Testing device for wafer clamping needle

Abstract

The utility model provides a testing device for wafer clamping needles. The testing device comprises a power piece, a transmission piece, a clamping table, a rotation adjusting part and a plurality of wafer clamping needles. The transmission piece is rotationally connected with the power piece. The clamping table is fixedly connected with the transmission part, and a wafer is installed on the top wall of the clamping table. The plurality of wafer clamping needles are all installed in the clamping table, the plurality of wafer clamping needles are all provided with a plurality of abutting columns exposed out of the top wall, and the plurality of abutting columns are arranged around the wafer. The rotation adjusting part is installed in the clamping table, and the rotation adjusting part is provided with a plurality of adjusting parts which are in one-to-one correspondence with the wafer clamping needles and are rotatably connected with the wafer clamping needles. The rotation adjusting part is rotated, and the adjusting part drives the wafer clamping needle to rotate, so that the abutting column abuts against the wafer to fix the wafer; the power piece drives the clamping table to rotate through the transmission piece, and drives the wafer to rotate so as to test the service life of the wafer clamping needle. Compared with the prior art, the utility model adopts the manually controlled rotation adjusting part to replace the cylinder drive, the power piece rotates, and the service life of the wafer clamping needle is tested.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a testing device for a wafer clamping pin. Background Technology

[0002] In semiconductor manufacturing processes, wafer chuck pins are core components of wafer clamping devices, and their performance directly affects wafer processing accuracy and equipment stability. With increasing market demand, manufacturers producing wafer chuck pins through OEM and outsourcing must implement strict quality control. Plastic wafer chuck pins are prone to performance degradation due to material properties (such as creep and low fatigue strength), and dimensional inspection alone is insufficient to select qualified products. Therefore, lifespan testing of wafer chuck pins is necessary to simulate clamping movements under actual working conditions, ensuring the quality of the wafer chuck pins.

[0003] Traditional wafer clamping pin testing requires original equipment (OEM) equipment in the FAB factory (such as cylinder-driven machines), which uses cylinders to push the pins to achieve clamping motion. Such equipment is complex in structure, has high maintenance costs, and cannot be directly used for independent testing by third-party suppliers.

[0004] In view of this, it is indeed necessary to propose a testing device for wafer clamping pins to solve the above problems. Utility Model Content

[0005] To achieve the above objectives, this utility model provides a simple test device for wafer clamping pins, used to test the service life of wafer clamping pins.

[0006] Therefore, the present invention provides a testing device for a wafer clamping pin, comprising:

[0007] Power components;

[0008] Transmission components are rotatably connected to power components;

[0009] The clamping stage is fixedly connected to the transmission components, and its top wall is used to mount the wafer.

[0010] Several wafer clamping pins are installed inside the clamping stage. Several wafer clamping pins are provided with several abutment posts exposed on the top wall. Several abutment posts are arranged around the wafer.

[0011] A rotating adjustment unit is installed inside the clamping stage. The rotating adjustment unit has several adjustment parts that correspond one-to-one with the wafer clamping pins and are rotatably connected to them.

[0012] The rotating adjustment unit drives the wafer clamping pin to rotate, so that the abutment post abuts against the wafer to fix the wafer; the power unit drives the clamping stage to rotate through the transmission unit, thereby rotating the wafer.

[0013] Optionally, the bottom of the rotation adjustment unit is provided with a downwardly extending rotating column, which is at least partially exposed at the bottom of the clamping table. An external force drives the rotating column to rotate the rotation adjustment unit.

[0014] Optionally, the bottom of the clamping stage is provided with a limiting groove, and the rotating column moves within the limiting groove. The length of the limiting groove is equal to the stroke of half a revolution of the wafer clamping pin.

[0015] Optionally, the top wall of the clamping stage is provided with a foolproof point. When the wafer clamping pin is installed, the abutment post is located at the end closest to the foolproof point and aligned with the foolproof point.

