Driving structure of wafer production dust removal device

Abstract

The utility model discloses a driving structure of a wafer production dust removal device, which comprises a bottom frame, four corners of the bottom frame are provided with upright columns extending upwards, one end of each upright column far away from the bottom frame is provided with an upper frame body, and the bottom frame, the upright columns and the upper frame body form a mounting frame; a dust removal mechanism is arranged in the mounting frame, a moving mechanism is arranged on the dust removal mechanism, an air pressure assembly is arranged on the moving mechanism, and the dust removal mechanism, the moving mechanism and the air pressure assembly are arranged in the mounting frame; a supporting transverse plate is arranged between the middles of every two adjacent stand columns, the other supporting transverse plate is correspondingly arranged between the two stand columns on the other opposite side in a matched mode, the two supporting transverse plates are oppositely arranged in a matched mode, a transverse carrying plate is arranged between the two supporting transverse plates, and a part of an air pressure assembly is arranged on the transverse carrying plate. The moving mechanism is arranged between the supporting transverse plates on the two sides and comprises a concave rail and a motor. Positive and negative air channels isolated by gas and electricity are clean, and the stability and the yield of product processing are improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to the air duct structure of a cleaning device for semiconductor chip manufacturing. Background Technology

[0002] A wafer is a silicon chip used in the fabrication of silicon semiconductor integrated circuits. Wafers are used to produce integrated circuit chips. In the semiconductor manufacturing process, wafers are placed in wafer cassettes and transported to carriers at different load ports via AMHS (Automated Material Handling System). After a period of time, dust will remain on the surface of the carriers, affecting the yield of wafer products.

[0003] To maintain the cleanliness of the carriers, the carriers of semiconductor processing equipment need to be cleaned regularly. Existing cleaning methods mostly use manual cleaning and brush cleaning. Manual cleaning can only be done during equipment maintenance, which is time-consuming, labor-intensive, inefficient, and not conducive to the overall working environment. It is also impossible to control the cleanliness. Brush cleaning is a contact method, which poses the risk of scratching the carriers and generating static electricity. Utility Model Content

[0004] In order to solve the problems existing in the prior art, the purpose of this utility model is to provide an air duct structure for a cleaning device for semiconductor chip production, which adopts positive and negative air duct cleaning with air-electric isolation to improve the stability and yield of product processing.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A drive structure for a dust removal device in wafer manufacturing includes a base frame, four corner posts extending upwards and standing upright, and an upper frame at the end of each post away from the base frame. The base frame, posts, and upper frame together form an installation frame. A dust removal mechanism is installed within the installation frame, a moving mechanism is installed above the dust removal mechanism, and a pneumatic assembly is installed above the moving mechanism. The dust removal mechanism, the moving mechanism, and the pneumatic assembly are all housed within the installation frame.

[0007] A support plate is provided between the middle of two adjacent columns, and another matching support plate is provided between the two columns on the opposite side. The two support plates are matched and opposite to each other, and a cross plate is provided between the two support plates. Part of the pneumatic assembly is provided on the cross plate.

[0008] The moving mechanism is located between the support cross plates on both sides, and includes a concave rail and a motor;

[0009] The concave rail is provided with a motor at one end and a gear at the other end, a transmission belt is sleeved between the output shaft of the motor and the gear, the transmission belt is arranged in the groove of the concave rail, and a transmission wheel on the output shaft of the motor is in gear transmission connection with the transmission belt.

[0010] Further, in some embodiments, a sliding groove parallel to the transmission belt is formed in the bottom of the concave rail groove, a hanging concave sliding seat is sleeved on the concave rail, a hanging beam is arranged at the top end of the hanging concave sliding seat, and the hanging concave sliding seat is hung on the concave rail through the hanging beam.

[0011] Further, in some embodiments, a sliding groove parallel to the transmission belt is formed in the bottom of the concave rail groove, a hanging concave sliding seat is sleeved on the concave rail, a hanging beam is arranged at the top end of the hanging concave sliding seat, and the hanging concave sliding seat is hung on the concave rail through the hanging beam.

[0012] Further, in some embodiments, the air pressure assembly includes a positive pressure fan and a negative pressure fan, a horizontal loading plate is arranged between the two supporting horizontal plates, the two ends of the horizontal loading plate are fixedly arranged on the two supporting horizontal plates, a negative pressure high-efficiency filter bin is arranged on the upper surface of the horizontal loading plate, a negative pressure fan is arranged on the upper surface of the negative pressure high-efficiency filter bin, a negative pressure fan air inlet shell is sleeved on the outer side of the negative pressure fan, a negative pressure fan air outlet shell is sleeved on the top of the negative pressure fan, and the negative pressure high-efficiency filter bin is connected with the air suction cylinder of the dust removal mechanism through a pipeline.

