Cold and hot table for probe test

Abstract

The utility model discloses a cold and hot bench used for probe test, and specifically relates to the probe test bench equipment technology field, the cold and hot bench comprises a connecting seat and a probe body, the inner cavity of the connecting seat is divided into three parts of a hot cavity, a cold cavity and an installation cavity by two partition plates, the installation cavity is arranged in the middle, the top end of the installation cavity is in an opening shape, and the probe body is arranged in the hot cavity. A driving assembly is arranged in the middle of the bottom end of an inner cavity of the installation cavity, the probe body is installed on the upper side of one end of the inner cavity of the installation cavity in the height direction, temperature adjusting assemblies are installed in inner cavities of the hot cavity and the cold cavity respectively, and thermal insulation assemblies are arranged on the end faces, away from each other, of the two partition plates respectively. According to the cold and hot table for the probe test, the test material can be respectively heated and cooled by arranging the temperature adjusting assembly, and the test material is driven to be respectively heated and cooled by arranging the driving assembly, so that the damage to the probe body caused by a relatively large temperature difference is avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to probe test bench technical field, especially in kind for probe test cold and hot platform. BACKGROUND

[0002] Probe test cold and hot platform is the equipment that temperature control and electrical test function are integrated in one. Cold and hot platform can accurate temperature control, range from ultralow temperature to higher temperature, borrow heating, refrigeration element collaborative work, probe is made of high conductivity material, is used for with sample electrical connection, is applied to semiconductor material research, electronic device performance evaluation, material phase change research many fields.

[0003] The patent with the authorization announcement number CN219676099U discloses a kind of probe test cold and hot platform, including: test bench;Detection box is fixedly connected at the top of test bench;Electric heating plate is fixedly installed in the back inner wall of detection box;Liquid nitrogen pipe is fixedly installed in the front inner wall of detection box;Probe platform is rotatably connected in the bottom inner wall of detection box;Electric telescopic rod is fixedly installed in the right inner wall of detection box;Probe assembly is fixedly installed in the output end of electric telescopic rod.The device can change the temperature environment in detection box by setting electric heating plate and liquid nitrogen pipe, facilitate probe assembly to detect the surface temperature of material under different temperature environment, improve the accuracy of detection data of detection sample, the stability of internal environment of detection box is improved by setting cover plate and hand screwing screw.

[0004] The probe assembly in the device is set in the inside of detection box, and in the testing process, due to the large temperature difference in the inside of detection box, the probe assembly will produce uneven expansion and contraction stress due to the different thermal expansion and contraction coefficients, causing the probe to bend and break. Utility model content

[0005] The main purpose of the utility model is to provide a kind of probe test cold and hot platform, which can effectively solve the problems raised in the above.

[0006] To achieve the above object, the technical scheme adopted by the utility model is:

[0007] A kind of probe test cold and hot platform, including connecting seat and probe body, two partition plates are symmetrically installed in the inner chamber of connecting seat, away from the middle of two sides, two The middle of the opposite surface of two partition plates is symmetrically provided with groove, two The inner chamber of connecting seat is divided into hot cavity, cold cavity and mounting cavity three parts by two partition plates, the mounting cavity is located in the middle, the top end of the mounting cavity is open, the drive assembly is arranged in the middle of the bottom end of the inner chamber of the mounting cavity, the probe body is installed on the upper side of one end of the inner chamber of the mounting cavity in height direction, temperature adjusting assembly is installed in the inner chamber of hot cavity and cold cavity respectively, and temperature insulation assembly is arranged on the end face of two partition plates away from each other.

[0008] Preferably, the temperature adjusting assembly comprises an electromagnetic heater and an expansion slot, the electromagnetic heater is installed through the top end of the inner cavity of the hot cavity, and the output end of the electromagnetic heater is aligned with the inlet slot in the hot cavity.

[0009] Preferably, the expansion slot is arranged through the lower side of the right end of the inner cavity of the cold cavity, the inner cavity surface of the expansion slot is inserted with a water box, and the top end of the inner cavity of the cold cavity is installed through a liquid helium supply pipe away from the side of the shaft.

[0010] Preferably, the temperature insulation assembly comprises four hinged seats, the two hinged seats on the same side are located on the upper part of the inlet slot on the same side.

[0011] Preferably, two hinged blocks are rotatably connected between the two hinged seats on the same side, and two temperature insulation plates are fixedly connected to the bottom ends of the two hinged blocks.

