Backlight inspection device

Abstract

The utility model discloses a backlight inspection device, which is applied to the field of wafer detection and comprises a shell, and a sliding cylinder is sleeved on the inner wall of the shell in a sliding manner; according to the utility model, the LED lamp is turned on, strong light emitted by the light source emitting part can penetrate through the wafer, and whether the wafer is missed to be cut or not can be obviously observed from the front side, so that the purpose of good inspection effect is achieved, the wafer is observed from the front side, the operation is more convenient, the detection efficiency is improved, and the height can be adjusted through the electric lifting rod. An adjusting block is rotated to enable a fixing ring to drive a UV film to change the angle, the angle can be adjusted, different observation requirements can be met, and the practicability of the device is improved. A rotating head is rotated to enable a rotating shaft to drive a rotating disc to rotate, the rotating disc rotates to drive a transmission rod to enable a clamping head and a clamping hole to be separated from clamping, and an LED lamp is pulled out for overhauling; therefore, the purpose of conveniently overhauling the LED lamp is achieved, the practicability is improved, and use is convenient.

Description

Technical Field

[0001] This utility model relates to the field of wafer inspection, and in particular to a backlight inspection device. Background Technology

[0002] A search of Chinese patents revealed publication number CN213878041U, which discloses a novel wafer edge inspection device belonging to the field of semiconductor wafer inspection equipment technology. The device includes an inspection stand, with an edge-finding and corner-finding device at its upper end. A rotating platform is positioned between the edge-finding and corner-finding device and the inspection stand. A stop block, integrated with the rotating platform, is located at the lower end of the outer circumference of the rotating platform. A limiting component, which movably contacts and limits the movement of the stop block and is inserted into the inspection stand, is located on the side of the edge-finding and corner-finding device, and a magnifying glass is positioned above the edge-finding and corner-finding device. A light source is located at the lower end of the magnifying glass. A clamping base is located on the side of the inspection stand, and a connecting rod adjusting arm is positioned between the clamping base and the magnifying glass. This device features a simple structure, convenient operation, high efficiency, and time and labor savings. It solves the problem of large-scale full-batch inspection of wafer edge defects in wafer manufacturing.

[0003] Existing inspection devices have poor detection performance. Generally, inspection devices use the method of inspecting with the back to the fluorescent light, but this method is not effective enough, has poor inspection accuracy, is prone to missed detection, is inconvenient to operate, and reduces inspection efficiency. In order to solve the above problems, we propose a backlight inspection device. Utility Model Content

[0004] The purpose of this invention is to provide a backlight inspection device, which has the advantage of good detection effect.

[0005] The above-mentioned technical objective of this utility model is achieved through the following technical solution: a backlight inspection device, comprising a housing, a slide cylinder slidably sleeved on the inner wall of the housing, a fixed ring rotatably connected to the inner wall of the slide cylinder, a UV film installed on the inner wall of the fixed ring, a fixed shell bolted to the surface of the slide cylinder, a worm gear fixedly sleeved on the surface of the fixed ring, a worm engaging with the surface of the worm gear, and the worm rotatably sleeved with the inner wall of the fixed shell, an electric lifting rod bolted to the bottom of the slide cylinder, and the bottom of the electric lifting rod bolted to the inner wall of the housing, an LED light disposed inside the housing, and a controller bolted to the surface of the housing.

[0006] By adopting the above technical solution, the strong light emitted by the LED light source can penetrate the wafer, allowing for clear observation of whether there are any uncut wafers from the front, thus achieving a good inspection effect. Observing the wafer from the front makes operation more convenient and improves inspection efficiency. The height can be adjusted by the electric lifting rod, and the angle of the UV film can be changed by rotating the adjusting block to drive the fixing ring. The angle can be adjusted to meet different observation needs, improving the practicality of the device.

