Disilane multi-stage rectification and purification device

Abstract

The utility model belongs to the technical field of rectification equipment, and particularly relates to a disilane multi-stage rectification purification device which comprises a bottom plate, a rectification tower body, a tower bottom product cooler, a reboiler and a tower top product cooler are arranged at the top of the bottom plate, a packed tower is arranged at the top of the rectification tower body, and a mounting frame is arranged at the top of the packed tower. The top of the mounting rack is provided with a condenser, and the mounting rack is connected with the packed tower and the condenser through a mounting structure; a lower mounting assembly; wherein the upper mounting assembly and the lower mounting assembly have the same structure and are symmetrically arranged at the two ends of the mounting frame, the two ends of the upper mounting assembly are connected with the mounting frame and the packed tower, and the two ends of the lower mounting assembly are connected with the mounting frame and the condenser. The device has the beneficial effects that by arranging the mounting structure, a worker can more conveniently and rapidly assemble and disassemble the device, the problem of thread abrasion is reduced, and the assembling efficiency is improved.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of rectification equipment, and particularly relates to a multi-stage rectification and purification device for ethylsilane. BACKGROUND

[0002] Ethylsilane is a colorless transparent liquid and is mainly used in solar cells, photosensitive drums, amorphous silicon films, epitaxial growth, oxide films, nitride films, chemical vapor deposition and the like. Ethylsilane needs to be rectified and purified in the production process to improve the purity of ethylsilane. In the ethylsilane rectification process, a liquid distribution tray is needed to uniformly distribute the liquid ethylsilane in the rectification equipment, improve the mass transfer between the liquid and gaseous substances, and thus improve the purity of ethylsilane.

[0003] The patent with the publication number CN212039074U discloses a rectification and purification device, which comprises a bottom plate and a tower top product cooler. A rectification tower body is installed on the top outer wall of the bottom plate through bolts. A packing tower is threadedly connected to the top outer wall of the rectification tower body. An installation rack is installed on the top outer wall of the packing tower through bolts. A condenser is installed on the top outer wall of the installation rack through bolts. A tower bottom product cooler is installed on the top outer wall of the bottom plate through bolts. The tower bottom product cooler is connected to the bottom outer wall of the rectification tower body through a conduit. A reboiler and a tower top product cooler are installed on the top outer wall of the bottom plate through a support frame. A reflux pipe is threadedly connected to the top outer wall of the reboiler. The end of the reflux pipe away from the reboiler is threadedly connected to the inside of the rectification tower body.

[0004] The installation rack and the connecting structure connected through bolts of the above patent can facilitate the combination and assembly of the device by the staff during use and facilitate the maintenance of the device by the staff. However, the structure relying solely on threads can facilitate combination and assembly, but the threads will be worn after multiple disassembly and assembly, which needs to be improved. SUMMARY

[0005] The purpose of the present application is to provide a multi-stage rectification and purification device for ethylsilane, which can solve the above problems.

[0006] The purpose of the present application is to provide a multi-stage rectification and purification device for ethylsilane, which comprises a bottom plate. A rectification tower body, a tower bottom product cooler, a reboiler and a tower top product cooler are arranged on the top of the bottom plate. A packing tower is arranged on the top of the rectification tower body. An installation rack is arranged on the top of the packing tower. A condenser is arranged on the top of the installation rack. The installation rack, the packing tower and the condenser are connected through a mounting structure. The mounting structure comprises:

[0007] an upper mounting assembly;

[0008] a lower mounting assembly;

[0009] The upper mounting assembly and the lower mounting assembly are symmetrically arranged at both ends of the mounting frame, and the two ends of the upper mounting assembly are connected with the packing tower and the mounting frame, and the two ends of the lower mounting assembly are connected with the condenser and the mounting frame.

[0010] The installation structure is composed of an upper mounting assembly and a lower mounting assembly, which are symmetrically arranged at both ends of the mounting frame and connected with the mounting frame, the packing tower and the condenser. The design of the installation structure makes it more convenient and efficient for workers to assemble and disassemble the device. Compared with the traditional threaded connection method, the threaded wear problem is reduced, and the assembly efficiency is improved.

