 12 are relatively easy to remove. However, impurities inside the workpiece 12 are difficult to remove due to space limitations. In this application, a circulation device 2 is connected to the cleaning tank 11, and one end of the hollow cavity of the workpiece 12 is connected to the circulation device 2. Therefore, the circulation device 2 can drive the cleaning solution to circulate between the inside and outside of the workpiece 12, thereby ensuring that both the inner and outer walls of the workpiece 12 are cleaned.

[0040] In some embodiments, the cleaning device in the embodiments of the present application can be applied to the cleaning process of the gas inlet pipe of the LPCVD coating device, that is, the workpiece 12 is the gas inlet pipe. In the coating operation of the silicon wafer by using the LPCVD coating device, oxygen and silane gas enter the inside of the furnace pipe through the gas inlet pipe, and are decomposed and deposited at high temperature to realize the process of SiO2 / polysilicon passivation layer coating. At the same time, a layer of polysilicon film is deposited on the inner and outer walls of the gas inlet pipe. With the increase of the process number, the deposited film on the silane gas inlet pipe and the oxygen gas inlet pipe becomes thicker and thicker, which easily causes the small holes on the gas inlet pipe to be blocked and the problem of pipe wall slagging, seriously affecting the coating effect and needing to be replaced in time. The old gas inlet pipe will be scrapped, causing serious waste of resources. The cleaning device in the embodiments of the present application can be used to clean the gas inlet pipe, so that the gas inlet pipe can be reused, which not only reduces the cost, but also improves the coating quality.

[0041] Of course, the cleaning device in the present application is not limited to cleaning the workpiece 12 with a hollow cavity. For structural parts without a hollow cavity, such as quartz boats used for coating, the cleaning device in the present application can also be used for cleaning. Specifically, during the cleaning operation, the structural part to be cleaned can be directly placed in the cleaning tank 11, and the structural part is not connected with the circulating device 2. At this time, the two ends of the circulating device 2 are respectively communicated with the cleaning tank 11, and the circulating device 2 is started to drive the cleaning liquid to circulate and flow in the cleaning tank 11 and the circulating device 2. In this way, the cleaning liquid can flow, thereby helping to improve the cleaning effect and cleaning efficiency.

[0042] In other embodiments, as shown in Figure 1 The cleaning device further includes a cover plate 13 arranged at the slot opening of the cleaning tank 11. The cover plate 13 is movably connected with the first tank body 1 at the slot opening, and the cover plate 13 can move relative to the first tank body 1. During the cleaning process, the cover plate 13 is covered on the slot opening of the cleaning tank 11 to avoid the cleaning liquid from splashing out and polluting the surrounding environment. Before or after cleaning, the slot opening of the cleaning tank 11 can be opened by moving the cover plate 13 to perform corresponding operations in the cleaning tank 11.

[0043] Optionally, as shown in Figures 1 to 4 The circulating device 2 includes a connecting head 21, a first pipeline 22, a second pipeline 23 and a driving member 24. The connecting head 21 is arranged on the inner wall of the cleaning tank 11 and is adapted to be detachably connected with one end of the workpiece 12. The first pipeline 22 is connected with the connecting head 21, and the second pipeline 23 is communicated with the cleaning tank 11. The driving member 24 is connected with the first pipeline 22 and the second pipeline 23 respectively, and is used to drive the cleaning liquid to circulate and flow between the first pipeline 22 and the second pipeline 23.

[0044] In the embodiment of the present application, the connecting head 21 is arranged on the inner wall of the cleaning tank 11, so that one end of the workpiece 12 is fixed to the connecting head 21 during cleaning. The first pipeline 22 is connected to the connecting head 21, and the workpiece 12 can be communicated with the first pipeline 22 through the connecting head 21. One end of the second pipeline 23 is communicated with the cleaning tank 11, and the other end of the second pipeline 23 is communicated with the first pipeline 22 through the driving member 24. In this way, the cleaning liquid in the cleaning tank 11 can be driven by the driving member 24 to enter the inside of the workpiece 12, and then flow through the connecting head 21, the first pipeline 22 and the second pipeline 23 and return to the cleaning tank 11 again, so as to promote the circulation of the cleaning liquid between the inner and outer walls of the workpiece 12, and ensure that the inner and outer walls of the workpiece 12 can be fully cleaned, which can ensure the cleaning effect of the workpiece 12 and improve the cleaning efficiency of the workpiece 12.

