Detector protection device and semiconductor device detection equipment

Abstract

The utility model provides a detector protection device and semiconductor device detection equipment. The detector protection device comprises a protection outer cover, a telescopic rod, a protection plate and a wiring terminal. And the protective outer cover is made of a non-metal material. The telescopic rod extends out of the protective outer cover and is configured to stretch out and draw back in the direction parallel to the detector. And the protection plate is connected to one end, extending out of the protection outer cover, of the telescopic rod, and is driven by the telescopic rod to move so as to reach and move out of a protection position between the detector and the detected semiconductor device. The protection plate is made of a conductive material. And the wiring terminal is arranged on the protective outer cover, is electrically connected with the protective plate and is used for being connected with an external electrode, so that the protective plate is electrified. The arrangement of the protection plate enables the large beam and the small beam to be rapidly switched for use under the condition that the detector is not changed.

Description

TECHNICAL FIELD

[0001] The utility model relates to semiconductor detection technical field especially, and it is a kind of detector protection device and semiconductor device detection equipment. BACKGROUND

[0002] In recent years, with the high-speed development of semiconductor industry, the demand of defect detection equipment in Wafer manufacturing process is also more and more extensive. Since the features of Wafer to be detected are all microscopic size, the commonly used optical detection equipment cannot meet the use requirements, so the existing Wafer detection equipment is electron beam detection. With the improvement of detection process, the general single small beam detection cannot meet the current process requirements, and the present detection equipment needs to use large and small beam alternately. The current applied detector cannot withstand the bombardment of reflected signal particles after large beam is shot to the surface of Wafer, and under the condition of large beam, the detector does not participate in work, so a structure for protecting the detector under the condition of large beam is needed, and the work of the detector under the condition of small beam cannot be affected. SUMMARY

[0003] In view of the above problems, the utility model is proposed to provide a detector protection device and semiconductor device detection equipment to overcome the above problems or at least partially solve the above problems.

[0004] An object of the utility model is to realize shielding signal particles under the condition of large beam, so as to achieve the effect of protecting the detector.

[0005] A further object of the utility model is to realize that large and small beam can be quickly switched without changing the detector.

[0006] Another further object of the utility model is to prevent the emitted signal particles from producing secondary sputtering under the condition of large beam, and improve the performance of the equipment.

[0007] Another further object of the utility model is to realize accurate control of the position of protection plate in the process of electron beam detection.

[0008] Another further object of the utility model is to realize precise adjustment of the position of vacuum internal part by vacuum external control driving.

[0009] Particularly, the utility model provides a detector protection device, which comprises:

[0010] The protection cover is made of non-metallic material;

[0011] The telescopic rod is stretched out from the protection cover and is configured to stretch and retract along the direction parallel to the detector;

[0012] a shield plate connected to one end of the telescopic rod protruding out of the shield cover and moved by the telescopic rod to achieve the shield position between the probe and the semiconductor device under test; the shield plate is made of conductive material;

[0013] a terminal provided on the shield cover and electrically connected with the shield plate for connecting external electrode to electrify the shield plate.

[0014] Optionally, the probe shield device further comprises:

[0015] a sealing seat provided inside the shield cover, the sealing seat is provided with a first through hole, and the telescopic rod passes through the first through hole;

[0016] a bellows sleeved on the telescopic rod, one end of the bellows is connected to the sealing seat, and the other end of the bellows is connected to the end of the telescopic rod connected to the shield plate; wherein,

[0017] the bellows is made of conductive material, and the terminal is electrically connected with the shield plate through the bellows.

[0018] Optionally, the probe shield device further comprises:

[0019] a connecting frame, the shield plate is connected with the telescopic rod through the connecting frame;

[0020] the connecting frame is made of conductive material, the shield plate and the connecting frame are in contact type electrical connection, and the bellows and the connecting frame are in electrical connection.

