Precursor medium supply device

Abstract

The utility model discloses a precursor medium supply device which comprises a liquid supplementing bottle, a first liquid cavity is formed in the liquid supplementing bottle, a first pressurizing pipe and a first liquid outlet pipe are arranged on the top of the liquid supplementing bottle in a penetrating mode, a first valve is connected to the first pressurizing pipe, and a second valve and a pneumatic three-way reversing valve are sequentially connected to the first liquid outlet pipe. A first end of the pneumatic three-way reversing valve is connected with a first liquid outlet pipe, a second end perpendicular to the first end is connected with a second pressurizing pipe, a third end opposite to the second end is connected with a connecting pipe connected with a stock solution bottle, an air outlet pipe is arranged at the top of the stock solution bottle in a penetrating mode, and a third valve is connected to the air outlet pipe. A liquid level sensor is arranged in the stock solution bottle, all the valves and the liquid level sensor are connected with the controller, and the volume of the liquid supplementing bottle is larger than that of the stock solution bottle. According to the utility model, through automatic redistribution of the liquid supplementing bottle, the replacement of the stock solution bottle by maintenance personnel for multiple times is reduced to the replacement of the liquid supplementing bottle for one time, so that the working efficiency is greatly improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor, concretely relates to a kind of precursor medium supply device. BACKGROUND

[0002] Liquid precursor product is one of the core raw materials of the entire electronic industry system, which is widely used in many aspects of electronic device manufacturing such as computer chips, solar cells, mobile communication, satellite navigation, spacecraft, and plays a huge role in the fields of aerospace, new solar cells, electronic products, etc. In the furnace tube process, precursors represented by dichloroethylene play an important role in production as a good chlorine source. The current supply scheme in the industry is to use small volume source bottles to load chemical media. Whenever the media in a small volume original liquid bottle is used up, a new small volume source bottle is directly replaced.

[0003] The above-mentioned method has the following disadvantages: First, frequent stop and bottle replacement increase the number of contacts between maintenance personnel and chemicals, which poses a potential threat to the health of maintenance personnel. Second, in order to ensure production safety, there will be residual chemical media in the original liquid bottle, which cannot be completely used up before replacement. The incomplete use of media and the subsequent treatment of residual liquid not only cause waste of resources, but also further increase the operating cost of the enterprise. INVENTION CONTENTS

[0004] The purpose of the utility model is to provide a precursor medium supply device that can continuously replenish liquid and reduce the number of bottle replacements.

[0005] The purpose of the utility model can be achieved by the following technical solutions:

[0006] A precursor medium supply device for replenishing media to an original liquid bottle, comprising a liquid replenishing bottle, the liquid replenishing bottle has a first liquid cavity inside for loading media, a first pressurizing pipe and a first liquid outlet pipe are provided on the top, the outlet end of the first pressurizing pipe extends into the top of the first liquid cavity, a first valve is connected to the first pressurizing pipe, the liquid inlet of the first liquid outlet pipe extends into the first liquid cavity, a second valve and a pneumatic three-way reversing valve are connected in sequence to the first liquid outlet pipe, the first end of the pneumatic three-way reversing valve is connected to the first liquid outlet pipe, the second end perpendicular to the first end is connected to a second pressurizing pipe, and the third end opposite to the second end is connected to a connecting pipe connected to the original liquid bottle. The original liquid bottle has a second liquid cavity inside for loading media, the outlet end of the connecting pipe extends into the bottom of the second liquid cavity, a gas outlet pipe is provided on the top of the original liquid bottle, a third valve is connected to the gas outlet pipe, a liquid level sensor is provided in the original liquid bottle, and a controller is further included. All valves and liquid level sensors are connected to the controller. The volume of the liquid replenishing bottle is greater than that of the original liquid bottle.

[0007] By the technical scheme, the liquid level sensor detects the liquid level of the medium in the stock solution bottle, when it is detected that the stock solution bottle needs to be replenished, the liquid level sensor sends a signal, the controller controls the first valve and the second valve to be opened after receiving the signal, and controls the pneumatic three-way reversing valve to switch control, and the medium in the replenishment solution bottle is supplied to the stock solution bottle along the first liquid outlet pipe by the pneumatic mode. In this way, the liquid can be continuously replenished, the number of bottle replacement is reduced, the work efficiency is greatly improved, and waste caused by replacing the stock solution bottle with residual medium is effectively avoided. The pneumatic three-way reversing valve is used, and interlocking relationship exists in the physical structure, and the mistake is prevented.

[0008] In the specific embodiment of the utility model, the first pressurizing pipe is further connected with a pressure regulating valve and a pressure detector. By adopting the structure, the first pressurizing pipe is connected with the gas source, and the carrier gas enters the replenishment solution bottle after pressure regulation by the pressure regulating valve, so as to avoid damage to subsequent components caused by excessively high pressure. The pressure detector can detect the carrier gas pressure.

