Thickness measuring instrument for film thickness detection

Abstract

The utility model relates to the technical field of film measuring instruments, in particular to a thickness measuring instrument for film thickness detection, which comprises a measuring instrument, an adjusting assembly is arranged at the upper end of the measuring instrument, the adjusting assembly comprises a measuring platform arranged at the upper end of the measuring instrument, and the middle part of the lower end of the measuring platform is connected with a turntable. And four groups of symmetrical adjusting rods are connected to four corners of the lower end of the turntable. The film is fixed in the adjusting frame through the first magnet and the second magnet, the worm is slowly rotated, the adjusting blocks are far away from each other, and therefore the four edges of the film fixed between the first magnet and the second magnet are slowly unfolded outwards, and in the unfolding process, the screw can be independently rotated to push the adjusting frame to slide along the fixing frame. Through the above operation, a worker continuously carries out fine adjustment, so that the film is flatly displayed at the upper end of the measuring platform, and the film is prevented from being wrinkled in the measuring process, so that the measuring accuracy is not influenced.

Description

TECHNICAL FIELD

[0001] The utility model relates to thin film measuring instrument technical field especially relates to a kind of thickness measuring instrument for film thickness detection. BACKGROUND

[0002] SRMaster is the quick film thickness analysis system of company independent research and development, main advantages: optical measurement, non-contact, non-damage;High-speed measurement (measurement time <1s);Simultaneous measurement film thickness and thin film refractive index, can be used to evaluate thin film quality;Wide film thickness range can be measured, with ultraviolet light source, can measure 5nm thin film, with infrared light source, can measure 80um thin film;With self-research small spot light path, 0.2mm area can be measured, with self-research R-Theta platform, can be measured by sitting standard to specify position, further can draw film layer thickness distribution.

[0003] But the above-mentioned device cannot limit and fix the film, so that the film cannot be placed flat on the measuring platform, the film will have wrinkle, so that the optical measuring instrument is measured, and measurement error is prone to occur. UTILITY MODEL CONTENT

[0004] In order to overcome the defects of the prior art pointed out above, the present inventors have made in-depth research thereon, and after a lot of creative labor, the present utility model is completed.

[0005] Specifically, the technical problem to be solved by the present utility model is to provide a thickness measuring instrument for film thickness detection, so as to solve the technical problem that the prior art cannot limit and fix the film, so that the film cannot be placed flat on the measuring platform, the film will have wrinkle, so that the optical measuring instrument is measured, and measurement error is prone to occur.

[0006] To solve the above technical problems, the present utility model provides the following technical scheme:

[0007] A thickness measuring instrument for film thickness detection, comprising a measuring instrument, an adjusting assembly is arranged at the upper end of the measuring instrument, the adjusting assembly comprises a measuring platform arranged at the upper end of the measuring instrument, a turntable is connected to the lower end of the measuring platform, four groups of symmetrical adjusting rods are connected to the lower end of the turntable, adjusting blocks are arranged at the upper end of the adjusting rods, a limiting assembly is arranged at the upper end of the turntable, the limiting assembly comprises a fixed frame arranged at the upper end of the adjusting block, an adjusting frame is inserted into the middle end of the fixed frame, a sleeve is arranged on the inner wall of the upper end of the adjusting frame, a first piston is inserted into the inner wall of the sleeve, a plug rod is connected to the lower end of the first piston, a first magnet is arranged at the lower end of the plug rod, a second magnet is arranged at the inner wall of the lower end of the adjusting frame, and an optical lens is arranged at the upper end of the measuring instrument.

[0008] As an improved technical scheme, the lower end of the measuring platform is fixedly connected with the measuring instrument, the upper end of the rotating rod is fixedly connected with the rotating disc, the middle part of the upper end of the rotating disc is rotationally connected with the measuring platform, the lower end of the rotating rod is rotationally connected with the measuring instrument, a worm is fixedly arranged on the outer wall of the rotating rod, a fixed plate is fixedly arranged on the upper end of the measuring instrument, a worm wheel is rotationally inserted into the middle end of the fixed plate, and the worm wheel and the worm are meshed with each other.