[0007] The present invention is further configured such that: a sliding plate is slidably connected to the inner wall of the housing, and the sliding plate is bolted to the bottom of the LED light; a cover plate is bolted to the surface of the sliding plate; a rotating shaft is rotatably sleeved on the inner wall of the cover plate; a turntable is fixedly sleeved on the surface of the rotating shaft; a transmission rod is hinged to the surface of the turntable; a connecting rod is hinged to the other end of the transmission rod, and the connecting rod is slidably connected to the inner wall of the cover plate; a sliding rod is bolted to the other end of the connecting rod; a snap-fit ​​connector is bolted to the surface of the sliding rod; a snap-fit ​​hole is provided on the inner wall of the housing, and the snap-fit ​​connector snaps into the snap-fit ​​hole.

[0008] By adopting the above technical solution, the rotating head drives the rotating shaft to rotate the turntable, and the rotation of the turntable drives the transmission rod to disengage the snap-fit ​​connector from the snap-fit ​​hole, allowing the LED light to be pulled out for maintenance. This achieves the purpose of facilitating the maintenance of LED lights, improving practicality and ease of use.

[0009] The present invention is further configured such that: a slider is bolted to the bottom of the slide plate, and a groove is slidably connected to the surface of the slider, and the groove is formed on the inner wall of the housing.

[0010] By adopting the above technical solution, sliders and grooves are set to prevent the slide plate from deviating and ensure stability.

[0011] The present invention is further configured such that an adjusting block is bolted to one end of the worm gear.

[0012] By adopting the above technical solution, the angle can be easily adjusted by setting an adjustment block.

[0013] The present invention is further configured such that a limiting ring is fixedly sleeved on the surface of the slide cylinder.

[0014] By adopting the above technical solution, the slide cylinder is limited by setting a limit ring.

[0015] The present invention is further configured such that an anti-slip pad is bolted to the bottom of the housing.

[0016] By adopting the above technical solution and setting anti-slip pads, the stability of the device is improved.

[0017] The present invention is further configured such that a rotating head is bolted to one end of the rotating shaft.

[0018] By adopting the above technical solution, a rotating head is provided to facilitate the rotation of the shaft.

[0019] The present invention is further configured such that a spring is sleeved on the surface of the connecting rod.

[0020] By adopting the above technical solution and incorporating a spring, the snap-fit ​​connector is prevented from detaching from the snap-fit ​​hole, thus improving stability.

[0021] In summary, this utility model has the following beneficial effects:

[0022] 1. This utility model, by turning on the LED light, allows the strong light emitted by the light source to penetrate the wafer, making it easy to observe from the front whether there is any missing cutting on the wafer, thus achieving a good inspection effect. Observing the wafer from the front makes operation more convenient and improves inspection efficiency. The height can be adjusted by the electric lifting rod, and the angle of the UV film can be changed by rotating the adjusting block to drive the fixing ring. The angle can be adjusted to meet different observation needs, improving the practicality of the device.

[0023] 2. This utility model uses a rotating head to drive a rotating shaft to rotate a turntable. The rotation of the turntable drives a transmission rod to disengage the snap-fit ​​connector from the snap-fit ​​hole, allowing the LED light to be pulled out for maintenance. This achieves the purpose of facilitating the maintenance of LED lights, improving practicality and ease of use. Attached Figure Description

[0024] Figure 1 This is a three-dimensional structural view of the present invention;

[0025] Figure 2 This is a cross-sectional view of the structure of this utility model;

[0026] Figure 3 This is a side sectional view of the structure of this utility model;

[0027] Figure 4 This is a side sectional view of the structure of this utility model;

[0028] Figure 5 This is a partial structural side sectional view of the present invention;

[0029] Figure 6 This is a top sectional view of a partial structure of this utility model.

[0030] Reference numerals: 1. Housing; 2. Slide cylinder; 3. Fixing ring; 4. UV film; 5. Fixing shell; 6. Worm gear; 7. Worm; 8. Electric lifting rod; 9. LED light; 10. Controller; 11. Slide plate; 12. Cover plate; 13. Rotating shaft; 14. Turntable; 15. Transmission rod; 16. Connecting rod; 17. Slide rod; 18. Snap-fit ​​connector; 19. Snap-fit ​​hole; 20. Slider; 21. Slide groove; 22. Adjusting block; 23. Limiting ring; 24. Anti-slip pad; 25. Rotating head; 26. Spring. Detailed Implementation

[0031] The present invention will be further described in detail below with reference to the accompanying drawings.