[0045] The connecting head 21 is fixed to the inner wall of the cleaning tank 11, and the connecting head 21 has a connecting end for connecting the workpiece 12. The connecting end and the workpiece 12 can be connected in a detachable manner such as threaded connection, clamping or insertion, which facilitates the installation and removal of the workpiece 12. The structure of the connecting head 21 is matched with the structure of the workpiece 12. In actual application, multiple connecting heads of different specifications can be provided at the same time to meet the cleaning needs of workpieces 12 of different specifications. The specific structure of the connecting head 21 can be flexibly selected according to the actual application scenario, which is not limited here.

[0046] In addition, the driving member 24 in the present application can be a circulating pump, such as a volute circulating pump, a plunger circulating pump or a centrifugal circulating pump. In specific application, the corresponding cleaning liquid can be selected according to the cleaning process design, which is not limited here.

[0047] Optionally, as shown in Figures 1 to 3 The circulating device 2 further includes a manifold 25, the inner wall of the cleaning tank 11 is provided with multiple connecting heads 21, the manifold 25 is installed on the first tank body 1, and the multiple connecting heads 21 are connected to the manifold 25. The first pipeline 22 is connected to the manifold 25.

[0048] In the embodiment of the present application, multiple connecting heads 21 are arranged on the inner wall of the cleaning tank 11, and a manifold 25 is installed on the first tank body 1, so that the multiple connecting heads 21 are connected to the manifold 25. The cleaning liquid introduced into the multiple connecting heads 21 by the manifold 25 is converged and then guided to the first pipeline 22. In this way, the cleaning operation of multiple workpieces 12 can be realized at the same time, and the cleaning efficiency is improved.

[0049] Optionally, as shown in Figure 3As shown, the circulating device 2 further comprises a third pipeline 26 and a switching piece 27. The third pipeline 26 is connected with the first pipeline 22 and / or the second pipeline 23, and is adapted to be connected with an external air source. The switching piece 27 is arranged in the third pipeline 26 and is used to control the opening and closing of the third pipeline 26.

[0050] In the embodiment of the present application, the third pipeline 26 is connected with the first pipeline 22 and / or the second pipeline 23, and the third pipeline 26 is connected with an external air source. Thus, after the cleaning of the workpiece 12 by the cleaning liquid is completed, the switching piece 27 can be controlled to be opened, so that the external air source supplies air flow into the cleaning tank 11 and the hollow cavity of the workpiece 12 through the circulating device 2, to dry the inner and outer surfaces of the workpiece 12 by the air flow, reduce the impurity residues on the inner and outer walls of the workpiece 12, and improve the cleanliness of the workpiece 12.

[0051] The switching piece 27 can be selected from a solenoid valve, a manual valve, a hydraulic valve, or other structural pieces capable of controlling the opening and closing of the third pipeline 26, and can be selected flexibly according to actual needs, which is not limited herein.

[0052] The external air source connected with the third pipeline 26 in the present application can be a gas storage device, which stores nitrogen, compressed air, inert gas, or the like. The specific type of gas can be selected flexibly according to actual conditions, which is not limited herein.

[0053] Optionally, as shown in Figure 2 and Figure 5 The cleaning device further comprises a fixing frame 3 arranged in the cleaning tank 11. The fixing frame 3 is detachably connected with the first tank body 1. The fixing frame 3 is provided with a clamping groove 31, and the workpiece 12 is at least partially clamped in the clamping groove 31.

[0054] In the embodiment of the present application, the fixing frame 3 is arranged in the cleaning tank 11 to fix the workpiece 12 by clamping the workpiece 12 in the clamping groove 31, so as to avoid the deformation and damage of the workpiece 12 caused by large displacement of the workpiece 12 during the cleaning process. Meanwhile, the fixing frame 3 is detachably connected with the first tank body 1. In this way, the installation and dismounting of the fixing frame 3 are facilitated, and the use of the fixing frame 3 can be flexibly set according to the structure of the workpiece 12, so as to improve the applicability of the cleaning device.