[0009] As an improved technical scheme, the two ends of the adjusting rod are rotationally connected with the rotating disc and the adjusting block respectively, and the upper end of the measuring platform is provided with an adjusting groove matched with the adjusting block.

[0010] As an improved technical scheme, the adjusting frame is movably inserted into the fixed frame, sliding blocks are arranged at the upper end and the lower end of the adjusting frame, and sliding grooves matched with the sliding blocks are formed in the inner wall of the fixed frame.

[0011] As an improved technical scheme, the first piston is movably inserted into the inner wall of the sleeve, and the inserting rod is movably arranged through the sleeve and fixedly connected with the first magnet.

[0012] As an improved technical scheme, the first magnet and the second magnet are oppositely magnetized and are attracted to each other.

[0013] As an improved technical scheme, the limiting assembly further comprises a fixed sleeve fixed to the outer wall of the adjusting frame, a second piston is rotationally inserted into the middle end of the fixed sleeve, and a screw rod is threadedly inserted into the outer wall of the fixed frame and movably arranged through the fixed sleeve and fixedly connected with the second piston.

[0014] After the above technical scheme is adopted, the beneficial effects of the present application are as follows:

[0015] In the present application, the first magnet and the second magnet fix the film in the adjusting frame, the worm is slowly rotated, the adjusting blocks are away from each other, the film fixed between the first magnet and the second magnet is slowly unfolded outward, in the process of unfolding, the screw rod is rotated to push the adjusting frame to slide along the fixed frame, so that the horizontal distance of the four edges of the film is the same, through the above operation, the staff continuously fine-tunes, so that the film is evenly unfolded on the upper end of the measuring platform, and the film is prevented from being wrinkled in the measuring process, thereby affecting the accuracy of the measurement. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the drawings needed in the embodiment description will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor. Among them:

[0017] Figure 1 It is the whole stereoscopic structure schematic view of the thickness measuring instrument for film thickness detection.

[0018] Figure 2 It is the whole stereoscopic structure schematic view of the thickness measuring instrument for film thickness detection.

[0019] Figure 3 It is the whole stereoscopic structure schematic view of the thickness measuring instrument for film thickness detection.

[0020] Figure 4 It is the whole stereoscopic structure schematic view of the thickness measuring instrument for film thickness detection.

[0021] Explanation of reference signs:

[0022] 1, measuring instrument; 2, adjusting assembly; 21, measuring platform; 22, rotating disc; 23, adjusting rod; 24, adjusting block; 25, adjusting groove; 26, rotating rod; 27, worm; 28, fixed plate; 29, worm wheel; 3, limiting assembly; 301, fixed frame; 302, adjusting frame; 303, sleeve; 304, first piston; 305, inserting rod; 306, first magnet; 307, second magnet; 308, fixed sleeve; 309, second piston; 310, screw rod; 4, optical lens. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application.

[0024] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present application are only used to explain the relative positional relationship, movement condition, etc. between components in a certain posture (as shown in the drawings), and if the certain posture changes, the directional indications will also change accordingly.

[0025] Meanwhile, the meaning of "and / or" or "and / or" appearing throughout the text is that it includes three schemes, taking "A and / or B" as an example, including A scheme, or B scheme, or A and B schemes are met at the same time.

[0026] In addition, the description of "first", "second" and the like in the present application is only for the purpose of description and cannot be understood as indicating or implying the relative importance of the technical features or implying the number of the technical features indicated. Therefore, the features limited by "first" and "second" can be explicitly or implicitly included at least one of the features. In addition, the technical solutions of various embodiments can be combined with each other, but it must be based on the realization of ordinary skilled in the art, when the combination of technical solutions appears contradictory or unachievable, it should be considered that the combination of technical solutions does not exist, and is not within the protection scope required by the present application.