[0009] In the specific embodiment of the utility model, the volume of the replenishment solution bottle is 16L, and the volume of the stock solution bottle is 1L.

[0010] In the specific embodiment of the utility model, the third valve is a pneumatic three-way reversing valve. The pneumatic three-way reversing valve is used, and interlocking relationship exists in the physical structure, and the mistake is prevented.

[0011] In the specific embodiment of the utility model, a constant-temperature container is further included, the constant-temperature container has a cavity with a top opening, and the stock solution bottle is located in the cavity.

[0012] In summary, in the utility model, the liquid level sensor detects the liquid level of the medium in the stock solution bottle, when it is detected that the stock solution bottle needs to be replenished, the liquid level sensor sends a signal, the controller controls the first valve and the second valve to be opened after receiving the signal, and controls the pneumatic three-way reversing valve to switch control, and the medium in the replenishment solution bottle is supplied to the stock solution bottle along the first liquid outlet pipe by the pneumatic mode. In this way, the liquid can be continuously replenished, the number of bottle replacement is reduced, the work efficiency is greatly improved, and waste caused by replacing the stock solution bottle with residual medium is effectively avoided. The pneumatic three-way reversing valve is used, and interlocking relationship exists in the physical structure, and the mistake is prevented. BRIEF DESCRIPTION OF DRAWINGS

[0013] The utility model will be further described in combination with the drawings.

[0014] Figure 1 It is a structure schematic view of a precursor medium supply device of the utility model;

[0015] Figure 2 It is a structure schematic view of an outlet expander of the utility model. DETAILED DESCRIPTION

[0016] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application.

[0017] Please refer to Figure 1 As shown in the figure, the present application is a kind of front body medium supply device, for supplementing medium to the original liquid bottle 9, it includes liquid supplement bottle 10, the first liquid cavity 11 for loading medium is arranged in the inside of liquid supplement bottle 10, the top is provided with first pressurizing pipe 12 and first liquid outlet pipe 13. The outlet end of first pressurizing pipe 12 extends into the top of first liquid cavity 11, and a first valve 121 is connected to the first pressurizing pipe 12. The liquid inlet of first liquid outlet pipe 13 extends into first liquid cavity 11. A second valve 131 and a pneumatic tee valve 132 are connected to the first liquid outlet pipe 13 in sequence. The first end head 1321 of the pneumatic tee valve 132 is connected to the outlet end of the first liquid outlet pipe 13, the second end head 1322 perpendicular to the first end head 1321 is connected to the second pressurizing pipe 15, and the third end head 1323 opposite to the second end head 1322 is connected to the connecting pipe 16. The connecting pipe 16 is connected to the original liquid bottle 9, the second liquid cavity 901 for loading medium is arranged in the inside of the original liquid bottle 9, and the outlet end of the connecting pipe 16 extends into the bottom of the second liquid cavity 901. An air outlet pipe 17 is also provided on the top of the original liquid bottle 9. A third valve 19 is connected to the air outlet pipe 17, a liquid level sensor 902 is arranged in the original liquid bottle 9, and a controller (not shown in the figure) is also included. The first valve 121, the second valve 131, the pneumatic tee valve 132, the third valve 19, and the liquid level sensor are all connected to the controller. Here, the third valve 19 is also a pneumatic tee valve. By using the pneumatic tee valve, there is an interlocking relationship in the physical structure, which prevents mistakes.

[0018] In this embodiment, a pressure regulating valve 122 and a pressure detector 123 are also connected to the first pressurizing pipe 12. With this structure, the first pressurizing pipe 122 is connected to a gas source, and the carrier gas enters the liquid supplement bottle 10 after pressure regulation by the pressure regulating valve 122, so as to avoid damage to subsequent components caused by excessive pressure. The pressure detector can detect the size of the carrier gas pressure. Here, the carrier gas can be nitrogen.

[0019] In this embodiment, the volume of the liquid supplement bottle 10 is greater than the volume of the original liquid bottle 9. The volume of the liquid supplement bottle 10 is 16L. The volume of the original liquid bottle 9 is 1L. The original liquid bottle 9 is a quartz bottle.

[0020] A constant temperature container 18 is also included. The constant temperature container 18 has a cavity 181 with an open top. The stock solution bottle 9 is located in the cavity 181. The constant temperature container 18 is internally provided with a heating sheet, a control circuit board, and a temperature level switch. In this way, the temperature is controlled by the temperature level switch, and the temperature of the medium in the stock solution bottle placed in the cavity 181 is controlled, so as to meet the technical process of the subsequent machine. Here, the constant temperature container is prior art, and will not be described in detail.