[0011] By optimizing the connection mode between the mounting frame and the packing tower and the condenser, the installation efficiency is improved, the negative effects caused by multiple disassembly and assembly are avoided, the durability of the device is improved, the maintenance and replacement frequency is reduced, and the overall operating cost is reduced.

[0012] Further, the lower mounting assembly comprises:

[0013] A positioning frame is arranged on the packing tower, and a positioning through slot is formed in the positioning frame;

[0014] A positioning plug plate is arranged at the bottom of the mounting frame and cooperates with the positioning through slot;

[0015] A fastening structure is arranged on the positioning frame and used for fixing the positioning frame and the positioning plug plate;

[0016] The positioning plug plate is threadedly connected with the mounting frame, and the two positioning frames are arranged at intervals, and the positioning plug plate and the positioning through slot are connected through plug-in connection.

[0017] The positioning frame is arranged on the packing tower and serves as the basis for connecting the mounting frame. The positioning through slot cooperates with the positioning plug plate to ensure accurate positioning of the mounting frame. The positioning plug plate is threadedly connected with the mounting frame, which not only provides sufficient connection strength but also facilitates replacement of the positioning plug plate. The positioning plug plate is arranged at the bottom of the mounting frame and forms plug-in cooperation with the positioning through slot, which not only simplifies the installation process but also improves the stability and reliability of the connection. The positioning plug plate allows the mounting frame to be easily aligned and fixed on the positioning frame, thereby avoiding errors and deviations during installation. The fastening structure is arranged on the positioning frame and used for further fixing the connection between the positioning frame and the positioning plug plate, which not only improves the stability of the connection but also allows the mounting frame to be easily disassembled and reinstalled when needed.

[0018] Further, the fastening structure comprises:

[0019] The positioning block is arranged on the positioning frame and is fixedly connected to the positioning frame. The cross section of the positioning block is circular. A positioning through hole is formed on the surface of the positioning block and penetrates through the positioning frame. The positioning through hole provides a channel for the fastener to pass through and connect the positioning insert plate. The threaded hole is arranged on the positioning insert plate and is adapted to the external thread of the rod portion of the fastener. The isolation cover is arranged on the positioning block and is threadedly connected to the positioning block. The limiting through hole formed on the isolation cover and communicating with the positioning through hole provides an additional limiting effect for the fastener, preventing the fastener from loosening or falling off during connection. The isolation cover also has a protective effect, avoiding direct contact between the fastener and the positioning block.

[0020] The threaded hole is arranged on the positioning insert plate and is adapted to the external thread of the rod portion of the fastener.

[0021] The isolation cover is arranged on the positioning block and is threadedly connected to the positioning block. The limiting through hole formed on the isolation cover and communicating with the positioning through hole provides an additional limiting effect for the fastener, preventing the fastener from loosening or falling off during connection. The isolation cover also has a protective effect, avoiding direct contact between the fastener and the positioning block.

[0022] The fastener includes a limiting portion and a rod portion. The end of the rod portion is provided with an external thread adapted to the threaded hole.

[0023] The rod portion of the fastener passes through the limiting through hole and the positioning through hole in sequence and is connected to the threaded hole.

[0024] The positioning block is arranged on the positioning frame and is fixedly connected to the positioning frame. The cross section of the positioning block is circular. A positioning through hole is formed on the surface of the positioning block and penetrates through the positioning frame. The positioning through hole provides a channel for the fastener to pass through and connect the positioning insert plate. The threaded hole is arranged on the positioning insert plate and is adapted to the external thread of the rod portion of the fastener. The isolation cover is arranged on the positioning block and is threadedly connected to the positioning block. The limiting through hole formed on the isolation cover and communicating with the positioning through hole provides an additional limiting effect for the fastener, preventing the fastener from loosening or falling off during connection. The isolation cover also has a protective effect, avoiding direct contact between the fastener and the positioning block. The fastener includes a limiting portion and a rod portion. The end of the rod portion is provided with an external thread adapted to the threaded hole. The fastener passes through the limiting through hole and the positioning through hole in sequence and is connected to the threaded hole, achieving firm connection between the positioning frame and the positioning insert plate.