[0027] As Figure 1 and Figure 4 As shown in the drawings, the embodiment provides a thickness measuring instrument for film thickness detection, which comprises a measuring instrument 1, an adjusting assembly 2 is arranged at the upper end of the measuring instrument 1, the adjusting assembly 2 comprises a measuring platform 21 arranged at the upper end of the measuring instrument 1, a rotating disc 22 is connected to the middle of the lower end of the measuring platform 21, four groups of symmetrical adjusting rods 23 are connected to the lower end of the rotating disc 22, adjusting blocks 24 are arranged at the upper end of the adjusting rods 23, a limiting assembly 3 is arranged at the upper end of the adjusting block 24, the limiting assembly 3 comprises a fixed frame 301 arranged at the upper end of the adjusting block 24, an adjusting frame 302 is inserted into the middle end of the fixed frame 301, a sleeve 303 is arranged on the inner wall of the upper end of the adjusting frame 302, a first piston 304 is inserted into the inner wall of the sleeve 303, a plug rod 305 is connected to the lower end of the first piston 304, a first magnet 306 is arranged at the lower end of the plug rod 305, a second magnet 307 is arranged at the inner wall of the lower end of the adjusting frame 302, and an optical lens 4 is arranged at the upper end of the measuring instrument 1.

[0028] The lower end of the measuring platform 21 is fixedly connected with the measuring instrument 1, the upper end of the rotating rod 26 is fixedly connected with the rotating disc 22, the upper end of the rotating disc 22 is rotatably connected with the measuring platform 21, the lower end of the rotating rod 26 is rotatably connected with the measuring instrument 1, a worm 27 is fixedly sleeved on the outer wall of the upper end of the rotating rod 26, a fixed plate 28 is fixedly arranged at the upper end of the measuring instrument 1, a worm wheel 29 is rotatably inserted into the middle end of the fixed plate 28, and the worm wheel 29 and the worm 27 are meshed with each other.

[0029] The two ends of the adjusting rod 23 are rotatably connected with the rotating disc 22 and the adjusting block 24 respectively, and the upper end of the measuring platform 21 is provided with an adjusting groove 25 matched with the adjusting block 24.

[0030] The adjusting frame 302 is movably inserted into the fixed frame 301, and the adjusting frame 302 is provided with sliding blocks at the upper end and the lower end.

[0031] The first piston 304 is movably inserted into the inner wall of the sleeve 303, and the plug rod 305 is movably inserted into the sleeve 303 and fixedly connected with the first magnet 306.

[0032] The first magnet 306 and the second magnet 307 are opposite in polarity and attract each other.

[0033] The limiting assembly 3 further comprises a fixed sleeve 308 fixed to the outer wall of the adjusting frame 302, a second piston 309 rotatably inserted into the fixed sleeve 308, and a screw rod 310 threadedly connected to the outer wall of the fixed frame 301 and movably penetrating through the fixed sleeve 308 and the second piston 309.

[0034] The first magnet 306 is pushed upward to be separated from the second magnet 307, and then the four corners or edges of the film to be measured are sequentially placed into the adjusting frame 302 between the first magnet 306 and the second magnet 307. Then the first magnet 306 is loosened, and under the mutual attraction of the first magnet 306 and the second magnet 307, the first piston 304 drives the inserting rod 305 to slide downward along the sleeve 303, and the first magnet 306 and the second magnet 307 fix the film therebetween. Then the worm wheel 29 is slowly rotated to drive the worm 27 to rotate, and the worm 27 drives the rotating rod 26 to rotate, so that the rotating disc 22 is rotated to drive the adjusting rod 23 to rotate, and the adjusting rod 23 drives the adjusting block 24 to slide along the adjusting groove 25, and the adjusting blocks 24 are away from each other, so that the four edges of the film fixed between the first magnet 306 and the second magnet 307 are slowly unfolded outward. Since the size, width and length of the film are different, the screw rod 310 can be individually rotated during the unfolding process, the second piston 309 at the front end of the fixed frame 301 is rotated along the inner wall of the fixed sleeve 308, and the screw rod 310 drives the adjusting frame 302 to slide along the fixed frame 301, so that the transverse distance of the four edges of the film unfolded is the same, avoiding that one edge is unfolded too much outward to cause the film to be broken. Through the above operation, the staff continuously fine-tunes to make the film evenly unfolded on the upper end of the measuring platform 21, avoiding that the film has wrinkles during the measuring process to affect the accuracy of the measurement.

