Automatic cleaning device for laser platform deck

By designing an automatic cleaning device for the laser stage, the problem of dust clogging the vacuum holes was solved, achieving automated cleaning, improving the continuity of equipment operation and production efficiency, and ensuring the stability of the laser process and product yield.

CN223775460UActive Publication Date: 2026-01-09KOER MICROELECTRONICS EQUIP (XIAMEN) CO LTD
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Patent Information

Application Number
CN202520021801.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-01-06
Publication Date
2026-01-09
Estimated Expiration
2035-01-06

AI Technical Summary

Technical Problem

Dust generated during the laser process can easily clog vacuum holes, leading to unstable vacuum adsorption in the equipment, affecting equipment operation and production efficiency. Furthermore, the untimely and uncertain nature of manual cleaning affects the continuity of the equipment.

Method used

Design an automatic cleaning device for a laser stage, comprising a dust discharge module and a dust washing module. The automatic cleaning is achieved through components such as a vacuum generator, a suction nozzle, a cleaning brush head, and a displacement device. The cleaning process includes washing and dust discharge.

Benefits of technology

It enables automated cleaning of the laser stage, improves the continuity of equipment operation and production efficiency, ensures normal vacuum adsorption function, and enhances product yield and processing accuracy.

✦ Generated by Eureka AI based on patent content.

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    Figure CN223775460U_ABST
Patent Text Reader

Abstract

The utility model provides an automatic cleaning device for a laser carrying table, which is arranged on one side of the laser carrying table and comprises a dust discharging module and a dust washing module, the dust discharging module is arranged on one side of the dust washing module; the dust washing module is used for cleaning dust solidified and attached to the laser carrying table; and the dust discharging module is configured to discharge the dust cleaned by the dust brushing module. Through the automatic cleaning function of the newly added platform, manual operation of personnel is avoided as much as possible, convenience is achieved, and meanwhile time and cost are saved.
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Description

Technical Field

[0001] This application relates to the field of chip processing technology, specifically to an automatic cleaning device for a laser stage. Background Technology

[0002] The crystals first need to be transferred from the wafer to the iron ring. Then, the surface of each crystal needs to be laser-etched to track the batch number of the product later. The laser-etched surface of the product has a fixed surface. During the laser-etching process, dust will inevitably be generated and left on the laser platform. After a certain period of time, it can easily block the vacuum holes of the platform, causing problems with the vacuum adsorption of the platform. In severe cases, it will affect the vacuum circuit of the whole machine, which will affect the downtime of the equipment and thus affect the production efficiency.

[0003] Current laser engraving and packaging equipment for chips has the following drawbacks:

[0004] (1) Dust will inevitably be generated during the laser process. Dust will always remain on the laser platform, which can easily cause the dust to block the vacuum holes of the platform, thus causing the equipment to alarm for abnormal vacuum. This will lead to a decrease in equipment yield, low production efficiency, and even product loss due to unstable vacuum establishment inside the machine.

[0005] (2) Personnel need to receive the cleaning platform regularly. However, the uncertainty and untimeliness of personnel cleaning cannot solve this problem, and it also affects the continuity of the equipment. Utility Model Content

[0006] To address the aforementioned technical problems, this application proposes an automatic cleaning device for a laser stage. The cleaning device is disposed on one side of the laser stage and includes: a dust discharge module and a dust washing module. The dust discharge module is disposed on one side of the dust washing module. The dust washing module is configured to clean the dust that has solidified and adhered to the laser stage. The dust discharge module is configured to discharge the dust that has been cleaned by the dust washing module.

[0007] By incorporating a dust removal module and a dust washing module, with the dust removal module positioned alongside the dust washing module, a complete cleaning process is established, where dust is washed before being removed. This effectively addresses the problem of dust adhering to and solidifying on the laser stage, achieving comprehensive and orderly automatic cleaning. This ensures the cleanliness of the laser stage, facilitating subsequent laser-related operations and preventing adverse effects of dust on the laser process and related processes, such as preventing dust interference with laser beams and affecting processing accuracy.