[0025] The fastening structure achieves firm connection between the positioning frame and the positioning insert plate through the cooperative action of the positioning block, the threaded hole, the isolation cover and the fastener. This connection method not only has the characteristics of simple structure and convenient operation, but also has high connection strength and stability. At the same time, due to the use of threaded connection and limiting through hole design, the fastening structure also avoids deviation and error during connection, ensuring the accuracy and reliability of installation.

[0026] Further, the diameter of the positioning through hole is greater than the diameters of the rod portion and the limiting through hole, and an installation cavity is formed between the rod portion and the limiting through hole. The diameter of the rod portion is the same as the diameter of the limiting through hole.

[0027] The diameter of the positioning through hole is greater than the diameter of the rod portion, so that the rod portion does not directly contact the inner wall of the positioning through hole during installation, avoiding direct friction caused by threaded connection, thereby effectively reducing wear. As a result of avoiding direct contact with the thread, the fastening structure can maintain better performance during long-term use, reducing the frequency of maintenance and replacement. At the same time, the design of the positioning through hole allows the fastener to easily pass through the positioning frame and connect with the threaded hole on the positioning insert plate, simplifying the installation process and improving installation efficiency.

[0028] Further, an auxiliary assembly is arranged in the mounting cavity, and the auxiliary assembly comprises:

[0029] A pre-tightening ring is arranged on the outer wall of the rod portion;

[0030] A positioning ring is arranged on the inner wall of the positioning through hole;

[0031] A spring is arranged between the pre-tightening ring and the positioning ring and is sleeved on the outer wall of the rod portion.

[0032] The pre-tightening ring and the positioning through hole have a gap therebetween, and the positioning ring and the rod portion have a gap therebetween.

[0033] The pre-tightening ring is arranged on the outer wall of the rod portion of the fastener, and when the fastener is tightened, the pre-tightening ring gradually approaches the positioning ring and compresses the spring. After the fastener is tightened, the spring provides a continuous pre-tightening force, thereby enhancing the fastening effect of the connection, improving the stability of the connection, and to some extent, compensating for the loosening of the connection caused by temperature changes, material expansion and other factors. At the same time, due to the presence of the spring, the fastener will be subjected to the elastic force of the spring during repositioning during disassembly, thereby improving the disassembly efficiency.

[0034] Further, a hand screw head is arranged on the limiting portion, and the hand screw head is provided with friction lines.

[0035] The hand screw head arranged on the limiting portion of the fastener and the friction lines arranged on the hand screw head can provide a more convenient and efficient screwing mode for the user, improve the convenience of operation, and enhance the safety of use. The design of the hand screw head enables the user to directly screw the fastener by hand without the aid of other tools or equipment, simplifying the operation process and improving the installation and disassembly efficiency. The friction lines arranged on the hand screw head increase the friction force between the hand and the fastener, making the screwing process more stable and less likely to slip.

[0036] The beneficial effects of the present application are:

[0037] 1. By arranging the mounting structure, the worker can assemble and disassemble the device more conveniently and quickly. Compared with the traditional threaded connection mode, the threaded wear problem is reduced, and the assembly efficiency is improved;

[0038] 2. By optimizing the connection mode between the mounting frame and the filler tower and the condenser, the installation efficiency is improved, the negative effects caused by multiple disassembly and assembly are avoided, the durability of the device is improved, the maintenance and replacement frequency is reduced, and the overall operating cost is reduced;

[0039] 3、Through the hand screw head arranged on the limiting portion of the fastener and the friction lines arranged on the hand screw head, a more convenient and efficient screwing mode is provided for the user, so that the user can directly screw the fastener through the hand, without the aid of other tools or equipment, the operation process is simplified, and the installation and dismounting efficiency is improved. BRIEF DESCRIPTION OF DRAWINGS

[0040] Figure 1 is a structural schematic view of the utility model;

