Automatic photoresist nozzle cleaning device

Abstract

The utility model discloses an automatic cleaning photoresist nozzle device, which is applied to the field of cleaning devices and comprises a cleaning bin and a timer, the bottom of the cleaning bin is communicated with a blow-off pipe, a photoresist nozzle is arranged in the cleaning bin, and the inner wall of the cleaning bin is communicated with eight cleaning nozzles; the liquid storage bin is arranged to be used for storing liquid medicine used for cleaning. The pump, the liquid pumping pipe, the liquid conveying pipe and the control valve are arranged to input liquid medicine to the eight cleaning sprayers, the cleaning sprayers spray the liquid medicine to the photoresist nozzles to clean the photoresist nozzles, the timer is arranged to start and stop the pump and the control valve in a timed mode, and therefore cleaning of the photoresist nozzles can be automatically completed in a timed mode. Manual wiping is not needed, and the problems that manpower is wasted, personnel are increased, manual wiping is forgotten, and dust-free cloth is left can be directly avoided; and the stirring motor is arranged in the liquid storage bin to drive the stirring shaft to rotate, so that the precipitation phenomenon of the cleaning liquid medicine can be avoided.

Description

Technical Field

[0001] This utility model relates to the field of cleaning devices, and in particular to an automatic cleaning device for photoresist nozzles. Background Technology

[0002] Wafer coating machines typically use nozzles to apply photoresist, which is then spread evenly onto the product using high-speed centrifugal force. However, when the machine idles for extended periods, the photoresist at the nozzles can dry and harden, leading to uneven coating during operation. Currently, the nozzles are manually wiped with a lint-free cloth before operation.

[0003] Defects and shortcomings:

[0004] 1. Wiping before work wastes manpower and increases the number of personnel required;

[0005] 2. Staff members forgot to wipe the product, leading to product malfunctions;

[0006] 3. There is a risk that the cleanroom cloth may be left inside the machine when personnel use it for wiping. When the machine is rotating at high speed, the roll of cleanroom cloth may cause the product to break.

[0007] To address the aforementioned problems, we propose an automatic cleaning device for photoresist nozzles. Utility Model Content

[0008] The purpose of this invention is to provide an automatic cleaning device for photoresist nozzles, which has the advantage of being able to automatically clean the photoresist nozzles.

[0009] The above-mentioned technical objective of this utility model is achieved through the following technical solution: an automatic cleaning light-resist nozzle device, comprising a cleaning chamber and a timer, wherein a drain pipe is connected to the bottom of the cleaning chamber, a light-resist nozzle is provided inside the cleaning chamber, eight cleaning nozzles are connected to the inner wall of the cleaning chamber, an infusion pipe is connected to the outer wall of the cleaning chamber, a pump is connected to the bottom end of the infusion pipe, a suction pipe is connected to the other end of the pump, a storage chamber is connected to the storage chamber, a stirring shaft is provided inside the storage chamber, a stirring motor is installed on the top of the storage chamber, and the output end of the stirring motor is fixedly installed to the stirring shaft through a coupling;

[0010] The timer is connected to the pump via wires.

[0011] By adopting the above technical solution, a storage tank is set up to store the cleaning solution; a pump, a suction pipe, a delivery pipe, and a control valve are set up to input the solution to eight cleaning nozzles. The cleaning nozzles spray the solution onto the photoresist nozzles to clean them. By setting a timer to start and stop the pump and control valve at regular intervals, the cleaning of the photoresist nozzles can be completed automatically and on a timed basis, thus eliminating the need for manual wiping and directly avoiding the problems of wasted manpower, increased personnel, missed wiping, and lint left behind. By setting a stirring motor inside the storage tank to drive the stirring shaft to rotate, the sedimentation of the cleaning solution can be prevented.

[0012] The present invention is further configured such that: a control valve is installed inside the infusion tube, and the timer is also electrically connected to the control valve via a wire.

[0013] By adopting the above technical solution, the control valve can be set in conjunction with a timer to start and stop the infusion at set times. The start and stop times of the control valve are the same as the start time of the pump. When the control valve is started, the medicine can flow inside the infusion tube, and when the control valve is closed, the medicine cannot flow inside the infusion tube.

[0014] The present invention is further configured such that the eight cleaning nozzles are evenly distributed in a circular pattern on the inner wall of the cleaning chamber.

[0015] Using the above technical solution, eight cleaning nozzles are evenly installed in a circular pattern inside the cleaning chamber. The spray center of the cleaning solution from the eight cleaning nozzles is the photoresist nozzle. The use of eight cleaning nozzles ensures that the photoresist nozzle can receive uniform spray of the cleaning solution.

