Anti-collision jig in PVD part cleaning process
By designing anti-collision fixtures and using Teflon material and partition support structure, the problem of easy damage to semiconductor components during cleaning was solved, achieving component protection and improved cleaning efficiency.
Patent Information
- Application Number
- CN202423126774.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-18
- Publication Date
- 2026-01-13
- Estimated Expiration
- 2034-12-18
AI Technical Summary
Existing cleaning fixtures cannot effectively protect semiconductor components with extended parts, making them susceptible to damage during the cleaning process and affecting product quality.
An anti-collision fixture was designed, consisting of a lower fixture and an upper fixture, made of Teflon material, with partitions and supporting columns to ensure that the parts are not bumped or stacked during the cleaning process, preventing bending and deformation.
It effectively prevents parts from being bumped, bent, or deformed during the cleaning process, ensuring product quality and preventing scratches on the products. It is suitable for cleaning multiple products simultaneously.
Smart Images
Figure CN223789164U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the technical field of cleaning and protective fixtures, and in particular to a fixture for preventing bumps and knocks during the cleaning process of PVD parts. Background Technology
[0002] In the semiconductor industry, some components have stringent requirements, and some parts have extensions that must be protected from impacts, stacking, bending, deformation, or other damage during cleaning. Existing cleaning fixtures lack protection for these types of workpieces, making them susceptible to damage during cleaning and affecting product quality. Utility Model Content
[0003] This utility model aims to address the shortcomings of existing technologies by providing a shockproof fixture for cleaning PVD components.
[0004] To achieve the above objectives, this utility model adopts the following technical solution:
[0005] A shockproof fixture for cleaning PVD parts includes a lower fixture and an upper fixture, with the upper fixture mounted on the lower fixture.
[0006] The lower fixture includes a first base plate, with support columns at the four corners of the upper surface of the first base plate. A first baffle is fixed between the upper ends of the two front support columns. Several first partitions are fixed from left to right on the upper surface of the first base plate. The upper part of the front end face of the first partition is fixed to the first baffle. A first bottom flow hole is penetrating the first base plate. A first side flow hole is penetrating the first partition. A plug-in column is provided at the top of the support column.
[0007] The upper fixture includes a second base plate. Several second partitions are fixed on the upper surface of the second base plate from left to right. The upper front and rear sides of the second partitions are provided with second baffles. A second bottom flow hole is passed through the second base plate. A second side flow hole is passed through the second partitions. Sockets are provided on the left and right sides of the second base plate corresponding to the support columns. Socket holes are provided at the bottom of the sockets. The top of the plug-in column is inserted into the socket hole.
[0008] The first handle is located on the outer wall of the first partition on the far left and far right.
[0009] The top of the support column has an internal insertion hole extending downwards, and the lower end of the insertion column passes through the internal insertion hole.
[0010] A second handle is provided on the outer wall of the second partition on the far left and far right.
[0011] The beneficial effects of this utility model are: this utility model can ensure that the components form an effective isolation during the washing process, prevent collisions and stacking, and effectively prevent bending deformation or other damage. Attached Figure Description
[0012] Figure 1 This is a schematic diagram of the structure of this utility model;
[0013] Figure 2 This is a schematic diagram of the lower-level fixture.
[0014] Figure 3 A structural diagram of the upper-level fixture in one direction;
[0015] Figure 4 This is a structural diagram of the upper fixture from another direction;
[0016] In the diagram: 1 - Lower jig; 2 - Upper jig;
[0017] 11-First base plate; 12-Support column; 13-First baffle; 14-First partition; 15-First bottom flow hole; 16-First side flow hole; 17-Insertion post; 18-First handle;
[0018] 21-Second base plate; 22-Second partition; 23-Second baffle; 24-Second bottom flow hole; 25-Second side flow hole; 26-Socket; 27-Socket hole; 28-Second handle;
[0019] The following will describe in detail the embodiments of this utility model with reference to the accompanying drawings. Detailed Implementation
[0020] The principles and features of this utility model are described below with reference to the accompanying drawings. The embodiments described are for illustrative purposes only and are not intended to limit the scope of this utility model. The utility model is described more specifically in the following paragraphs by way of example with reference to the accompanying drawings. The advantages and features of this utility model will become clearer from the following description. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of this utility model.