[0041] Figure 2 is a structural schematic view of the installation structure of the utility model;

[0042] Figure 3 is a structural schematic view of the internal structure of the installation structure of the utility model;

[0043] Figure 4 is Figure 3 is an enlarged view of A in

[0044] The figure is marked as: 100, bottom plate; 110, rectifying tower body; 120, tower bottom product cooler; 130, reboiler; 140, tower top product cooler; 150, filler tower; 160, mounting frame; 170, condenser; 200, upper mounting assembly; 300, lower mounting assembly; 310, positioning frame; 311, positioning through slot; 320, positioning plugboard; 400, fastening structure; 410, positioning block; 411, positioning through hole; 420, screw hole; 430, isolation cover; 431, limiting through hole; 440, fastener; 441, limiting portion; 442, rod portion; 450, mounting cavity; 460, hand screw head; 500, auxiliary assembly; 510, pre-tightening compression ring; 520, positioning compression ring; 530, spring. DETAILED DESCRIPTION

[0045] The technical solutions in the embodiments of the present application will be clearly described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art belong to the scope of protection of the present application.

[0046] The terms "first," "second," etc., used in the specification and claims of this application are used to distinguish similar objects and not to describe a specific order or sequence. It should be understood that such use of data can be interchanged where appropriate so that embodiments of this application can be implemented in orders other than those illustrated or described herein, and the objects distinguished by "first," "second," etc., are generally of the same class and the number of objects is not limited; for example, a first object can be one or more. Furthermore, in the specification and claims, "and / or" indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.

[0047] The following description, in conjunction with the accompanying drawings, details the multi-stage distillation and purification apparatus for silane provided in this application through specific embodiments and application scenarios.

[0048] Example 1:

[0049] like Figures 1 to 3 As shown in the embodiment of this application, a multi-stage distillation purification device for silane is provided, including a bottom plate 100. A distillation column body 110, a bottom product cooler 120, a reboiler 130, and a top product cooler 140 are disposed on the top of the bottom plate 100. A packed column 150 is disposed on the top of the distillation column body 110. A mounting frame 160 is disposed on the top of the packed column 150, and a condenser 170 is disposed on the top of the mounting frame 160. The mounting frame 160 is connected to the packed column 150 and the condenser 170 via an installation structure, which includes:

[0050] Install component 200;

[0051] Install component 300;

[0052] The upper mounting assembly 200 and the lower mounting assembly 300 have the same structure and are symmetrically arranged at both ends of the mounting frame 160. The two ends of the upper mounting assembly 200 are connected to the mounting frame 160 and the packed tower 150, and the two ends of the lower mounting assembly 300 are connected to the mounting frame 160 and the condenser 170.

[0053] In some embodiments of this application, such as Figure 1 As shown, the above-mentioned multi-stage distillation and purification device for silane improves assembly convenience, stability, and durability through its installation structure. The installation structure consists of an upper installation component 200 and a lower installation component 300, symmetrically positioned at both ends of a mounting frame 160 and connected to the mounting frame 160, the packed tower 150, and the condenser 170, respectively. This installation structure design allows for easier and faster assembly and disassembly by operators. Compared to traditional threaded connections, it reduces thread wear and improves assembly efficiency.

[0054] By optimizing the connection mode between the mounting frame 160 and the filler tower 150 and the condenser 170, the installation efficiency is improved, the negative effects caused by multiple disassembly and assembly are avoided, the durability of the device is improved, the maintenance and replacement frequency is reduced, and the overall operating cost is reduced.

[0055] Embodiment 2:

[0056] The embodiment of the present application provides a disilane multi-stage rectification purification device, in addition to comprising the above technical features, the disilane multi-stage rectification purification device of the embodiment of the present application further comprises the following technical features.

