Monocrystalline silicon wafer sorting equipment

Abstract

The utility model relates to the technical field of sorting devices, and discloses monocrystalline silicon wafer sorting equipment which comprises an installation box, and a sliding groove is formed in the lower surface of the installation box. Through the arrangement of a threaded rod, a first movable block, a second movable block, a third movable block and a fourth movable block, when a first motor starts to operate, the threaded rod can rotate and enables the first movable block and a first driving rod to start to move leftwards; at the moment, a second movable block and a second driving rod are driven by a first driving rod to move forwards, then the second driving rod moves to drive a third movable block, so that the third movable block and a third driving rod move rightwards, and finally, the third driving rod moves to drive a fourth movable block, so that the fourth movable block moves backwards; the positions of the four negative pressure suction cups can be changed along with movement of the first movable block, the second movable block, the third movable block and the fourth movable block.

Description

Technical Field

[0001] This utility model relates to the field of sorting device technology, and more specifically, to a single crystal silicon wafer sorting device. Background Technology

[0002] Monocrystalline silicon is a relatively reactive non-metallic element and an important component of crystalline materials. It is at the forefront of new material development and is mainly used as a semiconductor material or in the manufacture of solar photovoltaic panels. Monocrystalline silicon requires extremely high purity. In photovoltaic technology, high-purity monocrystalline silicon wafers can improve photoelectric conversion efficiency, while in the chip manufacturing industry, high-purity monocrystalline silicon can ensure the stable operation of chips.

[0003] When producing monocrystalline silicon wafers, operators often use sorting equipment to separate wafers that fail surface inspection. However, while existing sorting equipment has basic sorting functions, it generally lacks the ability to adjust the suction cup position according to the wafer size. This limits the sorting equipment to only processing monocrystalline silicon wafers of specific sizes, significantly reducing its applicability. Therefore, improvements are needed. Utility Model Content

[0004] In order to overcome the shortcomings of the existing technology, this utility model provides a single crystal silicon wafer sorting device with the advantage of high applicability.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a single-crystal silicon wafer sorting device, comprising a mounting box, a groove formed on the lower surface of the mounting box, a central block fixedly connected to the center of the bottom of the inner surface of the mounting box, a first motor fixedly mounted on the right surface of the mounting box, a threaded rod fixedly sleeved at the other end of the output shaft of the first motor, the left end of the threaded rod sequentially penetrating the mounting box and the central block and extending into the interior of the central block, a first movable block threadedly sleeved on the outer surface of the threaded rod, a first driving rod fixedly sleeved on the upper side of the outer surface of the first movable block, and two... The first movable block, the second movable block, has a second driving rod fixedly sleeved on the upper side of its outer surface. The inner surface of the second driving rod is movably connected to the third movable block. The upper side of the outer surface of the third movable block is fixedly sleeved to the third driving rod. The inner surface of the third driving rod is movably connected to the fourth movable block. The first, second, third, and fourth movable blocks are all movably connected to the inner surface of the slide groove. The bottom ends of the first, second, third, and fourth movable blocks all penetrate the mounting box and extend to the lower surface of the mounting box, and are fixedly connected to the mounting sleeve. The inner surface of the mounting sleeve is movably sleeved with a negative pressure suction cup.

[0006] In a preferred embodiment of this utility model, a circular block located above a negative pressure suction cup is movably fitted onto the inner surface of the mounting sleeve. A fixing plate is fixedly connected to the outer surface of the mounting sleeve. A locking pin is movably fitted onto the inner surface of the circular block. The outer end of the locking pin passes through the circular block, the mounting sleeve, and the fixing plate in sequence, extends to the outside of the fixing plate, and is fixedly connected to a toggle plate. Limiting strips are fixedly connected to both the left and right sides of the outer surface of the toggle plate. The other end of the limiting strip passes through the fixing plate, extends to the inside of the fixing plate, and is fixedly connected to a locking block. A spring is movably fitted onto the outer surface of the locking pin. The outer end of the spring is fixedly connected to the inner surface of the toggle plate, and the other end of the spring is fixedly connected to the outer surface of the fixing plate.