[0008] Preferably, the dust removal module includes: a vacuum generator, a discharge pipe, and a suction nozzle; the two ends of the vacuum generator are respectively connected to the discharge pipe and the suction nozzle; the suction nozzle is close to the laser stage.

[0009] Vacuum generator: As a key component providing suction, it can generate sufficient negative pressure to create the driving conditions for dust discharge, so that the dust can be smoothly sucked away from the laser stage, ensuring the effective realization of the dust discharge function.

[0010] Discharge pipe: It serves to connect the vacuum generator and the suction nozzle, providing a transmission channel for the sucked-out dust. This ensures that the dust can be smoothly transported to the outside after being sucked out from the suction nozzle, preventing dust leakage or accumulation inside the device during the discharge process and maintaining the smooth operation of the entire discharge system.

[0011] The suction nozzle is positioned close to the laser stage, allowing for precise location of dust particles. By getting as close as possible to the dust source, the efficiency and effectiveness of suction are improved. This allows for more effective removal of residual dust and impurities after washing, further ensuring the cleanliness of the laser stage after cleaning.

[0012] Preferably, the dust washing module includes: an electric cleaning device and a displacement device for moving the electric cleaning device.

[0013] Electric cleaning device: It is the core component for physically cleaning the solidified dust on the laser platform. Through its own operation, it can directly act on the dust and use mechanical force to peel and remove the dust from the platform. Compared with manual cleaning, it is more efficient, stable and can maintain a relatively consistent cleaning force, which helps to improve the overall cleaning quality.

[0014] Displacement device: Drives the electric cleaning device to move, ensuring that the cleaning device can cover different areas of the laser stage, so that the entire stage can be cleaned more thoroughly, avoiding cleaning dead corners, expanding the cleaning range, and ensuring that dust in all parts of the stage can be effectively handled.

[0015] Preferably, the electric cleaning device includes: a cleaning brush head and a vibration motor; the vibration motor is connected to the cleaning brush head; the vibration motor is configured to enable the cleaning brush head to reciprocate in the XY direction.

[0016] With the above technical solution, the cleaning brush head comes into direct contact with the dust on the laser stage. Through the structure of the brush head bristles, it can wipe and scrape the dust, removing the attached dust from the surface of the stage. Its material, shape and other design will affect the actual cleaning effect. A suitable cleaning brush head can complete the cleaning task more efficiently.

[0017] Furthermore, the vibration motor is configured to enable the cleaning brush head to reciprocate in the XY direction. This reciprocating motion increases the friction and force between the brush head and the dust, making it easier for the dust that was originally firmly attached to the platform to be removed by the brush head. Especially for dust with strong coagulation, vibration can effectively break its adhesion, enhance the cleaning effect, and improve cleaning efficiency.

[0018] Preferably, the displacement device includes a slide rail and an adjustment mechanism; the adjustment mechanism drives the electric cleaning device to move along the slide rail.

[0019] In the above technical solution, the slide rail provides guidance and support for the movement of the electric cleaning device, enabling the cleaning device to move smoothly on the laser platform along a predetermined trajectory, ensuring the accuracy and stability of its movement process, avoiding deviation, shaking, and other situations, thereby ensuring the accuracy and comprehensiveness of the cleaning range.

[0020] Preferably, the adjustment mechanism includes an X-axis lifting cylinder and a Y-axis lifting cylinder.

[0021] In the above technical solution, the X-axis lifting cylinder and the Y-axis lifting cylinder can precisely control the position changes of the electric cleaning device in different axes. They can flexibly adjust the distance between the cleaning device and the laser stage, as well as the specific coordinate position on the stage, to adapt to the cleaning needs of laser stages of different specifications and shapes, as well as dust of different thicknesses and accumulation degrees, thereby improving the applicability of the device and the accuracy of cleaning.

