Concave dust removal head structure of wafer production dust removal device

Abstract

The utility model discloses a concave dust removal head structure of a wafer production dust removal device, which comprises a bottom frame, four corners of the bottom frame are provided with upright columns extending upwards, one end of each upright column far away from the bottom frame is provided with an upper frame body, and the bottom frame, the upright columns and the upper frame body form a mounting frame; a dust removal mechanism is arranged in the mounting frame, a moving mechanism is arranged on the dust removal mechanism, an air pressure assembly is arranged on the moving mechanism, and the dust removal mechanism, the moving mechanism and the air pressure assembly are arranged in the mounting frame; the dust removal mechanism comprises a dust removal head cavity, a bottom plate is arranged at the bottom of the dust removal head cavity, the dust removal head cavity and the bottom plate are integrally formed, and a frame sealing cover is arranged at the top end of the dust removal head cavity; an opening is formed in the top of the dust removal head cavity, a frame sealing cover is arranged at the opening in the top end of the dust removal head cavity, and a positive pressure chamber is arranged in the dust removal head cavity. According to the dust removal head, blowing and cleaning are conducted through the middle dust blowing seam, suction is conducted through the suction seams on the two sides, and the cleaning efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a dust removal head structure for a cleaning device used in semiconductor chip production. Background Technology

[0002] A wafer is a silicon chip used in the fabrication of silicon semiconductor integrated circuits. Wafers are used to produce integrated circuit chips. In semiconductor production, a chip box is placed on a carrier, and a tray for processing chips is placed inside the chip box. The wafers on the carrier (chip box tray) need to undergo the deposition of insulating or dielectric layer patterning processing. After a period of time, dust will remain on the surface of the carrier, affecting the yield of the product.

[0003] To maintain the cleanliness of the carriers, the carriers of semiconductor processing equipment need to be cleaned regularly. In the semiconductor industry, current semiconductor production mostly uses manual cleaning methods, which mainly involve brush contact cleaning. Moreover, cleaning can only be done when the equipment is shut down for maintenance, taking advantage of the gaps in the cleaning process. Manual cleaning is laborious, time-consuming, inefficient, and detrimental to the overall working environment, and it is also impossible to control the cleanliness. Utility Model Content

[0004] In order to solve the problems existing in the prior art, the purpose of this utility model is to provide a concave dust removal head structure for a wafer production dust removal device, which adopts positive and negative air channels for cleaning, improves the stability and yield of product processing, and realizes intelligent cleaning.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A concave dust removal head structure for a wafer manufacturing dust removal device includes a base frame, four corner posts extending upwards and standing upright, and an upper frame at the post end away from the base frame. The base frame, posts, and upper frame form an installation frame. A dust removal mechanism is installed in the installation frame, a moving mechanism is installed above the dust removal mechanism, and a pneumatic assembly is installed above the moving mechanism. The dust removal mechanism, the moving mechanism, and the pneumatic assembly are arranged in the installation frame.

[0007] The dust removal mechanism includes a dust removal head cavity, a bottom plate at the bottom of the dust removal head cavity, the dust removal head cavity and the bottom plate are integrally formed, and a frame sealing cover at the top of the dust removal head cavity;

[0008] The top of the dust collector head cavity is provided with an opening, and a frame sealing cover is provided at the opening at the top of the dust collector head cavity. A positive pressure chamber is provided inside the dust collector head cavity. The transverse side walls of the positive pressure chamber are set vertically from the bottom plate inside the dust collector head cavity. A separation gap is provided between the top of the positive pressure chamber and the top of the dust collector head cavity.

[0009] There is a gap between the outer walls on both sides of the positive pressure chamber and the inner wall of the dust collector head cavity. The cavity between the inner wall of the dust collector head cavity and the outer wall of the positive pressure chamber forms a negative pressure chamber. Negative pressure chambers are provided on both sides of the positive pressure chamber and are set in the dust collector head cavity.

[0010] Furthermore, in some embodiments, a transverse dust blowing slit is provided on the bottom plate of the positive pressure chamber, and two matching variable cross-section rods are provided on the bottom surface of the positive pressure chamber. The variable cross-section rods are arranged parallel to the dust blowing slit, and the two variable cross-section rods are respectively arranged on both sides of the dust blowing slit.

