Silicon wafer turnover tool
By designing silicon wafer turnover fixtures and adopting structures such as lifting platforms and overflow troughs, the problem of the inability of traditional water trucks to automate turnover has been solved, realizing automated handling, improving turnover efficiency, and reducing environmental pollution and silicon wafer damage.
Patent Information
- Application Number
- CN202422958846.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-02
- Publication Date
- 2026-01-09
- Estimated Expiration
- 2034-12-02
AI Technical Summary
Traditional waterwheels cannot be used in conjunction with AGVs to automate the turnover of silicon wafers, resulting in low turnover efficiency.
A silicon wafer turnover fixture including a tooling frame and a water tank was designed. A lifting platform is provided under the water tank, which, together with the lifting and moving device, enables automated handling. An overflow trough, baffles and positioning components are provided on the water tank to prevent water from overflowing and wafer box damage. Casters are provided at the bottom of the tooling frame to accommodate both manual and automated movement.
It enables automated turnover of silicon wafers, improves turnover efficiency, reduces water spillage and silicon wafer damage, and combines manual and automated movement to reduce environmental pollution.
Smart Images
Figure CN223786469U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to the technical field of semiconductor, especially relates to a silicon wafer turnover tool. BACKGROUND
[0002] In the production process of silicon wafers, in order to facilitate handling, the silicon wafers are usually placed in wafer boxes. After polishing, the wafer boxes loaded with silicon wafers are usually placed in water carts to prevent oxidation, and the turnover is carried out by manual trolley. The traditional water cart cannot realize automatic turnover with AGV trolley, and the turnover efficiency is low. UTILITY MODEL CONTENTS
[0003] To solve the above technical problems, the utility model provides a silicon wafer turnover tool, which effectively solves the technical problems of the traditional water cart unable to realize automatic turnover with AGV trolley and low turnover efficiency, and overcomes the shortcomings of the prior art.
[0004] The utility model adopts the technical scheme: a silicon wafer turnover tool, including tool frame body, the top of tool frame body is equipped with water tank, is used for placing the wafer box loaded with silicon wafer, the lower portion of water tank is equipped with jacking table, jacking table sets up on tool frame body, is used for cooperating with jacking moving device, makes jacking moving device can jacking jacking table, drives water tank moves.
[0005] Further, the water tank is provided with an overflow groove.
[0006] Further, the overflow groove is arranged around the water tank and along the outer wall of the water tank.
[0007] Further, the water tank and the overflow groove are provided with an overflow hole.
[0008] Further, the number of overflow holes is multiple.
[0009] Further, the water tank is provided with a partition plate for separating the adjacent wafer boxes.
[0010] Further, the bottom of the water tank is provided with a positioning member for positioning the wafer box.
[0011] Further, the water tank is provided with a handrail.
[0012] Further, the outer bottom of the water tank is provided with a drain valve.
[0013] Further, the bottom of the tool frame body is provided with a castor.
[0014] The utility model discloses have the advantages and positive effect is: because adopt above -mentioned technical scheme, realized the automatic turnover of silicon wafer, improved the turnover efficiency, reduced the effusion of water body in the process of tooling movement, reduced the environmental pollution to outside, prevented the wafer box from moving and colliding in the process of movement, reduced the damage of silicon wafer or wafer box, gave consideration to manual and automatic two functions, simple structure, convenient to use. BRIEF DESCRIPTION OF DRAWINGS
[0015] Figure 1 It is a structure schematic view of a silicon wafer turnover tool of the utility model embodiment.
[0016] In the drawing,
[0017] 1, tooling frame body 2, water tank 3, jacking table
[0018] 4, overflow groove 5, overflow hole 6, baffle
[0019] 7, handrail 8, drain valve 9, trundle
[0020] 10, wafer box DETAILED DESCRIPTION
[0021] The utility model embodiment provides a kind of silicon wafer turnover tool, the embodiment of the utility model is described below in conjunction with the drawing.
[0022] In the description of the embodiment of the utility model, it needs to be understood that the orientation or position relationship indicated by the terms "top", "bottom" etc. is based on the orientation or position relationship shown in the drawing, and is only for the convenience of describing the utility model and simplifying the description, and is not indicative or implied that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, so it cannot be understood as a limitation on the utility model. In the description of the utility model, it needs to be explained that, unless otherwise explicitly specified and limited, the terms "set", "connected" should be understood broadly, for example, can be fixedly connected, can be detachably connected, or integrally connected;It can be directly connected, or indirectly connected through intermediate medium, and can be the communication inside two elements. For ordinary skilled in the art, the specific meaning of the above-mentioned terms in the utility model can be understood by specific circumstances.
