Sampling device
By designing the pipeline structure and control switch of the sampling device, the problem of inaccurate concentration caused by residual media in the sampling pipeline was solved, achieving higher precision chemical solution concentration measurement and ensuring the stability of the wet process.
Patent Information
- Application Number
- CN202520232482.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-13
- Publication Date
- 2026-01-09
- Estimated Expiration
- 2035-02-13
AI Technical Summary
In existing technologies, residual media in the sampling pipeline leads to inaccurate measurement of chemical solution concentration, affecting the stability of the wet process.
The sampling device includes a first housing, a first pipeline, a second pipeline, a third pipeline, and a control switch. The connection of the pipeline is controlled by the control switch to reduce the amount of residual medium and improve the sampling accuracy.
By reducing the amount of residual medium in the pipeline, the accuracy of the sampling medium is improved, ensuring the accuracy of chemical solution concentration measurement and guaranteeing the stability of the wet process.
Smart Images
Figure CN223783952U_ABST
Abstract
Description
Technical Field
[0001] This disclosure relates to the field of semiconductor technology, and more particularly to a sampling device. Background Technology
[0002] Wet processes are crucial in semiconductor wafer manufacturing. By treating the wafer with chemical solutions, purposes such as etching, doping, or cleaning can be achieved. The concentration of the chemical solution is related to the stability of the process. To ensure process stability, the concentration of the chemical solution needs to be sampled and measured before the process begins.
[0003] How to improve sampling accuracy is a question worth discussing. Utility Model Content
[0004] In view of this, embodiments of the present disclosure provide a sampling device that can improve sampling accuracy.
[0005] To address the aforementioned technical problems, this disclosure provides a sampling device, which includes:
[0006] The first housing has a receiving cavity;
[0007] The first pipeline has an input port for connecting the sampling medium.
[0008] The second pipeline, the output port of which is located inside the accommodating cavity, is used to input the sampling medium into the accommodating cavity;
[0009] The third conduit, the output port of which is located outside the accommodating cavity;
[0010] A control switch is connected to the output port of the first pipeline, the input port of the second pipeline, and the input port of the third pipeline, respectively, to control the connection between the first pipeline and the second pipeline, and the connection between the first pipeline and the third pipeline.
[0011] Optionally, the first housing further comprises:
[0012] A drain hole penetrates the first housing and is located at the bottom of the accommodating cavity, for discharging the sampling medium from the accommodating cavity.
[0013] Optionally, the sampling device further includes:
[0014] The fourth pipeline has its input port connected to the drain hole.
[0015] Optionally, the output port of the fourth pipeline is connected to the third pipeline;
[0016] Alternatively, the fourth pipeline may be independent of the third pipeline.
[0017] Optionally, the first housing includes:
[0018] At the top, the second conduit passes through the top;
[0019] The sidewall is connected to the top.
[0020] A platform is located on the side wall and is disposed opposite to the top, and the drain hole is located on the platform;
[0021] The output port of the second pipeline is located between the platform and the top.
[0022] Optionally, the stage further comprises:
[0023] The first tank, wherein the first port of the drain hole is located at the bottom of the first tank, and the bottom of the first tank is used to support the sampling bottle.
[0024] Optionally, the inner diameter of the drain hole gradually decreases along the direction away from the receiving cavity.
[0025] Optionally, the first conduit, the third conduit, and the control switch are located outside the accommodating cavity.
[0026] Optionally, the sampling device further includes:
[0027] A medium supply end is connected to the input port of the first pipeline and is used to supply sampling medium to the first pipeline;
[0028] The medium collection end is connected to the output port of the third pipeline and is used to collect the sampling medium discharged from the third pipeline.
[0029] Optionally, the sampling device further includes:
[0030] The second housing has a sampling port;
[0031] A sampling window, located at the sampling port, forms a sealed cavity with the second housing, used to open or close the sampling port;
[0032] The first housing is located inside the sealed cavity.