[0016] The present invention is further configured such that the top of the liquid storage tank is connected to an injection port.

[0017] By adopting the above technical solution, the injection port facilitates the filling of cleaning solution into the storage tank.

[0018] The present invention is further configured such that: the control valve is specifically a solenoid valve, and the control valve is installed on the outside of the cleaning chamber.

[0019] With the above technical solution, the control valve is installed on the outside of the cleaning chamber, which makes it convenient for personnel to maintain the control valve.

[0020] The present invention is further configured such that: the end of the pump connected to the infusion pipe is the outlet end, and the end of the pump connected to the extraction pipe is the extraction end.

[0021] Using the above technical solution, one end of the pump and the liquid extraction pipe is used to extract cleaning solution into the storage tank; the other end of the pump and the liquid delivery pipe is used to discharge the extracted solution into the cleaning tank and spray it out to the photoresist nozzle through eight cleaning nozzles to clean the photoresist nozzle.

[0022] In summary, this utility model has the following beneficial effects:

[0023] This invention features a storage tank for storing cleaning solution; a pump, extraction pipe, delivery pipe, and control valve for supplying the solution to eight cleaning nozzles; and the cleaning nozzles spray the solution onto the photoresist nozzles for cleaning. A timer automatically starts and stops the pump and control valve, eliminating the need for manual wiping and avoiding issues such as wasted manpower, missing personnel, and leftover lint. Furthermore, an internal stirring motor within the storage tank drives the stirring shaft, preventing sedimentation of the cleaning solution. Attached Figure Description

[0024] Figure 1 This is a three-dimensional structural view of the present invention;

[0025] Figure 2 This is a cross-sectional view of the cleaning chamber of this utility model;

[0026] Figure 3 This is a top sectional view of the cleaning chamber of this utility model.

[0027] Attached reference numerals: 1. Cleaning chamber; 2. Drain pipe; 3. Light-resistant nozzle; 4. Cleaning nozzle; 5. Infusion pipe; 6. Pump; 7. Suction pipe; 8. Storage chamber; 9. Stirring shaft; 10. Stirring motor; 11. Timer; 12. Control valve; 13. Injection port. Detailed Implementation

[0028] The present invention will be further described in detail below with reference to the accompanying drawings.

[0029] Example 1:

[0030] refer to Figure 1 , Figure 2 and Figure 3An automatic cleaning device for photoresist nozzles includes a cleaning chamber 1 and a timer 11. A drain pipe 2 is connected to the bottom of the cleaning chamber 1. Photoresist nozzles 3 are installed inside the cleaning chamber 1. Eight cleaning nozzles 4 are connected to the inner wall of the cleaning chamber 1. A liquid inlet pipe 5 is connected to the outer wall of the cleaning chamber 1. A pump 6 is connected to the bottom end of the liquid inlet pipe 5. A suction pipe 7 is connected to the other end of the pump 6. One end of the suction pipe 7 is connected to a storage tank 8. A stirring shaft 9 is installed inside the storage tank 8. A stirring motor 10 is installed on the top of the storage tank 8. The output end of the stirring motor 10 is fixedly installed to the stirring shaft 9 via a coupling. The timer 11 is electrically connected to the pump 6 via a wire. The device utilizes the storage tank... 8 is used to store the cleaning solution; a pump 6, a suction pipe 7, an infusion pipe 5, and a control valve 12 are used to input the cleaning solution to eight cleaning nozzles 4. The cleaning nozzles 4 spray the solution onto the photoresist nozzles 3 to clean them. By setting a timer 11 to start and stop the pump 6 and the control valve 12 at set times, the cleaning of the photoresist nozzles 3 can be completed automatically and at set times, thus eliminating the need for manual wiping and directly avoiding the problems of wasting manpower, increasing the number of personnel, forgetting to wipe, and leaving lint-free cloths. By setting a stirring motor 10 inside the storage tank 8 to drive the stirring shaft 9 to rotate, the sedimentation of the cleaning solution can be avoided.

[0031] Furthermore, a control valve 12 is installed inside the infusion tube 5. The timer 11 is also electrically connected to the control valve 12 via a wire. By setting the control valve 12, it can be used in conjunction with the timer 11 to start and stop at specific times. The start and stop times of the control valve 12 are the same as the start time of the pump 6. When the control valve 12 is started, the medicine inside the infusion tube 5 can flow. When the control valve 12 is closed, the medicine inside the infusion tube 5 cannot flow.

