Wafer hanging tool with hanging vertical adjusting device
By installing a lifting module and adjusting bolts on the wafer rack, the tilting problem caused by unstable center of gravity was solved, enabling rapid and precise verticality adjustment and improving the stability and efficiency of the process.
Patent Information
- Application Number
- CN202422658950.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-01
- Publication Date
- 2026-01-09
- Estimated Expiration
- 2034-11-01
AI Technical Summary
Existing wafer racks are tilted due to unstable center of gravity, which affects the processing effect. Existing adjustment methods cannot quickly and accurately adjust the verticality.
The wafer rack with a vertical suspension adjustment device includes a lifting module, a clamping body, a clamping cylinder, and an adjustment component. The verticality of the suspension is adjusted by adjusting bolts on the top and sides.
It enables rapid and precise verticality adjustment of wafer racks, avoiding wafer wobble and inaccurate positioning, and improving the stability and efficiency of the process.
Smart Images
Figure CN223780380U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to wafer hanger field especially a kind of wafer hanger with suspension vertical adjusting device. BACKGROUND
[0002] Single wafer is in electroplating and wet chemical process, need to use hanger to place and fix, install with cover sealing;
[0003] As shown in Figure 9 、 Figure 10 Since the cover plate is on the side of the hanger body, when the wafer product and the cover are installed, the center of gravity of the entire structure is not at the center of the hanger body. When the upper edge of the hanger is clamped with a clamp, the center of gravity of the hanger set deviates from the center plane of the clamp, and the hanger set will tilt. The larger the size of the wafer, especially the 12-inch wafer, the larger and heavier the hanger, the greater the deviation of the center of gravity, and the more obvious the tilt angle during vertical suspension. When the overhead crane and the sliding module clamp the tilted hanger and insert it into the process tank, the tilted hanger will collide with and interfere with the guide wheels on both sides of the hanger sliding groove inside the tank body, and the product process processing task cannot be completed.
[0004] Although the prior art can change the angle of the cylinder and the clamp plate by widening the guide gap between the guide wheel and the hanger, or adding a gasket to the side of the side-mounted cylinder, the tilt angle is absorbed by the gap, which can cause inaccurate positioning of the wafer product, large gap, and shaking, affecting the process processing effect. Adding a gasket to the side of the cylinder changes the angle of the cylinder and the clamp plate, which requires multiple tests, adding different numbers and thicknesses of gaskets, and the size cannot be fine-tuned, so the verticality cannot be quickly adjusted to the desired result. SUMMARY
[0005] To solve the problem of tilting of the wafer hanger due to the center of gravity when hanging, the utility model provides a wafer hanger with a suspension vertical adjusting device.
[0006] The wafer hanger with a suspension vertical adjusting device provided by the utility model adopts the following technical solution:
[0007] The utility model provides a wafer hanger with suspension vertical adjusting device, including lifting module, clamp body, the output of lifting module is connected with clamp body through bolt, controls the lifting of clamp body, the clamp body includes fixed seat, clamping cylinder, clamping plate, the output of lifting module is connected with fixed seat of dismantling, the bottom of fixed seat is fixedly installed with clamping cylinder through bolt, the output end of clamping cylinder is installed with the clamping plate for clamping wafer hanger body through bolt, first fixed part is arranged between fixed seat and mounting plate, and first adjusting part for adjusting the overall inclination of clamping cylinder, second fixed part, second adjusting part are arranged between the lateral wall of clamping cylinder and mounting plate,
[0008] Further, the first fixing part includes a top fixing bolt; the inside of the lateral wall connected by the fixed seat and the mounting plate is provided with through holes, and the four through holes are distributed in a rectangular array along the four corners of the mounting surface; the top fixing bolt is arranged in the through hole respectively; the front lateral wall of the mounting plate is provided with a top fixing hole corresponding to the position of the four top fixing bolts; the inside of the top fixing hole is provided with a thread, and is connected with the top fixing bolt through the thread, for fixing the fixed seat and the mounting plate;
[0009] Further, the first adjusting part includes a top adjusting stud; two screw holes are horizontally provided in the inside of the fixed seat; the two screw holes and the two top fixing bolts located at the lower side are in the same horizontal plane, and the top adjusting stud is connected in the screw hole through the thread; the front lateral wall of the mounting plate is provided with a top adjusting groove corresponding to the top adjusting stud; one end of the top adjusting stud abuts against the top of the top adjusting groove, and the other end is arranged at the side of the fixed seat away from the mounting plate;
[0010] Further, the end of the top adjusting stud away from the mounting plate is provided with an internal hexagonal hole, and the top adjusting stud can be rotated by using an internal hexagonal wrench;
[0011] Further, the second fixing part includes a side fixing bolt; the inside of the mounting plate is provided with a through hole; the lateral wall of the clamping cylinder is provided with a screw hole corresponding to the through hole; the side fixing bolt passes through the through hole from the back side of the mounting plate and is connected in the screw hole of the lateral wall of the clamping cylinder through the thread;
[0012] Further, the second adjusting part includes a side adjusting stud; the lateral wall of the mounting plate is provided with a screw hole, and the screw hole is arranged at the lower side of the side fixing bolt; the side adjusting stud is connected in the screw hole through the thread; one end of the side adjusting stud abuts against the lateral wall of the clamping cylinder, and the other end is arranged at the back side of the mounting plate;
[0013] Further, the hexagonal hole is arranged at one end of the rear side of the mounting plate, and the side adjusting stud can be rotated by using a hexagonal wrench.
