Protective device

Abstract

The utility model provides a protective device which is used when phosphorus or arsenic source materials are loaded and unloaded on an arsenic or phosphorus furnace body, and a water vapor sealing zipper is arranged on the protective device, so that the protective device belongs to a wearable protective device relative to the furnace body, and the protective device has wide applicability. Due to the visibility of the polyethylene or polypropylene material and the characteristics of softness, good plasticity and the like of the polyethylene or polypropylene material, the protection device can be suitable for various special-shaped structures, so that the operation difficulty of operators can be simplified, the use cost is reduced, high-purity nitrogen is introduced into the air inlet to isolate air, and the safety of the operators is improved. According to the protection device, when the solid red phosphorus or arsenic source is loaded and unloaded in the protection device, fire hazards can be eliminated, adsorption of impurity gas can be reduced, pollution to a high-purity source material is avoided, in addition, by means of the air pressure difference between the air inlet and the air outlet, the influence of suspended particles of the source material on operators is avoided, and the safety of the operators is guaranteed.

Description

Technical Field

[0001] This utility model relates to the technical field of wafer processing, and in particular to a protective device. Background Technology

[0002] Molecular beam epitaxy (MBE) technology lies in the precise control of atomic or molecular beams to deposit on a substrate surface under ultra-high vacuum conditions, forming an atomically flat epitaxial layer. It is widely used in optoelectronic devices, quantum devices, and high-performance integrated circuits. High-purity source materials are essential for achieving high-quality epitaxial growth. Typically, MBE equipment includes one to three source furnaces for Group V elements (such as arsenic (As) and phosphorus (P)). These source materials require rigorous loading, unloading, and processing before being loaded into the MBE equipment.

[0003] However, arsenic (As) and phosphorus (P) have the following properties that pose great challenges to loading, unloading and handling.

[0004] Arsenic (As) gradually oxidizes in humid air, changing its surface color from bronze to black. When arsenic is heated in air, it also produces arsenic trioxide (As₂O₃) or arsenic tetraoxide (As₄O₆). These oxides not only contaminate the source material but also affect the purity and quality of the epitaxial layer. Furthermore, arsenic and its compounds are highly toxic and can enter the human body through the respiratory tract, digestive tract, and skin, posing a serious threat to the health of operators.

[0005] Red phosphorus, another commonly used source material of Group V elements, is mainly used for the epitaxial growth of phosphides (such as InP and GaP). However, red phosphorus is highly flammable when exposed to open flames, high heat, impact, or even slight friction, and may even explode. This characteristic necessitates that the handling of red phosphorus be carried out under a strictly controlled inert atmosphere to avoid accidental combustion. Furthermore, as a giant covalent molecule with an amorphous structure, red phosphorus has a very large surface area, comparable to activated carbon, whether in bulk or compressed into ingots. This characteristic makes red phosphorus readily adsorb oxygen and moisture from the air, thus affecting the purity of the epitaxial material. In addition, red phosphorus particles easily generate dust during handling, posing a threat to the health and safety of operators.

[0006] Therefore, developing a protective device that can safely handle solid red phosphorus / arsenic source materials is a problem that needs to be solved. Utility Model Content

[0007] In view of the shortcomings of the prior art described above, the purpose of this utility model is to provide a protective device to solve the problems of how to avoid damage to operators and how to ensure the purity of epitaxial materials when loading and unloading solid red phosphorus / arsenic source materials.

[0008] To achieve the above and other related objectives, this utility model provides a protective device, the protective device comprising:

[0009] The main structure includes a top plate with two glove inlets, a bottom plate opposite to the top plate, and a side plate along the circumference of the top plate. The side plate is fixedly connected to the top plate, and the side plate also has an opening with a protrusion along the circumference of the opening. The protrusion is fixedly connected to the side plate.

[0010] A sealing assembly extending along the protrusion to the base plate;

[0011] An atmosphere control assembly includes an air inlet and an air outlet disposed opposite to each other on the side plate for atmosphere replacement within the main structure. The air outlet is disposed at the top of the side plate, and the air inlet is disposed at the bottom of the side plate.

[0012] A fixing component is provided on the circumference of the top plate and fixedly connected to the top plate to prevent the protective device from shifting during use;

[0013] Storage bag, located inside the main structure, for storing operating tools and red phosphorus or arsenic source materials.

[0014] Optionally, the height of the main structure is 80cm, and the diameter of the main structure ranges from 35 to 40cm.

[0015] Optionally, the protrusion is cylindrical in shape, and the open end of the protrusion is provided with a drawstring opening.

[0016] Optionally, the length of the protrusion is 20cm and the radius of the protrusion is 10cm.

[0017] Optionally, the sealing assembly includes a moisture-sealing zipper, and the moisture-sealing zipper is made of polyethylene.