[0016] Optionally, the clamping platform includes a cover and a body arranged vertically. The cover has a mating groove at its center, and a bearing is installed in the mating groove. The bearing is interference-fitted with the rotation adjustment part and the transmission part, respectively.

[0017] Optionally, the rotating adjustment part is provided with at least four sets of ribs arranged along the circumference. Each rib has a first post extending downward. The bottom of the cover is provided with a second post corresponding to the first post. An elastic element is provided between the first post and the second post. The first end of the elastic element is connected to the first post, and the second end of the elastic element is connected to the second post.

[0018] Optionally, any rib may have a downwardly extending rotating post, and the bottom of the body may have a limiting groove corresponding to the rotating post, within which the rotating post moves; and / or,

[0019] The two opposing ribs are each provided with a downwardly extending rotating column, and the opposite sides of the body are provided with a limiting groove corresponding to the rotating column. The two rotating columns move within the corresponding limiting grooves.

[0020] Optionally, the cover is provided with a limiting post corresponding to one end of the limiting groove. When the rotating post moves to the end of the limiting groove near the limiting post, the rib abuts against the limiting post.

[0021] Optionally, it also includes a bracket and a cover fixed to the bracket, the cover having an installation space in which the clamping platform is installed.

[0022] Optionally, the protective cover has two viewing windows on each side, and a sliding groove is provided on the outer wall of the protective cover. A transparent sliding piece is detachably connected to the sliding groove, and the transparent sliding piece is configured to close the viewing window.

[0023] Compared with the prior art, the technical solution of the embodiments of this utility model has the following beneficial effects:

[0024] This invention comprises several wafer clamping pins installed within a clamping stage, each with exposed abutment posts on the top wall. These abutment posts surround the wafer, securely fixing it from multiple directions and ensuring the wafer remains stable during testing, preventing loosening or displacement. A rotation adjustment unit, also installed within the clamping stage, corresponds to each wafer clamping pin. Rotating this unit drives the wafer clamping pins to rotate, bringing the abutment posts into contact with the wafer for secure clamping. The operation is simple and convenient. Through the coordination of power and transmission components, the clamping stage is automatically driven to rotate, thereby rotating the wafer. Multiple sets of abutment posts provide multi-directional abutment and fixation of the wafer, simulating clamping motion under actual working conditions and enabling fatigue testing of the wafer clamping pins. By observing the changes in the state of the wafer clamping pins during testing, their lifespan and performance can be accurately assessed, facilitating control over the factory quality of the wafer clamping pins. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the structure of a test device for wafer clamping pins conforming to a preferred embodiment of the present invention;

[0026] Figure 2 yes Figure 1 Cross-sectional view of the testing device for the wafer clamping pin;

[0027] Figure 3 yes Figure 2 A close-up view of the area circled in the middle;

[0028] Figure 4 This is a schematic diagram of the structure of the cover body conforming to the preferred embodiment of the present utility model;

[0029] Figure 5 yes Figure 4 A structural diagram from another angle;

[0030] Figure 6 This is a schematic diagram of the structure of the main body conforming to the preferred embodiment of the present utility model;

[0031] Figure 7 yes Figure 3 Schematic diagram of the structure of the wafer clamping pin;

[0032] Figure 8 This is a schematic diagram of the structure of the rotation adjustment part according to a preferred embodiment of the present utility model;

[0033] Figure 9 This is a schematic diagram of the assembly of the cover and the rotation adjustment part according to a preferred embodiment of the present utility model.