[0007] As a preferred embodiment of this utility model, a connecting arm is fixedly connected to the upper surface of the mounting box, a fixed sleeve is movably sleeved on the rear side of the outer surface of the connecting arm, a movable plate is fixedly connected to the lower surface of the fixed sleeve, a second motor located inside the fixed sleeve is fixedly installed on the upper surface of the movable plate, a rotating shaft is fixedly sleeved at the other end of the output shaft of the second motor, the top end of the rotating shaft passes through the connecting arm and extends into the interior of the connecting arm, and the outer surface of the rotating shaft and the inner surface of the connecting arm are fixedly sleeved.

[0008] As a preferred technical solution of this utility model, movable rods are fixedly connected to both the left and right sides of the lower surface of the movable plate. A limiting sleeve is movably sleeved on the outer surface of the movable rod. A base plate is fixedly connected to the bottom end of the limiting sleeve. A connecting sleeve located between the limiting sleeves is fixedly connected to the upper surface of the base plate. A pneumatic cylinder is fixedly installed on the inner surface of the connecting sleeve. The top end of the pneumatic cylinder is fixedly connected to the lower surface of the movable plate.

[0009] As a preferred technical solution of this utility model, the upper surface of the base plate is fixedly connected to a placement platform located on the left side of the limiting sleeve, the front side of the upper surface of the base plate is fixedly connected to a mounting plate, and a driven wheel is movably installed on the right side of the inner surface of the mounting plate. The front and rear ends of the driven wheel both penetrate the mounting plate and extend to the outer side of the mounting plate.

[0010] As a preferred embodiment of this utility model, a No. 3 motor is fixedly installed on the left side of the front surface of the base plate, and a round shaft is fixedly sleeved on the other end of the output shaft of the No. 3 motor. The rear end of the round shaft passes through the mounting plate and extends to the rear surface of the mounting plate. The outer surface of the round shaft and the inner surface of the mounting plate are movably sleeved. A surface detector is fixedly installed on the left side of the upper surface of the base plate.

[0011] As a preferred embodiment of this utility model, a drive wheel located inside the mounting plate is fixedly sleeved on the outer surface of the circular shaft, and the drive wheel is connected to the driven wheel via a transmission belt.

[0012] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0013] This invention utilizes a threaded rod, four movable blocks (number one, two, three, and four). When motor one starts running, the threaded rod rotates, causing movable block one and its driving rod to move to the left. Movable block two and its driving rod then move forward under the influence of driving rod one. The movement of driving rod two then moves movable block three to the right, and finally, driving rod three moves movable block four backward. As these four movable blocks move, the positions of the four negative pressure suction cups change, thus enabling the sorting of monocrystalline silicon wafers of different sizes. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of this utility model;

[0015] Figure 2 This is a schematic diagram of the structure of the back of this utility model;

[0016] Figure 3 This is a cross-sectional view of the back of the present invention.

[0017] Figure 4 This is a cross-sectional view of the pneumatic cylinder of this utility model;

[0018] Figure 5 This is a cross-sectional view of the movable rod of this utility model;

[0019] Figure 6 This is a schematic diagram of the structure of the spring of this utility model;

[0020] Figure 7 This is a schematic diagram of the structure of the intermediate block of this utility model;

[0021] Figure 8 for Figure 4 A magnified schematic diagram of the structure at point A in the middle.