[0032] Example 1:

[0033] refer to Figure 1 , Figure 2 , Figure 3 , Figure 5 and Figure 6 A backlit inspection device includes a housing 1, a slide cylinder 2 slidably sleeved on the inner wall of the housing 1, a fixing ring 3 rotatably connected to the inner wall of the slide cylinder 2, a UV film 4 installed on the inner wall of the fixing ring 3, a fixing shell 5 bolted to the surface of the slide cylinder 2, a worm gear 6 fixedly sleeved on the surface of the fixing ring 3, a worm 7 meshing with the surface of the worm gear 6, and the worm 7 rotatably sleeved with the inner wall of the fixing shell 5, an electric lifting rod 8 bolted to the bottom of the slide cylinder 2, and the bottom of the electric lifting rod 8 bolted to the inner wall of the housing 1, an LED light 9 installed inside the housing 1, and a controller 10 bolted to the surface of the housing 1. By turning on the LED light 9, the strong light emitted by the light source can penetrate the wafer, allowing for clear observation of whether there is any uncutting on the wafer from the front, thus achieving a good inspection effect. Observing the wafer from the front makes operation more convenient and improves inspection efficiency. The height can be adjusted by the electric lifting rod 8, and the angle of the UV film 4 can be changed by rotating the adjusting block 22, which drives the fixing ring 3. The angle can be adjusted to adapt to different observation needs, improving the practicality of the device.

[0034] refer to Figure 1 , Figure 5 and Figure 6 One end of the worm gear 7 is bolted with an adjusting block 22, which facilitates angle adjustment.

[0035] refer to Figure 1 , Figure 2 , Figure 3 and Figure 4 A limit ring 23 is fixedly sleeved on the surface of the slide cylinder 2, and the slide cylinder 2 is limited by setting the limit ring 23.

[0036] refer to Figure 2 , Figure 3 and Figure 4 An anti-slip pad 24 is bolted to the bottom of the housing 1. The stability of the device is improved by setting the anti-slip pad 24.

[0037] Example 2:

[0038] refer to Figure 2 and Figure 4A sliding plate 11 is slidably connected to the inner wall of the housing 1, and the sliding plate 11 is bolted to the bottom of the LED light 9. A cover plate 12 is bolted to the surface of the sliding plate 11. A rotating shaft 13 is rotatably sleeved on the inner wall of the cover plate 12. A turntable 14 is fixedly sleeved on the surface of the rotating shaft 13. A transmission rod 15 is hinged to the surface of the turntable 14. A connecting rod 16 is hinged to the other end of the transmission rod 15, and the connecting rod 16 is slidably connected to the inner wall of the cover plate 12. A sliding rod 17 is bolted to the other end of the connecting rod 16. A snap-fit ​​connector 18 is bolted to the surface of the sliding rod 17. A snap-fit ​​hole 19 is opened on the inner wall of the housing 1, and the snap-fit ​​connector 18 snaps into the snap-fit ​​hole 19. By rotating the rotating head 25, the rotating shaft 13 drives the turntable 14 to rotate. The rotation of the turntable 14 drives the transmission rod 15 to disengage the snap-fit ​​connector 18 from the snap-fit ​​hole 19, allowing the LED light 9 to be pulled out for maintenance. This achieves the purpose of facilitating the maintenance of the LED light 9, improving practicality and ease of use.

[0039] refer to Figure 2 A slider 20 is bolted to the bottom of the slide plate 11. A groove 21 is slidably connected to the surface of the slider 20, and the groove 21 is opened on the inner wall of the housing 1. By setting the slider 20 and the groove 21, the slide plate 11 is prevented from shifting and stability is ensured.

[0040] refer to Figure 1 and Figure 2 A rotating head 25 is bolted to one end of the rotating shaft 13, which facilitates the rotation of the rotating shaft 13.

[0041] refer to Figure 4 A spring 26 is fitted on the surface of the connecting rod 16. By setting the spring 26, the snap-fit ​​connector 18 is prevented from disengaging from the snap-fit ​​hole 19, thus improving stability.