[0021] Optionally, the telescopic rod is made of conductive material, the bellows and the telescopic rod are in contact type electrical connection, and the connecting frame and the telescopic rod are in contact type electrical connection;

[0022] the sealing seat is made of conductive material, the sealing seat and the bellows are in contact type electrical connection, and the terminal and the sealing seat are in contact type electrical connection.

[0023] Optionally, the connecting frame comprises:

[0024] a connecting block, the corresponding end of the telescopic rod is provided with a mounting groove, the connecting block is inserted into the mounting groove, and the connecting block and the telescopic rod are connected through a connecting piece;

[0025] a spacer extending from the connecting block in a direction perpendicular to the telescopic rod is formed;

[0026] A supporting member is connected to the spacer at an end away from the connecting block; the protective plate is detachably connected to the supporting member.

[0027] Optionally, the detector protection device further comprises:

[0028] A mounting seat is arranged inside the protective cover, the mounting seat is made of non-metallic material, a second through hole corresponding to the first through hole is arranged on the mounting seat, and the sealing seat is mounted on the mounting seat; and the telescopic rod passes through the second through hole.

[0029] A driving assembly, a housing of the driving assembly is connected to the mounting seat; and the telescopic rod is driven to extend and retract by the driving assembly.

[0030] Optionally, the detector protection device further comprises:

[0031] An adapter block is arranged between the output shaft of the driving assembly and the telescopic rod, the adapter block has a connecting portion, an output shaft clamping portion and a telescopic rod clamping portion, and the output shaft clamping portion and the telescopic rod clamping portion are arranged on opposite sides of the connecting portion.

[0032] An output shaft clamping block is arranged on the adapter block, and the output shaft clamping block and the output shaft clamping portion clamp the output shaft therebetween.

[0033] A telescopic rod clamping block is arranged on the adapter block, and the telescopic rod clamping block and the telescopic rod clamping portion clamp an end of the telescopic rod away from the protective plate therebetween.

[0034] The output shaft and the telescopic rod are arranged in parallel and at intervals.

[0035] Optionally, the detector protection device further comprises:

[0036] A linear bearing is arranged on the mounting seat and adjacent to the second through hole; and the telescopic rod is mounted on the linear bearing.

[0037] Optionally, a beam hole for passing an electron beam is arranged on the protective plate, and the beam hole is at the center of the protective plate.

[0038] According to another aspect of the present application, a semiconductor device detection device is also provided, comprising:

[0039] A supporting device configured to support a semiconductor device under test;

[0040] An emitting device configured to emit an electron beam to the semiconductor device under test;

[0041] A detector for receiving signal particles reflected from the semiconductor device under test;

[0042] The detector protection device as claimed in any one of the preceding embodiments, wherein the telescopic rod drives the protection plate to move by telescopic movement to reach and move out of the protection position between the detector and the semiconductor device under test.

[0043] In the detector protection device, the protection plate moves with the one end of the telescopic rod extending out of the protection cover, when the small beam current detection is performed on the Wafer, the protection plate moves out of the protection position between the detector and the Wafer under test, the small beam current electron beam is shot at the surface of the Wafer, the detector works normally and normally receives the signal particles reflected from the surface of the Wafer under test. When the large beam current detection is performed on the Wafer, the large beam current electron beam is shot at the surface of the Wafer, the detector cannot withstand the bombardment of the signal particles reflected from the Wafer under test under the condition of the large beam current, the protection plate reaches the protection position between the detector and the Wafer under test, the signal particles reflected are shielded by the protection plate, and the detector is protected. The protection plate is arranged to enable the small and large beam currents to be quickly switched without changing the detector. The protection cover made of non-metallic material can shield the part of the telescopic rod in the protection cover during the electron beam detection process, avoids the risk of electric shock during the working process, and ensures safety. Moreover, in the prior art, under the condition of the large beam current, the signal particles reflected from the large beam current electron beam shot at the Wafer under test bombard the protection plate to generate a large amount of irregular sputtering electrons, and secondary sputtering is generated, which greatly affects the performance of the equipment and the service life of the workpiece. In the present application, the protection plate is connected with the terminal and is electrified, preferably, the protection plate is positively charged, and after the signal particles bombard the protection plate, the signal particles are adsorbed by the positive charge of the protection plate, so that the signal particles cannot sputter around. The overall protection performance is effectively ensured, and the performance of the equipment and the service life of the surrounding workpiece can be improved.