[0022] In the diagram: 1. Mounting box; 2. Slide groove; 3. Intermediate block; 4. Motor No. 1; 5. Threaded rod; 6. Movable block No. 1; 7. Drive rod No. 1; 8. Movable block No. 2; 9. Drive rod No. 2; 10. Movable block No. 3; 11. Drive rod No. 3; 12. Movable block No. 4; 13. Mounting sleeve; 14. Negative pressure suction cup; 15. Round block; 16. Locking pin; 17. Fixing plate; 18. Actuating plate; 19. Spring; 2 0. Limiting bar; 21. Locking block; 22. Connecting arm; 23. Fixing sleeve; 24. Motor No. 2; 25. Rotating shaft; 26. Movable plate; 27. Pneumatic cylinder; 28. Connecting sleeve; 29. ​​Movable rod; 30. Limiting sleeve; 31. Base plate; 32. Placement platform; 33. Mounting plate; 34. Driven wheel; 35. Motor No. 3; 36. Round shaft; 37. Driving wheel; 38. Transmission belt; 39. Surface detector. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] like Figures 1 to 8As shown, this utility model provides a single-crystal silicon wafer sorting device, including a mounting box 1. A groove 2 is formed on the lower surface of the mounting box 1. A middle block 3 is fixedly connected to the center of the bottom of the inner surface of the mounting box 1. A first motor 4 is fixedly mounted on the right surface of the mounting box 1. A threaded rod 5 is fixedly sleeved at the other end of the output shaft of the first motor 4. The left end of the threaded rod 5 passes through the mounting box 1 and the middle block 3 sequentially and extends into the interior of the middle block 3. A first movable block 6 is threadedly sleeved on the outer surface of the threaded rod 5. A first driving rod 7 is fixedly sleeved on the upper side of the outer surface of the first movable block 6. A second movable block 8 is movably connected to the inner surface of the first driving rod 7. A second driving rod 9 is fixedly sleeved on the upper side of the outer surface of the second movable block 8. A third movable block 10 is movably connected to the inner surface of the second driving rod 9. A third driving rod 11 is fixedly sleeved on the upper side of the outer surface of the third movable block 10. A fourth movable block 12 is movably connected to the inner surface of the third driving rod 11. Movable blocks 6, 8, 10, and 12 are all movably connected to the inner surface of the slide 2. The bottom ends of movable blocks 6, 8, 10, and 12 penetrate the mounting box 1 and extend to the lower surface of the mounting box 1, where they are fixedly connected to the mounting sleeve 13. The inner surface of the mounting sleeve 13 is movably fitted with a negative pressure suction cup 14. When the operator starts motor 4, the threaded rod 5 will start to rotate. At this time, movable block 6 and driving rod 7 will start to move to the left. The movement of driving rod 7 will drive movable block 8, causing movable block 8 and driving rod 9 to move forward. The movement of driving rod 9 will then drive movable block 10, causing movable block 10 and driving rod 11 to move to the right. The movement of driving rod 11 will eventually drive movable block 12, causing movable block 12 to move backward.

[0025] The inner surface of the mounting sleeve 13 is movably fitted with a circular block 15 located above the negative pressure suction cup 14. A fixing plate 17 is fixedly connected to the outer surface of the mounting sleeve 13. A locking pin 16 is movably fitted to the inner surface of the circular block 15. The outer end of the locking pin 16 passes through the circular block 15, the mounting sleeve 13, and the fixing plate 17 in sequence, extending to the outside of the fixing plate 17 and being fixedly connected to a toggle plate 18. Limiting strips 20 are fixedly connected to both the left and right sides of the outer surface of the toggle plate 18. The other end of the limiting strip 20 passes through the fixing plate 17 and extends to... A locking block 21 is fixedly connected to the inner side of the fixed plate 17. A spring 19 is movably sleeved on the outer surface of the locking pin 16. The outer end of the spring 19 is fixedly connected to the inner surface of the actuating plate 18, and the other end of the spring 19 is fixedly connected to the outer surface of the fixed plate 17. The design of the spring 19 will cause the locking pin 16 and the actuating plate 18 to move towards the circular block 15 under the elastic force of the spring 19. At the same time, the design of the limiting strip 20 and the locking block 21 will limit the overall movement range of the actuating plate 18.