[0022] Preferably, the vacuum generator has a gas supply pressure of 0.4 MPa and an intake flow rate of 450 L / min.

[0023] Preferably, the cleaning brush head uses DuPont bristles.

[0024] Compared with the prior art, the beneficial results of this application are as follows:

[0025] (1) Automatic cleaning of the laser platform is achieved. After the product is unloaded, the platform will automatically clean itself at a fixed position. The cleaning process includes a lifting cylinder controlling an electric toothbrush to descend and scrub the dust that has solidified and adhered to the platform, followed by a high-flow-rate vacuum to remove the dust and discharge it to the exhaust gas outlet. Each platform can automatically complete the cleaning, reducing the need for manual operation, avoiding equipment downtime due to untimely manual cleaning, improving the continuity of equipment operation, and thus significantly improving production efficiency.

[0026] (2) The automatic cleaning function removes dust from the platform in a timely manner, effectively preventing dust from clogging the vacuum holes, ensuring the normal operation of the platform's vacuum adsorption function, ensuring the stability and accuracy of the laser process, and thus improving the product yield.

[0027] (3) Integrating the cleaning function into the laser platform's workflow allows the equipment to automatically clean itself after completing laser and material unloading operations, forming a coherent and efficient production process and improving the coordination and smoothness of the entire production system. Attached Figure Description

[0028] The accompanying drawings are included to provide a further understanding of the embodiments and are incorporated in and constitute a part of this specification. The drawings illustrate embodiments and, together with the description, serve to explain the principles of this application. Other embodiments and many anticipated advantages of these embodiments will be readily recognized as they become better understood through reference to the following detailed description. Elements in the drawings are not necessarily to scale. The same reference numerals refer to corresponding similar parts.

[0029] Figure 1 This is a schematic diagram of the structure of an automatic cleaning device for a laser stage according to an embodiment of this application;

[0030] Figure 2 This is a flowchart illustrating the operation of an automatic cleaning device for a laser stage according to an embodiment of this application.

[0031] Explanation of reference numerals in the attached drawings: 1. Laser stage; 2. Dust removal module; 3. Dust washing module; 2a. Suction nozzle; 2b. Vacuum generator; 2c. Discharge pipe; 3a. Cleaning brush head; 3b. Vibration motor; 3c. Displacement device. Detailed Implementation

[0032] In the following detailed description, reference is made to the accompanying drawings, which form part of the detailed description and illustrate illustrative specific embodiments in which the present application may be practiced. In this regard, directional terms such as “top,” “bottom,” “left,” “right,” “up,” “down,” etc., are used with reference to the orientation of the described figures. Because components of the embodiments can be positioned in several different orientations, directional terms are used for illustrative purposes and are by no means limiting. It should be understood that other embodiments may be utilized or logical changes may be made without departing from the scope of the present application. Therefore, the following detailed description should not be taken in a limiting sense, and the scope of the present application is defined by the appended claims.

[0033] like Figure 1 As shown, an automatic cleaning device for a laser stage 1 is provided. The cleaning device is located on one side of the laser stage 1 and includes: a dust discharge module 2 and a dust washing module 3. The dust discharge module 2 is located on one side of the dust washing module 3. The dust washing module 3 is configured to clean the dust that has solidified and adhered to the laser stage 1. The dust discharge module 2 is configured to discharge the dust after it has been cleaned by the dust washing module 3.

[0034] By setting up a dust discharge module 2 and a dust washing module 3, and placing the dust discharge module 2 on one side of the dust washing module 3, a complete cleaning process is formed, which first washes and then discharges the dust. This effectively solves the problem of cleaning dust that has solidified and adhered to the laser stage 1, achieving a more comprehensive and orderly automatic cleaning of the laser stage 1. This ensures the cleanliness of the laser stage 1, which helps it to perform corresponding laser-related operations normally and accurately in the future, and avoids the adverse effects of dust on the laser process and related processes, such as preventing dust from interfering with the laser beam and affecting processing accuracy.