[0013] Further, in some embodiments, the upper frame body is provided with a positive pressure high-efficiency filter bin, the lower surface of the positive pressure high-efficiency filter bin is provided with a positive pressure fan, the upper part of the positive pressure fan is sleeved with a positive pressure fan air inlet shell, the lower part of the positive pressure fan is sleeved with a positive pressure fan air outlet shell, and the positive pressure fan is connected with the air inlet cylinder of the dust removal mechanism through a pipeline.

[0014] Further, in some embodiments, the dust removal mechanism is hung on the hanging concave sliding seat of the moving mechanism through the hanging bracket, and the dust removal mechanism is suspended on the bottom frame.

[0015] The dust removal mechanism is connected with the air pressure assembly through a pipeline.

[0016] The horizontal loading plate is provided with a battery, and the battery is arranged below the upper frame body.

[0017] The application adopts the suspended dust removal head (dust removal assembly) for cleaning, cleans the carrier, and sets a high-efficiency filter on the suction fan (negative pressure fan) to filter dust, so that two fans provide a positive pressure or negative pressure air source without external air source. In addition, a battery is used for power supply without external power supply. The fan and the motor are both 24 volts, and the whole device is isolated from external air and electricity.

[0018] The dust removal mechanism is arranged on the moving mechanism (concave rail) and can move back and forth, the fan is connected with the dust removal head through the air guide pipe, the dust removal head (dust removal mechanism) is suspended on the carrier, and no contact occurs between the dust removal head (dust removal mechanism) and the carrier, so that the carrier surface is avoided, and intelligent cleaning is realized. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is a three-dimensional schematic view of the embodiment of the utility model;

[0020] Figure 2 It is a structural schematic view of the embodiment of the utility model;

[0021] Figure 3 It is an assembly schematic view of the moving mechanism part of the embodiment of the utility model;

[0022] Figure 4 It is a structural schematic view of the moving mechanism part of the embodiment of the utility model;

[0023] Figure 5 It is an assembly schematic view of the air pressure assembly part of the embodiment of the utility model.

[0024] Marking in the drawing:

[0025] Stand 11, upper frame body 12, support cross plate 13, cross carrier plate 14, bottom frame 21, dust removal mechanism 31, moving mechanism 51, motor 52, gear 53, inner tooth belt 54, concave rail 55, sliding groove 56, hanging concave sliding seat 57, clamping seat 58, air pressure assembly 61, positive pressure fan 62, negative pressure fan 63, positive pressure fan exhaust shell 64, positive pressure fan air inlet shell 65, negative pressure high-efficiency filtering bin 66, negative pressure fan air inlet shell 67, negative pressure fan exhaust shell 68, positive pressure high-efficiency filtering bin 69, battery 81, duct 82, hanging frame 84, and mounting beam 85. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical scheme and advantages of the utility model more clear, the following will combine the specific embodiment of the utility model and the corresponding drawings to clearly and completely describe the technical scheme of the utility model. Obviously, the described embodiment is only a part of the embodiment of the utility model, not all the embodiments. Based on the embodiment in the utility model, all other embodiments obtained by the person skilled in the art without creative labor belong to the protection scope of the utility model.

[0027] In the description of the utility model, it is necessary to explain that the directions or position relations of the terms "horizontal", "horizontal", "upper", "lower", "front", "rear", "inner", "outer" and the like are based on the directions or position relations shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as limiting the utility model. In addition, the terms "first", "second" and the like are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. In the description of the utility model, the meaning of "a plurality of" is two or more, unless otherwise specifically limited.

[0028] Please refer to the drawings, the application includes the bottom frame 21, the four corners of the bottom frame 21 are provided with the vertical column 11 extending upward, the end away from the bottom frame 21 of the vertical column 11 is provided with the upper frame body 12, the bottom frame 21, the vertical column 11 and the upper frame body 12 form the mounting frame, the mounting frame is provided with the dust removal mechanism 31, the upper surface of the dust removal mechanism 31 is provided with the moving mechanism 51, the upper surface of the moving mechanism 51 is provided with the air pressure assembly 61, the dust removal mechanism 31, the moving mechanism 51 and the air pressure assembly 61 are arranged in the mounting frame.

