Shaking device
By introducing linkage components and elastic buffers into the shaking device, the problem of pallet lack of buffering and deceleration is solved, thereby improving the stability of the pallet and the lifespan of the drive components.
Patent Information
- Application Number
- CN202422805160.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-18
- Publication Date
- 2026-01-13
- Estimated Expiration
- 2034-11-18
AI Technical Summary
The existing swaying device has no buffer or deceleration when the pallet moves up and down, resulting in excessive load, which affects the stability of the pallet and the service life of the drive components.
The design employs a linkage component and an elastic buffer. Through the cooperation of the inclined end and the elastic buffer, the pallet's movement is buffered and decelerated, reducing inertial force and improving stability and the lifespan of the drive components.
By employing buffering and deceleration designs, the load on the pallet movement is reduced, thereby improving the stability of the pallet and extending the service life of the drive components.
Smart Images

Figure CN223789069U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor processing technology, specifically to a shaking device. Background Technology
[0002] In the LED industry, wet cleaning refers to the process of using various chemical reagents to chemically react or dissolve impurities and oil adsorbed on the surface of materials, while combining physical measures such as ultrasonic mechanisms, heating mechanisms, shaking mechanisms, and vacuum mechanisms to desorb impurities from the material surface, and finally rinsing with a large amount of high-purity deionized water to obtain a clean surface.
[0003] A swaying mechanism is a mechanical device that enables an object to oscillate back and forth within a certain range to assist in cleaning. In the prior art, a swaying mechanism includes a tray that carries materials and a drive component. The output end of the drive component is connected to the tray, and the drive component drives the tray to move up and down, so that the materials move up and down synchronously in the cleaning tank.
[0004] However, the pallet maintains a constant speed during its up-and-down movement, moving directly downwards after approaching the highest point and then directly upwards again after approaching the lowest point. This process lacks buffering and deceleration, resulting in a significant load on the pallet during its movement, which affects its stability and the lifespan of the drive components. Utility Model Content
[0005] Based on this, the purpose of this utility model is to provide a shaking device to solve the technical problem in the prior art that existing pallets have no buffering or deceleration process when moving up and down, which causes the pallet to generate a large load during movement, thereby affecting the stability of the pallet and the service life of the drive components.
[0006] The present invention provides a shaking device, including a driving member, a tray disposed in the cleaning tank, at least one elastic buffer member, and a linkage component disposed between the tray and the driving member;
[0007] The linkage assembly includes a bracket connected to the tray, a slider disposed on the bracket, and a boss. One end face of the boss is connected to the driving member, and the other end face has an inclined end with dimensions decreasing sequentially. The slider abuts against the inclined end so that when the driving member drives the boss to rotate, the slider moves relative to the inclined end, thereby causing the tray to reciprocate relative to the cleaning tank.
[0008] The elastic buffer is disposed in the cleaning tank, and its two ends are respectively connected to the tray and the cleaning tank to buffer the reciprocating motion of the tray.
[0009] Furthermore, the sliding element is rotatably connected to the bracket.
[0010] Furthermore, the contact surface between the slider and the end of the inclined surface is arc-shaped.
[0011] Furthermore, the inclined end is also provided with a groove for the sliding member to slide.
[0012] Furthermore, the wobbling device also includes a coupling, through which the driving component is connected to the boss.
[0013] Furthermore, the shaking device includes a plurality of elastic buffers, which are spaced apart along the length of the tray.
[0014] Furthermore, the linkage assembly also includes a reinforcing rib, one end of which is connected to the bracket and the other end of which is connected to the tray.
[0015] Furthermore, the shaking device also includes a sliding component, which is disposed between the bracket and the cleaning tank.
[0016] Furthermore, the sliding assembly includes a slider and a slide rail, with the slider slidably connected within the slide rail;
[0017] In this configuration, one of the slider and the slide rail is located on the bracket, and the other is located on the cleaning tank.
[0018] Furthermore, the slider is mounted on the bracket, and the slide rail is mounted on the outer wall of the cleaning tank.