[0055] In some embodiments, the detachable connection structure between the fixing frame 3 and the first tank body 1 can adopt a structure of a sliding groove and a sliding table. Specifically, a sliding groove is arranged on the sidewall of the cleaning tank 11, the sliding groove extends from the tank opening to the tank bottom, and the fixing frame 3 is provided with a sliding table matched with the sliding groove. When installing, the sliding table of the fixing frame 3 is inserted into the sliding groove, and the fixing frame 3 can be installed into the cleaning tank 11 by pushing the fixing frame 3. When it is necessary to disassemble the fixing frame 3, the fixing frame 3 can be taken out of the cleaning tank 11 by pulling the fixing frame 3 towards the tank opening, which is simple and convenient to operate.

[0056] Of course, other detachable connection methods can also be adopted between the fixing frame 3 and the first tank body 1, for example, clamping, screw connection, pin shaft connection, etc. can be adopted, which can be flexibly set according to actual conditions, and is not limited herein.

[0057] It can be understood that when cleaning the workpiece 12 such as a pipeline with a relatively long length, relative displacement will be generated between the two ends of the workpiece 12 along with the flow of the cleaning liquid in the cleaning tank 11, which is easy to cause local deformation and damage of the workpiece 12. Therefore, in the present application, the fixing frame 3 is arranged in the cleaning tank 11 to fix the workpiece 12 by using the fixing frame 3, so as to reduce the movement and deformation of the workpiece 12 during cleaning.

[0058] In addition, in the present application, the fixing frame 3 is detachably connected with the first tank body 1, so that when cleaning a workpiece 12 with a large size, the fixing frame 3 can be disassembled, thereby increasing the accommodation space in the cleaning tank 11 to meet the cleaning requirements of workpieces 12 with different structures.

[0059] Optionally, as shown in Figure 1 The fixing frame 3 is provided in a plurality of fixing frames 3, and the plurality of fixing frames 3 are arranged in the cleaning tank 11 at intervals, and the workpiece 12 is clamped and fixed with the plurality of fixing frames 3.

[0060] In the embodiments of the present application, a plurality of fixing frames 3 arranged at intervals are arranged in the cleaning tank 11, each workpiece 12 can be clamped and fixed with the plurality of fixing frames 3 at the same time, so as to segmentally fix the workpiece 12 with a relatively long length. In this way, the fixing effect of the workpiece 12 can be achieved, and the influence of the plurality of fixing frames 3 on the flow of the cleaning liquid can be reduced.

[0061] Optionally, as shown in Figure 6 The cleaning tank 11 has a tank opening and a tank bottom arranged oppositely, and along the direction from the tank opening to the tank bottom, the fixing frame 3 includes at least two layers of fixing portions 30 arranged at intervals, and each fixing portion 30 is provided with at least one clamping groove 31.

[0062] In the embodiment of the present application, at least two layers of fixing portions 30 are arranged in each fixing frame 3, and at least one clamping groove 31 is arranged in each fixing portion 30. In this way, the fixing frame 3 can be used to fix multiple workpieces 12 at the same time, facilitating simultaneous cleaning operation of the multiple workpieces 12 and improving the cleaning efficiency.

[0063] Specifically, at least two layers of fixing portions 30 are arranged in the fixing frame 3 in the direction from the slot opening to the slot bottom of the cleaning tank 11, and at least two clamping grooves 31 are further arranged in each fixing portion 30. The at least two clamping grooves 31 in each fixing portion 30 are arranged in a vertical direction to the extending direction of the workpiece 12. In this way, one fixing frame 3 can be used to fix multiple workpieces 12 at the same time, improving the number of workpieces 12 cleaned at a time.

[0064] Furthermore, multiple fixing frames 3 arranged at intervals can be arranged in the cleaning tank 11, so that different positions of the workpiece 12 can be fixed by the multiple fixing frames 3. In this way, the fixing effect of the multiple workpieces 12 can be achieved, and at the same time, a certain gap is formed between the multiple workpieces 12, so that the cleaning liquid can flow between the different workpieces 12 to achieve the cleaning purpose of the workpiece 12.

[0065] Optionally, as shown in Figure 3 The cleaning device further includes a second tank body 6 arranged opposite to the first tank body 1. The second tank body 6 is provided with a containing groove 61 which is in communication with the cleaning tank 11 and used to store the cleaning liquid.

[0066] In the embodiment of the present application, the second tank body 6 is arranged, and the containing groove 61 in the second tank body 6 is in communication with the cleaning tank 11 of the first tank body 1. After the cleaning liquid in the cleaning tank 11 completes the cleaning operation of the workpiece 12, the cleaning liquid can be guided into and stored in the containing groove 61 of the second tank body 6. When the workpiece 12 is cleaned again, the cleaning liquid can be guided from the second tank body 6 back to the first tank body 1. In this way, the cleaning liquid can be reused, the utilization rate of the cleaning liquid is improved, and the cleaning cost is reduced. At the same time, the temporary storage of the cleaning liquid by the second tank body 6 can avoid the pollution of the cleaning liquid.

