Chip conveying mechanism of stepping type photoetching machine

Abstract

The utility model relates to the technical field of photoetching machines, and discloses a wafer conveying mechanism of a stepping type photoetching machine, which comprises a machine body, a bearing plate is arranged in the middle of the machine body, a motor I is fixedly connected to the left side of the top of the bearing plate, a rotating shaft is fixedly connected to the output end of the motor I, a connecting rope is arranged on the outer side of the rotating shaft, and the rotating shaft is connected with a motor II. A movable block is slidably connected to the middle of the bearing plate, the rear side of the movable block is fixedly connected with the other end of the connecting rope, a fan is arranged on the front side of the movable block, a spring is fixedly connected to the right side of the movable block, and the other end of the spring is fixedly connected with the outer side of the bearing plate; and a cleaning mechanism is mounted in the machine body. The first motor drives the rotating shaft to rotate, the connecting rope is wound or released, the moving block is pulled to slide on the bearing plate, the fan on the front side of the moving block moves along with the moving block, and the spring on the right side plays a buffering role.

Description

Technical Field

[0001] This utility model relates to the field of lithography machine technology, and in particular to a wafer transfer mechanism for a stepper lithography machine. Background Technology

[0002] Stepper lithography machines are key equipment in the lithography process. Their working principle is to shrink the integrated circuit pattern on the photomask through an optical system and expose it to the silicon wafer coated with photoresist in a step-by-step repeating manner. This can achieve high resolution and precision. After each area is exposed, the silicon wafer will move precisely to the next position to continue exposure, which can effectively reduce the impact of some aberrations on pattern transfer. They play a core role in the semiconductor manufacturing field, driving the continuous development of chip manufacturing technology towards smaller size and higher performance. They are an important equipment foundation for the modern microelectronics industry to realize large-scale integrated circuit manufacturing.

[0003] The wafer transfer mechanism of a stepper lithography machine is a key component for achieving precise silicon wafer transport and positioning. It includes a robotic arm and a carrier stage. The robotic arm is responsible for precisely picking up the silicon wafer from external devices, such as a photoresist coater, and transferring it to the carrier stage of the lithography machine. The carrier stage can precisely raise, lower, and translate the silicon wafer according to instructions, ensuring that the wafer is within the optimal focusing range of the lithography machine's optical system. It can also precisely step to the next exposure position after each exposure, requiring extremely high repeatability to ensure accurate transfer of the pattern across different areas of the silicon wafer. The efficient and stable operation of the wafer transfer mechanism plays an indispensable role in improving the overall exposure efficiency of the stepper lithography machine and ensuring the consistency and high precision of chip manufacturing. During use, although modern wafer stages... While the accuracy and speed of movement have been greatly improved, frequent movement and positioning of the worktable still require a certain amount of time. Furthermore, stability and accuracy must be ensured during high-speed movement and high-precision positioning, which to some extent limits the improvement of exposure efficiency. In existing technologies, high-strength and high-stability materials and structural designs are used to increase the rigidity of the worktable and support frame, reduce deformation and vibration during movement, and improve positioning accuracy and repeatability. However, when processing items, the photolithography process requires high-precision operation. Even slight temperature changes can affect the wafer transfer mechanism. The metal components in the wafer transfer mechanism will expand and contract due to temperature changes, causing changes in the size and shape of the mechanical structure, which in turn affects the positioning accuracy of the wafer. Utility Model Content

[0004] To overcome the above deficiencies, this utility model provides a wafer transfer mechanism for a stepper lithography machine, aiming to improve the existing technology where, during the processing of items, the lithography process requires a high-precision environment, and even slight temperature changes can affect the wafer transfer mechanism. The metal components in the wafer transfer mechanism will undergo thermal expansion and contraction due to temperature changes, resulting in changes in the size and shape of the mechanical structure, which in turn affects the positioning accuracy of the wafer.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a wafer transfer mechanism for a stepper lithography machine, comprising a body, a support plate disposed in the middle of the body, a motor fixedly connected to the top left side of the support plate, a rotating shaft fixedly connected to the output end of the motor, a connecting rope disposed on the outer side of the rotating shaft, a moving block slidably connected to the middle of the support plate, the rear side of the moving block being fixedly connected to the other end of the connecting rope, a fan disposed on the front side of the moving block, a spring fixedly connected to the right side of the moving block, the other end of the spring being fixedly connected to the outer side of the support plate, and a cleaning mechanism installed inside the body, the cleaning mechanism serving a cleaning function.