[0057] As shown in Figures 2 to 4 The lower mounting assembly 300 comprises:

[0058] The positioning frame 310 is arranged on the filler tower 150, and the positioning through slot 311 is arranged on the positioning frame 310;

[0059] The positioning plug plate 320 is arranged at the bottom of the mounting frame 160 and cooperates with the positioning through slot 311;

[0060] The fastening structure 400 is arranged on the positioning frame 310 and is used for fixing the positioning frame 310 and the positioning plug plate 320;

[0061] Among them, the positioning plug plate 320 is threadedly connected with the mounting frame 160, and the two positioning frames 310 are arranged at intervals, and the positioning plug plate 320 and the positioning through slot 311 are connected through plug-in connection.

[0062] In the embodiment of the present application, the positioning frame 310 is arranged on the filler tower 150, which serves as the basis for connecting the mounting frame 160, and the positioning through slot 311 is arranged to cooperate with the positioning plug plate 320, which ensures the accurate positioning of the mounting frame 160. The positioning plug plate 320 is threadedly connected with the mounting frame 160, which not only provides sufficient connection strength but also facilitates the replacement of the positioning plug plate 320. The positioning plug plate 320 is arranged at the bottom of the mounting frame 160 and forms plug-in cooperation with the positioning through slot 311, which not only simplifies the installation process but also improves the stability and reliability of the connection. The positioning plug plate 320 is arranged to enable the mounting frame 160 to be easily aligned and fixed on the positioning frame 310, thereby avoiding errors and deviations in the installation process. The fastening structure 400 is arranged on the positioning frame 310 and is used for further fixing the connection between the positioning frame 310 and the positioning plug plate 320, which not only improves the stability of the connection but also enables the mounting frame 160 to be conveniently disassembled and reinstalled when needed.

[0063] Embodiment 3:

[0064] The application embodiment provides a multi-stage rectification purification device for ethylsilane.

[0065] As shown in Figures 2 to 4 The fastening structure 400 comprises:

[0066] The positioning block 410 is arranged on the positioning frame 310 and has a circular cross section, and a positioning through hole 411 penetrating through the positioning frame 310 is arranged on the surface of the positioning block 410;

[0067] The threaded hole 420 is arranged on the positioning plug plate 320;

[0068] The isolation cover 430 is arranged on the positioning block 410 and is threadedly connected with the positioning block 410, and a limiting through hole 431 communicating with the positioning through hole 411 is arranged on the isolation cover 430;

[0069] The fastener 440 comprises a limiting portion 441 and a rod portion 442, and an external thread is arranged on the end of the rod portion 442;

[0070] The rod portion 442 of the fastener 440 is sequentially connected with the limiting through hole 431, the positioning through hole 411 and the threaded hole 420.

[0071] In the application embodiment, the positioning block 410 is arranged on the positioning frame 310 and is fixedly connected with the positioning frame 310, has a circular cross section, and the positioning through hole 411 penetrating through the positioning frame 310 is arranged on the surface of the positioning block 410, thereby providing a channel for the fastener 440 to pass through and connect the positioning plug plate 320. The threaded hole 420 is arranged on the positioning plug plate 320 and is adapted with the external thread of the rod portion 442 of the fastener 440. The isolation cover 430 is arranged on the positioning block 410 and is threadedly connected with the positioning block 410. The limiting through hole 431 communicating with the positioning through hole 411 is arranged on the isolation cover 430, thereby providing an additional limiting effect for the fastener 440, preventing the fastener 440 from loosening or falling off during the connection process, and also playing a protection role to avoid the fastener 440 directly contacting the positioning block 410. The fastener 440 comprises the limiting portion 441 and the rod portion 442, and the external thread is arranged on the end of the rod portion 442. The fastener 440 is sequentially connected with the limiting through hole 431, the positioning through hole 411 and the threaded hole 420 through the rod portion 442, thereby realizing the firm connection between the positioning frame 310 and the positioning plug plate 320.

[0072] The fastening structure 400 realizes the firm connection between the positioning frame 310 and the positioning plugboard 320 through the cooperation of the positioning block 410, the threaded hole 420, the isolation cover 430 and the fastener 440. This connection method not only has the characteristics of simple structure and convenient operation, but also has high connection strength and stability. At the same time, due to the adoption of threaded connection and limiting through hole 431 and other designs, the fastening structure 400 also avoids deviation and error in the connection process, ensuring the accuracy and reliability of installation.