[0012] Preferably, the driving assembly comprises a motor and a placing box, the motor is fixedly installed at the bottom end of the inner cavity of the installation cavity, a fixed arm is fixedly installed on the output shaft of the motor, two supporting legs are symmetrically installed on the bottom end of the fixed arm away from the middle part, two ball grooves are arranged at the bottom ends of the two supporting legs, two balls are rotatably installed in the inner cavity surfaces of the two ball grooves, and the two balls are in rolling contact with the bottom end of the inner cavity of the installation cavity.

[0013] Preferably, the electric cylinder is fixedly installed at the top right end of the fixed arm, the placing box is located at the top left end of the fixed arm, the output shaft of the electric cylinder is fixedly connected with the placing box, two sliding grooves are symmetrically arranged on the left sides of the two ends of the fixed arm along the width direction of the fixed arm, two sliding blocks are slidably connected to the inner cavity surfaces of the two sliding grooves, and the opposite surfaces of the two sliding blocks are fixedly connected with the placing box.

[0014] Compared with the prior art, the utility model has the advantages of the following beneficial effects:

[0015] 1、The temperature adjusting assembly can be used for heating and cooling the test material respectively, the driving assembly can be used for driving the test material to heat and cool respectively, and thus the damage of the probe body caused by large temperature difference is avoided.

[0016] 2、The temperature insulation assembly can be used for preventing the temperature in the hot cavity and the cold cavity from escaping, reducing energy loss, ensuring stable operation of the equipment, and accurately maintaining the predetermined temperature condition of the working area. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1The overall structure schematic diagram of the utility model is shown in the figure.

[0018] Figure 2 The partial section structure schematic diagram of the driving assembly in the utility model is shown in the figure.

[0019] Figure 3 The section structure schematic diagram of the hot cavity in the utility model is shown in the figure.

[0020] Figure 4 The section structure schematic diagram of the cold cavity in the utility model is shown in the figure.

[0021] Figure 5 The utility model Figure 3 The node amplification schematic diagram of A in the utility model is shown in the figure.

[0022] In the figure: 1, connecting seat; 2, partition plate; 21, inlet groove; 3, probe body; 4, driving assembly; 41, motor; 42, fixed arm; 43, support leg; 431, ball groove; 432, ball; 44, electric cylinder; 45, sliding groove; 46, placing box; 461, sliding block; 5, temperature adjusting assembly; 51, electromagnetic heater; 52, telescopic groove; 53, water box; 54, liquid helium liquid supply pipe; 6, hot cavity; 7, temperature insulation assembly; 71, hinged seat; 72, hinged block; 73, temperature insulation plate; 8, cold cavity; 9, mounting cavity. DETAILED DESCRIPTION

[0023] In order to make the technical means, creative features, purposes and effects realized by the utility model easy to understand, the utility model is further described below in combination with specific embodiments.

[0024] As Figures 1-5 shown, a kind of for probe test cold and hot platform, including connecting seat 1 and probe body 3, two partition plates 2 are symmetrically installed in the inner cavity of connecting seat 1 away from the middle of two sides, inlet groove 21 is symmetrically opened in the middle of the opposite surface of two partition plates 2, two partition plates 2 divide the inner cavity of connecting seat 1 into hot cavity 6, cold cavity 8 and mounting cavity 9 three parts, mounting cavity 9 is located in the middle, the top end of mounting cavity 9 is open, and driving assembly 4 is arranged in the middle of the bottom end of the inner cavity of mounting cavity 9, probe body 3 is installed on the upper side of one end of the inner cavity of mounting cavity 9 in height direction, temperature adjusting assembly 5 is respectively installed in the inner cavity of hot cavity 6 and cold cavity 8, and temperature insulation assembly 7 is respectively arranged on the end face of two partition plates 2 away from each other;

[0025] In actual use process, the present scheme places test material in mounting cavity 9, starts driving assembly 4 to drive material to enter hot cavity 6 or cold cavity 8, respectively carries out temperature adjusting assembly 5 to test material to heat or cool operation, when material is heated or cooled, driving assembly 4 is started again to drive test material to re-enter mounting cavity 9 and test material is tested by probe body 3 alignment;

[0026] The temperature adjusting assembly 5 is used for adjusting the temperature of the hot cavity 6 and the cold cavity 8.

[0027] Specifically, the temperature adjusting assembly 5 comprises an electromagnetic heater 51 and an expansion slot 52, the electromagnetic heater 51 is installed at the top of the inner cavity of the hot cavity 6, and the output end of the electromagnetic heater 51 is aligned with the inlet slot 21 in the hot cavity 6.

[0028] The expansion slot 52 is provided at the lower right end of the inner cavity of the cold cavity 8, a water box 53 is inserted into the inner cavity of the expansion slot 52, and a liquid helium supply pipe 54 is installed at the side of the top of the inner cavity of the cold cavity 8 away from the center.