[0014] In summary, the utility model has the advantages of:
[0015] The utility model discloses, through increase first fixed part, first adjusting part, second fixed part, second adjusting part, adopt top installation, side face auxiliary fixed, side face and top all can adjust, whole structure stable firm, long -term use does not deform, lift and carry do not shake, and adjustment is also simple and reliable, can fine adjustment, and perpendicularity is higher;
[0016] First, the hanger is clamped in a hanging state by the clamp plate, the perpendicularity is adjusted, the side adjusting stud is rotated by using a hexagonal wrench, the clamping cylinder and the hanger body are lifted, until the hanger body is in a standard vertical state, then the top fixing bolt and the side fixing stud are cross-rotated gradually, the side fixing bolt is tightened without gap, in order to prevent the fixing seat of the clamping cylinder from being deformed when being locked by the top fixing bolt after being lifted by the adjusting screw, the top adjusting stud is rotated to abut against the lifting module, finally all the fixing bolts are tightened and locked, and the hanger perpendicularity adjustment is completed. BRIEF DESCRIPTION OF DRAWINGS
[0017] Figure 1 It is a front side view schematic diagram of the whole structure of the utility model;
[0018] Figure 2 It is an enlarged schematic diagram of part A of the utility model; Figure 1
[0019] Figure 3 It is a rear side view schematic diagram of the whole structure of the utility model;
[0020] Figure 4 It is an enlarged schematic diagram of part B of the utility model; Figure 3
[0021] It is a front side wall structure schematic diagram of the mounting plate of the utility model; Figure 5
[0022] It is a mounting schematic diagram of the fixing seat of the utility model; Figure 6
[0023] It is a rear side wall structure schematic diagram of the mounting plate of the utility model; Figure 7
[0024] It is a structure schematic diagram of the top adjusting part and the side adjusting part of the utility model; Figure 8
[0025] It is a hanger body structure schematic diagram of the wafer; Figure 9
[0026] Figure 10 Schematic diagram of the hanger body center of gravity transfer leading to tilting.
[0027] As shown in the figure: 1-lift module, 2-fixed seat, 3-clamping cylinder, 4-clamping plate, 5-hanger body, 6-cover plate, 7-wafer, 8-top fixing bolt, 81-top fixing hole, 9-top adjusting stud, 91-top adjusting groove, 10-side fixing bolt, 11-side adjusting stud, 12-mounting plate. DETAILED DESCRIPTION
[0028] The following will be described in detail in combination with the accompanying Figures 1-8 The utility model makes further detailed explanation:
[0029] The utility model discloses a wafer hanger with suspension vertical adjusting device, like Figures 1-8 As shown in the figure: a wafer hanger with suspension vertical adjusting device, including lift module 1, fixture body, the output of lift module 1 is connected with fixture body through bolt, controls the lift of fixture body, fixture body includes fixed seat 2, clamping cylinder 3, clamping plate 4, the output of lift module 1 is connected with fixed seat 2 and is dismantled, the bottom of fixed seat 2 is fixedly installed with clamping cylinder 3 through bolt, the output end of clamping cylinder 3 is installed with the clamping plate 4 for clamping wafer hanger body through bolt, first fixing part is arranged between fixed seat 2 and mounting plate 12, and first adjusting part for adjusting the overall inclination of clamping cylinder 3, second fixing part and second adjusting part are arranged between the outer wall of clamping cylinder 3 and mounting plate 12, in this embodiment, lift module 1 can accurately control the height of wafer hanger, ensure that wafer 7 is in the optimum position in the processing process, bolt connection is convenient to dismantle, make the maintenance of fixture body and lift module 1 more convenient, the design of clamping cylinder 3 and clamping plate 4 can firmly hold wafer hanger, prevent it from falling off in the processing process, simultaneously, the setting of first adjusting part and second adjusting part can accurately adjust the inclination angle of wafer hanger,
[0030] As shown in the figure: Figures 1-8 The first fixing part includes top fixing bolt 8, the inside of the side wall that fixed seat 2 is connected with mounting plate 12 is provided with through hole, four the through holes are distributed along the four top corners of the mounting surface rectangular array, and top fixing bolt 8 is arranged in the through hole respectively, the front side wall of mounting plate 12 is provided with top fixing hole 81 respectively at the position corresponding to four top fixing bolts 8, the inside of top fixing hole 81 is provided with thread, and is connected through thread with top fixing bolt 8, for the fixing between fixed seat 2 and mounting plate 12, in this embodiment, top fixing bolt 8 ensures the stable connection between fixed seat 2 and mounting plate 12, and the mounting and dismounting process of top fixing bolt 8 is simple and convenient, improves work efficiency,