[0006] As a further description of the above technical solution:

[0007] A second motor is installed inside the machine body. The output end of the second motor is fixedly connected to a first sprocket. A rotating shaft is rotatably connected to the right side of the inside of the machine body. A second sprocket is fixedly connected to the outside of the rotating shaft. The first sprocket is connected to the second sprocket via a chain. Multiple cleaning rods are equidistantly arranged on the outside of the chain.

[0008] As a further description of the above technical solution:

[0009] Support legs are fixedly connected to the four corners of the bottom of the machine body, and foot pads are fixedly connected to the bottom of the support legs.

[0010] As a further description of the above technical solution:

[0011] The top of the machine body is equipped with corner guards around all four sides, and the outer side of each corner guard is threaded with a screw.

[0012] As a further description of the above technical solution:

[0013] A warning sign is provided on the left side of the outer wall of the machine body, and two screws are threadedly connected to the outer side of the warning sign.

[0014] As a further description of the above technical solution:

[0015] An output rod is provided on the top rear side of the machine body, and a light bulb is provided on the top of the output rod.

[0016] As a further description of the above technical solution:

[0017] A control panel is mounted on the right side of the exterior of the machine body, and buttons are provided on the outer side of the control panel.

[0018] As a further description of the above technical solution:

[0019] A connecting line is provided in the middle of the rear side of the machine body, and a retaining ring is fixedly connected to the lower middle part of the rear side of the machine body.

[0020] This utility model has the following beneficial effects:

[0021] 1. In this utility model, a motor drives the rotating shaft to rotate, causing the connecting rope to wind or release, pulling the moving block to slide on the support plate. The fan on the front side of the moving block moves accordingly. The spring on the right side acts as a buffer and resets the moving block after the motor stops. The motor controls the fan to move in order to achieve a cooling effect.

[0022] 2. In this utility model, after the second motor starts, the first and second sprockets rotate synchronously, and the chain drives the cleaning rod to move, which is used to clean impurities and dust in specific areas inside the machine body, thus ensuring the normal operation and cleanliness of the equipment and adapting to different cleaning needs. Attached Figure Description

[0023] Figure 1 This is a perspective view of the wafer transfer mechanism of a stepper lithography machine proposed in this utility model;

[0024] Figure 2 This is a front view of the wafer transfer mechanism of a stepper lithography machine proposed in this utility model;

[0025] Figure 3 This is a rear view of the wafer transfer mechanism of a stepper lithography machine proposed in this utility model;

[0026] Figure 4 This is a partial structural diagram of the wafer transfer mechanism of a stepper lithography machine proposed in this utility model;

[0027] Figure 5 This is a schematic diagram of the cleaning mechanism of the wafer transfer mechanism of a stepper lithography machine proposed in this utility model.

[0028] Legend:

[0029] 1. Body; 2. Cleaning mechanism; 201. Cleaning rod; 202. Motor II; 203. Sprocket I; 204. Rotating shaft; 205. Sprocket II; 206. Chain; 3. Support plate; 4. Motor I; 5. Rotating shaft; 6. Connecting rope; 7. Moving block; 8. Fan; 9. Spring; 10. Support leg; 11. Foot pad; 12. Corner protector; 13. Screw I; 14. Warning sign; 15. Output rod; 16. Light bulb; 17. Control panel; 18. Button; 19. Connecting wire; 20. Snap ring; 21. Screw II. Detailed Implementation