[0044] The above and other objects, advantages and features of the present application will become more apparent from the following detailed description of some embodiments thereof, when considered in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF DRAWINGS

[0045] Some embodiments of the present application will now be described in detail in the following text with reference to the accompanying drawings, which are provided by way of example and are not limiting. Identical reference signs in the drawings denote identical or similar components or parts. It should be understood by those skilled in the art that the drawings are not necessarily drawn to scale. In the drawings:

[0046] Figure 1 is a schematic view of a detector protection device according to an embodiment of the present application;

[0047] Figure 2 is a sectional view of a detector protection device according to an embodiment of the present application;

[0048] Figure 3 is a partial schematic view of a detector protection device according to an embodiment of the present application;

[0049] Figure 4 is a schematic view of a telescopic motor according to an embodiment of the present application;

[0050] Figure 5 is a schematic view of a detector protection device working under a small beam current according to an embodiment of the present application;

[0051] Figure 6 is a schematic view of a detector protection device working under a large beam current according to an embodiment of the present application;

[0052] Figure 7 is a schematic view of irregular sputtering of a signal particle bombardment protection plate under a large beam current according to an embodiment of the present application.

[0053] List of reference signs:

[0054] 100, detector protection device; 111, protection cover; 112, mounting seat; 121, telescopic rod; 122, protection plate; 123, sealing seat; 124, bellows; 125, linear bearing; 126, adapter spacer; 127, first screw; 128, second screw; 129, wiring terminal; 130, connecting frame; 131, connecting block; 132, spacer; 133, support; 141, connecting part; 142, output shaft holding part; 143, telescopic rod holding part; 144, telescopic rod fixing screw; 151, output shaft holding block; 152, telescopic rod holding block; 153, motor shaft fixing screw; 160, telescopic motor; 161, output shaft; 162, mounting plate;

[0055] 200, detector;

[0056] 310, large beam current electron beam; 320, small beam current electron beam; 330, signal particle;

[0057] 400, wafer. DETAILED DESCRIPTION

[0058] Reference will now be made to Figures 1 to 7The detector protection device and the semiconductor device detection equipment are described in the embodiments of the present application. In the description of the embodiments, it should be understood that the terms "first", "second" are used only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first", "second" can explicitly or implicitly include at least one of the features, that is, one or more of the features. In the description of the present application, the meaning of "a plurality of" is at least two, for example, two, three, etc., unless otherwise specifically limited. When a certain feature "includes or contains" a certain or certain features, unless otherwise specifically described, it indicates that other features and can further include other features.

[0059] Unless otherwise expressly specified and limited, the terms "provide", "mount", "connect", "connect", "fix", "couple" and other terms should be broadly understood, for example, can be fixedly connected, or can be detachably connected, or integrated; can be mechanically connected, or electrically connected; can be directly connected, or indirectly connected through an intermediate medium, can be the internal communication of two elements or the interaction relationship of two elements, unless otherwise expressly limited. Those skilled in the art should be able to understand the specific meaning of the above terms in the present application according to the specific circumstances.

[0060] In addition, in the description of the embodiments, the first feature "above" or "below" the second feature can include that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact through another feature between them. That is, in the description of the embodiments, the first feature "above", "above" and "above" the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the first feature is higher than the second feature in horizontal height. The first feature "below", "below" or "below" the second feature can be that the first feature is directly below or obliquely below the second feature, or only indicates that the first feature is less than the second feature in horizontal height.

[0061] In the description of the embodiments, the description of the terms "one embodiment", "some embodiments", "illustrative embodiment", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the described specific features, structures, materials or characteristics can be combined in any one or more embodiments or examples in a suitable manner.