[0034] The components in the attached diagram are labeled as follows:

[0035] Protective cover 1, viewing window 11, sliding groove 12, transparent slide 13;

[0036] Bracket 2, first fixing plate 21, support column 22, second fixing plate 23, support leg 24, stabilizing block 25;

[0037] Power component 3;

[0038] Transmission component 4, rod 41, flange 42;

[0039] Clamping platform 5, cover 51, top wall 511, foolproof point 5111, mounting groove 512, mating groove 513, second column 514, limiting column 515, body 52, limiting groove 521;

[0040] Wafer clamping pin 6, main body 61, abutment post 62, gear part 63;

[0041] Rotation adjustment part 7, adjustment part 71, rotation column 72, rib 73, first column 731, elastic element 74;

[0042] Bearing 8;

[0043] Test apparatus 100 for wafer clamping pins; wafer 200. Detailed Implementation

[0044] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0045] It should be noted that, in order to avoid obscuring the present invention with unnecessary details, only the structures and / or processing steps closely related to the present invention are shown in the accompanying drawings, while other details that are not closely related to the present invention are omitted.

[0046] Additionally, it should be noted that the terms “comprising,” “including,” or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0047] Please see Figures 1 to 9 As shown, an embodiment of this utility model provides a testing device 100 for wafer clamping pins, simulating reciprocating clamping motion under actual working conditions to perform fatigue testing on the wafer clamping pins 6. The testing device 100 includes a support 2, a clamping stage 5, and a protective cover 1 fixed to the support 2. The protective cover 1 has an installation space, within which the clamping stage 5 is installed. A power component 3 is fixed to the support 2, and the power component 3 drives the clamping stage 5 to rotate. The clamping stage 5 can perform fatigue testing on the wafer clamping pins 6 to test their service life.

[0048] Two viewing windows 11 are provided on each side of the protective cover 1. Operators can rotate the adjustment part 7 through the viewing windows 11 without disassembling or opening the protective cover 1, improving the convenience and efficiency of operation. A sliding groove 12 is provided on the outer wall of the protective cover 1, located below the viewing windows 11. A transparent slider 13 is slidably connected to the sliding groove 12, and the transparent slider 13 is configured to close the viewing windows 11. At the same time, the cooperation between the sliding groove 12 and the transparent slider 13 can flexibly close or open the viewing windows 11 as needed. The protective cover 1 is provided with a cover, which can cover the clamping stage 5 to prevent the wafer 200 inside the clamping stage 5 from flying out during rotation, greatly reducing the risk of safety accidents.

[0049] Please see Figures 1 to 3 As shown, the support 2 includes a first fixed plate 21, support columns 22, a second fixed plate 23, and two legs 24 arranged sequentially along the height direction. Each leg 24 is equipped with two stabilizing blocks 25. The top of each stabilizing block 25 is fixedly connected to the second fixed plate 23. The stabilizing blocks 25 serve as counterweights, effectively increasing the overall weight distribution of the support 2 and preventing instability or top-heavy conditions in the legs 24. This ensures the stability of the entire device during operation and avoids testing errors or safety accidents caused by the shaking of the support 2, providing a stable and reliable support platform for the fatigue testing of the wafer clamping pins 6. Two support columns 22 are fixed to both sides of the second fixed plate 23. The other end of each support column 22 is fixedly connected to the first fixed plate 21. The first fixed plate 21 is fixed to the bottom of the clamping platform 5. A hole is provided in the center of the first fixed plate 21 to facilitate the connection and transmission between the power component 3 and the clamping platform 5, ensuring that power can be accurately and efficiently transmitted to the clamping platform 5, achieving stable rotation of the clamping platform 5.

[0050] One end of the power component 3 is fixed to the second fixed plate 23, and the other end is fixed to the first fixed plate 21. The output shaft of the power component 3 passes through the hole in the first fixed plate 21 and extends into the clamping stage 5. This arrangement allows the power component 3 to stably transmit power to the clamping stage 5, ensuring that the clamping stage 5 maintains a stable speed and torque during rotation. In this embodiment, the power component 3 is a motor. The output shaft of the power component 3 is connected to the transmission component 4. The transmission component 4 includes a rod 41 and a flange 42 fixed to the rod 41. The transmission component 4 is fixed to the clamping stage 5 through the flange 42, ensuring the coaxiality between the output shaft of the power component 3 and the clamping stage 5, avoiding transmission problems or vibrations caused by installation errors, thereby improving the accuracy and stability of the rotation of the clamping stage 5, and further ensuring the accuracy and reliability of the fatigue test of the wafer clamping pin 6.

