Magnetron sputtering coating tool

Abstract

The utility model relates to the technical field of production tools, in particular to a magnetron sputtering coating tool which comprises a silica gel grating, a plurality of placing grooves are formed in the silica gel grating, a positioning plate is connected to the lower surface of the silica gel grating in a sliding mode, a vertical plate is connected to the lower surface of the positioning plate in a sliding mode, and a supporting plate is fixedly connected to the side, away from the positioning plate, of the vertical plate. When the coating device is used, a workpiece to be coated is placed in the placing groove, the motor I is started, the double-spiral threaded rod is driven to rotate by a certain amplitude, the two sliding blocks are driven to slide back to back by a certain distance, the two long strips are driven to move back to back by a certain distance, the two groups of connecting strips are driven to move back to back by a certain distance, and the silica gel grating is driven to be transversely stretched by a certain amplitude; due to the fact that the silica gel grating is soft, the workpiece to be coated is clamped when the silica gel grating deforms, the coating tool conducts coating on the workpiece, the workpiece to be coated does not have dead corners which cannot be coated, and therefore the effect that the coating area is more comprehensive is achieved.

Description

Technical Field

[0001] This utility model relates to the field of production tooling technology, specifically a magnetron sputtering coating tooling. Background Technology

[0002] Magnetron sputtering coating fixture is a special equipment or device combination used in magnetron sputtering coating process. It is mainly a tool system for supporting, fixing, positioning and assisting the coating operation of the workpiece during magnetron sputtering. Its purpose is to ensure that the workpiece can receive the deposition of sputtered particles in the appropriate position and state, so as to complete the coating process efficiently and with high quality.

[0003] A search revealed a magnetron sputtering coating fixture disclosed in Chinese utility model patent publication number CN219174605U, belonging to the field of production tooling technology. It includes a base plate and multiple placement racks. The base plate is fixedly connected to a rotating shaft. The multiple placement racks are arranged end-to-end around the circumference of the base plate, and each placement rack is rotatably connected to the base plate. Each placement rack has a hopper with an opening at the top for placing products. Each placement rack has an inner sputtering window connected to the hopper on its inner side and an outer sputtering window connected to the hopper on its outer side. The advantage is that after coating one side, the placement rack can be rotated and flipped to perform sputtering coating on the other side of the product.

[0004] However, the device lacks the function of completely coating the surface of the workpiece to be coated. When the workpiece to be coated is placed inside the hopper, it gets stuck in the groove, with part of it hidden inside the groove, making it impossible to coat and resulting in imperfect workpiece processing. Utility Model Content

[0005] The purpose of this invention is to provide a magnetron sputtering coating fixture to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] A magnetron sputtering coating fixture includes a silicone grid plate with several placement slots. A positioning plate is slidably connected to the lower surface of the silicone grid plate, and a vertical plate is slidably connected to the lower surface of the positioning plate. A support plate is fixedly connected to the side of the vertical plate away from the positioning plate. Several connecting strips are fixedly connected to the outer surface of the silicone grid plate. A long strip is fixedly connected to the bottom end of each connecting strip. A slider is fixedly connected to one end of each long strip. A double-threaded rod is slidably connected inside the slider. A motor output shaft is fixedly connected to one end of each double-threaded rod.

[0008] Preferably, a support plate is fixedly connected to the lower surface of the motor, and a rotating shaft is fixedly connected to the side of the support plate away from the silicone grid plate. The output shaft of the second motor is fixedly connected to the end of the two rotating shafts that is closer to the first motor.

[0009] Preferably, a support column is fixedly connected to the lower surface of the second motor, and a support frame is rotatably connected to the outer surface of the rotating shaft.

[0010] Preferably, the inner wall of the placement groove is fixedly connected with several soft pads, and the upper surface of the positioning plate is fixedly connected with several protrusions.

[0011] Preferably, the pads 15 are distributed at the inner corners of the placement groove 2.