[0021] As shown in FIGS. 1, 2, and 3, the first liquid outlet pipe 13 is connected to the first liquid inlet pipe 12. The first liquid outlet pipe 13 is connected to the first liquid inlet pipe 12 through a first liquid outlet valve 131. Figure 1 and Figure 2 As shown in FIGS. 1, 2, and 3, the first liquid outlet pipe 13 is connected to the first liquid inlet pipe 12. The first liquid outlet pipe 13 is connected to the first liquid inlet pipe 12 through a first liquid outlet valve 131.

[0022] A purge pipe 23 is also provided in the outlet expansion container 20. The purge pipe 23 is connected to the corresponding branch liquid outlet pipe 22 through a plurality of purge branch pipes 24. The purge pipe 23 is sequentially connected to a third manual valve 231, a one-way valve 232, and a pressure gauge 233. Each of the purge branch pipes 24 is connected to a fourth manual valve 241. When performing the purge operation, the purge pipe 23 is connected to the carrier gas source, the third manual valve and the corresponding fourth manual valve 241 are opened, and if it is necessary to blow the residual liquid in the pipe into the stock solution bottle, the corresponding second manual valve 221 is closed, so that the carrier gas carries the residual liquid in the pipe into the corresponding stock solution bottle. Conversely, if it is necessary to blow the residual liquid in the pipe into the stock solution bottle, the first manual valve 211 and the corresponding second manual valve 221 are opened, so that the carrier gas carries the residual liquid into the stock solution bottle.

[0023] The above is a precursor medium supply device, and its working mode is as follows:

[0024] In use, the thermostat container 18 is started to control the temperature of the medium in the original liquid bottle, so that the medium can reach the required temperature condition in the subsequent process. The pneumatic three-way valve 132 is switched to the gas circuit, and the carrier gas enters the second liquid cavity through the second pressurizing pipe 15, the connecting pipe 16, and the liquid medium, and then the carrier gas will be in the form of a bubble from the liquid medium, and the surface of the bubble will be attached to the liquid medium, and then enter the machine terminal through the gas outlet pipe 17. At the same time, the liquid level sensor 902 continuously monitors the liquid level of the medium in the original liquid bottle. As the liquid medium is continuously consumed, when the liquid level sensor detects that the medium in the original liquid bottle needs to be replenished, the liquid level sensor 902 sends a signal, and the controller controls the first valve 121 and the second valve 131 to open, and controls the pneumatic three-way valve 132 to switch the liquid circuit, and the medium in the liquid supplement bottle is supplied to the original liquid bottle 9 through the first liquid outlet pipe 13 by means of gas pressure.

[0025] In summary, the liquid level sensor detects the liquid level of the medium in the original liquid bottle in the utility model, and when it is detected that the original liquid bottle needs to be replenished, the liquid level sensor sends a signal, and the controller controls the first valve and the second valve to open, and controls the pneumatic three-way valve to switch the liquid circuit, and the medium in the liquid supplement bottle is supplied to the original liquid bottle through the first liquid outlet pipe by means of gas pressure. In this way, through the automatic redistribution of the liquid supplement bottle, the replacement of the original liquid bottle by the maintenance personnel is reduced to once the replacement of the liquid supplement bottle, and the work efficiency is greatly improved. In addition, the medium is in the thermostat container, and the terminal use amount can be supplemented in time, and the temperature change in the original liquid bottle is smaller than that after the whole bottle is replaced.

[0026] The above describes one embodiment of the utility model in detail, but the content described is only the preferred embodiment of the utility model, and cannot be considered as limiting the scope of the utility model. Any equivalent changes and improvements within the scope of the utility model application should still belong to the patent coverage range of the utility model.

Claims

1. A precursor media supply device for replenishing a media to a stock solution bottle, characterized by, The first pressurizing pipe is connected with a pressure regulating valve and a pressure detector.

2. The precursor media supply apparatus of claim 1, wherein, The volume of the liquid supplement bottle is 16L, and the volume of the original liquid bottle is 1L.

3. The precursor media supply apparatus of claim 1, wherein, The third valve is a pneumatic three-way reversing valve.

4. The precursor media supply apparatus of claim 1, wherein, The first liquid outlet pipe is further connected with an outlet expansion container for connecting with multiple original liquid bottles.

5. The precursor media supply apparatus of claim 1, wherein, The outlet expansion container has a main liquid inlet pipe and multiple branch liquid outlet pipes connected with the main liquid inlet pipe.

6. The precursor media supply apparatus of claim 1, wherein, The outlet expansion container is further provided with a purge pipe, which is connected with the corresponding branch liquid outlet pipes through multiple purge branch pipes.

7. The precursor media supply apparatus of claim 6, wherein, The purge pipe is further connected with a third manual valve, a one-way valve and a pressure gauge in sequence.

8. The precursor media supply apparatus of claim 7, wherein, ​

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