[0026] The upper surface of the mounting box 1 is fixedly connected to a connecting arm 22. A fixed sleeve 23 is movably sleeved on the rear side of the outer surface of the connecting arm 22. A movable plate 26 is fixedly connected to the lower surface of the fixed sleeve 23. A second motor 24 located inside the fixed sleeve 23 is fixedly installed on the upper surface of the movable plate 26. A rotating shaft 25 is fixedly sleeved on the other end of the output shaft of the second motor 24. The top end of the rotating shaft 25 passes through the connecting arm 22 and extends into the interior of the connecting arm 22. The outer surface of the rotating shaft 25 and the inner surface of the connecting arm 22 are fixedly sleeved. When the operator starts the second motor 24, the rotating shaft 25 and the connecting arm 22 will start to rotate under the limitation of the fixed sleeve 23, which facilitates the transfer of the sorted single crystal silicon wafers and their placement in other positions.

[0027] Movable rods 29 are fixedly connected to both sides of the lower surface of the movable plate 26. Limiting sleeves 30 are movably sleeved on the outer surface of the movable rods 29. The bottom end of the limiting sleeves 30 is fixedly connected to the bottom plate 31. The upper surface of the bottom plate 31 is fixedly connected to the connecting sleeves 28 located between the limiting sleeves 30. A pneumatic cylinder 27 is fixedly installed on the inner surface of the connecting sleeve 28. The top end of the pneumatic cylinder 27 is fixedly connected to the lower surface of the movable plate 26. When the pneumatic cylinder 27 starts to run, the movable plate 26 will start to move upward as a whole. The design of the limiting sleeves 30 and the movable rods 29 serves to limit the overall movement direction of the movable plate 26.

[0028] The upper surface of the base plate 31 is fixedly connected to a placement platform 32 located on the left side of the limiting sleeve 30. The front side of the upper surface of the base plate 31 is fixedly connected to a mounting plate 33. A driven wheel 34 is movably mounted on the right side of the inner surface of the mounting plate 33. Both the front and rear ends of the driven wheel 34 penetrate the mounting plate 33 and extend to the outer side of the mounting plate 33. The placement platform 32 is designed to place unqualified monocrystalline silicon wafers, while the driven wheel 34 can rotate under the limitation of the inner surface of the mounting plate 33.

[0029] Among them, a No. 3 motor 35 is fixedly installed on the left side of the front surface of the base plate 31. A round shaft 36 is fixedly sleeved at the other end of the output shaft of the No. 3 motor 35. The rear end of the round shaft 36 passes through the mounting plate 33 and extends to the rear surface of the mounting plate 33. The outer surface of the round shaft 36 and the inner surface of the mounting plate 33 are movably sleeved. A surface detector 39 is fixedly installed on the left side of the upper surface of the base plate 31. When the monocrystalline silicon wafer passes under the surface detector 39, the surface detector 39 will scan for defects and cracks on the surface of the monocrystalline silicon wafer. If the monocrystalline silicon wafer fails to pass the scan, the surface detector 39 will sound an alarm to remind the operator.

[0030] The outer surface of the circular shaft 36 is fixedly fitted with a drive wheel 37 located inside the mounting plate 33. The drive wheel 37 is connected to the driven wheel 34 via a transmission belt 38. The drive wheel 37 rotates together with the circular shaft 36, and the rotation of the drive wheel 37 drives the transmission belt 38, causing the transmission belt 38 and the driven wheel 34 to start rotating, thereby conveying the single crystal silicon wafer placed above the transmission belt 38.