[0012] Preferably, the bottom of the positioning plate 3 is provided with a sliding groove 17, and the vertical plate is slidably connected to the inner wall of the sliding groove 17.

[0013] Preferably, each of the connecting strips 6 is located at the middle of the adjacent side of the placement slot 2.

[0014] Preferably, the axis of symmetry of each row of placement slots 2 along the extension direction of the double-threaded rod 9 coincides with the connecting line of the two connecting strips 6 opposite to it.

[0015] Compared with the prior art, the beneficial effects of this utility model are:

[0016] This magnetron sputtering coating fixture, with its silicone grid, allows for efficient use. The workpiece to be coated is placed inside the placement slot, and the motor is started, driving the double-threaded rod to rotate a certain distance. This causes two sliders to slide backwards a certain distance, two long strips to move backwards a certain distance, and two sets of connecting strips to move backwards a certain distance. This causes the silicone grid to be stretched laterally by a certain degree. Because the silicone grid is relatively soft, its deformation simultaneously clamps the workpiece to be coated, allowing the coating tool to coat the workpiece. This ensures that no uncoated areas remain on the workpiece, resulting in a more comprehensive coating area.

[0017] This magnetron sputtering coating fixture, through the setting of motor two and positioning plate, when in use, motor two is started to drive the rotating shaft to rotate, which causes the support plate to flip, and causes the silicone grid plate and the workpiece to be coated placed inside it to flip until the silicone grid plate flips 180 degrees and stops flipping. The positioning plate is then removed. At this time, the side of the workpiece to be coated that has not been processed faces the processing tool, waiting for coating. At the same time, most of the workpieces to be coated are flipped, avoiding the time wasted by flipping each one, thereby improving the processing efficiency to a certain extent. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall design of this utility model.

[0019] Figure 2 This is a cross-sectional view of the present invention.

[0020] Figure 3 This is a schematic diagram showing the disassembled silicone grid plate and positioning plate of this utility model.

[0021] Figure 4 This is a schematic diagram illustrating the installation of the silicone grid and soft pad of this utility model.

[0022] In the diagram: 1. Silicone grid plate; 2. Placement groove; 3. Positioning plate; 4. Vertical plate; 5. Support plate; 6. Connecting strip; 7. Long strip; 8. Slider; 9. Double-threaded rod; 10. Motor 1; 11. Rotating shaft; 12. Motor 2; 13. Support column; 14. Support frame; 15. Soft pad; 16. Protrusion; 17. Slide groove. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] Please see Figures 1-4 As shown, this utility model provides a technical solution:

[0025] A magnetron sputtering coating fixture includes a silicone grid plate 1 with several placement slots 2. A positioning plate 3 is slidably connected to the lower surface of the silicone grid plate 1, and a vertical plate 4 is slidably connected to the lower surface of the positioning plate 3. A support plate 5 is fixedly connected to the end of the vertical plate 4 away from the positioning plate 3. Several connecting strips 6 are fixedly connected to the outer surface of the silicone grid plate 1. A long strip 7 is fixedly connected to the bottom end of the connecting strips 6. At least one end of the long strip 7 is fixedly connected to a slider 8. A double-threaded rod 9 is slidably connected inside the slider 8. One end of the double-threaded rod 9 is fixedly connected to the output shaft of a motor 10. In use, the workpiece to be coated is placed inside the placement slot 2, and the motor is started. 10. Drive the double-threaded rod 9 to rotate a certain amplitude, causing the two sliders 8 to slide a certain distance in opposite directions, causing the two long strips 7 to move a certain distance in opposite directions, causing the two sets of connecting strips 6 to move a certain distance in opposite directions, causing the silicone grid plate 1 to be stretched laterally by a certain amplitude. Since the silicone grid plate 1 is relatively soft, it clamps the workpiece to be coated while deforming. The coating tool coats the workpiece. Traditional coating fixtures basically place the workpiece to be coated in the slot for fixation. This method has processing dead corners, affecting the processing effect and causing the product quality to be unqualified. This device does not have dead corners on the workpiece to be coated that cannot be coated, thereby achieving a more comprehensive coating area.