[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0031] Reference Figure 1 , Figure 2 and Figure 4 This utility model provides an embodiment of a wafer transfer mechanism for a stepper lithography machine, comprising a body 1, a support plate 3 disposed in the middle of the body 1, a motor 4 fixedly connected to the top left side of the support plate 3, a rotating shaft 5 fixedly connected to the output end of the motor 4, the rotating shaft 5 being rotated by the kinetic energy of the motor 4, a connecting rope 6 disposed on the outer side of the rotating shaft 5, a movable block 7 slidably connected to the middle of the support plate 3, the rear side of the movable block 7 being fixedly connected to the other end of the connecting rope 6, a fan 8 disposed on the front side of the movable block 7, and a fan 8 disposed on the right side of the movable block 7. A spring 9 is fixedly connected to the side, which plays a role in compression and rebound. The other end of the spring 9 is fixedly connected to the outer side of the bearing plate 3. A cleaning mechanism 2 is installed inside the machine body 1, which plays a role in cleaning. Support legs 10 are fixedly connected to the four corners of the bottom of the machine body 1. Foot pads 11 are fixedly connected to the bottom of the support legs 10, which play a role in supporting the whole. Corner guards 12 are provided on all four sides of the top of the machine body 1. Screws 13 are threadedly connected to the outer side of the corner guards 12. The corner guards 12 are fixed by screws 13, which play a role in protection.

[0032] Specifically, when motor 4 drives shaft 5 to rotate, connecting rope 6 will wrap around or release on the outside of shaft 5, thereby pulling moving block 7 to slide linearly on bearing plate 3. Fan 8 is configured at the front end of moving block 7. As moving block 7 moves, fan 8 also moves synchronously. Spring 9 is fixedly connected to the right side of moving block 7. The other end of spring 9 is fixed to the outside of bearing plate 3. When moving block 7 moves under the drive of motor 4, spring 9 plays a buffering role. After motor 4 stops working, spring 9 can make moving block 7 return to the initial position. Motor 4 controls fan 8 to move to different positions to achieve cooling effect. Support legs 10 are provided at the four corners of the bottom of the body 1. Foot pads 11 are fixedly installed at the bottom of support legs 10 to achieve the overall support function. Corner guards 12 are provided around the top edge of body 1. The outer side of corner guards 12 is connected to screw 13 by threads. Corner guards 12 are fixed by screw 13 to achieve protection.

[0033] Reference Figure 1 , Figure 2 and Figure 5 The machine body 1 is equipped with a second motor 202. The output end of the second motor 202 is fixedly connected to a first sprocket 203. The kinetic energy of the second motor 202 drives the first sprocket 203 to rotate. The right side of the machine body 1 is rotatably connected to a rotating shaft 204. The outer side of the rotating shaft 204 is fixedly connected to a second sprocket 205. The first sprocket 203 is connected to the second sprocket 205 through a chain 206. Multiple cleaning rods 201 are equidistantly arranged on the outer side of the chain 206. A warning sign 14 is set on the front left side of the outer wall of the machine body 1. The outer side of the warning sign 14 is threaded with a second screw 21. The warning sign 14 is fixed by the second screw 21 and serves as a warning. The top rear side of the machine body 1 is equipped with an output rod 15. A light bulb 16 is set on the top of the output rod 15 for illumination.

[0034] Specifically, when motor 202 starts, sprocket 203 rotates accordingly, which in turn drives sprocket 205 to rotate synchronously via chain 206. Since cleaning rod 201 is fixed to the outside of chain 206, cleaning rod 201 moves along with the cyclical movement of chain 206, thereby cleaning a specific area inside the machine body 1 and removing impurities and dust attached to the surface. A warning sign 14 is specially provided on the left side of the front side of the outer wall of the machine body 1. The warning sign 14 is connected to screw 21 by the outer thread and fixed by screw 21, thereby playing a warning function. In addition, an output rod 15 is provided on the top rear side of the machine body 1, and a light bulb 16 is installed at the top of the output rod 15 to provide lighting.

[0035] Reference Figure 1 and Figure 3A control panel 17 is installed on the right side of the body 1. Buttons 18 are provided on the outside of the control panel 17 to facilitate operation of the control panel 17. A connecting line 19 is provided in the middle of the rear side of the body 1. A retaining ring 20 is fixedly connected to the lower middle of the rear side of the body 1. The retaining ring 20 is used to fix the connecting line 19.

