Semiconductor transfer valve

Abstract

The utility model discloses a semiconductor transmission valve which comprises a valve body, a valve plate is vertically arranged at the bottom end in the valve body, supports are vertically arranged on the left side and the right side of the front face of the valve plate, a driving shaft is vertically and movably arranged between the supports, and the driving shaft is vertically located in the valve body. Air cylinders are vertically arranged at the two ends of the top end of the exterior of the valve body, a gas flow divider is arranged between the air cylinders, the gas flow divider is transversely located in the middle of the top end of the exterior of the valve body, the gas flow divider is connected with the air cylinders through pipelines, and pistons are transversely arranged in the air cylinders; the piston is connected with the driving shaft; and the piston and the driving shaft are in the same moving direction.

Description

Technical Field

[0001] This utility model relates to the field of transmission valves, and in particular to semiconductor transmission valves. Background Technology

[0002] Semiconductor transfer valves are the most widely used vacuum components in silicon wafer transport channels, and are crucial for silicon wafer transport and vacuum assurance in the modern semiconductor industry. During silicon wafer transport, semiconductor transfer valves ensure the continuity of the channel, while during the wafer manufacturing process, they guarantee the vacuum and cleanliness of the chamber. Furthermore, due to their structural characteristics, semiconductor transfer valves can maintain both a high vacuum environment and particle size control within that environment, offering significant advantages in the transport process. However, many existing semiconductor transfer valves rely on a single-unit drive mechanism, leading to instability during operation and a tendency for leakage. Therefore, a new semiconductor transfer valve is proposed. Utility Model Content

[0003] To overcome the shortcomings mentioned above, this utility model aims to provide a technical solution that can solve the above problems.

[0004] A semiconductor transmission valve includes a valve body. A valve plate is vertically mounted at the bottom of the valve body. Supports are vertically mounted on both sides of the valve plate facing forward. A drive shaft is vertically movably mounted between the supports and is located vertically inside the valve body. Cylinders are vertically mounted at both ends of the top of the valve body. A gas distributor is mounted between the cylinders and is located laterally at the middle of the top of the valve body. The gas distributor is connected to the cylinders via a pipeline. A piston is laterally mounted inside the cylinder and is connected to the drive shaft. The piston and the drive shaft move in the same direction.

[0005] Preferably, a valve body cover is provided between the valve body and the cylinder, and the valve body cover is laterally located at the top of the valve body. The cylinders are all vertically arranged on the valve body cover and the gas distributor is laterally arranged on the valve body cover. The valve body is provided with a valve body cover, and the valve body cover is laterally located at the bottom of the valve body.

[0006] Preferably, a first air port is provided between the gas distributor and the cylinder, and the first air port is formed at the top of the cylinder. The first air port is connected to the cylinder by a pipeline, and the other end of the first air port is connected to the gas distributor by a pipeline.

[0007] Preferably, a second air port is provided between the gas distributor and the cylinder, and the second air port is formed at the bottom of the cylinder. The second air port is connected to the cylinder by a pipeline, and the other end of the second air port is connected to the gas distributor by a pipeline.

[0008] Preferably, the valve plate is provided with a pressure plate, and the pressure plate is located laterally at the bottom end of the valve plate, and the pressure plate and the valve plate move in the same direction.

[0009] Compared with the prior art, the beneficial effects of this utility model are as follows: When the piston is at the bottom of the cylinder, the gas distributor introduces air into the bottom of the cylinder, driving the piston to move upward inside the cylinder and simultaneously driving the drive shaft to move upward inside the valve body. When the drive shaft moves upward, it drives the valve plate to move upward inside the valve body through the bracket until the piston stroke is limited, at which point the gas distributor stops introducing air and the valve body is in the open state. Conversely, when the piston is at the top of the cylinder, the gas distributor introduces air into the top of the cylinder, driving the piston to move downward inside the cylinder and simultaneously driving the drive shaft to move downward inside the valve body. When the drive shaft moves downward, it drives the valve plate to move downward inside the valve body through the bracket until the piston stroke is limited, at which point the gas distributor stops introducing air and the valve body is in the closed state. Thus, by using a dual-cylinder drive and a gas distributor design to synchronize the push rod during operation, the improved valve body operates more stably.

[0010] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0011] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0012] Figure 1 This is a schematic diagram of the structure of a semiconductor transfer valve;

[0013] Figure 2 This is another schematic diagram of a semiconductor transfer valve.