[0029] The middle part between the two adjacent vertical columns 11 is provided with a support transverse plate 13, the other two vertical columns 11 opposite each other are provided with a matching corresponding other support transverse plate 13, the two support transverse plates 13 are oppositely arranged, the two support transverse plates 13 are provided with a transverse plate 14, part of the air pressure assembly 61 is arranged on the transverse plate 14, the battery 81 is arranged on the transverse plate 14, and the battery 81 is arranged below the upper frame body 12.

[0030] Further, in one embodiment, the dust removal mechanism 31 is hung on the hanging recessed seat 57 of the moving mechanism 51 through the hanging bracket 84, and the dust removal mechanism 31 is suspended on the bottom frame 21; the dust removal mechanism 31 is connected with the air pressure assembly 61 through the conduit 82.

[0031] The moving mechanism 51 is arranged between the two side support transverse plates 13, and the moving mechanism 51 comprises a concave rail 55 and a motor 52; specifically, the concave rail 55 is arranged between the two side support transverse plates 13, the two ends of the concave rail 55 are fixedly arranged on the two side support transverse plates 13, one end of the concave rail 55 is provided with the motor 52, the other end of the concave rail 55 is provided with a gear 53, an inner tooth belt 54 is sleeved between the output shaft of the motor 52 and the gear 53, the inner tooth belt 54 is arranged in the groove of the concave rail 55, and a transmission wheel on the output shaft of the motor 52 is in gear transmission connection with the inner tooth belt 54.

[0032] The bottom of the groove of the concave rail 55 is provided with a sliding groove 56 parallel to the inner tooth belt 54, the concave rail 55 is sleeved with a hanging concave sliding seat 57, the top end of the hanging concave sliding seat 57 is provided with a hanging beam 85, and the hanging concave sliding seat 57 is hung on the concave rail 55 through the hanging beam 85; the groove bottom surface of the hanging concave sliding seat 57 is provided with a clamping seat 58 matched with the inner tooth belt 54, the inner tooth belt 54 is clamped and arranged in the clamping seat 58, and the clamping seat 58 is arranged in close cooperation with the inner tooth belt 54; the clamping seat 58 is inserted into the sliding groove 56, and the lower surface of the hanging concave sliding seat 57 is fixedly provided with a hanging frame 84.

[0033] The motor 52 drives the clamping seat 58 to move back and forth in the sliding groove 56 through the inner tooth belt 54, the clamping seat 58 drives the hanging concave sliding seat 57 to move back and forth on the concave rail 55, and then drives the dust removal mechanism 31 to move back and forth through the hanging frame 84.

[0034] The air pressure assembly 61 comprises a positive pressure fan 62 and a negative pressure fan 63, the two sides of the support horizontal plate 13 are provided with a horizontal loading plate 14, the two ends of the horizontal loading plate 14 are fixedly arranged on the two sides of the support horizontal plate 13, the upper surface of the horizontal loading plate 14 is provided with a negative pressure high-efficiency filtering bin 66, the upper surface of the negative pressure high-efficiency filtering bin 66 is provided with the negative pressure fan 63, the outer side of the negative pressure fan 63 is sleeved with a negative pressure fan air inlet shell 67, the top of the negative pressure fan 63 is sleeved with a negative pressure fan air outlet shell 68, and the negative pressure high-efficiency filtering bin 66 is connected with the air suction cylinder on the dust removal mechanism 31 through a pipeline 82.

[0035] The lower surface of the upper frame body 12 is provided with a positive pressure high-efficiency filtering bin 69, the lower surface of the positive pressure high-efficiency filtering bin 69 is provided with the positive pressure fan 62, the upper portion of the positive pressure fan 62 is sleeved with a positive pressure fan air inlet shell 65, the lower portion of the positive pressure fan 62 is sleeved with a positive pressure fan air outlet shell 64, and the positive pressure fan 62 is connected with the air inlet cylinder on the dust removal mechanism 31 through the pipeline 82.

[0036] The above detailed description includes the reference to the drawings, which form a part of the detailed description. By way of illustration, the drawings show certain embodiments in which the present application can be practiced. These embodiments are also referred to herein as "examples." Other elements not shown or described can also be present in the examples. The present application is not limited to the elements shown or described but rather the present application can include any combination of elements shown or described.