[0031] AsFigures 1-8 As shown in the figure, the first adjusting part includes a top adjusting stud 9; the inside of the fixed seat 2 is horizontally provided with two threaded holes; the threaded holes are in the same horizontal plane as the two top fixing bolts 8 located at the lower side, and the top adjusting stud 9 is threadedly connected in the threaded holes; the front side wall of the mounting plate 12 is provided with a top adjusting groove 91 corresponding to the top adjusting stud 9; one end of the top adjusting stud 9 abuts against the top of the top adjusting groove 91, and the other end is arranged at the side of the fixed seat 2 away from the mounting plate 12; in this embodiment, by rotating the top adjusting stud 9, the extension length thereof can be changed, so as to adjust the relative inclination angle between the fixed seat 2 and the mounting plate 12; the extension length of the top adjusting stud 9 can be accurately adjusted, so that the inclination angle of the wafer holder is accurately controlled.
[0032] As shown in the figure, Figures 1-8 The end of the top adjusting stud 9 away from the mounting plate 12 is provided with an internal hexagonal hole, and the top adjusting stud 9 can be rotated by using an internal hexagonal wrench.
[0033] As shown in the figure, Figures 1-8 The second fixing part includes a side fixing bolt 10; the inside of the mounting plate 12 is provided with a through hole; the outer side wall of the clamping cylinder 3 is provided with a threaded hole corresponding to the through hole; the side fixing bolt 10 passes through the through hole from the back side of the mounting plate 12 and is threadedly connected in the threaded hole of the outer side wall of the clamping cylinder 3; in this embodiment, this connection mode is also simple and effective, and can firmly fix the relative position between the two; the side fixing bolt 10 ensures the stable connection between the clamping cylinder 3 and the mounting plate 12, prevents loosening caused by vibration or external force, and fixes the position of the clamping cylinder 3.
[0034] As shown in the figure, Figures 1-8 The second adjusting part includes a side adjusting stud 11; the outer side wall of the mounting plate 12 is provided with a threaded hole, which is arranged at the lower side of the side fixing bolt 10; the side adjusting stud 11 is threadedly connected in the threaded hole; one end of the side adjusting stud 11 abuts against the outer side wall of the clamping cylinder 3, and the other end is arranged at the back side of the mounting plate 12; in this embodiment, one end of the side adjusting stud 11 abuts against the outer side wall of the clamping cylinder 3, and the other end extends out of the mounting plate 12; by rotating the side adjusting stud 11, the extension length thereof can be changed, so as to adjust the relative inclination angle between the clamping cylinder 3 and the mounting plate 12; the extension length of the side adjusting stud 11 can be finely adjusted, so that the inclination angle of the wafer holder is further accurately controlled.
[0035] As shown in the figure, Figures 1-8 The end of the side adjusting stud 11 at the back side of the mounting plate 12 is provided with an internal hexagonal hole, and the side adjusting stud 11 can be rotated by using an internal hexagonal wrench.
[0036] The implementation principle of the embodiment of the utility model is:
[0037] The utility model discloses when using, first, fixed seat 2 first with clamping pneumatic cylinder 3 installation locking, again with the lifting module 1, with top fixed bolt 8 installation, do not lock first, again install top adjusting stud 9, again install the side of clamping pneumatic cylinder 3's side adjusting stud 11, finally install side fixed bolt 10,
[0038] With the clamping plate 4 clamping the hanger body 5 is in the state of suspension, start adjusting perpendicularity, with the inner hexagonal spanner, rotate side adjusting stud 11, lift clamping pneumatic cylinder 3 and hanger body, namely hanger body 5, until hanger body 5 is in the standard perpendicular state, again gradually cross-rotating top fixed bolt 8 and side fixed bolt 10, and side fixed bolt 10 is tightly screwed without gap, to prevent the fixed seat 2 of clamping pneumatic cylinder 3 from being lifted after being adjusted screw, lock when top fixed bolt 8 is deformed, need to rotate top adjusting stud 9, let top adjusting stud 9 resist lifting module 1, finally all fixed bolts are screwed tightly and locked, here, the hanger perpendicularity adjustment is finished.