[0033] Compared with the prior art, the technical solution of this utility model embodiment has the following advantages:
[0034] The sampling device provided in this embodiment of the present invention may include: a first housing, a first pipeline, a second pipeline, a third pipeline, and a control switch. The first housing has a receiving cavity for containing a sampling bottle. The input port of the first pipeline is used to connect to the sampling medium. The output port of the second pipeline is located inside the receiving cavity and is used to input the sampling medium into the receiving cavity. The output port of the third pipeline is located outside the receiving cavity. The control switch is used to control the connection between the first pipeline and the second pipeline, as well as the connection between the first pipeline and the third pipeline. By adopting the above technical solution, the amount of residual medium entering the receiving cavity can be reduced, thereby improving the sampling accuracy of the sampling medium in the sampling bottle. Attached Figure Description
[0035] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this specification. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0036] Figure 1 A schematic diagram of the structure of a sampling device according to an embodiment of the present disclosure is shown;
[0037] Figure 2 A cross-sectional schematic diagram of a sampling device according to an embodiment of the present disclosure is shown.
[0038] Figure label:
[0039] First pipe 110, second pipe 120, third pipe 130, fourth pipe 140, control switch 150;
[0040] First housing 200, accommodating cavity 210, top 220, side wall 230, stage 240, first groove 241, drain hole 242;
[0041] Medium supply end 310, medium collection end 320;
[0042] 400 sampling bottles;
[0043] Second housing 500, sealing cavity 510, sampling window 520, knob 530. Detailed Implementation
[0044] As is known from the background art, wet processing is crucial in semiconductor wafer manufacturing. By treating the wafer with a chemical solution, purposes such as etching, doping, or cleaning can be achieved. The solubility of the chemical solution is related to the stability of the process. To ensure process stability, the concentration of the chemical solution needs to be sampled and measured before the process begins.
[0045] In some embodiments, a sampling device is used to sample the concentration of a chemical solution. The sampling device may include a sampling line, a control switch, and a stage. The sampling measurement steps may include: placing a sampling bottle on the stage, inserting the output port of the sampling line into the sampling bottle, controlling the connection of the sampling line with the control switch, and allowing the sampling medium to enter the sampling bottle through the output port of the sampling line.
[0046] In actual work, sampling pipelines are usually used multiple times. If there are other media remaining in the sampling pipeline, it will cause the concentration of the sampling medium currently input into the sampling bottle to be inaccurate.
[0047] To address the aforementioned technical problems, in this embodiment of the present disclosure, the sampling device may include: a first housing, a first conduit, a second conduit, a third conduit, and a control switch. The first housing has a receiving cavity for containing a sampling bottle. The input port of the first conduit is used to connect to the sampling medium. The output port of the second conduit is located inside the receiving cavity and is used to input the sampling medium into the receiving cavity. The output port of the third conduit is located outside the receiving cavity. The control switch is used to control the connection between the first and second conduits and between the first and third conduits, allowing the sampling medium to flow into the first conduit through its input port. This solution reduces the amount of residual medium entering the receiving cavity, thereby improving the sampling accuracy of the sampling medium in the sampling bottle.
[0048] To make the above-mentioned objectives, features and beneficial effects of this disclosure more apparent and understandable, specific embodiments of this disclosure will be described in detail below with reference to the accompanying drawings.
[0049] Combined with reference Figure 1 and Figure 2 , Figure 1 A schematic diagram of a sampling device according to an embodiment of this disclosure is shown. Figure 2 A cross-sectional schematic diagram of a sampling device according to an embodiment of the present disclosure is shown.
[0050] In this embodiment, the sampling device may include: a first pipeline 110, a second pipeline 120, a third pipeline 130, a control switch 150, and a first housing 200.
[0051] The first pipeline 110 has an input port for receiving the sampling medium; the first housing 200 has a accommodating cavity 210 for accommodating the sampling bottle 400; the output port of the second pipeline 120 is located inside the accommodating cavity 210 for inputting the sampling medium into the accommodating cavity 210; the first pipeline 110, the third pipeline 130, and the control switch 150 are all located outside the accommodating cavity 210; the control switch 150 is used to control the connection between the first pipeline 110 and the second pipeline 120 and the connection between the first pipeline 110 and the third pipeline 130.
[0052] In some embodiments, the sampling medium may include: chemical mechanical polishing solutions such as silica polishing slurry, cerium oxide polishing slurry, aluminum polishing slurry or copper polishing slurry, or etching solutions such as hydrofluoric acid, buffered hydrofluoric acid, phosphoric acid, potassium hydroxide or sulfuric acid.
[0053] In some embodiments, the sampling device may further include a medium supply end 310 and a medium collection end 320.
[0054] The medium supply end 310 is a container for storing the sampling medium. The medium supply end 310 is connected to the input port of the first pipeline 110 and is used to supply the sampling medium to the first pipeline 110. The medium collection end 320 is a container for storing the sampling medium. The medium collection end 320 is connected to the output port of the third pipeline 130 and is used to recover the sampling medium discharged from the third pipeline 130.