[0011] The bottom plate of the negative pressure chamber has a first suction slit and a second suction slit that run horizontally through it. The first suction slit and the second suction slit are arranged parallel to the dust blowing slit. The first suction slit is located close to the dust blowing slit, and the second suction slit is located away from the dust blowing slit. There is a separation gap between the first suction slit and the second suction slit. There is a blowing and suction operation gap between the dust blowing slit and the first suction slit.

[0012] Furthermore, in some embodiments, a positive pressure sealing cover is provided at the end of the positive pressure chamber away from the bottom plate, and an air inlet duct extending upward through the frame sealing cover is provided on the positive pressure sealing cover. The end of the air inlet duct away from the positive pressure chamber extends out of the frame sealing cover, and the air inlet duct is connected to the positive pressure chamber in a through manner.

[0013] The ratio of the height of the positive pressure chamber to the height of the dust collector head cavity is 2 / 3 to 3 / 4:1;

[0014] The frame sealing cover is equipped with a hanging bracket, and the end of the hanging bracket away from the frame sealing cover is set on the moving mechanism.

[0015] Furthermore, in some embodiments, the frame sealing cover is provided with an exhaust duct, which is connected in communication with the negative pressure chamber; the positive pressure chamber and the negative pressure chamber are respectively arranged in the dust removal head cavity, and the positive pressure chamber and the negative pressure chamber are isolated from each other and do not communicate with each other;

[0016] The ratio of the width of the dust blowing slit to the width of the first suction slit to the width of the second suction slit is 1:4~5:4~5; the first suction slit and the second suction slit are of equal width.

[0017] Dust blowing gap air volume: The air volume ratio of the first suction gap is 1:1.5~3, and the air volume of the second suction gap is equal to that of the first suction gap.

[0018] Furthermore, in some embodiments, a supporting central beam is provided in the middle of the bottom frame, and supporting side beams are provided on both sides of the supporting central beam. The supporting central beam and the supporting side beams are arranged in the frame of the bottom frame, and the supporting central beam and the supporting side beams are spaced apart.

[0019] The bottom surfaces of the supporting middle beam and the supporting side beam are respectively provided with positioning grooves that match the vehicle. The two sides of the supporting middle beam are respectively provided with outward protruding double-sided tactile wings, and the inner side of the supporting side beam is provided with inward protruding inner-sided tactile wings.

[0020] Furthermore, in some embodiments, the bottom plate of the dust removal head cavity is provided with a central receiving groove that matches the supporting beam, and the two sides of the central receiving groove are provided with double-sided avoidance recesses that match the double-sided tactile wings; the bottom plate of the dust removal head cavity is provided with a side receiving groove that matches the supporting side beam, and the inner side of the side receiving groove is provided with an inner avoidance recess that matches the inner side tactile wings.

[0021] Furthermore, in some embodiments, the variable cross-section rod is provided with an inwardly protruding compressed airflow protrusion, and an air inlet spacing D1 is provided between the tops of the two corresponding variable cross-section rods, and a protrusion spacing D2 is provided between the compressed airflow protrusions on opposite sides of the middle of the two variable cross-section rods, with the air inlet spacing D1 > the protrusion spacing D2; an air outlet spacing D3 is provided between the bottoms of the two corresponding variable cross-section rods, and a dust blowing slit opened on the bottom plate is provided with a dust blowing spacing D4, which is also the width of the dust blowing slit; the air inlet spacing D1 = the air outlet spacing D3, and the air outlet spacing D3 > the dust blowing spacing D4;

[0022] The compressed airflow bulge is a convex strip shape;

[0023] Or the compressed airflow bulge is a long strip with an arc-shaped cross-section;

[0024] Or, the compressed airflow bulge is a long strip with a short chord-shaped cross-section;

[0025] The bottom surface of the positive pressure chamber is provided with a matching pairing plate that matches the variable cross-section rod, and the variable cross-section rod is embedded in the matching pairing plate;

[0026] The ratio of air inlet spacing D1 to convex bulge spacing D2 is 5 to 10:1; air inlet spacing D1 = air outlet spacing D3; the ratio of dust blowing spacing D4 to convex bulge spacing D2 is 1:1 to 1.5.