[0023] As Figure 1As shown, the utility model discloses a kind of silicon wafer turnover tool, including tool frame body 1, water tank 2 is equipped in the top of tool frame body 1, for placing the wafer box 10 loaded silicon wafer, the top of water tank 2 is set as opening.Water tank 2 below is equipped with jacking platform 3, jacking platform 3 is arranged on tool frame body 1, jacking platform 3 is used to cooperate with jacking moving device, so that jacking moving device can jacking jacking platform 3, drive water tank 2 to move, without manual pushing, the automatic handling turnover of silicon wafer is realized.The specific structure of jacking platform 3 is not limited, can be horizontal plate member or horizontal frame body, and is fixedly connected with tool frame body 1.Jacking platform 3 and the bottom of tool frame body 1 are equipped with certain distance, so that jacking moving device can be placed below jacking platform 3, by jacking jacking platform 3, entire tool frame can leave ground, automatic handling.Jacking moving device is not specifically limited, preferably, set as AGV trolley.
[0024] Preferably, in order to prevent the water in the water tank 2 from sloshing and spilling out during movement, causing pollution to the external environment, an overflow groove 4 is provided on the water tank 2. The specific form of the overflow groove 4 is not limited. Preferably, in order to prevent the water in the overflow groove 4 from sloshing out, the top of the overflow groove 4 is sealed, and the sloshing water in the water tank 2 enters from the side of the overflow groove 4 close to the water tank.
[0025] Preferably, the overflow groove 4 is arranged around the water tank 2 and is arranged along the outer wall of the water tank 2 close to the top opening of the water tank 2, thereby protecting in all directions of the water tank 2 and ensuring that the water does not spill out.
[0026] Specifically, an overflow hole 5 is provided at the connection between the water tank 2 and the overflow groove 4, and through the overflow hole 5, the sloshing water can enter the overflow groove 4. The overflow hole 5 is opened on the side wall of the water tank 2 and communicates the water tank 2 and the overflow groove 4. Preferably, in order to facilitate overflow and ensure the overflow effect, a plurality of overflow holes 5 are provided. The plurality of overflow holes 5 are arranged side by side and at equal intervals along the side wall of the water tank 2, and a plurality of rows of overflow holes 5 can be provided.
[0027] Preferably, in order to facilitate the placement of the wafer box 10, a partition plate 6 is provided in the water tank 2 for separating the adjacent wafer boxes 10. The partition plate 6 divides the inside of the water tank 2 into a plurality of placement areas, and the wafer boxes 10 are separated and placed in each placement area. The partition plate 6 is fixedly connected with the wafer box 10.
[0028] Preferably, in order to prevent the wafer box 10 from moving during movement and causing damage to the silicon wafer, a positioning member is provided at the bottom of the water tank 2 for positioning the wafer box 10. The specific form of the positioning member is not limited and can be a positioning plate or a positioning block. The positioning member is adapted to the bottom of the wafer box 10 and is fixed to the bottom of the water tank 2, and is arranged around the wafer box 10 and can be clamped with the bottom of the wafer box 10, which is not shown in the figure.
[0029] Preferably, the outer wall of the water tank 2 is fixed with a handrail 7. The specific form of the handrail 7 is not limited.
[0030] Preferably, the outer bottom of the water tank is provided with a drain valve 8. The bottom of the water tank 2 is provided with a drain hole, and the drain valve 8 is connected to the drain hole.
[0031] Preferably, the bottom of the tool holder body 1 is provided with a castor 9. By setting the castor 9 and the handrail 7, the movement of the tool holder body 1 is facilitated, so that the tool can be automatically moved and manually pushed, and both manual and automatic functions are considered. Preferably, the castor 9 is set as a universal wheel.
[0032] Embodiment one: a silicon wafer turnover tool, comprising a tool holder body 1, which is formed by welding a profile. The top of the tool holder body 1 is welded with a water tank 2, which is set as a sheet metal part and the top is set as an opening. The lower part of the water tank 2 is fixed with a jacking table 3, which is a horizontally arranged frame body welded with the tool holder body 1. The bottom of the jacking table 3 and the tool holder body 1 are set at a certain distance, so that the jacking moving device can be placed below the jacking table 3. The jacking moving device is specifically an AGV trolley. Around the water tank 2, along the outer wall of the water tank 2 close to the top opening of the water tank 2, an overflow chute 4 is arranged. The top of the overflow chute 4 is sealed. The connection between the water tank 2 and the overflow chute 4 is provided with an overflow hole 5, which is arranged on the side wall of the water tank 2 and communicates with the water tank 2 and the overflow chute 4. The number of overflow holes 5 is set to be multiple. Multiple overflow holes 5 are arranged side by side and at equal intervals along the side wall of the water tank 2, and multiple rows of overflow holes 5 are arranged. A partition plate 6 is arranged in the water tank 2, which is welded with the water tank 2 and divides the water tank 2 into two placing areas. A positioning member is fixed in the bottom of the water tank 2. The positioning member is specifically a positioning plate. The positioning plate is matched with the bottom of the wafer box 10, fixed on the bottom of the water tank 2, and can be clamped with the bottom of the wafer box 10. The outer wall of the water tank 2 is welded with a handrail 7. The bottom of the water tank 2 is provided with a drain hole, and the drain valve 8 is connected to the drain hole. The bottom of the tool holder body 1 is provided with a castor 9, which is specifically a universal castor 9.