[0018] Optionally, the fixing assembly includes a lifting ring inlet and a fixing sling. The lifting ring inlet is disposed opposite to the top plate, one end of the fixing sling is fixedly connected to the lifting ring inlet, and the other end of the fixing sling is fixed around the molecular beam epitaxy device.

[0019] Optionally, one end of the exhaust port is connected to an exhaust pipe, and a first valve is provided between the exhaust port and the exhaust pipe. One end of the air inlet is connected to an air inlet pipe, and a second valve is provided between the air inlet and the air inlet pipe. The first valve and the second valve control the air pressure difference between the air inlet and the exhaust port.

[0020] Optionally, the first valve is a ball valve, and the second valve is a ball valve.

[0021] Optionally, the main structure is made of transparent polyethylene or polypropylene, and the thickness of the main structure is greater than 0.5 mm.

[0022] As described above, the protective device of this utility model, used when loading and unloading phosphorus or arsenic source materials on arsenic or phosphorus furnaces, has the following beneficial effects: Because the protective device is equipped with a water vapor sealing zipper, it is a wearable protective device relative to the furnace body, with wide applicability. Due to the visibility of the transparent material and the softness and good plasticity of polyethylene or polypropylene, the protective device can be applied to various irregular structures, thereby simplifying the operation for operators and reducing operating costs. High-purity nitrogen is introduced through the air inlet to isolate air. Operating the loading and unloading of solid red phosphorus or arsenic sources within the protective device eliminates fire hazards and reduces the adsorption of impurity gases, thus avoiding contamination of the high-purity source materials. Furthermore, the pressure difference between the air inlet and outlet prevents suspended particles of the source material from affecting the operator, ensuring the operator's safety. Attached Figure Description

[0023] Figure 1 The diagram shown is a structural schematic of a protective device according to this utility model.

[0024] Component designation explanation

[0025] 10. Main structure; 101. Top plate; 102. Side plate; 103. Glove inlet; 104. Bottom plate; 105. Protrusion; 11. Sealing assembly; 121. Exhaust port; 122. Air inlet; 13. Fixing assembly; 131. Lifting ring inlet; 132. Fixing sling; 14. Drawstring drawstring; 15. Storage bag; 161. First valve; 162. Second valve. Detailed Implementation

[0026] The following specific embodiments illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification.

[0027] The structures, proportions, and sizes illustrated in the accompanying drawings are merely for illustrative purposes to aid those skilled in the art and to facilitate understanding. They are not intended to limit the scope of this invention and therefore have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to size, provided they do not affect the effectiveness or purpose of this invention, should still fall within the scope of the technical content disclosed herein. Similarly, terms such as "above," "on top of," "on the upper surface of," and "on the surface" used to describe the spatial relationship between one device or feature as shown in the figures and other devices or features are merely for clarity and not intended to limit the scope of this invention. Changes or adjustments to these relative relationships, without substantially altering the technical content, should also be considered within the scope of this invention.

[0028] In this utility model, unless otherwise explicitly specified, terms such as "assembly," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can also refer to a mechanical connection; they can refer to a direct connection or a connection through an intermediate medium; or they can refer to the internal connection of two components. Furthermore, the use of terms such as "first," "second," and "third" to define components is merely for the purpose of distinguishing these components. Unless otherwise stated, these terms have no special meaning and therefore should not be construed as limiting the scope of protection of this utility model.

[0029] The following is in conjunction with the appendix Figure 1 The present invention will be further described with reference to the embodiments. Figure 1 The diagram shows a structural schematic of a protective device according to the present invention. The protective device includes:

[0030] The main structure 10 includes a top plate 101 with two work glove inlets 103, a bottom plate 104 opposite to the top plate 101, and a side plate 102 along the circumference of the top plate 101. The side plate 102 is fixedly connected to the top plate 101 and has an opening. A protrusion 105 is provided along the circumference of the opening and is fixedly connected to the side plate 102.

[0031] A sealing assembly 11 extends along the protrusion 105 to the base plate 104;

[0032] An atmosphere control assembly includes an air inlet 122 and an exhaust outlet 121 disposed opposite to each other on the side plate 102 for atmosphere replacement within the main structure 10. The exhaust outlet 121 is disposed at the top of the side plate 102, and the air inlet 122 is disposed at the bottom of the side plate 102.

[0033] A fixing component 13 is disposed on the circumference of the top plate 101 and fixedly connected to the top plate 101 to prevent the protective device from shifting during use.

[0034] Storage bag 15, which is disposed inside the main structure 10, is used to store operating tools and red phosphorus or arsenic source materials.

[0035] As an example, the height of the main structure 10 is 80cm, and the diameter of the main structure 10 ranges from 35 to 40cm.