[0027] Furthermore, in some embodiments, the dust removal mechanism is suspended on the mobile mechanism via a hanging bracket, and the dust removal mechanism is suspended on the bottom frame; the dust removal mechanism is connected to the air pressure assembly via a conduit;

[0028] A support plate is provided between the middle of two adjacent columns, and another matching support plate is provided between the two columns on the opposite side. The two support plates are matched and correspondingly set. A cross plate is provided between the two support plates. Part of the pneumatic assembly is provided on the cross plate. A battery is provided under the upper frame.

[0029] This application involves placing a cleaning device on the carrier after the processed chip box has been removed from the carrier to clean the tray. The dust removal head (blow-suction head) of this application cleans the tray by blowing through the central dust-blowing slit and drawing in dust through the side suction slits. The dust removal head is suspended on the carrier and does not contact the carrier; the central dust-blowing slit blows while the side suction slits draw in dust, and the negative pressure suction (suction slits) prevents air leakage and keeps dust out.

[0030] The dust removal head has two suction slits (narrow suction channels) on each side, and the width of the suction slits is greater than the width of the dust blowing slits. The air blown down from the dust blowing slit in the middle of the dust removal head (working gun) will diffuse to both sides, and two suction slits on each side will form an air curtain, which will then suck away the dust; this prevents dust from spreading out of the dust blowing gun, improves cleaning efficiency, and enhances the automation level of the equipment. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the structure of an embodiment of the present utility model;

[0032] Figure 2 This is a schematic diagram of the structure of the bottom frame portion in an embodiment of this utility model;

[0033] Figure 3 This is a cross-sectional structural diagram of the dust removal mechanism in an embodiment of this utility model;

[0034] Figure 4 This is a schematic diagram of the structure of one embodiment of the variable cross-section rod of this utility model;

[0035] Figure 5 This is a schematic diagram of another embodiment of the variable cross-section rod of this utility model;

[0036] Figure 6 This is a schematic diagram of the dust removal mechanism in an embodiment of the present utility model;

[0037] Figure 7 This is a cross-sectional schematic diagram of the dust removal mechanism in an embodiment of the present utility model;

[0038] Figure 8 This is a schematic diagram of the wind direction of the dust removal mechanism in an embodiment of this utility model.

[0039] Explanation of markings in the diagram:

[0040] Column 11, upper frame 12, supporting horizontal plate 13, horizontal load plate 14, bottom frame 21, supporting central beam 22, positioning groove 23, double-sided tactile wings 24, supporting side beam 25, inner tactile wings 27, dust removal mechanism 31, dust removal head cavity 32, bottom plate 33, frame sealing cover 34, positive pressure sealing cover 35, negative pressure chamber 36, positive pressure chamber 37, air inlet duct 38, exhaust duct 39, central receiving groove 41, double-sided clearance recess 42, side receiving groove 43, inner clearance recess 44, compressed airflow protrusion 45, first suction slit 46, second suction slit 47, dust blowing slit 48, variable cross-section rod 49, moving mechanism 51, air pressure assembly 61, battery 81, conduit 82, positioning plate 83, hanging bracket 84. Detailed Implementation

[0041] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. To further understand the features, technical means, and specific objectives and functions achieved by this utility model, and to analyze its advantages and spirit, a detailed description of this utility model is provided below in conjunction with the accompanying drawings and specific embodiments.

[0042] It should be noted that when a component is referred to as "fixed to" or "set on" another component, it can be directly on the other component or there may be an intermediate component. When a component is considered to be "connected" to another component, it can be directly connected to the other component or there may be an intermediate component. The terms "vertical," "horizontal," "front," "back," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0043] Please refer to the attached drawings. This application includes a base frame 21, with upright columns 11 extending upwards from the four corners of the base frame 21. An upper frame 12 is provided at the end of the column 11 away from the base frame 21. The base frame 21, the columns 11, and the upper frame 12 form an installation frame. A dust removal mechanism 31 is provided in the installation frame. A moving mechanism 51 is provided above the dust removal mechanism 31. A pneumatic assembly 61 is provided above the moving mechanism 51. The dust removal mechanism 31, the moving mechanism 51, and the pneumatic assembly 61 are arranged in the installation frame.