[0073] Further, the diameter of the positioning through hole 411 is greater than the diameter of the rod portion 442 and the limiting through hole 431, and an installation cavity 450 is formed between the positioning through hole 411 and the rod portion 442, and the diameter of the rod portion 442 is the same as the diameter of the limiting through hole 431.

[0074] The diameter of the positioning through hole 411 is greater than the diameter of the rod portion 442, so that the rod portion 442 does not directly contact the inner wall of the positioning through hole 411 during installation, avoiding direct friction caused by threaded connection, thereby effectively reducing wear. Because direct contact with the thread is avoided, the fastening structure 400 can maintain better performance during long-term use, reducing the frequency of maintenance and replacement. At the same time, the design of the positioning through hole 411 allows the fastener 440 to easily pass through the positioning frame 310 and connect with the threaded hole 420 on the positioning plugboard 320, simplifying the installation process and improving installation efficiency.

[0075] Embodiment 4:

[0076] The embodiment of the present application provides a disilane multi-stage rectification purification device, in addition to the above technical features, the disilane multi-stage rectification purification device of the embodiment of the present application also includes the following technical features.

[0077] As shown in Figure 4 , an auxiliary assembly 500 is arranged in the installation cavity 450, and the auxiliary assembly 500 includes:

[0078] A pre-tightening ring 510 is arranged on the outer wall of the rod portion 442;

[0079] A positioning ring 520 is arranged on the inner wall of the positioning through hole 411;

[0080] A spring 530 is arranged between the pre-tightening ring 510 and the positioning ring 520 and is sleeved on the rod portion 442;

[0081] Among them, the pre-tightening ring 510 and the positioning ring 520 are arranged on the outer wall of the rod portion 442 and the inner wall of the positioning through hole 411 respectively.

[0082] In the embodiment of the present application, the pre-tightening ring 510 is arranged on the outer wall of the shank 442 of the fastener 440, and when the fastener 440 is tightened, the pre-tightening ring 510 gradually approaches the positioning ring 520 and compresses the spring 530. After the fastener 440 is tightened, the spring 530 provides a continuous pre-tightening force, thereby enhancing the fastening effect of the connection, not only improving the stability of the connection, but also being able to compensate for the loosening of the connection caused by factors such as temperature changes and material expansion to a certain extent. At the same time, due to the presence of the spring 530, the fastener 440 will be subjected to the elastic force of the spring 530 during disassembly, thereby improving the disassembly efficiency.

[0083] Embodiment 5:

[0084] The embodiment of the present application provides a disilane multi-stage rectification purification device, in addition to the above technical features, the disilane multi-stage rectification purification device of the embodiment of the present application further comprises the following technical features.

[0085] As shown in Figures 2 to 4 The limiting portion 441 is further provided with a hand screw head 460, and the hand screw head 460 is provided with a friction pattern.

[0086] In the embodiment of the present application, the hand screw head 460 arranged on the limiting portion 441 of the fastener 440 and the friction pattern arranged on the hand screw head 460 can provide a more convenient and efficient screwing mode for the user, not only improving the convenience of operation, but also enhancing the safety of use. The design of the hand screw head 460 enables the user to directly screw the fastener 440 by hand, without the need for other tools or equipment, simplifying the operation process and improving the installation and disassembly efficiency. The friction pattern arranged on the hand screw head 460 increases the friction between the hand and the fastener 440, making the screwing process more stable and less likely to slip.

[0087] It should be noted that, in the present document, the terms "comprises", "comprising", or any other variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can also include other elements not expressly listed or inherent to such process, method, article, or apparatus. An element proceeded by "comprises... a" does not, without more constraints, exclude the presence of additional identical elements in the process, method, article, or apparatus that comprises the element. Furthermore, it is to be understood that the method and apparatus of the present application can be carried out by someone other than the person named in the independent claims, and that the scope of the independent claims is not limited to the person named in the independent claims. In addition, it should be noted that the scope of the method and apparatus of the present application is not limited to performing the functions in the order discussed or illustrated, but can also include performing the functions in a substantially simultaneous manner or in a reverse order, for example, the described method can be performed in an order different from that described, and various steps can be added, omitted, or combined, in addition, features described with reference to certain examples can be combined in other examples.