[0026] In this embodiment, preferably, a support plate 5 is fixedly connected to the lower surface of motor 10. A rotating shaft 11 is fixedly connected to the side of the support plate 5 away from the silicone grid plate 1. The output shaft of motor 2 12 is fixedly connected to the end of the two rotating shafts 11 that is closer to motor 10 and away from the support plate 5. In use, motor 2 12 is started to drive the rotating shaft 11 to rotate, which causes the support plate 5 to flip, and causes the silicone grid plate 1 and the workpiece to be coated placed inside it to flip until the silicone grid plate 1 flips 180 degrees and stops flipping. The positioning plate 3 is then removed. At this time, the side of the workpiece to be coated that has not been processed faces the processing tool and is waiting for coating. Traditional coating flipping is mostly done manually one by one, which is time-consuming and labor-intensive. This device flips most of the workpieces to be coated at the same time, avoiding the time wasted by flipping one by one, thereby improving the processing efficiency to a certain extent.

[0027] In this embodiment, preferably, a support column 13 is fixedly connected to the lower surface of the motor 12, and a support frame 14 is rotatably connected to the outer surface of the rotating shaft 11. In use, the support frame 14 supports the entire device, ensuring the stable operation of the entire device.

[0028] In this embodiment, preferably, a plurality of soft pads 15 are fixedly connected to the inner wall of the placement groove 2, and a plurality of protrusions 16 are fixedly connected to the upper surface of the positioning plate 3. The protrusions 16 are used to close the opening of the placement groove near the positioning plate 3. In use, the workpiece to be coated is placed inside the placement groove 2, which is slightly larger than the diameter of the workpiece to be coated. After the motor 10 is started, the silicone grid plate 1 is stretched laterally to a certain extent, and the soft pads 15 are in close contact with the workpiece to be coated, clamping the workpiece to be coated and providing a basis for the overall flipping of the device.

[0029] In this embodiment, preferably, the soft pads 15 are distributed at the inner corners of the placement groove 2. When in use, the workpiece to be coated is placed inside the placement groove 2. The placement groove 2 is slightly larger than the diameter of the workpiece to be coated. After the motor 10 is started, the silicone grid plate 1 is stretched laterally to a certain extent, and the soft pads 15 come into close contact with the workpiece to be coated, clamping the workpiece. This clamping method only clamps through side contact, does not obstruct the surface of the workpiece to be coated, and does not create processing dead corners.

[0030] In this embodiment, preferably, the bottom of the positioning plate 3 is provided with a sliding groove 17, and the inner wall of the sliding groove 17 is slidably connected to a vertical plate 4. When in use, the motor 12 is started to drive the rotating shaft 11 to rotate, which drives the support plate 5 to flip, and drives the silicone grid plate 1 and the workpiece to be coated placed inside it to flip until the silicone grid plate 1 flips 180 degrees and stops flipping. The positioning plate 3 is then removed. At this time, the side of the workpiece to be coated that has not been processed faces the processing tool, waiting for coating. The protrusion 16 on the positioning plate 3 can support the workpiece to be coated when it is placed in the placement groove 2. After the device is flipped, the positioning plate 3 can be removed to process the other side of the workpiece to be coated.

[0031] In this embodiment, preferably, each connecting strip 6 is located at the middle of the adjacent side of the adjacent placement groove 2. When in use, the motor 10 is started, driving the double-threaded rod 9 to rotate a certain amplitude, causing the two sliders 8 to slide a certain distance in opposite directions, causing the two long strips 7 to move a certain distance in opposite directions, causing the two sets of connecting strips 6 to move a certain distance in opposite directions, causing the silicone grid 1 to be stretched laterally by a certain amplitude. Since the silicone grid 1 is made of relatively soft material, it clamps the workpiece to be coated while deforming. Due to the position setting of the connecting strip 6, it is ensured that the force applied during the pulling process is on the longer centerline of the placement groove 2, thereby ensuring that the silicone grid 1 clamps the workpiece to be coated after deformation.