[0055] In some embodiments, the control switch 150 may have the following two states: the first port and the second port are closed while the first port and the third port are connected; the first port and the second port are connected while the first port and the third port are closed. Accordingly, sampling using a sampling device may include steps S01 to S03:
[0056] Step S01: Control switch 150 controls the first pipe 110 and the second pipe 120 to shut off, and at the same time controls the first pipe 110 to connect with the third pipe 130.
[0057] In this way, the sampling medium can flow into the third pipeline 130 through the first pipeline 110. Correspondingly, the residual medium in the first pipeline 110 can also enter the third pipeline 130 along with the sampling medium. This step can reduce the amount of residual medium in the first pipeline 110.
[0058] It should be noted that the connection time between the first pipeline 110 and the third pipeline 130 can be determined based on the type of residual medium in the first pipeline 110. For example, if the residual medium is an easily crystallizing solution such as a grinding slurry, the connection time can be 2 minutes (min) to fully dissolve and remove the residual medium in the first pipeline 110. For example, if the residual medium is a cleaning agent such as deionized water, the connection time can be 30 seconds (s).
[0059] Step S02: Place the sampling bottle 400 into the receiving cavity 210 and insert the output port of the second pipeline 120 into the sampling bottle 400.
[0060] Step S03: Control switch 150 controls the first pipe 110 to connect with the second pipe 120, and at the same time controls the first pipe 110 to disconnect from the third pipe 130.
[0061] In this way, the sampling medium can flow into the second pipeline 120 through the first pipeline 110, and then enter the sampling bottle 400 through the output port of the second pipeline 120 to complete the sampling operation.
[0062] In summary, step S01 can remove the residual medium in the first pipeline 110 in advance, thereby reducing the amount of residual medium in the first pipeline 110 entering the sampling bottle 400 in the accommodating cavity 210, thus improving the sampling accuracy of the sampling medium in the sampling bottle 400.
[0063] In some embodiments, the control switch 150 may have a first port, a second port, and a third port.
[0064] The first port of the control switch 150 is connected to the output port of the first pipeline 110, the second port is connected to the input port of the second pipeline 120, and the third port is connected to the input port of the third pipeline 130. The control switch 150 realizes the connection and disconnection between the first pipeline 110 and the second pipeline 120 by controlling the connection and disconnection between the first port and the second port, and realizes the connection and disconnection between the first pipeline 110 and the third pipeline 130 by controlling the connection and disconnection between the first port and the third port.
[0065] In some embodiments, the control switch 150 may be a multi-way valve, such as a three-way valve.
[0066] It should be noted that the above description does not constitute a limitation on the states that the control switch 150 can have, and the control switch 150 can also have other states. For example, the first port and the second port are both off, and the first port and the third port are both off. For example, the first port and the second port are both connected, and the first port and the third port are both connected.
[0067] In some embodiments, before performing step S02, the following step S11 may also be performed: the control switch 150 controls the first pipeline 110 to connect with the third pipeline 130.
[0068] Before the sampling bottle 400 is placed in the receiving cavity 210 for sampling, the sampling medium can flow into the second pipeline 120 through the first pipeline 110 and enter the receiving cavity 210 through the output port of the second pipeline 120. Correspondingly, the residual medium in the second pipeline 120 can also enter the receiving cavity 210 along with the sampling medium. This step reduces the amount of residual medium in the second pipeline 120 in advance, thereby reducing the amount of residual medium in the second pipeline 120 entering the sampling bottle 400 in the receiving cavity 210, thus improving the sampling accuracy of the sampling medium in the sampling bottle 400.
[0069] It should be noted that the sampling medium entering the accommodating cavity 210 through step S11 will collect at the bottom of the accommodating cavity 210. When the sampling bottle 400 is subsequently placed at the bottom of the accommodating cavity 210, some of the sampling medium will be contaminated on the surface of the sampling bottle 400. Some components in the sampling medium are highly corrosive and highly volatile, and the sampling medium exposed on the surface of the sampling bottle 400 may cause potential hazards.
[0070] In some embodiments, the entirety or surface of the first housing 200 may be made of one or more materials selected from ceramics, silicon carbide, titanium alloy, 316L stainless steel, polytetrafluoroethylene, polyvinylidene fluoride, or Hastelloy, which can exhibit high corrosion resistance to highly corrosive sampling media such as strong acids, strong alkalis, and organic solvents.