[0067] Specifically, the first tank body 1 and the second tank body 6 are in communication through a communication pipeline, and a solution pump is arranged in the communication pipeline. The solution pump can pump the cleaning liquid from the first tank body 1 to the second tank body 6 or from the second tank body 6 to the first tank body 1.

[0068] Optionally, as shown in Figure 1 The cleaning device further includes an ultrasonic vibration device 4 connected to the first tank body 1 and used to drive the first tank body 1 to vibrate.

[0069] In the embodiment of the present application, the ultrasonic vibration device 4 can be arranged at the bottom of the cleaning tank 11, and the ultrasonic vibration generated by the ultrasonic vibration device 4 can drive the cleaning liquid in the first tank body 1 to generate high-frequency vibration, so as to destroy the insoluble impurities on the surface of the workpiece 12 and make the insoluble impurities dispersed in the cleaning liquid, thereby improving the cleaning effect on the workpiece 12.

[0070] Specifically, the ultrasonic vibration device 4 includes an ultrasonic generator and a transducer, the transducer is connected with the first tank body 1, and the ultrasonic generator is connected with the transducer. The ultrasonic generator emits a high-frequency oscillation signal, which is converted into a high-frequency mechanical oscillation by the transducer, and then drives the first tank body 1 and the cleaning liquid in the cleaning tank 11 to generate high-frequency vibration, so that the cleaning liquid flows to generate a large number of micro-bubbles. The micro-bubbles vibrate under the action of the sound field, which can destroy the insoluble impurities on the surface of the workpiece 12, so as to make the insoluble impurities dispersed in the cleaning liquid, thereby realizing the cleaning effect on the impurities on the surface of the workpiece 12. In addition, the ultrasonic vibration device 4 can also accelerate the reaction rate of the cleaning liquid and the deposit, thereby improving the cleaning efficiency.

[0071] Optionally, as shown in Figure 1 The cleaning device further includes a heating device 5 connected with the first tank body 1, and the heating device 5 is used for heating the cleaning liquid in the cleaning tank 11.

[0072] In the embodiment of the present application, the heating device 5 is arranged to heat the cleaning liquid in the cleaning tank 11, so as to improve the solubility of the cleaning liquid and improve the cleaning ability of the cleaning liquid to the impurities on the surface of the workpiece 12.

[0073] Specifically, the heating device 5 can include an electric connecting piece and a heating piece, the heating piece is in heat-conducting connection with the first tank body 1, and the electric connecting piece is in electrical connection with the heating piece. The electric connecting piece can be connected with an external power supply, and the heating piece is powered through the electric connecting piece to generate heat, so as to heat the cleaning liquid in the cleaning tank 11.

[0074] The heating piece can be selected from components capable of generating heat, such as heating wires, heating coils, heating resistors, etc. The specific type and structure of the heating piece can be selected flexibly according to actual conditions, which is not limited herein.

[0075] Optionally, as shown in Figure 1 and Figure 7 The embodiment of the present application further provides a cleaning system, which includes an auxiliary straightening device 7 and the cleaning device in the above-mentioned embodiment. The cleaning device is used for cleaning the workpiece 12, and the auxiliary straightening device 7 is used for straightening and correcting the cleaned workpiece 12.

[0076] In the embodiment of the present application, by arranging the circulating device 2 in the first tank body 1, during the cleaning operation, the workpiece 12 is placed in the cleaning tank 11 of the first tank body 1, and the workpiece 12 is connected with one end of the circulating device 2, and the other end of the circulating device 2 is communicated with the cleaning tank 11. Further, the cleaning liquid can be driven by the circulating device 2 to flow into the hollow cavity of the workpiece 12 from the cleaning tank 11, and then flow back to the cleaning tank 11 through the circulating device 2, so that the cleaning liquid can circulate between the cleaning tank 11 and the hollow cavity of the workpiece 12. In this way, it can be ensured that the inner and outer walls of the workpiece 12 can be fully contacted with the cleaning liquid, so as to clean the workpiece 12 in all directions by using the cleaning liquid, thereby improving the cleaning effect and efficiency of the workpiece 12.