[0029] The electromagnetic heater 51 in the scheme belongs to the prior art, and its model is DW-1.2KW. Its working principle is to work according to the principle of electromagnetic induction. The alternating current passes through the copper coil to generate an alternating magnetic field of the same frequency. The magnetic field penetrates the metal to be heated, so that the internal induction electromotive force is generated by electromagnetic induction, and then a closed eddy current is formed. According to Joule's law, the eddy current generates heat due to the resistance of the metal to realize heating.

[0030] A certain amount of water is filled in the inner cavity of the water box 53, the water box 53 is inserted into the cold cavity 8 through the expansion slot 52, liquid nitrogen is poured into the water box 53 through the liquid helium supply pipe 54, and the low-temperature steam environment is created in the cold cavity 8 by controlling the amount of liquid nitrogen to accurately control the temperature by using the large specific heat capacity of water.

[0031] Further, the temperature insulation assembly 7 comprises four hinge seats 71, the four hinge seats 71 are symmetrically arranged on the end faces of the two partition plates 2 away from each other, and the two hinge seats 71 on the same side are located on the upper part of the inlet slot 21 on the same side.

[0032] Two hinge blocks 72 are rotatably connected between the two hinge seats 71 on the same side, and the bottom ends of the two hinge blocks 72 are fixedly connected with two temperature insulation plates 73.

[0033] The temperature insulation plate 73 is fixedly installed at the bottom end of the hinge block 72, and the hinge block 72 is rotatably installed between the two hinge seats 71. Thus, the hinge block 72 is rotated downward by the self-weight of the temperature insulation plate 73, so that the temperature insulation plate 73 always seals the inlet slot 21 without external force, thereby preventing the temperature in the inner cavities of the hot cavity 6 or the cold cavity 8 from overflowing outward through the inlet slot 21.

[0034] The temperature insulation plate 73 in the scheme is made of polystyrene foam plastic EPS, which is formed by heating and pre-expanding the expandable polystyrene beads in the mold. It is light in weight, good in temperature insulation performance, and relatively low in price.

[0035] Specific, drive assembly 4 includes motor 41 and placed box 46, motor 41 is fixedly installed in the installation cavity 9 inner cavity bottom end middle part, the output shaft of motor 41 is fixedly installed with fixed arm 42, the bottom end of fixed arm 42 is symmetrically installed with two supporting legs 43 away from the two sides of the middle part, the bottom end of two supporting legs 43 is respectively provided with two ball grooves 431, the inner cavity surface of two ball grooves 431 is respectively rotatably installed with two ball bearings 432, two ball bearings 432 are respectively in rolling contact with the inner cavity bottom end of installation cavity 9;

[0036] The top end right side of fixed arm 42 is fixedly installed with electric cylinder 44, the top end left side of fixed arm 42 is placed with box 46, the output shaft of electric cylinder 44 is fixedly connected with box 46, the left side of fixed arm 42 along the width direction of its two ends is respectively symmetrically provided with two sliding grooves 45, the inner cavity surface of two sliding grooves 45 is respectively slidably connected with two sliding blocks 461, the opposite surface of two sliding blocks 461 is commonly fixedly connected with box 46;

[0037] Start motor 41 to drive fixed arm 42 to rotate, when fixed arm 42 rotates, it drives the top end of its placed box 46 to rotate together;

[0038] In use, the test material is placed into the placed box 46, the motor 41 is started, the motor 41 drives the placed box 46 to rotate left ninety degrees, so that the placed box 46 is away from the probe body 3 and is aligned with the leftmost inlet slot 21, the electric cylinder 44 is started, the output shaft of the electric cylinder 44 passes through the placed box 46, the placed box 46 moves along the horizontal direction of the two sliding grooves 45 through the two sliding blocks 461, so that the placed box 46 enters the hot cavity 6 through the leftmost inlet slot 21, and is heated by the electromagnetic heater 51, when the test material in the inner cavity of the placed box 46 is heated, the placed box 46 is pulled into the installation cavity 9 through the leftmost inlet slot 21 by the electric cylinder 44, the motor 41 is started, the output shaft of the motor 41 rotates right ninety degrees, so that the placed box 46 is aligned with the probe body 3 again, so that the input end of the probe body 3 is in contact with the test material in the placed box 46, thereby the test operation is carried out;

[0039] Start motor 41, motor 41 drives placed box 46 to rotate ninety degrees, start electric cylinder 44, electric cylinder 44 pushes placed box 46 to the right to make test material enter into the inner cavity of cold cavity 8 to carry out cooling treatment, when the material in placed box 46 is cooled, placed box 46 is pulled into installation cavity 9 through the rightmost inlet slot 21 by electric cylinder 44, motor 41 is started, the output shaft of motor 41 rotates left ninety degrees, so that placed box 46 is aligned with probe body 3 again, so that the input end of probe body 3 is in contact with the test material in placed box 46, test operation is carried out.