[0019] Compared with the prior art, the beneficial effects of this utility model are as follows:
[0020] In the shaking device provided by this utility model, the linkage component and elastic buffer are designed to provide a certain degree of buffering and deceleration when the tray reciprocates in the washing tank, thereby reducing the load on the tray during movement and improving the stability of the tray and the service life of the driving component. Specifically, the linkage component has a sloping end on the boss, so when the driving component drives the boss to rotate, the sliding component will move relative to the sloping end. Since the size of the sloping end decreases from large to small, the sloping end is specifically designed as a ramp, which allows the sliding component to drive the support and the tray to move in both upward and downward directions. However, during the downward movement, the tray bears a greater inertial force due to the material placed on it. At this time, the presence of the elastic buffer allows the inertial force generated by the tray during the downward movement to be released by compressing the elastic buffer, thereby avoiding inertial force and eliminating the deformation of the tray. At the same time, the rebound force generated by the elastic buffer can also support the tray to move upward, ensuring the stability of the tray's upward movement. Attached Figure Description
[0021] Figure 1 This is a perspective view of the shaking device in one embodiment of the present invention;
[0022] Figure 2 This is a perspective sectional view of a shaking device according to an embodiment of the present invention;
[0023] Figure 3 This is a side view of a shaking device according to an embodiment of the present invention.
[0024] In the diagram: 100, driving component; 200, cleaning tank; 300, tray; 400, elastic buffer; 500, linkage assembly; 510, bracket; 520, sliding component; 530, boss; 531, inclined end; 532, groove; 600, coupling; 700, sliding assembly; 710, slider; 720, slide rail. Detailed Implementation
[0025] To facilitate understanding of this utility model, a more complete description will be given below with reference to the accompanying drawings. Several embodiments of this utility model are shown in the drawings. However, this utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of this utility model will be more thorough and complete.
[0026] It should be noted that when a component is said to be "fixed to" another component, it can be directly on the other component or there may be an intervening component. When a component is said to be "connected to" another component, it can be directly connected to the other component or there may be an intervening component. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.
[0027] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.
[0028] Please see Figures 1 to 3 The image shows a shaking device in one embodiment of the present invention, including a driving member 100, a tray 300 disposed in a cleaning tank 200, at least one elastic buffer member 400, and a linkage component 500 disposed between the tray 300 and the driving member 100.
[0029] The linkage assembly 500 includes a bracket 510 connected to the tray 300, a slider 520 disposed on the bracket 510, and a boss 530. One end face of the boss 530 is connected to the drive member 100, and the other end face has an inclined end 531 with dimensions decreasing from large to small. The slider 520 abuts against the inclined end 531 so that when the drive member 100 drives the boss 530 to rotate, the slider 520 moves relative to the inclined end 531, so that the tray 300 reciprocates relative to the cleaning tank 200.
[0030] The elastic buffer 400 is disposed in the cleaning tank 200. The two ends of the elastic buffer 400 are connected to the tray 300 and the cleaning tank 200 respectively, so as to buffer the reciprocating motion of the tray 300.
[0031] In this example, the linkage component 500 and the elastic buffer 400 provide buffering and deceleration when the tray 300 reciprocates within the cleaning tank 200, reducing the load on the tray 300 during movement and improving its stability and the service life of the drive component 100. Specifically, the linkage component 500 features a ramp end 531 on the boss 530, causing the sliding member 520 to move relative to the ramp end 531 when the drive component 100 rotates. Since the dimensions of the ramp end 531 decrease sequentially, the ramp end 531 provides… The body is designed with a slope, which allows the sliding member 520 to drive the support 510 and the tray 300 to move in both upward and downward directions. However, during the downward movement, the tray 300 bears a greater inertial force due to the material placed on it. At this time, the presence of the elastic buffer member 400 allows the inertial force generated by the tray 300 during the downward movement to be released by compressing the elastic buffer member 400, thereby avoiding inertial force and eliminating the deformation of the tray 300. At the same time, the rebound force generated by the elastic buffer member 400 can also support the tray to move upward, ensuring the stability of the tray 300's upward movement.
[0032] In this embodiment, to further improve the stability of the slider 520 during movement, the slider 520 is rotatably connected to the bracket 510, and the contact surface between the slider 520 and the inclined end 531 is arc-shaped. The inclined end 531 is also provided with a groove 532 for the slider 520 to slide. Specifically, the slider 520 can be circular, and the slider 520 can be slidably disposed in the groove 532.