[0077] Further, by arranging the auxiliary straightening device 7, after the workpiece 12 is cleaned by the cleaning device, the auxiliary straightening device 7 is used to straighten and correct the workpiece 12, so as to reduce the local deformation of the workpiece 12 caused by cleaning, thereby ensuring the dimensional accuracy of the workpiece 12.

[0078] In some embodiments, as shown in Figure 7 The auxiliary straightening device 7 can include a mounting base 72 and at least two roller rows 71, the roller rows 71 are formed by a plurality of rollers arranged at intervals, the rollers are rotatably connected to the mounting base 72, and adjacent two roller rows 71 are arranged at intervals to form a clamping space. Further, the cleaned workpiece 12 can pass through the clamping space, and by driving the workpiece 12 to move in the clamping space, the workpiece 12 can be straightened and corrected by the clamping action of the two roller rows 71.

[0079] Of course, the auxiliary straightening device 7 can also select other devices or equipment that can achieve the straightening and correcting effect of the workpiece 12, and those skilled in the art can select flexibly according to actual needs, which is not limited here.

[0080] In some embodiments, the workpiece 12 to be cleaned is taken as an example of the inlet pipe of the LPCVD film coating equipment, and the working principle of the cleaning system of the present application is described, and the specific cleaning process is as follows:

[0081] When the replaced inlet pipe needs to be cleaned, the inlet pipe to be cleaned is placed in the cleaning tank 11 of the first tank body 1, and one end of the inlet pipe is connected and fixed with the connecting head 21 on the tank wall of the cleaning tank 11, and the other end of the inlet pipe is directly exposed to the cleaning tank 11 and communicated with the cleaning tank 11.

[0082] Then, the cleaning liquid is added into the cleaning tank 11, and the outer surface of the intake pipe is immersed in the cleaning liquid. The cleaning liquid is an alkaline solution formed by mixing pure water and an alkaline compound (such as NaOH or KOH, etc.) in a certain ratio, and the mass concentration of the alkaline compound in the alkaline solution ranges between 5wt%-10wt%. Further, the heating device 5 is used to heat the cleaning liquid in the cleaning tank 11, and the temperature of the cleaning liquid is heated to 50°C-80°C. Moreover, the ultrasonic vibration device 4 is turned on, and the frequency of the ultrasonic waves generated by the ultrasonic vibration device 4 ranges between 20KHz-25KHz. By using the high-frequency vibration of the ultrasonic vibration device 4 and the reaction between the alkaline solution and the impurities attached to the intake pipe, the impurities such as polysilicon on the outside of the intake pipe can be cleaned.

[0083] At the same time, the circulating pump in the circulating device 2 is turned on, and the cleaning liquid is circulated between the cleaning tank 11 and the inside of the intake pipe, that is, the cleaning liquid is continuously circulated between the inner and outer walls of the intake pipe, so that the impurities such as polysilicon deposited inside the intake pipe can be cleaned. The flow rate of the cleaning liquid in the circulating device 2 is controlled by the circulating pump to range between 5L / min-20L / min, and the cleaning time ranges between 60min-180min. After cleaning with the cleaning liquid, the cleaning liquid in the first tank body 1 is discharged and temporarily stored in the second tank body 6. The cleaning liquid in the second tank body 6 can be guided back to the first tank body 1 by the pump for reuse next time.

[0084] Then, pure water is added into the cleaning tank 11 of the first tank body 1, and the intake pipe is cleaned with the pure water. The cleaning process is repeated 2-3 times, and the pure water is heated by the heating device 5 during the cleaning process, and the heating temperature is set to 50°C-80°C. At the same time, the circulating pump is turned on, and the pure water is circulated between the cleaning tank 11 and the inside of the intake pipe. The circulating flow rate of the pure water ranges between 5L / min-20L / min, and the cleaning time ranges between 5min-30min. After cleaning, the pure water is discharged.

[0085] Then, normal-temperature compressed air with a flow rate ranging between 10L / min-80L / min is introduced into the circulating device 2, and the compressed air is used to blow and dry the residual liquid and impurities inside and outside the intake pipe. The blowing and drying time ranges between 5min-30min, so as to ensure that the intake pipe is completely cleaned. Finally, the cleaned intake pipe is clamped and straightened by the auxiliary clamping and straightening device 7, so as to complete the entire cleaning process of the intake pipe. The cleanliness of the intake pipe is ensured, and the dimensional accuracy of the intake pipe is also ensured, so that the intake pipe can be repeatedly used.