[0031] Working principle and usage process of this utility model:

[0032] First, the operator places the monocrystalline silicon wafer on the transmission belt 38 located below the surface detector 39 and starts the No. 3 motor 35 and the surface detector 39. As the No. 3 motor 35 runs, the circular shaft 36 and the drive wheel 37 will start to rotate, while the transmission belt 38 and the driven wheel 34 will start to rotate under the drive wheel 37. At this time, the monocrystalline silicon wafer will pass through the surface detector 39 as the transmission belt 38 rotates. The surface detector 39 will scan the outer surface of the monocrystalline silicon wafer to check for defects. When the unqualified monocrystalline silicon wafer moves to the bottom of the mounting box 1, the pneumatic cylinder 27 will start to run.

[0033] As the pneumatic cylinder 27 operates, the movable plate 26 and the entire mounting box 1 will begin to move downwards. When the negative pressure suction cup 14 contacts the defective monocrystalline silicon wafer, the negative pressure suction cup 14 will start to operate. At this time, the defective monocrystalline silicon wafer will be sucked by the negative pressure suction cup 14, thereby causing the defective monocrystalline silicon wafer to detach from the upper surface of the transmission belt 38. Subsequently, the second motor 24 will start to operate, thereby causing the connecting arm 22 and the entire mounting box 1 to rotate. When the entire mounting box 1 and the defective monocrystalline silicon wafer rotate to above the placement platform 32, the negative pressure suction cup 14 and the pneumatic cylinder 27 will start again, thereby placing the defective monocrystalline silicon wafer stably on the upper surface of the placement platform 32.

[0034] If the operator needs to sort monocrystalline silicon wafers of different sizes, the operator first starts motor 4. As motor 4 runs, threaded rod 5 rotates, causing movable block 6 and drive rod 7 to move towards the middle block 3. At this time, movable block 8 and drive rod 9 will move towards the middle block 3 under the drive of drive rod 7. Then, the movement of drive rod 9 will drive movable block 10, causing movable block 10 and drive rod 11 to move towards the middle block 3. Finally, the movement of drive rod 11 will drive movable block 12, causing movable block 12 to move towards the middle block 3. As movable blocks 6, 8, 10, and 12 move towards each other, the positions of the four negative pressure suction cups 14 will change, thus satisfying the need to grasp monocrystalline silicon wafers of different sizes.

[0035] If the negative pressure suction cup 14 is damaged and needs to be replaced, the operator needs to pull the actuating plate 18 outward. When the locking pin 16 moves outside the mounting sleeve 13, the fixing of the negative pressure suction cup 14 and the round block 15 will be released. At this time, the operator can directly pull out the damaged negative pressure suction cup 14 for replacement, which facilitates the maintenance of the negative pressure suction cup 14.

[0036] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0037] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A single-crystal silicon wafer sorting device, comprising a mounting box (1), characterized in that: The mounting box (1) has a sliding groove (2) on its lower surface. A middle block (3) is fixedly connected to the center of the bottom of the inner surface of the mounting box (1). A first motor (4) is fixedly installed on the right surface of the mounting box (1). A threaded rod (5) is fixedly sleeved on the other end of the output shaft of the first motor (4). The left end of the threaded rod (5) passes through the mounting box (1) and the middle block (3) and extends into the interior of the middle block (3). A first movable block (6) is threadedly sleeved on the outer surface of the threaded rod (5). A first driving rod (7) is fixedly sleeved on the upper side of the outer surface of the first movable block (6). A second movable block (8) is movably connected to the inner surface of the first driving rod (7). A second driving rod (8) is fixedly sleeved on the upper side of the outer surface of the second movable block (8). 9) The inner surface of the second driving rod (9) is movably connected to the third moving block (10). The upper side of the outer surface of the third moving block (10) is fixedly sleeved with the third driving rod (11). The inner surface of the third driving rod (11) is movably connected to the fourth moving block (12). The first moving block (6), the second moving block (8), the third moving block (10) and the fourth moving block (12) are all movably connected to the inner surface of the slide groove (2). The bottom ends of the first moving block (6), the second moving block (8), the third moving block (10) and the fourth moving block (12) all penetrate the mounting box (1) and extend to the lower surface of the mounting box (1) and are fixedly connected to the mounting sleeve (13). The inner surface of the mounting sleeve (13) is movably sleeved with a negative pressure suction cup (14).