[0036] Specifically, such as Figure 1 As shown, in this embodiment, the main structure 10 is made of transparent polyethylene (PE) or polypropylene (PP) material. The thickness of the transparent polyethylene (PE) or polypropylene (PP) material is at least greater than 0.5 mm, for example, 1 mm. The main structure 10 includes a top plate 101, the diameter of which is the diameter of the top plate 101, which ranges from 35 to 40 cm. For example, the diameter of the top plate 101 is 35 cm, 38 cm, or 40 cm. A bottom plate 104 is disposed opposite to the top plate 101, and side plates 102 are disposed along the circumference of the top plate 101. The side plate 102 is fixedly connected to the top plate 101. The diameter of the top plate 101 is the same as the diameter of the bottom plate 104. The height of the main structure 10 is the same as the height of the side plate 102, which is 80cm. The top plate 101, bottom plate 104, and side plate 102 form a hollow cylindrical main structure 10. The hollow area can accommodate an arsenic or phosphorus source furnace. A storage bag 15 is also provided on the side plate 102. The storage bag 15 is located inside the main structure 10 and is used to place the necessary operating tools and red phosphorus or arsenic source materials.

[0037] Specifically, the top plate 101 is provided with two glove inlets 103, which are used to install work gloves to facilitate the loading and unloading of arsenic or phosphorus source materials.

[0038] Specifically, the side plate 102 is provided with an opening, and a protrusion 105 is provided along the circumference of the opening. The protrusion 105 is fixedly connected to the side plate 102. The protrusion 105 is cylindrical with openings at both ends. One end of the protrusion 105 is fixedly connected to the side plate 102 and communicates with the opening on the side plate 102. The other end of the protrusion 105 is provided with a drawstring opening 14. By tightening the drawstring opening 14 and combining it with the closing of the sealing assembly 11, the protective device can form a sealed space. In this embodiment, the length of the protrusion 105 is 20cm, the radius of the protrusion 105 is 10cm, and the radius of the opening on the side plate 102 can be 10cm or less, so that the protrusion 105 can be directly and sealingly connected to the side plate 102.

[0039] As an example, the sealing assembly 11 includes a moisture-sealing zipper, and the material of the moisture-sealing zipper is polyethylene (PE).

[0040] Specifically, such as Figure 1 As shown, the sealing assembly 11 includes a moisture-sealing zipper that extends along the protrusion 105, through the side plate 102, to the base plate 104. Before placing the protective device on the arsenic or phosphorus furnace body, the moisture-sealing zipper is opened. After placing the protective device on the arsenic or phosphorus furnace body, and after the protective device is placed on the As / P furnace body, the drawstring 14 is tightened to close the moisture-sealing zipper, ensuring the overall sealing of the protective device. Furthermore, the moisture-sealing zipper is made of polyethylene (PE), ensuring that the entire material of the protective device is soft and has good plasticity, allowing the protective device to be adapted to irregularly shaped structures.

[0041] As an example, the fixing assembly 13 includes a lifting ring inlet 131 and a fixing sling 132. The lifting ring inlet 131 is disposed opposite to the top plate 101. One end of the fixing sling 132 is fixedly connected to the lifting ring inlet 131, and the other end of the fixing sling 132 is fixed around the molecular beam epitaxy device.

[0042] Specifically, since manual operation is required when loading and unloading red phosphorus or arsenic source materials onto the arsenic or phosphorus furnace, the protective devices need to be secured to prevent large displacements caused by manual operation and other factors, which could affect the loading and unloading efficiency. For example... Figure 1 As shown, the fixing component 13 includes a lifting ring inlet 131 and a fixing sling 132. The lifting ring inlet 131 is disposed opposite to the top plate 101. One end of the fixing sling 132 is fixedly connected to the lifting ring inlet 131, and the other end of the fixing sling 132 is fixed around the molecular beam epitaxy equipment. The fixing sling 132 is used to fix the protective device and prevent the protective device from undergoing large displacement.

[0043] As an example, one end of the exhaust port 121 is connected to an exhaust pipe, and a first valve 161 is provided between the exhaust port 121 and the exhaust pipe. One end of the air inlet 122 is connected to an air inlet pipe, and a second valve 162 is provided between the air inlet 122 and the air inlet pipe. The first valve 161 and the second valve 162 control the air pressure difference between the air inlet 122 and the exhaust port 121.

[0044] Specifically, such as Figure 1 As shown, the air inlet 122 and the exhaust outlet 121 are arranged opposite to each other on the side plate 102 to facilitate atmosphere replacement within the main structure 10. Of course, this replacement does not necessarily mean a strict substitution; methods such as filling the air inlet 122 and evacuating the air from the exhaust outlet 121 are also within the scope of this invention. In one example, one end of the exhaust outlet 121 is connected to an exhaust pipe, and a first valve 161 is provided between the exhaust outlet 121 and the exhaust pipe. One end of the air inlet 122 is connected to an intake pipe, and a second valve 162 is provided between the air inlet 122 and the intake pipe. When using the protective device, the connections between the exhaust outlet 121 and the exhaust pipe, as well as between the air inlet 122 and the intake pipe, are sealed. For example, a clamp can be used to achieve the seal, or adhesive (such as AB glue) can be used to directly bond them together.