[0062] Figure 1is a schematic view of the detector protection device 100 according to an embodiment of the present application. As shown in Figure 1 , and referring to Figures 2-7 , the embodiment of the present application provides a detector protection device 100 for semiconductor device detection equipment, which comprises a protective cover 111, an extension rod 121, a protective plate 122 and a terminal 129. The protective cover 111 is made of non-metallic material. The extension rod 121 extends from the protective cover 111 and is configured to be extended in a direction parallel to the detector 200. The protective plate 122 is connected to one end of the extension rod 121 extending out of the protective cover 111 and is moved by the extension rod 121 to achieve a protective position between the detector and the measured semiconductor device. The protective plate 122 is made of conductive material. The terminal 129 is arranged on the protective cover 111 and is electrically connected to the protective plate 122, which is used to connect an external electrode so that the protective plate 122 is electrified.

[0063] The protective plate 122 moves with the one end of the extension rod 121 extending out of the protective cover 111, as shown in Figure 5 , when the beamlet detection is performed on the wafer 400, the protective plate 122 moves out of the protective position between the detector 200 and the measured wafer 400, the beamlet electron beam 320 is shot to the surface of the wafer 400, and the detector 200 normally works and normally receives the signal particles 330 reflected from the surface of the measured wafer 400. As shown in Figure 6 , when the beam detection is performed on the wafer 400, the beam electron beam 310 is shot to the surface of the wafer 400, and the detector cannot withstand the bombardment of the signal particles reflected from the measured wafer 400 under the condition of the large beam, the protective plate 122 reaches the protective position between the detector 200 and the measured wafer 400, and the signal particles 330 reflected from the surface of the wafer 400 are shielded by the protective plate 122, thereby protecting the detector 200. The setting of the protective plate makes it possible to quickly switch between the large beam and the small beam without changing the detector. The protective cover 111 made of non-metallic material can shield the part of the extension rod 121 in the protective cover 111 during the electron beam detection process, thereby avoiding the risk of electric shock during the work and ensuring safety. Moreover, the prior art under the condition of the large beam, Figure 7As shown in the figure, a large number of irregular sputtering electrons are generated when the reflected signal particles of the large-beam electron beam 310 hitting the wafer under test bombard the protection plate 122, which generates secondary sputtering, and has a great influence on the performance of the equipment and the service life of the workpiece. In the present application, the protection plate 122 is connected with the terminal 129 after being electrified, preferably, the protection plate 122 is positively charged, and after the signal particles bombard the protection plate 122, the signal particles 330 will be adsorbed by the positive charge of the protection plate 122, so that the signal particles 330 will not sputter around. Effectively guarantee the overall protection performance, but also can improve the performance of the equipment and the service life of the surrounding workpiece.

[0064] In some embodiments of the present application, as shown in Figure 2 The detector protection device 100 further comprises a sealing seat 123 and a bellows 124. The sealing seat 123 is arranged inside the protection cover 111, and the sealing seat 123 is provided with a first through hole, and the telescopic rod 121 passes through the first through hole. The bellows 124 is sleeved on the telescopic rod 121, one end of the bellows 124 is connected to the sealing seat 123, and the other end of the bellows 124 is connected to one end of the telescopic rod 121 connected to the protection plate 122. Wherein, the bellows 124 is made of conductive material, and the terminal 129 is electrically connected with the protection plate 122 through the bellows 124.

[0065] The telescopic rod 121 is in the sealing seat 123, and the end extending out of the protection cover 111 passes through the first through hole. The bellows 124 is driven by the telescopic rod 121 to extend and compress, and can isolate the internal and external environment. The outside of the bellows 124 is a vacuum environment, and the inside is an atmospheric environment. The arrangement of the bellows 124 ensures that the telescopic rod 121 will not damage the vacuum environment during movement. At the same time, the bellows 124 made of conductive material also electrically connects the terminal 129 and the protection plate 122, saving the special electric connection mechanism needed between the terminal 129 and the protection plate 122, saving cost, and achieving two goals at once.