[0036] Specifically, a control panel 17 is installed on the right side of the body 1. Buttons 18 are provided on the outside of the control panel 17 to facilitate operation. A connecting line 19 is provided in the middle of the rear side of the body 1. A retaining ring 20 is fixedly connected to the lower middle part of the rear side of the body 1. The retaining ring 20 is used to fix the connecting line 19.

[0037] Working principle: When motor 4 drives shaft 5 to rotate, connecting rope 6 will wrap around or release on the outside of shaft 5, thereby pulling moving block 7 to slide linearly on bearing plate 3. Fan 8 is set on the front side of moving block 7. The movement of moving block 7 drives fan 8 to move synchronously. Spring 9 is fixedly connected to the right side of moving block 7. The other end of spring 9 is fixed to the outside of bearing plate 3. When moving block 7 moves under the drive of motor 4, spring 9 plays a buffering role to prevent moving block 7 from being violently impacted by sudden start or stop of motor 4. At the same time, after motor 4 stops working, spring 9 can reset moving block 7 to the initial position for the next work. Motor 4 controls fan 8 to move to different positions to achieve the cooling effect.

[0038] When motor 202 starts, sprocket 1 203 rotates, which drives sprocket 205 to rotate synchronously via chain 206. Since cleaning rod 201 is fixed on the outside of chain 206, it moves along with the chain 206 as it rotates. It can be used to clean specific areas inside the machine body 1, removing impurities and dust attached to the surface, ensuring the normal operation and cleanliness of the equipment. The moving speed of cleaning rod 201 can be adjusted by controlling the speed of motor 202 to adapt to different cleaning needs.

[0039] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A wafer transfer mechanism for a stepper photolithography machine comprising a body (1) characterised in that: The middle part of the machine body (1) is provided with a bearing plate (3), the top left side of the bearing plate (3) is fixedly connected with a motor one (4), the output end of the motor one (4) is fixedly connected with a rotating shaft (5), the outer side of the rotating shaft (5) is provided with a connecting rope (6), the middle part of the bearing plate (3) is slidably connected with a moving block (7), the rear side of the moving block (7) is fixedly connected with the other end of the connecting rope (6), the front side of the moving block (7) is provided with a fan (8), the right side of the moving block (7) is fixedly connected with a spring (9), the other end of the spring (9) is fixedly connected with the outer side of the bearing plate (3), the inside of the machine body (1) is provided with a cleaning mechanism (2), the cleaning mechanism (2) plays a cleaning role.

2. A stepping mechanism for a photolithography machine according to claim 1, wherein: The inside of the machine body (1) is provided with a motor two (202), the motor two (202) is installed in the inside of the machine body (1), the output end of the motor two (202) is fixedly connected with a chain wheel one (203), the inside right side of the machine body (1) is rotatably connected with a rotating shaft (204), the outer side of the rotating shaft (204) is fixedly connected with a chain wheel two (205), the chain wheel one (203) is drivingly connected with the chain wheel two (205) through a chain (206), the outer side of the chain (206) is equidistantly provided with a plurality of cleaning rods (201).

3. The stepping mechanism according to claim 1, wherein: The bottom of the machine body (1) is fixedly connected with a supporting leg (10) at four corners, the bottom of the supporting leg (10) is fixedly connected with a foot pad (11).

4. The stepping mechanism according to claim 1, wherein: The top of the machine body (1) is provided with a corner guard (12) around, the outer side of the corner guard (12) is threadedly connected with a screw one (13).

5. The stepping mechanism according to claim 1, wherein: The front left end of the outer wall of the machine body (1) is provided with a warning sign (14), the outer side of the warning sign (14) is threadedly connected with a screw two (21).

6. The stepping mechanism according to claim 1, wherein: The top rear side of the machine body (1) is provided with an output rod (15), the top of the output rod (15) is provided with a bulb (16).

7. The stepping mechanism according to claim 1, wherein: The right side of the outer surface of the machine body (1) is provided with a control table (17), the outer side of the control table (17) is provided with a button (18).

8. The stepping photoetch machine wafer transfer mechanism of claim 1 wherein: The middle part of the rear side of the machine body (1) is provided with a connecting line (19), the middle lower part of the rear side of the machine body (1) is fixedly connected with a clasp (20).

Images