[0044] A support plate 13 is provided between the middle of two adjacent columns 11, and another support plate 13 is provided between the two columns 11 on the opposite side. The two support plates 13 are matched and correspondingly set. A cross plate 14 is provided between the two support plates 13. A portion of the pneumatic assembly 61 is provided on the cross plate 14. A battery 81 is provided under the upper frame 12.

[0045] The bottom surface of the positive pressure chamber 37 is provided with a matching pairing plate 83 that matches the variable cross-section rod 49, and the variable cross-section rod 49 is embedded in the matching pairing plate 83.

[0046] The dust removal mechanism 31 includes a dust removal head cavity 32, which is also a pressure chamber; the bottom of the dust removal head cavity 32 is provided with a base plate 33, and the dust removal head cavity 32 and the base plate 33 are integrally formed; the top of the dust removal head cavity 32 is provided with a frame sealing cover 34.

[0047] Furthermore, in one embodiment, the top of the dust collector head cavity 32 is provided with an opening, and a frame sealing cover 34 is provided at the opening at the top of the dust collector head cavity 32, that is, the frame sealing cover 34 is a sealing cover plate for the dust collector head cavity 32. A positive pressure chamber 37 is provided inside the dust collector head cavity 32. The transverse side walls of the positive pressure chamber 37 are vertically arranged from the bottom plate 33 inside the dust collector head cavity 32. The top of the positive pressure chamber 37 is separated from the top of the dust collector head cavity 32 by a separation gap, that is, there is a gap between the top of the positive pressure chamber 37 away from the bottom plate 33 and the frame sealing cover 34.

[0048] The ratio of the height of the positive pressure chamber 37 to the height of the dust collector head cavity 32 is 2 / 3 to 3 / 4:1.

[0049] Furthermore, in one embodiment, the positive pressure chamber 37 is provided with a positive pressure sealing cover 35 (positive pressure chamber cover plate) at one end away from the bottom plate 33. The positive pressure sealing cover 35 is provided with an air inlet duct 38 that extends upward through the frame sealing cover 34. The end of the air inlet duct 38 away from the positive pressure chamber 37 extends out of the frame sealing cover 34 and is connected to the positive pressure chamber 37.

[0050] In one embodiment, a gap is provided between the outer walls of both sides of the positive pressure chamber 37 and the inner wall of the dust removal head cavity 32. The cavity between the inner wall of the dust removal head cavity 32 and the outer wall of the positive pressure chamber 37 forms a negative pressure chamber 36. The negative pressure chamber 36 is provided on the outer side of the outer wall of the positive pressure chamber 37, that is, negative pressure chambers 36 are respectively provided on both sides of the positive pressure chamber 37, and the negative pressure chambers 36 on both sides are set in the dust removal head cavity 32. An exhaust duct 39 is provided on the frame sealing cover 34, and the exhaust duct 39 is connected to the negative pressure chamber 36. The positive pressure chamber 37 and the negative pressure chamber 36 are respectively set in the dust removal head cavity 32, and the positive pressure chamber 37 and the negative pressure chamber 36 are isolated from each other and do not communicate with each other.

[0051] The frame sealing cover 34 is provided with a hanging bracket 84, and the end of the hanging bracket 84 away from the frame sealing cover 34 is set on the moving mechanism 51.

[0052] Furthermore, in one embodiment, a transverse dust blowing slit 48 is provided on the bottom plate 33 (bottom surface) of the positive pressure chamber 37, and two matching variable cross-section rods 49 are provided on the bottom surface of the positive pressure chamber 37. The variable cross-section rods 49 are arranged parallel to the dust blowing slit 48, and the two variable cross-section rods 49 are respectively arranged on both sides of the dust blowing slit 48.

[0053] The variable cross-section rod 49 is provided with an inwardly protruding (facing the opposite side) compressed airflow protrusion 45. There is an air inlet gap D1 between the tops of the two corresponding variable cross-section rods 49, and a protrusion gap D2 between the compressed airflow protrusions 45 on opposite sides of the middle of the two variable cross-section rods 49. The air inlet gap D1 > the protrusion gap D2. There is an air outlet gap D3 between the bottoms of the two corresponding variable cross-section rods 49. The dust blowing slit 48 opened on the bottom plate 33 is provided with a dust blowing gap D4, which is also the width of the dust blowing slit 48. The air inlet gap D1 = the air outlet gap D3, and the air outlet gap D3 > the dust blowing gap D4.