[0033] In addition, the shaking device also includes a coupling 600, multiple elastic buffers 400, reinforcing ribs, and a sliding assembly 700. The drive unit 100 is connected to the boss 530 through the coupling 600. The multiple elastic buffers 400 are spaced apart along the length of the tray 300. One end of the reinforcing rib is connected to the bracket 510, and the other end is connected to the tray 300. The sliding assembly 700 is located between the bracket 510 and the cleaning tank 200.
[0034] Specifically, the sliding assembly 700 includes a slider 710 and a slide rail 720. The slider 710 is slidably connected within the slide rail 720. One of the slider 710 and the slide rail 720 is disposed on the bracket 510, and the other is disposed on the cleaning tank 200. In some embodiments, the slider 710 is disposed on the bracket 510, and the slide rail 720 is disposed on the outer wall of the cleaning tank 200. It should be noted that the slider 710 can also be disposed on the outer wall of the cleaning tank 200, and the slide rail 720 can be disposed on the bracket 510. The examples are not limiting.
[0035] In summary, the shaking device shown in this embodiment has at least the following advantages compared with the shaking devices in the prior art:
[0036] In the shaking device provided by this utility model, the linkage component 500 and the elastic buffer 400 enable the tray 300 to reciprocate within the cleaning tank 200, providing buffering and deceleration, reducing the load on the tray 300 during movement, and improving the stability of the tray 300 and the service life of the drive component 100. Specifically, the linkage component 500 has a sloping end 531 on the boss 530, so that when the drive component 100 rotates on the boss 530, the sliding component 520 will move relative to the sloping end 531. Since the size of the sloping end 531 decreases sequentially, the sloping end... Specifically, 531 is a ramp setting, which allows the sliding member 520 to drive the support 510 and the tray 300 to move in both upward and downward directions. However, during the downward movement, the tray 300 bears a greater inertial force due to the material placed on it. At this time, the presence of the elastic buffer 400 allows the inertial force generated by the tray 300 during the downward movement to be released by compressing the elastic buffer 400, thereby avoiding inertial force and eliminating the deformation of the tray 300. At the same time, the rebound force generated by the elastic buffer 400 can also support the upward movement of the tray, ensuring the stability of the upward movement of the tray 300.
[0037] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.
[0038] The above embodiments only illustrate several implementation methods of this utility model, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.
Claims
1. A shaking device for use in a cleaning tank, the shaking device comprising a driving member and a tray disposed in the cleaning tank, characterized in that, The shaking device also includes at least one elastic buffer and a linkage assembly disposed between the tray and the drive component; The linkage assembly includes a bracket connected to the tray, a slider disposed on the bracket, and a boss. One end face of the boss is connected to the driving member, and the other end face has an inclined end with dimensions decreasing sequentially. The slider abuts against the inclined end so that when the driving member drives the boss to rotate, the slider moves relative to the inclined end, thereby causing the tray to reciprocate relative to the cleaning tank. The elastic buffer is disposed in the cleaning tank, and its two ends are respectively connected to the tray and the cleaning tank to buffer the reciprocating motion of the tray.
2. The shaking device according to claim 1, characterized in that, The sliding element is rotatably connected to the bracket.
3. The shaking device according to claim 1, characterized in that, The contact surface between the slider and the end of the inclined surface is arc-shaped.
4. The shaking device according to claim 1, characterized in that, The inclined end is also provided with a groove for the sliding member to slide.
5. The shaking device according to claim 1, characterized in that, The wobbling device also includes a coupling, through which the driving component is connected to the boss.
6. The shaking device according to claim 1, characterized in that, The shaking device includes multiple elastic buffers, which are spaced apart along the length of the tray.
7. The shaking device according to claim 1, characterized in that, The linkage component also includes a reinforcing rib, one end of which is connected to the bracket and the other end of which is connected to the tray.
8. The shaking device according to claim 1, characterized in that, The shaking device also includes a sliding component, which is disposed between the bracket and the cleaning tank.
9. The shaking device according to claim 8, characterized in that, The sliding component includes a slider and a slide rail, wherein the slider is slidably connected within the slide rail; In this configuration, one of the slider and the slide rail is located on the bracket, and the other is located on the cleaning tank.
10. The shaking device according to claim 9, characterized in that, The slider is mounted on the bracket, and the slide rail is mounted on the outer wall of the cleaning tank.