2. The single-crystal silicon wafer sorting equipment according to claim 1, characterized in that: The inner surface of the mounting sleeve (13) is movably fitted with a circular block (15) located above the negative pressure suction cup (14). The outer surface of the mounting sleeve (13) is fixedly connected to a fixing plate (17). The inner surface of the circular block (15) is movably fitted with a locking pin (16). The outer end of the locking pin (16) passes through the circular block (15), the mounting sleeve (13), and the fixing plate (17) in sequence and extends to the outside of the fixing plate (17) and is fixedly connected to a toggle plate (18). Limiting strips (20) are fixedly connected to both sides of the outer surface of the plate (18). The other end of the limiting strip (20) passes through the fixed plate (17) and extends to the inner side of the fixed plate (17) and is fixedly connected to a locking block (21). A spring (19) is movably sleeved on the outer surface of the locking pin (16). The outer end of the spring (19) is fixedly connected to the inner surface of the actuating plate (18), and the other end of the spring (19) is fixedly connected to the outer surface of the fixed plate (17).

3. The single-crystal silicon wafer sorting equipment according to claim 1, characterized in that: A connecting arm (22) is fixedly connected to the upper surface of the mounting box (1). A fixed sleeve (23) is movably sleeved on the rear side of the outer surface of the connecting arm (22). A movable plate (26) is fixedly connected to the lower surface of the fixed sleeve (23). A second motor (24) located inside the fixed sleeve (23) is fixedly installed on the upper surface of the movable plate (26). A rotating shaft (25) is fixedly sleeved at the other end of the output shaft of the second motor (24). The top end of the rotating shaft (25) passes through the connecting arm (22) and extends into the interior of the connecting arm (22). The outer surface of the rotating shaft (25) and the inner surface of the connecting arm (22) are fixedly sleeved.

4. The single-crystal silicon wafer sorting equipment according to claim 3, characterized in that: Movable rods (29) are fixedly connected to both sides of the lower surface of the movable plate (26). A limiting sleeve (30) is movably sleeved on the outer surface of the movable rod (29). A base plate (31) is fixedly connected to the bottom end of the limiting sleeve (30). A connecting sleeve (28) located between the limiting sleeves (30) is fixedly connected to the upper surface of the base plate (31). A pneumatic cylinder (27) is fixedly installed on the inner surface of the connecting sleeve (28). The top end of the pneumatic cylinder (27) is fixedly connected to the lower surface of the movable plate (26).

5. A single-crystal silicon wafer sorting device according to claim 4, characterized in that: The upper surface of the base plate (31) is fixedly connected to a placement platform (32) located to the left of the limiting sleeve (30). The front side of the upper surface of the base plate (31) is fixedly connected to a mounting plate (33). A driven wheel (34) is movably mounted on the right side of the inner surface of the mounting plate (33). Both the front and rear ends of the driven wheel (34) penetrate the mounting plate (33) and extend to the outside of the mounting plate (33).

6. A single-crystal silicon wafer sorting device according to claim 4, characterized in that: A No. 3 motor (35) is fixedly installed on the left side of the front surface of the base plate (31). A round shaft (36) is fixedly sleeved on the other end of the output shaft of the No. 3 motor (35). The rear end of the round shaft (36) passes through the mounting plate (33) and extends to the rear surface of the mounting plate (33). The outer surface of the round shaft (36) and the inner surface of the mounting plate (33) are movably sleeved. A surface detector (39) is fixedly installed on the left side of the upper surface of the base plate (31).

7. A single-crystal silicon wafer sorting device according to claim 6, characterized in that: The outer surface of the circular shaft (36) is fixedly sleeved with a drive wheel (37) located inside the mounting plate (33), and the drive wheel (37) is connected to the driven wheel (34) via a transmission belt (38).

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