[0054] The compressed airflow convex 45 is a convex strip type;

[0055] Or the compressed airflow convex 45 is a long strip with an arc-shaped cross section;

[0056] Or the compressed airflow convex 45 is a long strip with a short chord-shaped cross section.

[0057] Variable cross-section rod 49: Compressed air passes through the variable cross-section air flow channel and the flow channel with varying width and width. Through repeated compression and diffusion, it generates a wavy airflow. At the outlet position (dust blowing slit 48), a high-frequency and high-speed pulse airflow is generated, which separates the ultrafine particles from the substrate and then they are sucked away and collected by the surrounding negative pressure airflow.

[0058] The ratio of air inlet spacing D1 to convex hull spacing D2 is 5 to 10:1;

[0059] Inlet air distance D1 = outlet air distance D3, D1 equals D3;

[0060] The ratio of dust blowing distance D4 to convex hull distance D2 is 1:1 to 1.5.

[0061] The air gap size is D1=D3>D2≧D4. The airflow undergoes air duct undulation changes from wide to narrow to wide to narrow as it passes through D1→D2→D3→D4, resulting in a high-frequency, high-speed pulsed airflow. The dust blowing slit 48 air outlets perform impact dust blowing and sweeping.

[0062] The bottom plate 33 (bottom surface) of the negative pressure chamber 36 has a first suction slit 46 and a second suction slit 47 that extend horizontally through it. The first suction slit 46 and the second suction slit 47 are arranged parallel to the dust blowing slit 48. The first suction slit 46 (inner suction slit) is located close to the dust blowing slit 48, and the second suction slit 47 (outer suction slit) is located away from the dust blowing slit 48. A separation gap is provided between the first suction slit 46 and the second suction slit 47. Furthermore, the first suction slit 46 and the second suction slit 47 are provided through the bottom plate 33 of the negative pressure chamber 36, that is, the first suction slit 46 and the second suction slit 47 are provided through the bottom plate 33. A blowing and suction operation gap is provided between the dust blowing slit 48 and the first suction slit 46.

[0063] Furthermore, in one embodiment, the ratio of the width of the dust blowing slit 48 to the width of the first suction slit 46 to the width of the second suction slit 47 is 1:4~5:4~5;

[0064] The first suction slit 46 and the second suction slit 47 are of the same width.

[0065] Furthermore, in one embodiment, the air volume ratio of the dust blowing slit 48 to the air volume of the first suction slit 46 is 1:1.5 to 3, and the air volume of the second suction slit 47 is equal to the air volume of the first suction slit 31.

[0066] A supporting beam 22 is provided in the middle of the bottom frame 21, and supporting side beams 25 are provided on both sides of the supporting beam 22. The supporting beam 22 and the supporting side beams 25 are set in the frame of the bottom frame 21, and the supporting beam 22 and the supporting side beams 25 are spaced apart.

[0067] The bottom surfaces of the supporting middle beam 22 and the supporting side beam 25 are respectively provided with positioning grooves 23 that match the vehicle. The two sides of the supporting middle beam 22 are respectively provided with outward protruding double-sided tactile wings 24, and the inner side of the supporting side beam 25 is provided with inward protruding inner tactile wings 27.

[0068] Furthermore, in one embodiment, the bottom plate 33 of the dust removal head cavity 32 is provided with a central receiving groove 41 that matches the supporting central beam 22, and the two sides of the central receiving groove 41 are provided with double-sided avoidance recesses 42 that match the double-sided tactile wings 24; the bottom plate 33 of the dust removal head cavity 32 is provided with a side receiving groove 43 that matches the supporting side beam 25, and the inner side of the side receiving groove 43 is provided with an inner avoidance recess 44 that matches the inner side tactile wings 27.

[0069] Furthermore, in one embodiment, the dust removal mechanism 31 is suspended on the moving mechanism 51 by a hanging bracket 84 and is suspended on the bottom frame 21; the dust removal mechanism 31 is connected to the air pressure assembly 61 by a conduit 82.