[0051] Please see Figures 4 to 6As shown, the clamping stage 5 is a chuck tray. The clamping stage 5 includes a cover 51 and a body 52 arranged vertically. The cover 51 and the body 52 form a cavity. The edge of the cover 51 is provided with several sets of mounting slots 512 for mounting wafer clamping pins 6. In this embodiment, there are 6 sets of mounting slots 512, which can test 6 sets of wafer clamping pins 6 simultaneously. The top wall 511 of the cover 51 is provided with several foolproof points 5111 corresponding to the mounting slots 512. The foolproof points 5111 are close to the mounting slots 512 and located at the outer edge of the mounting slots 512, which facilitates the operator to correctly install the wafer clamping pins 6.

[0052] A mating groove 513 is provided at the center of the cover 51, and a bearing 8 is installed in the mating groove 513. The inner edge of the bearing 8 is interference-fitted with the flange 42 of the transmission component 4. Furthermore, the flange 42 of the transmission component 4 is fixedly connected to the cover 51 by a thread. This arrangement ensures a stable connection between the transmission component 4 and the cover 51, effectively transmits power, avoids loosening or slippage during rotation, and ensures the stable rotation of the clamping table 5.

[0053] Please see Figures 3 to 7 As shown, the top wall 511 of the cover 51 is used to mount the wafer 200. A plurality of wafer clamping pins 6, arranged around the wafer 200, are mounted in a plurality of mounting slots 512. Each wafer clamping pin 6 includes a main body 61, an abutment post 62 located at the top edge of the main body 61, and a gear portion 63 located at the bottom of the main body 61. The main body 61 is cylindrical. The abutment post 62 protrudes from the top wall 511 of the cover 51. During installation, the wafer clamping pin 6 is rotated until its abutment post 62 is located at the end closest to the foolproof point 5111, thus completing the installation of the wafer clamping pin 6. This foolproof design prevents installation errors, improves installation efficiency, and ensures accurate and rapid installation even for inexperienced operators.

[0054] Please see Figures 8 to 9 As shown, the rotation adjustment part 7 is installed in the cavity of the clamping stage 5. The upper surface of the rotation adjustment part 7 is in close contact with the lower surface of the cover 51. The center of the rotation adjustment part 7 is provided with a through hole through which the output shaft of the power component 3 passes, several sets of ribs 73 arranged circumferentially around the through hole, and several adjustment parts 71 corresponding one-to-one with the wafer clamping pins 6. The adjustment parts 71 are rotatably connected to the wafer clamping pins 6. In this embodiment, the number of ribs 73 and adjustment parts 71 is the same as the number of wafer clamping pins 6, which is 6 sets. The rotation adjustment part 7 is a metal rack circle, and the adjustment parts 71 are racks set on the edge of the rotation adjustment part 7. With this configuration, the gear and rack have high transmission accuracy, which can realize precise adjustment of each wafer clamping pin 6 and adapt to different testing requirements.

[0055] An external force drives the rotation adjustment unit 7 to rotate, and the adjustment unit 71 drives the wafer clamping pin 6 to rotate, causing the abutment post 62 to abut against the wafer 200, thereby fixing the wafer 200. Multiple sets of abutment posts 62 fix the wafer 200, ensuring its stability during testing and preventing it from shaking or shifting, which could affect the test. Subsequently, the power unit 3 drives the clamping stage 5 to rotate via the transmission unit 4, which in turn drives the wafer 200 to rotate, initiating the testing of the wafer clamping pin 6's service life. This setup simulates the clamping motion under actual working conditions, allowing for fatigue testing of the wafer clamping pin 6. Through the cooperation of the rotation adjustment unit 7 and the power unit 3, the various stresses and movements experienced by the wafer clamping pin 6 in actual use can be realistically reproduced, making the test results more accurate and reliable.