[0066] In some embodiments of the present application, as shown in Figure 3 The telescopic rod, the sealing seat and the bellows are connected together by welding.

[0067] In some embodiments of the present application, as shown in Figure 2 The detector protection device 100 further comprises an adapter pad 126, which is made of non-metallic material, and the adapter pad 126 is installed on the sealing seat 123 by the first screw 127. The first screw 127 is made of non-metallic material. Non-metallic material can effectively prevent electric leakage.

[0068] In some embodiments of the present application, as shown in Figure 2As shown, the detector protection device 100 further comprises a connecting frame 130. The protection plate 122 is connected with the telescopic rod 121 through the connecting frame. The connecting frame is made of conductive material, the protection plate 122 and the connecting frame are in contact type electrical connection, and the bellows 124 and the connecting frame are in electrical connection. The connecting frame facilitates the installation and replacement of the protection plate 122.

[0069] Further, in some embodiments of the present application, the connecting frame comprises a connecting block 131, a spacer 132 and a supporting piece 133. The respective end of the telescopic rod 121 is provided with a mounting groove, the connecting block 131 is inserted into the mounting groove, the connecting block 131 and the telescopic rod 121 are connected through a connecting piece, and the connecting piece can be a second screw 128. The spacer 132 is formed by extending from the connecting block in a direction perpendicular to the telescopic rod 121. The supporting piece 133 is connected to the end of the spacer 132 away from the connecting block. The protection plate 122 is detachably connected with the supporting piece 133.

[0070] The protection plate improves the connection stability with the telescopic rod through the connecting frame. The connecting frame can adjust the interval distance between the protection plate and the wafer to be measured in the beam direction, thereby adjusting the shielding effect of the protection plate on the signal particles reflected by the wafer to be measured, so as to improve the protection effect of the detector protection device on the detector.

[0071] In some embodiments of the present application, the telescopic rod 121 is made of conductive material, the bellows 124 and the telescopic rod 121 are in contact type electrical connection, and the connecting frame and the telescopic rod 121 are in contact type electrical connection. The sealing seat 123 is made of conductive material, the sealing seat 123 and the bellows 124 are in contact type electrical connection, and the wiring terminal 129 and the sealing seat 123 are in contact type electrical connection.

[0072] The contact type electrical connection can save installation space, and the above arrangement can make the volume of the detector protection device 100 as small as possible.

[0073] In some embodiments of the present application, the detector protection device 100 further comprises a mounting seat 112 and a driving assembly. The mounting seat 112 is arranged on the inner side of the protection cover 111, the mounting seat 112 is made of non-metallic material, the mounting seat 112 is provided with a second through hole corresponding to the first through hole, and the sealing seat 123 is mounted on the mounting seat 112. The telescopic rod 121 passes through the second through hole. The housing of the driving assembly is connected to the mounting seat 112. The telescopic rod 121 is driven to extend and retract by the driving assembly.

[0074] The driving assembly and the sealing seat 123 are both mounted on the mounting seat 112, and the telescopic rod 121 is slidably arranged through the second through hole and the first through hole under the driving of the driving assembly.

[0075] In some embodiments of the present application, as shown in Figure 4As shown, the driving assembly includes a telescopic motor 160 having an output shaft 161. The telescopic motor 160 realizes the accurate control of the position of the protective plate during the electron beam detection process, and realizes the precise adjustment of the position of the internal part in the vacuum by the driving of the control outside the vacuum. Further, in some embodiments, the telescopic motor is a customized direct push motor, the motor body can convert the rotary motion into linear motion, the output shaft 161 drives the telescopic rod to control the movement of the protective plate, and the signal particles of the large beam are shielded and the signal particles of the small beam are released.

[0076] In some embodiments of the utility model, the housing of the driving assembly includes a mounting plate 162. The telescopic motor 160 is connected with the mounting seat 112 through the mounting plate 162.