[0045] As an example, the first valve 161 is a ball valve, and the second valve 162 is a ball valve.

[0046] Specifically, such as Figure 1 As shown, the first valve 161 and the second valve 162 are both ball valves. High-purity nitrogen (N2) is introduced through the opening of the second valve 162, isolating the hollow interior of the protective device from air. This eliminates the fire hazard and reduces the adsorption of impurity gases. The pressure difference inside the protective device is regulated by the first and second valves 161 and 162, causing the device to expand and expel any floating matter generated by the addition of arsenic or phosphorus source materials to the exhaust port 121, which is then discharged through the exhaust pipe. The internal pressure difference is maintained for a certain period until no arsenic or phosphorus source material particles remain inside. Then, the first and second valves 161 and 162 of the air inlet 122 and exhaust port 121 are closed. After installing the red phosphorus or arsenic source material, the drawstring 14 and the moisture-sealing zipper need to be opened, the fixing sling 132 removed, and the protective device taken down and cleaned.

[0047] In summary, this utility model provides a protective device for safely loading and unloading solid red phosphorus or arsenic source materials. This device is used when loading and unloading phosphorus or arsenic source materials onto arsenic or phosphorus furnaces. The protective device is made of transparent polyethylene or polypropylene. Due to the softness and good plasticity of polyethylene or polypropylene, this protective device can be adapted to various irregular structures, thus simplifying the operation for personnel and reducing operating costs. Furthermore, the water-vapor sealing zipper makes it a wearable protective device relative to the furnace body, thus having wide applicability. High-purity nitrogen is introduced into the air inlet to isolate it from air, eliminating fire hazards and reducing the adsorption of impurity gases during the loading and unloading of solid red phosphorus or arsenic sources, thereby avoiding contamination of the high-purity source materials. In addition, the pressure difference between the air inlet and outlet can prevent the impact of suspended particles of phosphorus or arsenic source materials on operators, ensuring their safety. Therefore, this utility model effectively overcomes the various shortcomings of existing technologies and has high industrial application value.

[0048] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A protective device, characterized in that The protective device comprises: a main body structure comprising a top plate provided with two working glove access ports, a bottom plate opposite to the top plate, and a side plate provided along the circumference of the top plate, the side plate being fixedly connected to the top plate, the side plate being further provided with an opening, a protruding portion being provided along the circumference of the opening, the protruding portion being fixedly connected to the side plate; a sealing assembly extending from the protruding portion to the bottom plate; an atmosphere control assembly comprising an air inlet and an air outlet provided opposite to each other on the side plate to replace the atmosphere in the main body structure, the air outlet being provided at the top end of the side plate, and the air inlet being provided at the bottom end of the side plate; a fixing assembly provided on the circumference of the top plate and fixedly connected to the top plate to prevent displacement of the protective device during use; a storage bag provided inside the main body structure to place operating tools and red phosphorus or arsenic source materials.

2. The guard of claim 1, wherein: The height of the main body structure is 80 cm, and the diameter of the main body structure ranges from 35 cm to 40 cm.

3. The guard of claim 1, wherein: The protruding portion is in the shape of a cylinder, and the opening end of the protruding portion is provided with a rope binding port.

4. The guard of claim 3, wherein: The length of the protruding portion is 20 cm, and the radius of the protruding portion is 10 cm.

5. The guard of claim 1, wherein: The sealing assembly comprises a water vapor sealing zipper, and the material of the water vapor sealing zipper is polyethylene.

6. The guard of claim 1, wherein: The fixing assembly comprises a lifting ring access port provided opposite to each other on the top plate, and a fixed lifting cable, one end of the fixed lifting cable being fixedly connected to the lifting ring access port, and the other end of the fixed lifting cable being fixed to the periphery of a molecular beam epitaxy device.

7. The guard of claim 1, wherein: One end of the air outlet is connected to an air outlet pipeline, a first valve is provided between the air outlet and the air outlet pipeline, one end of the air inlet is connected to an air inlet pipeline, a second valve is provided between the air inlet and the air inlet pipeline, and the first valve and the second valve control the pressure difference between the air inlet and the air outlet.

8. The guard of claim 7, wherein: The first valve is a spherical valve, and the second valve is a spherical valve.

9. The guard of any one of claims 1 to 8, wherein: The material of the main body structure is transparent polyethylene or polypropylene material, and the thickness of the main body structure is greater than 0.5 mm.

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