[0056] To facilitate the rotation of the adjustment unit 7, a downwardly extending rotating column 72 is provided on the rib 73, with at least a portion of the rotating column 72 exposed at the bottom of the clamping platform 5. This design allows the operator to easily move the rotating column 72 by external force, thereby rotating the adjustment unit 7 and adjusting the position and state of the wafer clamping pin 6. This eliminates the need for complex tools or equipment, improving the convenience and efficiency of operation.

[0057] In this embodiment, two sets of opposing ribs 73 are each provided with a downwardly extending rotating column 72, facilitating the rotation adjustment part 7. The symmetrical design makes the force on the rotation adjustment part 7 more even and the rotation more stable.

[0058] Each set of ribs 73 has a downwardly extending first post 731, and the bottom of the cover 51 has multiple sets of second posts 514 corresponding one-to-one with the first post 731. Furthermore, an elastic element 74 is provided between the first post 731 and the second post 514 within the same set. The first end of the elastic element 74 is connected to the first post 731, and the second end of the elastic element 74 is connected to the second post 514. When the operator can remove the rotating post 72 by passing both hands through the transparent slider 13 of the viewing window 11, the rotation adjustment part 7 rotates in a specific direction, causing the adjustment part 71 to rotate synchronously. The adjustment part 71 meshes with the gear part 63, driving the gear part 63 to rotate, causing the abutment post 62 to rotate half a turn to the end away from the anti-fool point 5111. The abutment post 62 abuts against the wafer 200 to fix the wafer 200. At this time, the elastic element 74 is in a compressed state. When the test is finished, the rotation adjustment part 7 is rotated in the opposite direction. At this time, the elastic element 74 helps the rotation adjustment part 7 to reset, which helps to avoid uneven rotation or jamming. Meanwhile, the elastic element 74 can increase the buffer, avoid collisions and excessive clamping of the edge of the wafer 200 during the clamping and releasing process, thereby reducing the risk of wafer 200 breakage.

[0059] The main body 52 has a through hole at its center for the output shaft of the power component 3 to pass through. The bottom of the main body 52 has two limiting grooves 521 corresponding to the rotating column 72, and the cover 51 has two sets of limiting posts 515 corresponding to one end of each limiting groove 521. In some embodiments, the cover 51 also has limiting grooves 521 corresponding to the rotating column 72. The rotating column 72 moves within the limiting groove 521, and the length of the limiting groove 521 is equal to the travel of half a revolution of the wafer clamping pin 6, thus serving as a limiting mechanism. The operator holds the rotating column 72 through the viewing window 11 and drives it to move along the limiting groove 521. When the rotating column 72 moves from the end of the limiting groove 521 away from the limiting post 515 to the end of the limiting groove 521 near the limiting post 515, the rib 73 abuts against the limiting post 515. At this time, the wafer clamping pin 6 rotates clockwise half a revolution and abuts against the wafer 200. The wafer 200 is secured by multiple sets of wafer clamping pins 6. Then, the power unit 3 is activated to rotate the clamping stage 5, simulating clamping motion under actual working conditions. The state of the wafer clamping pins 6 is observed at intervals. For example, the power unit 3 operates at speeds of 600 r / s, 1200 r / s, and 1600 r / s for 10 minutes each, and the state of the wafer clamping pins 6 is observed and recorded. The test is completed when scratches appear on the wafer clamping pins 6. The service life of the wafer clamping pins 6 can be determined based on the cumulative rotation time.