[0088] The embodiments of the present application described above are merely illustrative, and are not intended to limit the present application, and the specific embodiments described above are merely illustrative, and are not intended to limit the present application, and the person of ordinary skill in the art can make many forms under the inspiration of the present application without departing from the purpose of the present application and the scope protected by the claims, and all forms belong to the protection of the present application.

Claims

1. A multi-stage distillation purification apparatus for silane, comprising a bottom plate (100), a distillation column body (110), a bottom product cooler (120), a reboiler (130), and a top product cooler (140) disposed on the top of the bottom plate (100), and a packed column (150) disposed on the top of the distillation column body (110), a mounting frame (160) disposed on the top of the packed column (150), and a condenser (170) disposed on the top of the mounting frame (160), characterized in that: The mounting bracket (160) is connected to the packed tower (150) and the condenser (170) via a mounting structure, the mounting structure comprising: Install components (200); Install the following components (300); The upper mounting assembly (200) and the lower mounting assembly (300) have the same structure and are symmetrically arranged at both ends of the mounting frame (160). The two ends of the upper mounting assembly (200) are connected to the mounting frame (160) and the packed tower (150), and the two ends of the lower mounting assembly (300) are connected to the mounting frame (160) and the condenser (170).

2. The silane multi-stage distillation purification apparatus according to claim 1, characterized in that: The lower mounting component (300) includes: A positioning frame (310) is installed on the packed tower (150), and a positioning through slot (311) is provided on the positioning frame (310); A positioning insert (320) is provided at the bottom of the mounting bracket (160) and cooperates with the positioning through slot (311); A fastening structure (400) is provided on the positioning frame (310) and is used to fix the positioning frame (310) and the positioning insert plate (320); The positioning insert (320) is threadedly connected to the mounting bracket (160), and the two positioning brackets (310) are spaced apart. The positioning insert (320) and the positioning through groove (311) are connected by plugging.

3. The silane multi-stage distillation purification apparatus according to claim 2, characterized in that: The fastening structure (400) includes: The positioning block (410) is set on the positioning frame (310), and its cross-section is circular. Its surface is provided with a positioning through hole (411) that penetrates the positioning frame (310). A threaded hole (420) is provided on the positioning insert plate (320); An isolation cover (430) is disposed on a positioning block (410) and threadedly connected to the positioning block (410), and a limiting through hole (431) communicating with the positioning through hole (411) is provided on the isolation cover (430); The fastener (440) includes a limiting part (441) and a rod part (442), the end of which is provided with an external thread that is adapted to the threaded hole (420); The rod (442) of the fastener (440) passes through the limiting through hole (431) and the positioning through hole (411) in sequence and then connects to the threaded hole (420).

4. The silane multi-stage distillation purification apparatus according to claim 3, characterized in that: The diameter of the positioning through hole (411) is larger than the diameter of the rod (442) and the limiting through hole (431), and forms an installation cavity (450) between the rod (442) and the rod (442), and the diameter of the rod (442) is the same as the diameter of the limiting through hole (431).

5. The silane multi-stage distillation purification apparatus according to claim 4, characterized in that: An auxiliary component (500) is provided within the mounting cavity (450), and the auxiliary component (500) includes: A pre-tightening ring (510) is provided on the outer wall of the rod (442); A positioning pressure ring (520) is disposed on the inner wall of the positioning through hole (411); A spring (530) is disposed between the preload ring (510) and the positioning ring (520) and sleeved on the outside of the rod (442); There are gaps between the pre-tightening ring (510) and the positioning through hole (411) and between the positioning ring (520) and the rod (442).

6. The silane multi-stage distillation purification apparatus according to claim 5, characterized in that: The limiting part (441) is also provided with a hand-tightening head (460), and the hand-tightening head (460) is provided with friction texture.

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