[0040] It needs to be specially pointed out that the specific installation mode of the motor 41, the electric cylinder 44 and the liquid helium liquid supply pipe 54 and the connection mode and control method of the circuit all belong to the conventional design, and the utility model will not be described in detail.

[0041] The basic principle and main features of the utility model and the advantages of the utility model are shown and described above. Those skilled in the art should understand that the utility model is not limited to the above-mentioned embodiments, and the above-mentioned embodiments and descriptions in the specification are only to illustrate the principle of the utility model, and various changes and improvements can be made to the utility model without departing from the spirit and scope of the utility model, and these changes and improvements all fall within the scope of the utility model claimed. The scope of protection of the utility model is defined by the appended claims and their equivalents.

Claims

1. A probe test cold and hot platform comprising a connecting seat (1) and a probe body (3), characterized in that: The two split plates (2) are symmetrically arranged on both sides of the inner cavity of the connecting seat (1) away from the middle part, the middle part of the opposite surface of the two split plates (2) is symmetrically provided with an inlet groove (21), the two split plates (2) divide the inner cavity of the connecting seat (1) into a hot cavity (6), a cold cavity (8) and a mounting cavity (9), the mounting cavity (9) is located in the middle part, the top end of the mounting cavity (9) is in an open shape, a driving assembly (4) is arranged in the middle part of the bottom end of the inner cavity of the mounting cavity (9), the probe body (3) is arranged on the upper side of one end of the inner cavity of the mounting cavity (9) in the height direction, a temperature adjusting assembly (5) is arranged in the inner cavity of the hot cavity (6) and the cold cavity (8) respectively, and a temperature insulation assembly (7) is arranged on the end surface of the two split plates (2) away from each other.

2. The probe test hot and cold chuck of claim 1, wherein: The temperature adjusting assembly (5) comprises an electromagnetic heater (51) and an expansion slot (52), the electromagnetic heater (51) is arranged through the top end of the inner cavity of the hot cavity (6), and the output end of the electromagnetic heater (51) is aligned with the inlet groove (21) in the hot cavity (6).

3. The probe test hot and cold chuck of claim 2, wherein: The expansion slot (52) is arranged through the lower side of the right end of the inner cavity of the cold cavity (8), the water box (53) is arranged in the inner cavity surface of the expansion slot (52), and the liquid helium supply pipe (54) is arranged through the top end of the inner cavity of the cold cavity (8) away from the axis.

4. The probe test hot and cold chuck of claim 2, wherein: The temperature insulation assembly (7) comprises four hinged seats (71), the four hinged seats (71) are symmetrically arranged on the end surfaces of the two split plates (2) away from each other respectively, and the two hinged seats (71) located on the same side are arranged on the upper part of the inlet groove (21) on the same side.

5. The probe test hot and cold chuck of claim 4, wherein: Two hinged blocks (72) are rotatably connected between the two hinged seats (71) on the same side respectively, and two temperature insulation plates (73) are fixedly connected to the bottom ends of the two hinged blocks (72) respectively.

6. The probe test chuck of claim 1, wherein: The driving assembly (4) comprises a motor (41) and a placing box (46), the motor (41) is fixedly arranged in the middle part of the bottom end of the inner cavity of the mounting cavity (9), a fixed arm (42) is fixedly arranged on the output shaft of the motor (41), two supporting legs (43) are symmetrically arranged on the bottom end of the fixed arm (42) away from the middle part, two ball grooves (431) are arranged on the bottom ends of the two supporting legs (43) respectively, two balls (432) are rotatably arranged in the inner cavity surfaces of the two ball grooves (431) respectively, and the two balls (432) are in rolling contact with the bottom end of the inner cavity of the mounting cavity (9).

7. The probe test hot and cold chuck of claim 6, wherein: An electric cylinder (44) is fixedly arranged on the top right side of the fixed arm (42), the placing box (46) is arranged on the top left side of the fixed arm (42), the output shaft of the electric cylinder (44) is fixedly connected with the placing box (46), two sliding grooves (45) are symmetrically arranged on the left sides of the two ends of the fixed arm (42) in the width direction respectively, two sliding blocks (461) are slidingly connected to the inner cavity surfaces of the two sliding grooves (45) respectively, and the two sliding blocks (461) are fixedly connected with the placing box (46) on the opposite surface.

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