[0071] In some embodiments, one or more of the first conduit 110, the second conduit 120, and the third conduit 130 may be made of one or more materials selected from polytetrafluoroethylene, polyvinylidene fluoride, perfluoroether rubber, fluororubber, polyethylene, polypropylene, silicone, etc., which can exhibit high corrosion resistance to highly corrosive sampling media such as strong acids, strong alkalis, and organic solvents while ensuring flexibility.
[0072] In some embodiments, the first housing 200 may also have a drain hole 242.
[0073] The drain hole 242 penetrates the first housing 200 and is located at the bottom of the accommodating cavity 210. In this way, the sampling medium collected at the bottom of the accommodating cavity 210 can be discharged from the accommodating cavity 210 through the drain hole 242, thereby reducing the amount of sampling medium adhering to the surface of the sampling bottle 400.
[0074] In some embodiments, the sampling device may further include a fourth conduit 140.
[0075] The input port of the fourth pipeline 140 is connected to the drain hole 242, and the output port of the fourth pipeline 140 is connected to the medium collection end 320 to recover the sampling medium discharged from the drain hole 242.
[0076] In some examples, the fourth conduit 140 and the third conduit 130 can be independent of each other and connected to the media collection end 320 respectively, which facilitates troubleshooting during use.
[0077] It should be noted that the above description does not constitute a limitation on the relationship between the fourth pipe 140 and the third pipe 130, and the fourth pipe 140 and the third pipe 130 can also be connected.
[0078] For example, the output port of the fourth pipe 140 is connected to the third pipe 130, or the output port of the third pipe 130 is connected to the fourth pipe 140, that is, the third pipe 130 and the fourth pipe 140 share part of the pipe, which can reduce the cost of use.
[0079] In some embodiments, the fourth conduit 140 may be made of one or more materials selected from polytetrafluoroethylene, polyvinylidene fluoride, perfluoroether rubber, fluororubber, polyethylene, polypropylene, silicone, etc. These materials can exhibit high corrosion resistance to highly corrosive sampling media such as strong acids, strong alkalis and organic solvents while ensuring flexibility.
[0080] In some embodiments, the first housing 200 may include a top 220, a sidewall 230, and a stage 240.
[0081] The second pipe 120 passes through the top 220, the side wall 230 is connected to the top 220, the platform 240 is located on the side wall 230 and is opposite to the top 220, the second pipe 120 passes through the top 220 and is located between the platform 240 and the top 220, the drain hole 242 is located on the platform 240, and in actual use, the sampling bottle 400 is placed on the platform 240.
[0082] In some embodiments, there are two sidewalls 230, with their opposite end faces arranged in parallel. Each sidewall 230 is connected to the top 220 and forms an inverted U-shaped structure. The platform 240 is sandwiched between the two sidewalls 230 and forms a U-shaped structure.
[0083] In some embodiments, the stage 240 can be detachably connected to the side wall 230, which facilitates later partial maintenance of the first housing 200, as well as reduces costs and improves efficiency.
[0084] For example, a raised strip (not shown in the figure) is provided on the side wall 230, the raised strip is parallel to the top 220, and the platform 240 is erected on the raised strip.
[0085] For example, the stage 240 can be fixed to the side wall 230 by bolts (not shown in the figure).
[0086] It should be noted that the above description does not constitute a limitation on the relationship between the side wall 230 and the platform 240. The side wall 230 can also be connected to the side wall 240 by a non-removable connection method such as integral molding, bonding or welding.
[0087] In some embodiments, the stage 240 may also have a first slot 241.
[0088] The first groove 241 is located on the end face opposite to the top 220 of the platform 240, and the drain hole 242 is located at the bottom of the first groove 241. The sampling medium in the first groove 241 can enter the drain hole 242. The bottom of the first groove 241 is used to support the sampling bottle 400.
[0089] It should be noted that the bottom of the first tank 241 supports the sampling bottle 400, and the bottom of the sampling bottle 400 covers the port of the drain hole 242. There is residual sampling medium at the bottom of the first tank 241. The larger the contact area between the sampling bottle 400 and the bottom of the first tank 241, the more sampling medium will adhere to the surface of the sampling bottle 400.