[0042] Brief description of usage: LED light 9 emits strong light, making it easy to observe any missed cuts when the diced wafer is placed on UV film 4 from the front, thus achieving a good inspection effect. The electric lifting rod 8 drives the sliding cylinder 2 to rise and fall, allowing for height adjustment for ease of use. Rotating the adjusting block 22 rotates the worm gear 7, which in turn rotates the worm wheel 6, which in turn rotates the fixing ring 3, causing the UV film 4 to rotate, allowing for angle adjustment. Rotating the rotating head 25 rotates the rotating shaft 13, which in turn rotates the turntable 14. 14. Rotation drives transmission rod 15 to move, transmission rod 15 moves connecting rod 16 to move, connecting rod 16 moves sliding rod 17 to move, sliding rod 17 moves and causes snap-fit ​​connector 18 to disengage from snap-fit ​​hole 19, pulling out cover plate 12. Cover plate 12 moves and causes sliding plate 11 to move LED light 9 out of housing 1 for maintenance. After maintenance, LED light 9 is moved back into housing 1, and cover plate 12 covers housing 1. Sliding rod 17, under the action of spring 26, drives snap-fit ​​connector 18 to snap-fit ​​hole 19, fixing it and completing maintenance, thereby facilitating the maintenance of LED light 9.

[0043] This specific embodiment is merely an explanation of the present utility model and is not intended to limit the present utility model. After reading this specification, those skilled in the art can make modifications to this embodiment without contributing any inventive step, but as long as they are within the scope of the claims of the present utility model, they are protected by patent law.

Claims

1. A backlight inspection apparatus comprising a housing (1), characterized in that The inner wall of the shell (1) is sleeved with a sliding cylinder (2), the inner wall of the sliding cylinder (2) is rotatably connected with a fixed ring (3), the inner wall of the fixed ring (3) is installed with a UV film (4), the surface of the sliding cylinder (2) is bolted with a fixed shell (5), the surface of the fixed ring (3) is fixedly sleeved with a worm gear (6), the surface of the worm gear (6) is engaged with a worm (7), the worm (7) is rotatably sleeved with the inner wall of the fixed shell (5), the bottom of the sliding cylinder (2) is bolted with an electric lifting rod (8), and the bottom of the electric lifting rod (8) is bolted with the inner wall of the shell (1), the inside of the shell (1) is provided with an LED lamp (9), and the surface of the shell (1) is bolted with a controller (10).

2. A backlight inspection apparatus according to claim 1, wherein The inner wall of the shell (1) is slidably connected with a sliding plate (11), and the bottom of the sliding plate (11) is bolted with the LED lamp (9), the surface of the sliding plate (11) is bolted with a cover plate (12), the inner wall of the cover plate (12) is rotatably sleeved with a rotating shaft (13), the surface of the rotating shaft (13) is fixedly sleeved with a rotating disc (14), the surface of the rotating disc (14) is hingedly connected with a transmission rod (15), the other end of the transmission rod (15) is hingedly connected with a connecting rod (16), the connecting rod (16) is slidably connected with the inner wall of the cover plate (12), the other end of the connecting rod (16) is bolted with a sliding rod (17), the surface of the sliding rod (17) is bolted with a clamping joint (18), the inner wall of the shell (1) is provided with a clamping hole (19), and the clamping joint (18) is clamped with the clamping hole (19).

3. A backlight inspection apparatus according to claim 2, wherein The bottom of the sliding plate (11) is bolted with a sliding block (20), the surface of the sliding block (20) is slidably connected with a sliding groove (21), and the sliding groove (21) is arranged in the inner wall of the shell (1).

4. The backlight inspection apparatus of claim 1, wherein One end of the worm (7) is bolted with an adjusting block (22).

5. The backlight inspection apparatus of claim 1, wherein The surface of the sliding cylinder (2) is fixedly sleeved with a limiting ring (23).

6. The backlight inspection apparatus of claim 1, wherein The bottom of the shell (1) is bolted with an anti-skid pad (24).

7. The backlight inspection apparatus of claim 2, wherein One end of the rotating shaft (13) is bolted with a rotating head (25).

8. The backlight inspection apparatus of claim 2, wherein The surface of the connecting rod (16) is sleeved with a spring (26).

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