[0060] In other embodiments, the wafer clamping pin 6 is rotated at 600 rpm for 2 minutes, then at 1200 rpm for 2 minutes, then at 1600 rpm for 3 minutes, then at 1200 rpm for 2 minutes, and finally at 600 rpm for 2 minutes. This constitutes one rotation cycle. After each rotation cycle, the state of the wafer clamping pin 6 is observed and recorded. When scratches appear on the wafer clamping pin 6, the test is completed. The lifespan of the wafer clamping pin 6 can be determined based on the cumulative rotation time.

[0061] The testing process for wafer clamping pin 6 is as follows:

[0062] Install the wafer clamping pin 6 into the mounting slot 512, and place the wafer 200 to be tested on the top wall 511 of the cover 51 to ensure that the wafer 200 is in the correct and stable position.

[0063] By rotating the adjustment unit 71, the wafer clamping pin 6 is driven to rotate, causing the abutment post 62 to abut against the wafer 200 to fix the wafer 200. Specifically, the operator holds the rotating post 72 through the viewing window 11 and drives the rotating post 72 to move along the limiting groove 521. When the rotating post 72 moves from the end of the limiting groove 521 away from the limiting post 515 to the end of the limiting groove 521 near the limiting post 515, the rib 73 abuts against the limiting post 515. At this time, the wafer clamping pin 6 rotates half a turn clockwise and abuts against the wafer 200.

[0064] After the wafer 200 is fixed by multiple sets of wafer clamping pins 6, the power unit 3 is activated. The power unit 3 drives the clamping stage 5 to rotate through the transmission unit 4, thereby driving the wafer 200 to rotate and starting to simulate the clamping motion under actual working conditions.

[0065] During the test, the status of the wafer clamping pin 6 was observed at intervals, and data such as whether there were any abnormalities such as wear, deformation, or loosening, as well as the service life of the wafer clamping pin 6, were recorded.

[0066] After the test is completed, rotate the adjustment part 7 in the opposite direction. At this time, the elastic element 74 will help the adjustment part 7 to reset, and the wafer clamping pin 6 will also reset. Then, remove the wafer 200 to complete the entire test process.

[0067] In summary, the wafer clamping pins 6 of this invention are all installed inside the clamping platform 5, and each pin has an exposed abutment post 62 on the top wall 511. The abutment post 62 surrounds the wafer 200, which can firmly fix the wafer 200 from multiple directions, ensuring that the wafer 200 will not loosen or shift during the test, thus guaranteeing the stability of the test. The rotation adjustment part 7 is installed inside the clamping platform 5 and has an adjustment part 71 corresponding to each of the wafer clamping pins 6. By rotating the rotation adjustment part 7, the adjustment part 71 drives the wafer clamping pin 6 to rotate, so that the abutment post 62 abuts against the wafer 200, thereby fixing the wafer 200. The operation is simple and convenient. Through the cooperation of the power component 3 and the transmission component 4, the clamping platform 5 can be automatically driven to rotate, thereby driving the wafer 200 to rotate. Multiple sets of abutment posts 62 abut against and fix the wafer 200 from multiple directions, simulating the clamping motion under actual working conditions, and realizing the fatigue test of the wafer clamping pins 6. By observing the state changes of the wafer clamping pin 6 during the testing process, its service life and performance can be accurately assessed, providing a strong basis for the design optimization and quality control of the wafer clamping pin 6. Compared with the prior art, the wafer clamping pin testing device 100 of this utility model replaces the original cylinder drive with a manually controlled rotation adjustment unit 7, and uses the existing power component 3 to simulate the actual rotation, thereby testing the service life of the wafer clamping pin 6, significantly reducing equipment manufacturing costs and maintenance difficulty.

[0068] The above embodiments are only used to illustrate the technical solutions of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this utility model without departing from the spirit and scope of the technical solutions of this utility model.