[0035] Preferably, the dust removal module 2 includes: a vacuum generating device 2b, a discharge pipe 2c, and a suction nozzle 2a; the two ends of the vacuum generating device 2b are respectively connected to the discharge pipe 2c and the suction nozzle 2a; the suction nozzle 2a is close to the laser stage 1.

[0036] Vacuum generator 2b: As a key component providing suction, it can generate sufficient negative pressure to create the driving conditions for dust discharge, so that the dust can be smoothly sucked away from the laser stage 1, ensuring the effective realization of the dust discharge function.

[0037] Discharge pipe 2c: It serves to connect the vacuum generator 2b and the suction nozzle 2a, providing a transmission channel for the sucked-out dust. It ensures that the dust can be smoothly transported to the outside after being sucked out from the suction nozzle 2a, avoiding leakage or accumulation of dust inside the device during the discharge process, and maintaining the smooth operation of the entire discharge system.

[0038] Suction nozzle 2a: It is close to the laser stage 1 and can accurately locate the dust. It gets as close to the dust source as possible, thereby improving the efficiency and effect of suction. It can more effectively remove the dust and impurities remaining after washing, and further ensure the cleanliness of the laser stage 1 after cleaning.

[0039] Preferably, the dust washing module 3 includes: an electric cleaning device and a displacement device 3c for moving the electric cleaning device.

[0040] Electric cleaning device: This is the core component for physically cleaning the solidified dust on the laser stage 1. Through its own operation, it can directly act on the dust and use mechanical force to peel and remove the dust from the stage. Compared with manual cleaning, it is more efficient, stable and can maintain a relatively consistent cleaning force, which helps to improve the overall cleaning quality.

[0041] Displacement device 3c: Drives the electric cleaning device to move, ensuring that the cleaning device can cover different areas of the laser stage 1, so that the entire stage can be cleaned more thoroughly, avoiding cleaning dead corners, expanding the cleaning range, and ensuring that dust in all parts of the stage can be effectively handled.

[0042] Preferably, the electric cleaning device includes: a cleaning brush head 3a and a vibration motor 3b; the vibration motor 3b is connected to the cleaning brush head 3a; the vibration motor 3b is configured to realize the reciprocating motion of the cleaning brush head 3a in the XY direction.

[0043] Through the above technical solution, the cleaning brush head 3a comes into direct contact with the dust on the laser stage 1. Through the structure of the brush head bristles, it can wipe and scrape the dust, removing the attached dust from the surface of the stage. Its material, shape and other design will affect the actual cleaning effect. A suitable cleaning brush head 3a can complete the cleaning task more efficiently.

[0044] Furthermore, the vibration motor 3b is configured to realize the reciprocating motion of the cleaning brush head 3a in the XY direction. This reciprocating motion can increase the friction and force between the brush head and the dust, making it easier for the dust that was originally firmly attached to the platform to be removed by the brush head. Especially for dust with strong coagulation, vibration can effectively break its attachment state, enhance the cleaning effect, and improve cleaning efficiency.

[0045] Preferably, the displacement device 3c includes: a slide rail and an adjustment mechanism; the adjustment mechanism drives the electric cleaning device to move along the slide rail.

[0046] In the above technical solution, the slide rail provides guidance and support for the movement of the electric cleaning device, enabling the cleaning device to move smoothly on the laser stage 1 along a predetermined trajectory, ensuring the accuracy and stability of its movement process, avoiding deviation, shaking, etc., thereby ensuring the accuracy and comprehensiveness of the cleaning range.

[0047] Preferably, the adjustment mechanism includes an X-axis lifting cylinder and a Y-axis lifting cylinder.

[0048] In the above technical solution, the X-axis lifting cylinder and the Y-axis lifting cylinder can precisely control the position changes of the electric cleaning device in different axes, and can flexibly adjust the distance between the cleaning device and the laser stage 1 as well as the specific coordinate position on the stage, so as to adapt to the cleaning needs of laser stages 1 of different specifications and shapes and dust of different thicknesses and accumulation degrees, thereby improving the applicability of the device and the accuracy of cleaning.