[0077] In some embodiments of the utility model, as shown, Figure 2 As shown, the detector protection device 100 further includes an adapter block, an output shaft clamping block 151 and a telescopic rod clamping block 152. The adapter block is arranged between the output shaft 161 of the driving assembly and the telescopic rod 121, and the adapter block has a connecting portion 141, an output shaft clamping portion 142 and a telescopic rod clamping portion 143, and the output shaft clamping portion 142 and the telescopic rod clamping portion 143 are arranged on the opposite sides of the connecting portion 141. The output shaft clamping block 151 is arranged on the adapter block, and the output shaft clamping block 151 and the output shaft clamping portion 142 clamp the output shaft 161 therebetween. The telescopic rod clamping block 152 is arranged on the adapter block, and the telescopic rod clamping block 152 and the telescopic rod clamping portion 143 clamp the end of the telescopic rod 121 away from the protective plate 122 therebetween. The output shaft 161 and the telescopic rod 121 are arranged in parallel and spaced apart.

[0078] The output shaft clamping block 151 and the output shaft clamping portion 142 clamp the output shaft 161, the telescopic rod clamping block 152 and the telescopic rod clamping portion 143 clamp the end of the telescopic rod 121 away from the protective plate 122, and the connecting portion 141 connects the output shaft clamping portion 142 and the telescopic rod clamping portion 143 together, so that the adapter block, the output shaft clamping block 151 and the telescopic rod clamping block 152 connect the output shaft 161 and the telescopic rod 121 of the driving assembly together, and the telescopic rod 121 makes telescopic motion with the output shaft 161 of the driving assembly.

[0079] In some embodiments of the utility model, a first through hole is formed in the output shaft clamping block 151, and the first through hole faces the peripheral wall of the output shaft 161. A first threaded hole is formed in the peripheral wall of the output shaft in the radial direction, and the first threaded hole is opposite to the first through hole. The detector protection device 100 further includes a motor shaft fixing screw 153, the motor shaft fixing screw 153 passes through the first through hole and is screwed with the first threaded hole, so as to fixedly connect the output shaft clamping block 151 with the output shaft 161.

[0080] In some embodiments of the utility model, the output shaft holds tightly 142 and is provided with a second through hole, the second through hole is towards the circumference wall of telescopic rod 121. The circumference wall of telescopic rod 121 is provided with a second threaded hole along the radial direction, and the second threaded hole is opposite to the second through hole. The detector protection device 100 further includes telescopic rod fixing screw 144, which passes through the second through hole and is screwed with the second threaded hole, to fix and connect the connecting block with telescopic rod 121.

[0081] In some embodiments of the utility model, the detector protection device 100 further includes linear bearing 125, which is arranged on mounting seat 112 and adjacent to the second through hole. Telescopic rod 121 is installed on linear bearing 125.

[0082] Linear bearing 125 is used in cooperation with telescopic rod 121. Because the load ball of linear bearing 125 is in point contact with the bearing outer sleeve, the steel ball rolls with minimum frictional resistance, so linear bearing 125 has the characteristics of small friction and relatively stable, and its frictional resistance does not change with the bearing speed, which can obtain high sensitivity, high precision and smooth linear motion.

[0083] In some embodiments of the utility model, the protection plate 122 is provided with a beam hole for the electron beam to pass through, and the beam hole is located at the center of the protection plate 122.

[0084] The embodiment also provides a semiconductor device detection equipment, which includes a support device, an emission device, a detector 200 and the detector protection device 100 in any of the above embodiments. The support device is configured to support the measured semiconductor device. The emission device is configured to emit an electron beam to the measured semiconductor device. The detector is used to receive the signal particles reflected by the measured semiconductor device. Telescopic rod 121 drives protection plate 122 to move through telescopic movement, so as to realize the protection position between the detector and the measured semiconductor device. The semiconductor device here can be wafer 400.

[0085] At this point, those skilled in the art should realize that although the utility model has been shown and described in detail in the text, many other variants or modifications conforming to the principles of the utility model can be directly determined or deduced according to the content disclosed by the utility model without departing from the spirit and scope of the utility model. Therefore, the scope of the utility model should be understood and recognized as covering all these other variants or modifications.