[0090] In some embodiments, the inner diameter of the first groove 241 gradually decreases along the direction away from the top 220, and the inner diameter of the opening of the first groove 241 is greater than the inner diameter of the bottom of the first groove 241.
[0091] For example, the area of the opening of the first slot 241 is 400 cm². 2 The bottom area of the first groove 241 is 390 cm². 2 .
[0092] This allows the walls of the first tank to form a sloping structure, which facilitates the collection of the sampling medium splashed on the surface of the side wall 230 into the first tank 241.
[0093] In some embodiments, the opening of the first groove 241 may have various shapes, and the shape of the opening of the first groove 241 is consistent with the shape of the bottom of the first groove 241.
[0094] For example, the opening and bottom of the first groove 241 can both be rectangular, and the corresponding wall of the first groove 241 is a frustum.
[0095] For example, the opening and bottom of the first groove 241 can both be rectangular, and the corresponding wall of the first groove 241 is a frustum-shaped cone.
[0096] In some embodiments, the area ratio of the first port of the drain hole 242 to the bottom area of the adapted sampling bottle 400 can be in the range of [0.3, 0.9], wherein the first port of the drain hole 242 is the port of the drain hole 242 near the receiving cavity 210.
[0097] For example, the opening area of the first port of the drain hole 242 is 20 cm². 2 The compatible sampling bottle 400 has a bottom area of 24 cm². 2 .
[0098] The larger the area ratio of the first groove of the drain hole 242 to the bottom of the sampling bottle 400, the less sampling medium is adhering to the surface of the sampling bottle 400. The smaller the area ratio of the groove of the drain hole 242 near the accommodating cavity 210 to the bottom of the sampling bottle 400, the higher the stability of the sampling bottle 400 placed on the stage 240.
[0099] In some embodiments, the inner diameter of the drain hole 242 gradually decreases along the direction away from the accommodating cavity 210, and the inner diameter of the first port of the drain hole 242 is larger than the inner diameter of the second port of the drain hole 242, wherein the second port of the drain hole 242 is the port away from the accommodating cavity 210 and connected to the end of the fourth pipeline 140.
[0100] For example, the area of the first port of the drain hole 242 is 25 cm². 2 The area of the second port of the drain hole 242 is 2.25 cm². 2 .
[0101] This increases the area ratio of the first groove of the drain hole 242 to the bottom of the sampling bottle 400, while facilitating the collection of the sampling medium at the bottom of the first groove 241 into the drain hole 242. It also reduces the requirements for the diameter of the fourth pipe 140, making it easier to connect the second port of the drain pipe to the fourth pipe 140.
[0102] In some embodiments, the first port of the drain hole 242 may have various shapes, and the shape of the second port of the drain hole 242 is consistent with the shape of the first port of the drain hole 242.
[0103] For example, the first and second ports of the drain hole 242 can both be circular, and correspondingly, the inner wall of the drain hole 242 is a frustum.
[0104] For example, the first and second ports of the drain hole 242 can both be polygons, and correspondingly, the inner wall of the drain hole 242 is a frustum-shaped surface.
[0105] In some embodiments, the outer diameter of the stage 240 gradually decreases in the direction away from the receiving cavity 210 to adapt to the shape of the drain hole 242.
[0106] In some embodiments, the drainage device may further include a second housing 500 and a sampling window 520.
[0107] The second housing 500 and the sampling window 520 form a sealed cavity 510. The first housing is located inside the sealed cavity 510 and is connected to the inner wall of the sealed cavity 510, for example by welding or screwing, so that the sampling process can be carried out in a sealed environment.
[0108] In some embodiments, the second housing 500 has a sampling port (not shown in the figure), the sampling bottle 400 can be placed on the stage 240 through the sampling port, and the sampling window 520 is provided at the sampling port of the second housing 500 for opening or closing the sampling port.
[0109] In some embodiments, the sampling window 520 may be made of transparent materials such as polytetrafluoroethylene, fluorinated ethylene propylene copolymer, and polyether ether ketone, which facilitates observation of the sampling progress.
[0110] In some embodiments, one end of the sampling window 520 is rotatably connected to the outer side wall of the second housing 500.
[0111] Rotate the sampling window 520. When the first end face of the sampling window 520 abuts against the outer wall of the second housing 500, the sampling window 520 closes the sampling port. When the first end face of the sampling window 520 separates from the outer wall of the second housing 500, the sampling window 520 opens the sampling port.