[0033] Embodiment two: a silicon wafer turnover tool, comprising a tool rack body 1, the tool rack body 1 is formed by profile welding. The top of the tool rack body 1 is welded with a water tank 2, the water tank 2 is provided as a sheet metal part, and the top is provided as an opening. A jacking table 3 is fixed below the water tank 2, and the jacking table 3 is a horizontally arranged plate welded and fixed with the tool rack body 1. The jacking table 3 is a certain distance from the bottom of the tool rack body 1, so that the jacking moving device can be placed below the jacking table 3. The jacking moving device is specifically an AGV trolley. Around the water tank 2, overflow grooves 4 are arranged along the outer wall of the water tank 2 close to the top opening of the water tank 2. The top of the overflow groove 4 is sealed. The connection between the water tank 2 and the overflow groove 4 is provided with an overflow hole 5, and the overflow hole 5 is arranged on the side wall of the water tank 2 and communicates the water tank 2 and the overflow groove 4. The number of overflow holes 5 is multiple. The multiple overflow holes 5 are arranged side by side and at equal intervals along the side wall of the water tank 2, and multiple rows of overflow holes 5 are arranged. A partition plate 6 is arranged in the water tank 2, and the partition plate 6 is welded and fixed with the water tank 2, so as to divide the water tank 2 into three placing areas. A positioning piece is fixed in the water tank 2. The positioning piece is specifically a positioning block. The positioning block is matched with the bottom of the wafer box 10, and is fixed on the bottom of the water tank 2, and can be clamped with the bottom of the wafer box 10. A handrail 7 is welded on the outer wall of the water tank 2. A drain hole is formed in the bottom of the water tank 2, and a drain valve 8 is connected to the drain hole. The bottom of the tool rack body 1 is provided with a foot wheel 9.
[0034] The utility model has the advantages and positive effects that:
[0035] 1. By setting the jacking plate, cooperating with the jacking moving device, the automatic turnover of the silicon wafer is realized, and the turnover efficiency is improved.
[0036] 2. By setting the overflow groove, the overflow of water during the tool movement is prevented, and the pollution of the external environment is reduced.
[0037] 3. By setting the partition plate and the positioning piece, the movement and collision of the wafer box during the movement are prevented, and the damage to the silicon wafer or the wafer box is prevented.
[0038] 4. By setting the handrail and the foot wheel, the tool can be automatically moved and manually pushed, and the functions of manual and automatic are considered.
[0039] The embodiments of the utility model are described in detail above, but the content described cannot be considered as limiting the scope of the utility model. Any equivalent changes and improvements within the scope of the utility model application should still belong to the patent coverage range of the utility model.
Claims
1. A silicon wafer handling tool, comprising: The utility model provides a water tank of a tooling frame body, which is used for placing a wafer box loaded with silicon wafers, and a jacking table is arranged below the water tank, the jacking table is arranged on the tooling frame body, and a jacking moving device is matched with the jacking table, so that the jacking moving device can jackingly drive the jacking table to move the water tank.
2. The silicon wafer handling tool of claim 1 wherein: The water tank is provided with an overflow groove.
3. The silicon wafer handling tool of claim 2 wherein: The overflow groove is arranged around the water tank along the outer wall of the water tank.
4. The silicon wafer handling tool of claim 2 or 3, wherein: The water tank and the overflow groove are provided with overflow holes.
5. The silicon wafer handling tool of claim 4 wherein: The overflow holes are provided in plurality.
6. A silicon wafer handling tool as claimed in any one of claims 1 to 3 and 5, wherein: The water tank is provided with a partition plate for separating adjacent wafer boxes.
7. A silicon wafer handling tool as claimed in claim 6, wherein: The water tank is provided with a positioning member at the bottom for positioning the wafer box.
8. A silicon wafer handling tool as claimed in any one of claims 1 to 3, 5 and 7, wherein: The water tank is provided with a handrail.
9. A silicon wafer handling tool as claimed in any one of claims 1 to 3, 5 and 7, wherein: The water tank is provided with a drain valve at the bottom.
10. A silicon wafer handling tool as claimed in any one of claims 1 to 3, 5 and 7, wherein: The tooling frame body is provided with casters at the bottom.