Claims

1. A test apparatus for wafer chucking pins, characterized by, The utility model relates to a wafer clamping device, including: a power element (3); a transmission element (4) rotatably connected with the power element (3); a clamping table (5) fixedly connected with the transmission element (4), a top wall (511) of the clamping table (5) is used for installing a wafer (200), a plurality of wafer clamping needles (6) are installed in the clamping table (5), a plurality of the wafer clamping needles (6) are all provided with a plurality of abutting columns (62) exposed to the top wall (511), and a plurality of the abutting columns (62) are arranged around the wafer (200); a rotation adjusting part (7) is installed in the clamping table (5), and the rotation adjusting part (7) is provided with a plurality of adjusting parts (71) corresponding one by one with the wafer clamping needles (6) and rotatably connected with the wafer clamping needles (6); wherein, rotating the rotation adjusting part (7), the adjusting part (71) drives the wafer clamping needle (6) to rotate, makes the abutting column (62) with the wafer (200) abuts to fix the wafer (200);The power element (3) drives the clamping table (5) to rotate through the transmission element (4), and drives the wafer (200) to rotate.

2. The test apparatus of claim 1, wherein, The bottom of the rotation adjusting part (7) is provided with a rotation column (72) extending downward, the rotation column (72) is at least partially exposed to the bottom of the clamping table (5), and an external force drives the rotation column (72) to drive the rotation adjusting part (7) to rotate.

3. The test apparatus of claim 2, wherein, The bottom of the clamping table (5) is provided with a limiting groove (521), the rotation column (72) moves in the limiting groove (521), and the length of the limiting groove (521) is equal to the stroke of the wafer clamping needle (6) rotating half a circle.

4. The test apparatus of claim 3, wherein, The top wall (511) of the clamping table (5) is provided with a foolproof point (5111), when the wafer clamping needle (6) is installed, the abutting column (62) is located at one end closest to the foolproof point (5111) and is aligned with the foolproof point (5111).

5. The test apparatus of claim 1, wherein, The clamping table (5) includes a cover (51) and a body (52) arranged in a top-down manner, a matching groove (513) is arranged at the center of the cover (51), a bearing (8) is arranged in the matching groove (513), and the bearing (8) is in interference fit with the rotation adjusting part (7) and the transmission element (4) respectively.

6. The test apparatus of claim 5, wherein, The rotation adjusting part (7) is provided with at least four groups of ribs (73) arranged along the circumference, the ribs (73) are provided with a first column (731) extending downward, the bottom of the cover (51) is provided with a second column (514) corresponding to the first column (731), and an elastic element (74) is arranged between the first column (731) and the second column (514), a first end of the elastic element (74) is connected with the first column (731), and a second end of the elastic element (74) is connected with the second column (514).

7. The test apparatus of claim 6, wherein, Any one of the ribs (73) is provided with a rotation column (72) extending downward, the bottom of the body (52) is provided with a limiting groove (521) corresponding to the rotation column (72), and the rotation column (72) moves in the limiting groove (521);And / or, Two of the ribs (73) are respectively provided with a rotating column (72) extending downward, and opposite sides of the body (52) are respectively provided with a limiting slot (521) corresponding to the rotating column (72), and the two rotating columns (72) move in the corresponding limiting slots (521) respectively.

8. The test apparatus of claim 7, wherein, The cover (51) is provided with a limiting column (515) corresponding to one end of the limiting slot (521), and when the rotating column (72) moves to the end of the limiting slot (521) close to the limiting column (515), the rib (73) abuts against the limiting column (515).

9. The test apparatus of claim 2, wherein, The bracket (2) and the shroud (1) fixed on the bracket (2) are further included, the shroud (1) has a mounting space, and the clamping table (5) is mounted in the mounting space.

10. The test apparatus of claim 9, wherein, Two visual windows (11) are arranged on the two sides of the shroud (1) respectively, a sliding groove (12) is arranged on the outer side wall of the shroud (1), and a transparent sliding sheet (13) is detachably connected to the sliding groove (12), and the transparent sliding sheet (13) is configured to close the visual window (11).

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