[0112] In some embodiments, a sealing strip (not shown) is provided at the edge of the first end face of the sampling window 520.
[0113] Specifically, the sealing strip can improve the sealing performance between the first end face of the sampling window 520 and the outer wall of the second housing 500 when the first end face of the sampling window 520 abuts against the outer wall of the second housing 500.
[0114] In some embodiments, the output port of the first pipeline 110, the control switch 150, the input port of the second pipeline 120, the third pipeline 130, and the input port of the fourth pipeline 140 are all located inside the sealed cavity 510. By hiding the relevant devices, physical damage can be prevented on the one hand, and centralized management can be facilitated on the other hand.
[0115] In some embodiments, the output ports of the first conduit 110, the third conduit 130, the fourth conduit 140, the medium supply end 310, and the medium collection end 320 are located outside the sealed cavity 510 of the second housing 500.
[0116] In some embodiments, the second housing 500 also has a knob 530.
[0117] The knob 530 is located on the outside of the second housing 500 and is connected to the control switch 150 to adjust the state of the control switch 150.
[0118] It is understood that the above embodiments provide multiple implementation schemes, and these implementation schemes can be combined and cross-referenced with each other without conflict, thereby extending to multiple possible implementation schemes. These can all be considered as the implementation schemes disclosed and made public in this application.
[0119] It is understandable that the term "and / or" in this article is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this article indicates that the preceding and following related objects have an "or" relationship.
[0120] It is understood that "multiple" in this document refers to two or more. The descriptions of the first, second, third, fourth, etc., appearing in the embodiments of this application are only for illustration and to distinguish the described objects, and have no order, nor do they indicate a special limitation on the number of devices in the embodiments of this application, and cannot constitute any limitation on the embodiments of this application.
[0121] It should be noted that the "example" or "implementation" referred to in this specification means a specific feature, structure or characteristic that may be included in at least one implementation of the embodiments of this disclosure.
[0122] While the embodiments disclosed herein are as described above, this disclosure is not limited thereto. Any person skilled in the art can make various alterations and modifications without departing from the spirit and scope of this disclosure; therefore, the scope of protection of this specification should be determined by the scope defined in the claims.
Claims
1. A sampling device, characterized in that, include: The first housing has a receiving cavity; The first pipeline has an input port for connecting the sampling medium. The second pipeline, the output port of which is located inside the accommodating cavity, is used to input the sampling medium into the accommodating cavity; The third conduit, the output port of which is located outside the accommodating cavity; A control switch is connected to the output port of the first pipeline, the input port of the second pipeline, and the input port of the third pipeline, respectively, to control the connection between the first pipeline and the second pipeline, and the connection between the first pipeline and the third pipeline.
2. The sampling device according to claim 1, characterized in that, The first housing also has: A drain hole penetrates the first housing and is located at the bottom of the accommodating cavity, for discharging the sampling medium from the accommodating cavity.
3. The sampling device according to claim 2, characterized in that, Also includes: The fourth pipeline has its input port connected to the drain hole.
4. The sampling device according to claim 3, characterized in that, The output port of the fourth pipeline is connected to the third pipeline; Alternatively, the fourth pipeline may be independent of the third pipeline.
5. The sampling device according to claim 2, characterized in that, The first housing includes: At the top, the second conduit passes through the top; The sidewall is connected to the top. A platform is located on the side wall and is disposed opposite to the top, and the drain hole is located on the platform; The output port of the second pipeline is located between the platform and the top.
6. The sampling device according to claim 5, characterized in that, The platform also has: The first tank, wherein the first port of the drain hole is located at the bottom of the first tank, and the bottom of the first tank is used to support the sampling bottle.
7. The sampling device according to claim 5, characterized in that, The inner diameter of the drain hole gradually decreases in the direction away from the accommodating cavity.
8. The sampling device according to claim 1, characterized in that, The first pipeline, the third pipeline, and the control switch are located outside the accommodating cavity.
9. The sampling device according to claim 1, characterized in that, Also includes: A medium supply end is connected to the input port of the first pipeline and is used to supply sampling medium to the first pipeline; The medium collection end is connected to the output port of the third pipeline and is used to collect the sampling medium discharged from the third pipeline.
10. The sampling device according to claim 1, characterized in that, Also includes: The second housing has a sampling port; A sampling window, located at the sampling port, forms a sealed cavity with the second housing, used to open or close the sampling port; The first housing is located inside the sealed cavity.