[0032] In this embodiment, preferably, the axis of symmetry of each row of placement slots 2 along the extension direction of the double-threaded rod 9 coincides with the connecting line of the two connecting strips 6 opposite to it. In use, there are multiple placement slots 2 between each group of corresponding connecting strips 6. When each group of connecting strips 6 moves in opposite directions, it can tighten a whole row of placement slots of silicone partition 1 and clamp a whole row of workpieces to be coated, resulting in high working efficiency.

[0033] Working principle: In this embodiment, when using a magnetron sputtering coating fixture, the workpiece to be coated is placed inside the placement groove 2. The motor 10 is started, driving the double-threaded rod 9 to rotate a certain amplitude, causing the two sliders 8 to slide a certain distance in opposite directions, causing the two long strips 7 to move a certain distance in opposite directions, and causing the two sets of connecting strips 6 to move a certain distance in opposite directions, causing the silicone grid plate 1 to be stretched laterally by a certain amplitude. Since the silicone grid plate 1 is relatively soft, it clamps the workpiece to be coated while deforming, and the coating tool coats the workpiece. The motor 2 is started, driving the rotating shaft 11 to rotate, causing the support plate 5 to flip, and causing the silicone grid plate 1 and the workpiece to be coated placed inside it to flip until the silicone grid plate 1 flips 180 degrees and stops flipping. The positioning plate 3 is then removed, and at this time, the unprocessed side of the workpiece to be coated faces the processing tool, and coating is performed.

[0034] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A magnetron sputtering coating tool, characterized in that: The utility model relates to a silica gel grid board, including silica gel grid board (1), a plurality of placement groove (2) are seted up on the silica gel grid board (1), the lower surface of silica gel grid board (1) is connected with the locating plate (3) slidingly, the lower surface of locating plate (3) is connected with the vertical board (4) slidingly, the one end of vertical board (4) away from locating plate (3) is fixedly connected with the support plate (5), a plurality of connecting strips (6) are fixedly connected on the outer surface of silica gel grid board (1), the bottom of connecting strip (6) is fixedly connected with the long strip (7), at least one end of long strip (7) both ends is fixedly connected with the sliding block (8), the double screw thread rod (9) is connected with the sliding block (8) inside slidingly, one end of double screw thread rod (9) both ends is fixedly connected with motor one (10) output shaft.

2. The magnetron sputtering coating tool according to claim 1, characterized in that: The lower surface of motor one (10) is fixedly connected with support plate (5), the side of support plate (5) away from silica gel grid board (1) is fixedly connected with rotating shaft (11), and one of two rotating shafts (11) is fixedly connected with motor two (12) output shaft on the end away from support plate (5) close to motor one (10).

3. The magnetron sputtering coating tool according to claim 2, characterized in that: The lower surface of motor two (12) is fixedly connected with support column (13), and the outer surface of rotating shaft (11) is rotatably connected with support frame (14).

4. The magnetron sputtering coating tool according to claim 1, characterized in that: The inner wall of placement groove (2) is fixedly connected with a plurality of soft pads (15), and the upper surface of locating plate (3) is fixedly connected with a plurality of protrusions (16).

5. The magnetron sputtering coating tool according to claim 4, characterized in that: The soft pad (15) is distributed in the inner corner of placement groove (2).

6. The magnetron sputtering coating tool according to claim 1, characterized in that: The bottom of locating plate (3) is provided with a sliding groove (17), and the inner wall of sliding groove (17) is slidingly connected with vertical board (4).

7. The magnetron sputtering coating tool according to claim 1, characterized in that: Each connecting strip (6) is arranged at the middle position of the adjacent side of the adjacent placement groove (2).

8. The magnetron sputtering coating tool according to claim 7, characterized in that: The symmetry axis of each row of placement grooves (2) along the extension direction of the double screw thread rod (9) coincides with the connecting line of the two adjacent connecting strips (6).

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