[0070] The above embodiments only illustrate several preferred implementations of this utility model, and their descriptions are relatively specific and detailed. It should be understood that this utility model is not limited to the forms disclosed herein and should not be considered as excluding other embodiments. It can be used in various other combinations, modifications, and environments, and can be modified within the scope of the utility model concept described herein through the above teachings or related field techniques or knowledge. This should not be construed as a limitation on the scope of this utility model. It should be noted that for those skilled in the art, several modifications and improvements can be made without departing from the concept of this utility model. Such modifications and changes do not depart from the spirit and scope of this utility model, and all fall within the protection scope of the appended claims. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A concave dust head structure of a wafer production dust removal device, comprising: The bottom frame (21) is provided with an upwardly extending vertical column (11) at four corners, and an upper frame body (12) is arranged at the end of the vertical column (11) away from the bottom frame (21), and the bottom frame (21), the vertical column (11) and the upper frame body (12) form a mounting frame; characterized in that a dust removal mechanism (31) is arranged in the mounting frame, a moving mechanism (51) is arranged on the upper surface of the dust removal mechanism (31), and an air pressure assembly (61) is arranged on the upper surface of the moving mechanism (51), and the dust removal mechanism (31), the moving mechanism (51) and the air pressure assembly (61) are arranged in the mounting frame; The dust removal mechanism (31) comprises a dust removal head cavity (32), and the bottom of the dust removal head cavity (32) is provided with a bottom plate (33), and the dust removal head cavity (32) and the bottom plate (33) are integrally formed, and the top end of the dust removal head cavity (32) is provided with a frame sealing cover (34); The top of the dust removal head cavity (32) is provided with an opening, the opening at the top end of the dust removal head cavity (32) is provided with the frame sealing cover (34), the dust removal head cavity (32) is provided with a positive pressure chamber (37), the lateral two side walls of the positive pressure chamber (37) are arranged vertically on the bottom plate (33) in the dust removal head cavity (32), and the top end of the positive pressure chamber (37) is provided with a separation distance from the top end of the dust removal head cavity (32); The outer wall of the two sides of the positive pressure chamber (37) and the inner wall of the dust removal head cavity (32) are provided with a space, and the space between the inner wall of the dust removal head cavity (32) and the outer wall of the positive pressure chamber (37) forms a negative pressure chamber (36), and the two sides of the positive pressure chamber (37) are respectively provided with a negative pressure chamber (36), and the two negative pressure chambers (36) are arranged in the dust removal head cavity (32).

2. The concave duster head structure of a wafer production dust removal apparatus according to claim 1, characterized in that, The bottom plate (33) of the positive pressure chamber (37) is provided with a transversely penetrating dust blowing slot (48), the bottom surface of the positive pressure chamber (37) is provided with two corresponding variable cross-section rods (49), the variable cross-section rods (49) are arranged in parallel with the dust blowing slot (48), and the two variable cross-section rods (49) are arranged on the two sides of the dust blowing slot (48) respectively; The bottom plate (33) of the negative pressure chamber (36) is provided with a transversely penetrating first suction slot (46) and a second suction slot (47), the first suction slot (46) and the second suction slot (47) are arranged in parallel with the dust blowing slot (48); the first suction slot (46) is arranged close to the dust blowing slot (48), the second suction slot (47) is arranged away from the dust blowing slot (48), and a separation distance is arranged between the first suction slot (46) and the second suction slot (47); a blowing and suction operation distance is arranged between the dust blowing slot (48) and the first suction slot (46).

3. The concave duster head structure of a wafer production dust removal apparatus according to claim 1, wherein The end of the positive pressure chamber (37) away from the bottom plate (33) is provided with a positive pressure sealing cover (35), the positive pressure sealing cover (35) is provided with an air inlet cylinder (38) extending upwardly and penetrating the frame sealing cover (34), the end of the air inlet cylinder (38) away from the positive pressure chamber (37) extends above the frame sealing cover (34), and the air inlet cylinder (38) is connected with the positive pressure chamber (37) in penetration; The height ratio of the dust removal head cavity (32) to the positive pressure chamber (37) is 2 / 3-3 / 4:

1. The frame sealing cover (34) is provided with a hanging frame (84), and one end of the hanging frame (84) away from the frame sealing cover (34) is arranged on the moving mechanism (51).