[0014] The figure shows: 1. First air port, 2. Cylinder, 3. Second air port, 4. Piston, 5. Upper cover of valve body, 6. Gas distributor, 7. Valve body, 8. Drive shaft, 9. Valve plate, 10. Bracket, 11. Pressure plate, 12. Lower cover of valve body. Detailed Implementation

[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0016] Please see Figure 1-2 In this embodiment of the present invention, a semiconductor transmission valve includes a valve body 7. A valve plate 9 is vertically arranged at the bottom of the valve body 7, and supports 10 are vertically arranged on both sides of the valve plate 9 facing forward. A drive shaft 8 is vertically movably arranged between the supports 10 and is vertically located inside the valve body 7. Cylinders 2 are vertically arranged at both ends of the top of the valve body 7, and a gas distributor 6 is arranged between the cylinders 2. The gas distributor 6 is laterally located at the middle position of the top of the valve body 7. The gas distributor 6 is connected to the cylinders 2 via a pipeline. A piston 4 is laterally arranged inside the cylinder 2, and the piston 4 is connected to the drive shaft 8, with the piston 4 and drive shaft 8 moving in the same direction. When the piston 4 is at the bottom of the cylinder 2, the gas distributor 6 introduces air into the bottom of the cylinder 2, driving the piston... Piston 4 moves upward inside cylinder 2, simultaneously driving drive shaft 8 to move upward inside valve body 7. As drive shaft 8 moves upward, it drives valve plate 9 to move upward inside valve body 7 via bracket 10 until piston 4 reaches its stroke limit. At this point, gas distributor 6 stops intake, and valve body 7 is in the open state. Conversely, when piston 4 is at the top of cylinder 2, gas distributor 6 intakes air into the top of cylinder 2, driving piston 4 to move downward inside cylinder 2, simultaneously driving drive shaft 8 to move downward inside valve body 7. As drive shaft 8 moves downward, it drives valve plate 9 to move downward inside valve body 7 via bracket 10 until piston 4 reaches its stroke limit. At this point, gas distributor 6 stops intake, and valve body 7 is in the closed state. This design, with dual cylinders 2 driving gas distributor 6, synchronizes the push rod during operation, resulting in more stable valve body operation.

[0017] A valve body cover 5 is provided between the valve body 9 and the cylinder 2, and the valve body cover 5 is located horizontally at the top of the valve body 9. The cylinders 2 are all vertically arranged on the valve body cover 5, and the gas distributor 6 is horizontally arranged on the valve body cover 5. The valve body 9 is provided with a valve body cover 12, and the valve body cover 12 is located horizontally at the bottom of the valve body 9.

[0018] A first air port 1 is provided between the gas distributor 6 and the cylinder 2, and the first air port 1 is formed at the top of the cylinder 2. The first air port 1 is connected to the cylinder 2 by a pipeline, and the other end of the first air port 1 is connected to the gas distributor 6 by a pipeline. Thus, the gas distributor 6 can introduce air into the top of the cylinder 2 through the first air port 1.

[0019] A second air port 3 is provided between the gas distributor 6 and the cylinder 2. The second air port 3 is formed at the bottom of the cylinder 2. The second air port 3 is connected to the cylinder 2 by a pipeline, and the other end of the second air port 3 is connected to the gas distributor 6 by a pipeline. Thus, the gas distributor 6 can introduce air into the bottom of the cylinder 2 through the second air port 3.

[0020] The valve plate 9 is provided with a pressure plate 11, which is located laterally at the bottom of the valve plate 9. The pressure plate 11 and the valve plate 9 move in the same direction, so that the valve plate 9 can make more stable contact with the bottom of the valve body 7 through the pressure plate 11.

[0021] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention.

Claims

1. A semiconductor transfer valve, comprising a valve body, characterized in that, A valve plate is vertically installed at the bottom of the valve body, and supports are vertically installed on both the left and right sides of the front side of the valve plate. A drive shaft is vertically movably installed between the supports and is located vertically inside the valve body. Cylinders are vertically installed at both ends of the top of the valve body, and a gas distributor is installed between the cylinders. The gas distributor is located laterally at the middle position of the top of the valve body. The gas distributor is connected to the cylinder through a pipeline. A piston is horizontally installed inside the cylinder and is connected to the drive shaft. The piston and the drive shaft move in the same direction.

2. The semiconductor transfer valve according to claim 1, characterized in that, A valve body cover is provided between the valve body and the cylinder, and the valve body cover is located horizontally at the top of the valve body. The cylinders are all vertically mounted on the valve body cover, and the gas distributor is horizontally mounted on the valve body cover. The valve body is provided with a valve body cover, and the valve body cover is located horizontally at the bottom of the valve body.

3. The semiconductor transfer valve according to claim 1, characterized in that, A first air port is provided between the gas distributor and the cylinder, and the first air port is formed at the top of the cylinder. The first air port is connected to the cylinder by a pipeline, and the other end of the first air port is connected to the gas distributor by a pipeline.

4. The semiconductor transfer valve according to claim 1, characterized in that, A second air port is provided between the gas distributor and the cylinder, and the second air port is formed at the bottom of the cylinder. The second air port is connected to the cylinder by a pipeline, and the other end of the second air port is connected to the gas distributor by a pipeline.

5. The semiconductor transfer valve according to claim 1, characterized in that, The valve plate is provided with a pressure plate, which is located laterally at the bottom end of the valve plate, and the pressure plate and the valve plate move in the same direction.

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