Claims

1. A driving structure of a wafer production dust removing apparatus, comprising: The bottom frame (21) is provided with upwardly extending vertical columns (11) at four corners, and the end of the vertical column (11) away from the bottom frame (21) is provided with an upper frame body (12), and the bottom frame (21), the vertical column (11) and the upper frame body (12) constitute a mounting frame; characterized in that a dust removal mechanism (31) is arranged in the mounting frame, the upper surface of the dust removal mechanism (31) is provided with a moving mechanism (51), and the upper surface of the moving mechanism (51) is provided with a gas pressure assembly (61), and the dust removal mechanism (31), the moving mechanism (51) and the gas pressure assembly (61) are arranged in the mounting frame; Supporting cross plates (13) are arranged between the middle portions of two adjacent vertical columns (11), and another supporting cross plate (13) is arranged between the other two vertical columns (11) in a matched manner, the two supporting cross plates (13) are arranged in a matched and opposite manner, and a cross loading plate (14) is arranged between the two supporting cross plates (13), and part of the components of the gas pressure assembly (61) are arranged on the cross loading plate (14). The moving mechanism (51) is arranged between the two supporting cross plates (13), and the moving mechanism (51) comprises a concave rail (55) and a motor (52). The concave rail (55) is arranged between the two supporting cross plates (13), and the two ends of the concave rail (55) are fixedly arranged on the two supporting cross plates (13), respectively, one end of the concave rail (55) is provided with the motor (52), the other end of the concave rail (55) is provided with a gear (53), an inner tooth belt (54) is sleeved between the output shaft of the motor (52) and the gear (53), the inner tooth belt (54) is arranged in the groove of the concave rail (55), and a transmission wheel on the output shaft of the motor (52) is in gear transmission connection with the inner tooth belt (54).

2. The driving structure of a wafer production dust removal device according to claim 1, wherein The bottom of the groove of the concave rail (55) is provided with a sliding groove (56) parallel to the inner tooth belt (54), the concave rail (55) is sleeved with a hanging concave sliding seat (57), the top end of the hanging concave sliding seat (57) is provided with a hanging beam (85), and the hanging concave sliding seat (57) is hung on the concave rail (55) through the hanging beam (85).

3. The drive structure of a wafer production dust removal apparatus according to claim 2, wherein The groove bottom surface of the hanging concave sliding seat (57) is provided with a clamping seat (58) matched with the inner tooth belt (54), the inner tooth belt (54) is clamped in the clamping seat (58), and the clamping seat (58) and the inner tooth belt (54) are in close fitting arrangement; the clamping seat (58) is inserted into the sliding groove (56), and the lower surface of the hanging concave sliding seat (57) is fixedly provided with a hanging bracket (84).

4. The driving structure of a wafer production dust removal device according to claim 1, wherein The gas pressure assembly (61) comprises a positive pressure fan (62) and a negative pressure fan (63), the cross loading plate (14) is arranged between the two supporting cross plates (13), the two ends of the cross loading plate (14) are fixedly arranged on the two supporting cross plates (13), respectively, the upper surface of the cross loading plate (14) is provided with a negative pressure high-efficiency filtering bin (66), the upper surface of the negative pressure high-efficiency filtering bin (66) is provided with the negative pressure fan (63), the outer side of the negative pressure fan (63) is sleeved with a negative pressure fan air inlet shell (67), the top of the negative pressure fan (63) is sleeved with a negative pressure fan air outlet shell (68), and the negative pressure high-efficiency filtering bin (66) is connected with the air suction cylinder on the dust removal mechanism (31) through a pipeline (82).

5. The driving structure of a wafer production dust removal device according to claim 1, wherein The lower surface of the upper frame body (12) is provided with a positive pressure high efficiency filtering bin (69), the lower surface of the positive pressure high efficiency filtering bin (69) is provided with a positive pressure fan (62), the upper part of the positive pressure fan (62) is sleeved with a positive pressure fan air inlet shell (65), the lower part of the positive pressure fan (62) is sleeved with a positive pressure fan air outlet shell (64), and the positive pressure fan (62) is connected with the air inlet cylinder on the dust removal mechanism (31) through a pipeline (82).

6. The driving structure of a wafer production dust removal device according to claim 1, wherein The dust removal mechanism (31) is hung on the hanging recessed slide seat (57) of the moving mechanism (51) through a hanging frame (84), and the dust removal mechanism (31) is suspended on the bottom frame (21); The dust removal mechanism (31) is connected with the air pressure assembly (61) through the pipeline (82); The horizontal loading plate (14) is provided with a battery (81), and the battery (81) is arranged below the upper frame body (12).

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