[0035] It should be understood that the use of these embodiments is only for illustrating the present application and is not intended to limit the protection scope of the present application. In addition, it should also be understood that after reading the technical content of the present application, those skilled in the art can make various modifications, modifications and / or variations to the present application, and all these equivalent forms also fall within the protection scope defined by the claims attached to the present application.

Claims

1. A thickness gauge for thin film thickness detection, comprising a gauge (1), characterized in that: The upper end of the measuring instrument (1) is provided with an adjusting assembly (2), the adjusting assembly (2) comprises a measuring platform (21) arranged at the upper end of the measuring instrument (1), the lower end of the measuring platform (21) is connected with a rotating disc (22), the lower end of the rotating disc (22) is connected with four groups of symmetrical adjusting rods (23), the upper end of the adjusting rod (23) is provided with an adjusting block (24), the lower end of the rotating disc (22) is provided with a rotating rod (26), the upper end of the adjusting block (24) is provided with a limiting assembly (3), the limiting assembly (3) comprises a fixed frame (301) arranged at the upper end of the adjusting block (24), the middle end of the fixed frame (301) is inserted with an adjusting frame (302), the inner wall of the upper end of the adjusting frame (302) is provided with a sleeve (303), the inner wall of the sleeve (303) is inserted with a first piston (304), the lower end of the first piston (304) is connected with a plug rod (305), the lower end of the plug rod (305) is provided with a first magnet (306), the lower end of the adjusting frame (302) is provided with a second magnet (307), and the upper end of the measuring instrument (1) is provided with an optical lens (4).

2. The gauge for thin film thickness detection according to claim 1, characterized in that: The lower end of the measuring platform (21) is fixedly connected with the measuring instrument (1), the upper end of the rotating rod (26) is fixedly connected with the rotating disc (22), the upper end of the rotating disc (22) is rotatably connected with the measuring platform (21), the lower end of the rotating rod (26) is rotatably connected with the measuring instrument (1), the outer wall of the upper end of the rotating rod (26) is fixedly sleeved with a worm (27), the upper end of the measuring instrument (1) is fixedly provided with a fixed plate (28), the middle end of the fixed plate (28) is rotatably inserted with a worm wheel (29), and the worm wheel (29) and the worm (27) are meshed with each other.

3. The gauge for thin film thickness detection according to claim 1, wherein: The both ends of the adjusting rod (23) are rotatably connected with the rotating disc (22) and the adjusting block (24) respectively, and the inner wall of the upper end of the measuring platform (21) is provided with an adjusting groove (25) matched with the adjusting block (24).

4. The gauge for thin film thickness detection according to claim 1, wherein: The adjusting frame (302) is movably inserted in the fixed frame (301), and the upper and lower ends of the adjusting frame (302) are provided with sliding blocks.

5. The gauge for thin film thickness detection according to claim 1, wherein: The first piston (304) is movably inserted in the inner wall of the sleeve (303), and the plug rod (305) is movably inserted in the sleeve (303) and fixedly connected with the first magnet (306).

6. The gauge for thin film thickness detection according to claim 1, wherein: The first magnet (306) and the second magnet (307) are opposite in magnetic pole and attract each other.

7. The gauge for thin film thickness detection of claim 1, wherein: The limiting assembly (3) further comprises a fixed sleeve (308) fixedly arranged on the outer wall of the adjusting frame (302), a second piston (309) rotatably inserted in the middle end of the fixed sleeve (308), and a screw rod (310) threadedly inserted in the outer wall of the fixed frame (301), the screw rod (310) is movably inserted in the fixed sleeve (308) and fixedly connected with the second piston (309).

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