[0049] like Figure 2 As shown, in one specific embodiment,

[0050] Product laser engraving and unloading: This is the starting point of the process, indicating that the product is unloaded from the laser stage after the laser engraving operation is completed.

[0051] The displacement device moves to the working position: After the product is discharged, the displacement device moves to the working position to prepare for the cleaning operation.

[0052] The vibration motor starts, and the cleaning brush head cleans the residual dust: After the displacement device is in place, the vibration motor starts, driving the cleaning brush head to clean the residual dust on the laser stage.

[0053] The vacuum generator is activated to expel the dust: After the cleaning brush head cleans the dust, the vacuum generator is activated to expel the cleaned dust.

[0054] Once cleaning is complete, the vacuum generator and vibration motor are turned off, and the displacement device moves to the standby position. Finally, after the dust is discharged, the cleaning operation is complete, the vacuum generator and vibration motor are turned off, and the displacement device moves back to the standby position, awaiting the next cleaning operation.

[0055] Compared to existing products, this device adds a platform cleaning function after the product is unloaded. After the product is laser-etched and ejected, the corresponding platform retains laser-etched dust. The platform is cleaned at a fixed location. The cleaning is performed by an electric toothbrush that scrubs the platform after the cylinder descends (because the laser-etched dust solidifies and adheres to the platform). After scrubbing, the dust is sucked away by a high-flow-rate vacuum pump on the side and discharged to the corresponding exhaust outlet. This achieves automatic cleaning of each platform, reduces the need for manual operation, and improves the yield of the equipment.

[0056] It is obvious that those skilled in the art can make various modifications and alterations to the embodiments of this application without departing from the spirit and scope of this application. In this way, this application also aims to cover such modifications and alterations if they fall within the scope of the claims and their equivalents. The word "comprising" does not exclude the presence of other elements or steps not listed in the claims. The simple fact that certain measures are described in mutually different dependent claims does not indicate that a combination of these measures cannot be used for profit. Any reference numerals in the claims should not be considered limiting in scope.

Claims

1. An automatic cleaning device for a laser stage, disposed on one side of the laser stage, characterized in that, include: Dust discharge module and dust washing module; The dust discharge module is located on one side of the dust washing module; the dust washing module is configured to clean the dust that has solidified and adhered on the laser stage; the dust discharge module is configured to discharge the dust that has been cleaned by the dust washing module.

2. The automatic cleaning device for the laser stage according to claim 1, characterized in that, The dust removal module includes: a vacuum generator, a discharge pipe, and a suction nozzle; the two ends of the vacuum generator are respectively connected to the discharge pipe and the suction nozzle; the suction nozzle is close to the laser stage.

3. The automatic cleaning device for the laser stage according to claim 2, characterized in that, The dust washing module includes: an electric cleaning device and a displacement device for moving the electric cleaning device.

4. The automatic cleaning device for the laser stage according to claim 3, characterized in that, The electric cleaning device includes a cleaning brush head and a vibration motor; the vibration motor is connected to the cleaning brush head; the vibration motor is configured to enable the cleaning brush head to reciprocate in the XY direction.

5. The automatic cleaning device for the laser stage according to claim 3, characterized in that, The displacement device includes a slide rail and an adjustment mechanism; the adjustment mechanism drives the electric cleaning device to move along the slide rail.

6. The automatic cleaning device for a laser stage according to claim 5, characterized in that, The adjustment mechanism includes an X-axis lifting cylinder and a Y-axis lifting cylinder.

7. The automatic cleaning device for a laser stage according to claim 2, characterized in that, The vacuum generator has a gas supply pressure of 0.4 MPa and an intake flow rate of 450 L / min.

8. The automatic cleaning device for a laser stage according to claim 4, characterized in that, The cleaning brush head uses DuPont bristles.