[0086] In the description of the application, reference has been made to descriptive terms such as "one embodiment", "some embodiments", "an embodiment", "example", "specific example" or "some examples" etc. Such terminology means that a particular feature, structure, material or characteristic being described is included in at least one embodiment or example of the application. The illustrative appearances of such terminology in various places in the specification does not necessarily refer to the same embodiment or example. Moreover, it is appreciated that the specific features, structures, materials or characteristics can be combined in any suitable manner in one or more embodiments or examples.

[0087] Although embodiments of this application have been shown and described, it is to be understood that various modifications, substitutions, combinations, and variations can be made therein without departing from the spirit and scope of the application, which is defined by the appended claims and their equivalents.

Claims

1. A cleaning apparatus, characterized by, The application relates to a cleaning device, which comprises: a first tank body, wherein a cleaning tank is arranged in the first tank body, and the cleaning tank is used for containing cleaning liquid and a workpiece to be cleaned, and the workpiece has a hollow cavity; a circulating device, which is connected to the first tank body, one end of the circulating device is communicated with the cleaning tank, the other end of the circulating device is adapted to be detachably connected with the workpiece and is communicated with one end of the hollow cavity, the other end of the hollow cavity is communicated with the cleaning tank, and the circulating device is used for driving the cleaning liquid to flow circularly between the cleaning tank and the hollow cavity.

2. The cleaning apparatus according to claim 1, characterized in that The circulating device comprises a connecting head, a first pipeline, a second pipeline and a driving member, the connecting head is arranged on the inner wall of the cleaning tank, and the connecting head is adapted to be detachably connected with one end of the workpiece; the first pipeline is connected with the connecting head, and the second pipeline is communicated with the cleaning tank; the driving member is connected with the first pipeline and the second pipeline respectively, and is used for driving the cleaning liquid to flow circularly between the first pipeline and the second pipeline.

3. The cleaning apparatus of claim 2, wherein The circulating device further comprises a converging pipe, the inner wall of the cleaning tank is provided with a plurality of connecting heads, the converging pipe is installed on the first tank body, the plurality of connecting heads are connected with the converging pipe respectively, and the first pipeline is connected with the converging pipe.

4. The cleaning apparatus according to claim 2, wherein The circulating device further comprises a third pipeline and a switch member, the third pipeline is connected with the first pipeline and / or the second pipeline, the third pipeline is adapted to be connected with an external air source, and the switch member is arranged in the third pipeline and is used for controlling the opening and closing of the third pipeline.

5. The cleaning apparatus according to claim 1, wherein The cleaning device further comprises a fixing frame, the fixing frame is arranged in the cleaning tank, the fixing frame is detachably connected with the first tank body, the fixing frame is provided with a clamping groove, and the workpiece is at least partially clamped in the clamping groove.

6. The cleaning apparatus of claim 5, wherein The fixing frame is arranged in a plurality of fixing frames which are arranged in the cleaning tank in a spaced mode, and the workpiece is clamped and fixed with the plurality of fixing frames. The cleaning tank has a tank opening and a tank bottom which are arranged oppositely, along the direction from the tank opening to the tank bottom, the fixing frame comprises at least two layers of fixing parts which are arranged in a spaced mode, and each fixing part is provided with at least one clamping groove.

7. The cleaning apparatus of claim 6, wherein The cleaning device further comprises a second tank body, the second tank body is arranged oppositely to the first tank body, the second tank body is provided with a containing groove, the containing groove is communicated with the cleaning tank, and the containing groove is used for storing the cleaning liquid.

8. The cleaning apparatus according to any one of claims 1 to 7, characterized in that The cleaning device further comprises an ultrasonic vibration device, the ultrasonic vibration device is connected to the first tank body and is used for driving the first tank body to vibrate; 9. The cleaning apparatus according to any one of claims 1 to 7, characterized in that and / or, the cleaning device further comprises a heating device, the heating device is connected with the first tank body and is used for heating the cleaning liquid in the cleaning tank. The application further relates to an auxiliary straightening device and the cleaning device as claimed in any one of claims 1-9, the cleaning device is used for cleaning a workpiece, and the auxiliary straightening device is used for straightening and correcting the cleaned workpiece.

10. A cleaning system characterized by, ​

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