[0039] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. The various components mentioned in the utility model are common techniques in the prior art, which should be understood by those skilled in the art. The utility model is not limited by the above-mentioned embodiments, and the above-mentioned embodiments and descriptions in the specification are only to illustrate the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model can also have various changes and improvements, and these changes and improvements all fall within the scope of the utility model claimed. The scope of protection of the utility model is defined by the appended claims and their equivalents.
Claims
1. A wafer hanger with a suspension vertical adjustment device, comprising a lifting module (1), a clamp body; the output part of the lifting module (1) is connected with the clamp body through bolts to control the lifting of the clamp body; characterized in that, The clamp body comprises a fixing seat (2), a clamping cylinder (3) and a clamping plate (4); the output part of the lifting module (1) is detachably connected with the fixing seat (2); the bottom of the fixing seat (2) is fixedly installed with the clamping cylinder (3) through bolts; the output end of the clamping cylinder (3) is installed with the clamping plate (4) for clamping the wafer clamp body (5) through bolts; the fixing seat (2) and the mounting plate (12) are provided with a first fixing part and a first adjusting part for adjusting the overall inclination of the clamping cylinder (3); the outer side wall of the clamping cylinder (3) and the mounting plate (12) are provided with a second fixing part and a second adjusting part.
2. The wafer hanger with a suspension vertical adjustment device according to claim 1, characterized in that The first fixing part comprises a top fixing bolt (8); the inner side wall of the fixing seat (2) connected with the mounting plate (12) is provided with through holes, and four through holes are arranged in a rectangular array along the four top corners of the mounting plate (12); the top fixing bolt (8) is arranged in the through hole; the front side wall of the mounting plate (12) is provided with a top fixing hole (81) corresponding to the position of the four top fixing bolts (8); the inside of the top fixing hole (81) is provided with a thread, and is connected with the top fixing bolt (8) through the thread, for fixing the fixing seat (2) and the mounting plate (12).
3. The wafer hanger with a suspension vertical adjustment device according to claim 2, characterized in that The first adjusting part comprises a top adjusting stud (9); two threaded holes are horizontally arranged in the inside of the fixing seat (2); the two threaded holes and the two top fixing bolts (8) located below are in the same horizontal plane, and the top adjusting stud (9) is connected in the threaded hole through the thread; the front side wall of the mounting plate (12) is provided with a top adjusting groove (91) corresponding to the top adjusting stud (9); one end of the top adjusting stud (9) abuts against the top of the top adjusting groove (91), and the other end is arranged on the side of the fixing seat (2) away from the mounting plate (12).
4. The wafer hanger with a suspension vertical adjustment device according to claim 3, wherein The end of the top adjusting stud (9) away from the mounting plate (12) is provided with an internal hexagonal hole, and the top adjusting stud (9) can be rotated by using an internal hexagonal wrench.
5. The wafer hanger with a suspension vertical adjustment device according to claim 1, wherein The second fixing part comprises a side fixing bolt (10); the inside of the mounting plate (12) is provided with a through hole; the outer side wall of the clamping cylinder (3) is provided with a threaded hole corresponding to the through hole; the side fixing bolt (10) passes through the through hole from the back side of the mounting plate (12) and is connected in the threaded hole of the outer side wall of the clamping cylinder (3) through the thread.
6. The wafer hanger with a suspension vertical adjustment device according to claim 5, characterized in that The second adjusting part comprises a side adjusting stud (11); the outer side wall of the mounting plate (12) is provided with a threaded hole, which is arranged below the side fixing bolt (10); the side adjusting stud (11) is connected in the threaded hole through the thread; one end of the side adjusting stud (11) abuts against the outer side wall of the clamping cylinder (3), and the other end is arranged on the back side of the mounting plate (12).
7. The wafer hanger with a suspension vertical adjustment device according to claim 6, characterized in that The end of the side adjusting stud (11) located on the back side of the mounting plate (12) is provided with an internal hexagonal hole, and the side adjusting stud (11) can be rotated by using an internal hexagonal wrench.