4. The concave duster head structure of a wafer production dust removal apparatus according to claim 1, wherein The frame sealing cover (34) is provided with an air exhaust cylinder (39), the air exhaust cylinder (39) is in through connection with the negative pressure cavity (36); the positive pressure chamber (37) and the negative pressure cavity (36) are arranged in the dust removal head cavity (32) respectively, and the positive pressure chamber (37) and the negative pressure cavity (36) are isolated from each other and not through each other; The width ratio of the dust blowing seam (48), the first suction seam (46) and the second suction seam (47) is 1:4-5:4-5; the first suction seam (46) and the second suction seam (47) are equal in width; The air volume ratio of the dust blowing seam (48) and the first suction seam (46) is 1:1.5-3, and the air volume of the second suction seam (47) is equal to that of the first suction seam (46).

5. The concave duster head structure of a wafer production dust removal apparatus according to claim 1, wherein The middle part of the bottom frame (21) is provided with a supporting middle beam (22), both sides of the supporting middle beam (22) are respectively provided with a supporting side beam (25), the supporting middle beam (22) and the supporting side beam (25) are arranged in the frame of the bottom frame (21), and the supporting middle beam (22) and the supporting side beam (25) are arranged at intervals; The bottom surfaces of the supporting middle beam (22) and the supporting side beam (25) are respectively provided with positioning grooves (23) matched with the carrier, both sides of the supporting middle beam (22) are respectively provided with outwardly protruding double-sided touch wings (24), and the inner side of the supporting side beam (25) is provided with an inwardly protruding inner touch wing (27).

6. The concave duster head structure of a wafer production dust removal apparatus according to claim 5, wherein The bottom plate (33) of the dust removal head cavity (32) is provided with a middle containing groove (41) matched with the supporting middle beam (22), both sides of the middle containing groove (41) are provided with double-sided avoiding grooves (42) matched with the double-sided touch wings (24); the bottom plate (33) of the dust removal head cavity (32) is provided with a side containing groove (43) matched with the supporting side beam (25), and the inner side of the side containing groove (43) is provided with an inner avoiding groove (44) matched with the inner touch wing (27).

7. The concave duster head structure of a wafer production dust removal apparatus according to claim 2, wherein The variable cross-section rod (49) is provided with a compressed air flow convex (45) protruding inwardly, the top parts of two corresponding variable cross-section rods (49) are provided with an air inlet spacing D1, the compressed air flow convexes (45) on the opposite sides of the middle parts of the two variable cross-section rods (49) are provided with a convex spacing D2, the air inlet spacing D1 is greater than the convex spacing D2; the bottom parts of the two corresponding variable cross-section rods (49) are provided with an air outlet spacing D3, the dust blowing seam (48) formed on the bottom plate (33) is provided with a dust blowing spacing D4, and the dust blowing spacing D4 is also the width of the dust blowing seam (48); the air inlet spacing D1 is equal to the air outlet spacing D3, and the air outlet spacing D3 is greater than the dust blowing spacing D4; The compressed air flow convex (45) is a convex strip; Or the compressed air flow convex (45) is an arc-shaped long strip in cross section; Or the compressed air flow convex (45) is a short chord-shaped long strip in cross section; The bottom surface of the positive pressure chamber (37) is provided with a pair of clamping plates (83) matched with the variable cross-section rod (49), and the variable cross-section rod (49) is clamped in the clamping plates (83). The ratio of the convex distance D2 to the air inlet distance D1 is 5-10:1, the air inlet distance D1 is equal to the air outlet distance D3, and the ratio of the dust blowing distance D4 to the convex distance D2 is 1:1-1.

5.

8. The concave duster head structure of a wafer production dust removal apparatus according to claim 1, wherein The dust removal mechanism (31) is hung on the moving mechanism (51) through a hanging frame (84), and the dust removal mechanism (31) is suspended on the bottom frame (21); the dust removal mechanism (31) is connected with the air pressure assembly (61) through a pipeline (82); The middle parts of the two adjacent vertical columns (11) are provided with a support transverse plate (13), and the other two vertical columns (11) on the opposite side are provided with a matching corresponding other support transverse plate (13); the two support transverse plates (13) are matched and corresponded, the two support transverse plates (13) are provided with a transverse loading plate (14), and the transverse loading plate (14) is provided with part of the components of the air pressure assembly (61); the bottom of the upper frame body (12) is provided with a battery (81).

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