Claims

1. A detector protection device for semiconductor device testing equipment, characterized in that, include: The protective outer casing is made of non-metallic materials; A telescopic rod extends from the protective cover and is configured to extend and retract in a direction parallel to the detector; A protective plate is connected to one end of the telescopic rod that extends out of the protective cover. It is moved by the telescopic rod to reach and move out of the protective position located between the detector and the semiconductor device under test. The protective plate is made of conductive material. A terminal block is provided on the protective cover and electrically connected to the protective plate, used to connect an external electrode, thereby energizing the protective plate.

2. The detector protection device according to claim 1, characterized in that, Also includes: A sealing seat is provided inside the protective cover, and a first through hole is provided on the sealing seat, through which the telescopic rod passes; A corrugated pipe is fitted onto the telescopic rod, with one end of the corrugated pipe connected to the sealing seat and the other end of the corrugated pipe connected to the end of the telescopic rod that connects to the protective plate; wherein, The corrugated pipe is made of conductive material, and the terminal block is electrically connected to the protective plate through the corrugated pipe.

3. The detector protection device according to claim 2, characterized in that, Also includes: A connecting frame is provided, through which the protective plate is connected to the telescopic rod; The connecting frame is made of conductive material, the protective plate is electrically connected to the connecting frame by contact, and the corrugated pipe is electrically connected to the connecting frame.

4. The detector protection device according to claim 3, characterized in that, The telescopic rod is made of conductive material, and the corrugated pipe and the telescopic rod are connected by a contact electrical connection, as are the connecting frame and the telescopic rod. The sealing seat is made of conductive material, and the sealing seat and the bellows are connected by contact electrical connection; the terminal block and the sealing seat are connected by contact electrical connection.

5. The detector protection device according to claim 3, characterized in that, The connecting frame includes: A connecting block is provided at the corresponding end of the telescopic rod, the connecting block is inserted into the mounting groove, and the connecting block and the telescopic rod are connected by a connector; A spacer is formed extending from the connecting block in a direction perpendicular to the telescopic rod; A support member is connected to the end of the spacer away from the connecting block; the protective plate is detachably connected to the support member.

6. The detector protection device according to claim 2, characterized in that, Also includes: A mounting base is disposed inside the protective cover. The mounting base is made of non-metallic material and has a second through hole corresponding to the first through hole. The sealing seat is mounted on the mounting base. The telescopic rod passes through the second through hole. A drive assembly, the housing of which is connected to the mounting base; The telescopic rod extends and retracts under the drive of the drive assembly.

7. The detector protection device according to claim 6, characterized in that, Also includes: An adapter block is disposed between the output shaft of the drive assembly and the telescopic rod. The adapter block has a connecting part, an output shaft clamping part, and a telescopic rod clamping part. The output shaft clamping part and the telescopic rod clamping part are respectively disposed on opposite sides of the connecting part. An output shaft clamping block is disposed on the adapter block, and the output shaft clamping block and the output shaft clamping part clamp the output shaft therebetween. A telescopic rod clamping block is provided on the adapter block, and the telescopic rod clamping block and the telescopic rod clamping part clamp the end of the telescopic rod away from the protective plate therebetween; The output shaft and the telescopic rod are arranged parallel to each other at intervals.

8. The detector protection device according to claim 6, characterized in that, Also includes: A linear bearing is disposed on the mounting base and adjacent to the second through hole; the telescopic rod is mounted on the linear bearing.

9. The detector protection device according to claim 1, characterized in that, The protective plate has a beam hole for the electron beam to pass through, and the beam hole is located at the center of the protective plate.

10. A semiconductor device testing device, characterized in that, include: A support device configured to support the semiconductor device under test; A transmitting device configured to emit an electron beam toward the semiconductor device under test; A detector for receiving signal particles reflected by the semiconductor device under test; According to any one of claims 1 to 9, the telescopic rod drives the protective plate to move through telescopic movement, so as to reach and move out of the protective position located between the detector and the semiconductor device under test.

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