[0032] Furthermore, eight cleaning nozzles 4 are evenly distributed in a circular pattern on the inner wall of the cleaning chamber 1. The eight cleaning nozzles 4 are evenly installed in a circular pattern inside the cleaning chamber 1. The spray center of the medicine from the eight cleaning nozzles 4 is the light-blocking nozzle 3. The use of the eight cleaning nozzles 4 ensures that the light-blocking nozzle 3 can receive uniform medicine spray.

[0033] Furthermore, the top of the liquid storage tank 8 is connected to an injection port 13, which facilitates the filling of cleaning solution into the liquid storage tank 8.

[0034] Furthermore, the control valve 12 is specifically a solenoid valve. The control valve 12 is installed on the outside of the cleaning chamber 1, which facilitates personnel to maintain the control valve 12.

[0035] Furthermore, the end of pump 6 connected to infusion pipe 5 is the outlet end, and the end of pump 6 connected to suction pipe 7 is the suction end. The end of pump 6 connected to suction pipe 7 is used to draw cleaning solution into the interior of storage tank 8; the end of pump 6 connected to infusion pipe 5 is used to discharge the drawn solution into the interior of cleaning tank 1, and spray it out through eight cleaning nozzles 4 to the photoresist nozzles 3 to clean the photoresist nozzles 3 with the solution.

[0036] Brief description of usage:

[0037] In use, the opening and closing times of pump 6 and control valve 12 are timed by timer 11.

[0038] When the timer 11 reaches its set time, the timer 11 controls the pump 6 and the control valve 12 to start.

[0039] Pump 6 draws the medicine from the storage tank 8 through the extraction pipe 7. Pump 6 then injects the extracted medicine into the cleaning tank 1 through the control valve 12. After the cleaning tank 1 is filled with medicine, the eight cleaning nozzles 4 spray the medicine onto the photoresist nozzles 3 to clean them under the continuous delivery of medicine by pump 6.

[0040] It should be noted that timer 11 uses programming and circuit connection to set the timing for starting and stopping pump 6 and control valve 12. This is the current technology, and its working principle will not be elaborated here.

[0041] To prevent sedimentation of the medicine inside the storage tank 8, the stirring motor 10 can be started to drive the stirring shaft 9 to rotate, and the stirring shaft 9 can stir the medicine stored inside the storage tank 8, so that the medicine will not settle.

[0042] This specific embodiment is merely an explanation of the present utility model and is not intended to limit the present utility model. After reading this specification, those skilled in the art can make modifications to this embodiment without contributing any inventive step, but as long as they are within the scope of the claims of the present utility model, they are protected by patent law.

Claims

1. An automatic cleaning photoresist nozzle device comprising a cleaning chamber (1) and a timer (11), characterized in that: The bottom of the cleaning bin (1) is communicated with a sewage pipe (2), the inside of the cleaning bin (1) is equipped with a light blocking nozzle (3), the inner wall of the cleaning bin (1) is communicated with eight cleaning spray heads (4), the outer wall of the cleaning bin (1) is communicated with a liquid delivery pipe (5), the bottom end of the liquid delivery pipe (5) is communicated with a pump (6), the other end of the pump (6) is communicated with a liquid suction pipe (7), one end of the liquid suction pipe (7) is communicated with a liquid storage bin (8), the inside of the liquid storage bin (8) is equipped with a stirring shaft (9), the top of the liquid storage bin (8) is mounted with a stirring motor (10), the output end of the stirring motor (10) is fixedly installed through a shaft coupling and the stirring shaft (9). The timer (11) is electrically connected with the pump (6) through wires.

2. The automatic cleaning photoresist nozzle apparatus of claim 1, wherein: The inside of the liquid delivery pipe (5) is mounted with a control valve (12), and the timer (11) is also electrically connected with the control valve (12) through wires.

3. The automatic cleaning photoresist nozzle apparatus of claim 1, wherein: The eight cleaning spray heads (4) are uniformly distributed in a circular ring shape on the inner wall of the cleaning bin (1).

4. The automatic cleaning photoresist nozzle apparatus of claim 1, wherein: The top of the liquid storage bin (8) is communicated with a liquid injection port (13).

5. The apparatus of claim 2, wherein: The control valve (12) is a solenoid valve, and the control valve (12) is mounted on the outer side of the cleaning bin (1).

6. The automatic cleaning photoresist nozzle apparatus of claim 1, wherein: The end, at which the pump (6) and the liquid delivery pipe (5) are communicated, is a liquid outlet end, and the end, at which the pump (6) and the liquid suction pipe (7) are communicated, is a liquid suction end.

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