[0021] It should be noted that when a component is described as "fixed to" another component, it can be directly on the other component or may have a component in between. When a component is considered "connected to" another component, it can be directly connected to the other component or may have a component in between. When a component is considered "set on" another component, it can be directly set on the other component or may have a component in between. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.
[0022] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.
[0023] The present invention will be further described below with reference to the accompanying drawings and embodiments:
[0024] A type of anti-collision fixture for cleaning PVD parts, such as Figure 1 As shown, it includes a lower fixture 1 and an upper fixture 2, with the upper fixture 2 mounted on the lower fixture 1.
[0025] Lower fixture 1 Figure 2 As shown, it includes a first base plate 11, a support column 12, a first baffle 13, a first partition 14, a first bottom flow hole 15, a first side flow hole 16, a plug-in post 17, and a first handle 18.
[0026] The upper surface of the first base plate 11 is provided with four supporting columns 12 at the four corners. The upper ends of the two front supporting columns 12 are fixed with a first baffle 13. Several first partitions 14 are fixed from left to right on the upper surface of the first base plate 11. The upper part of the front end face of the first partition 14 is fixed with the first baffle 13. A first bottom flow hole 15 is passed through the first base plate 11. A first side flow hole 16 is passed through the first partition 14. The top of the supporting column 12 is provided with a plug-in column 17.
[0027] The first handle 18 is provided on the outer wall of the first partition 14 on the far left and far right.
[0028] The top of the support column 12 has an inner insertion hole extending downwards, and the lower end of the insertion column 17 is inserted into the inner insertion hole.
[0029] The first bottom flow hole 15 is located between two adjacent first partition plates 14.
[0030] Upper fixture 2 Figure 3 , Figure 4 As shown, it includes a second base plate 21, a second partition 22, a second baffle 23, a second bottom flow hole 24, a second side flow hole 25, a socket 26, a socket hole 27, and a second handle 28.
[0031] Several second partitions 22 are fixedly provided on the upper surface of the second base plate 21 from left to right. The upper front and rear ends of the second partitions 22 are provided with second baffles 23. The second base plate 21 has a second bottom flow hole 24 through it. The second partitions 22 have a second side flow hole 25 through it. The left and right sides of the second base plate 21 are provided with sockets 26 corresponding to the supporting columns 12. The bottom of the sockets 26 is provided with socket holes 27. The top of the plug-in column 17 is inserted into the socket hole 27.
[0032] A second handle 28 is provided on the outer wall of the second partition 22 on the far left and far right.
[0033] The second bottom flow hole 24 is located between two adjacent second partitions 22.
[0034] Both the first handle 18 and the second handle 28 have a U-shaped structure.
[0035] This utility model device is made entirely of Teflon material, which will not scratch or wear the product, and is resistant to acids and alkalis. It can effectively isolate components, prevent bumps and stacking, and effectively prevent bending deformation or other damage. In use, the components are placed between the partition of the lower fixture 1 and the upper fixture 2, which are divided into upper and lower layers. They can be disassembled, allowing more products to be installed for simultaneous cleaning. It is equipped with a first bottom flow hole 15, a first side flow hole 16, a second bottom flow hole 24, and a second side flow hole 25, which can ensure that pure water is always overflowing during the washing process.
[0036] The present invention has been described above with reference to the accompanying drawings. Obviously, the specific implementation of the present invention is not limited to the above-described manner. Any improvements made using the inventive concept and technical solution of the present invention, or direct application to other situations without modification, are all within the protection scope of the present invention.
Claims
1. A bumping prevention jig for a PVD component cleaning process, characterized by, The utility model relates to a double-layer fixture, which comprises a lower fixture (1) and an upper fixture (2), wherein the upper fixture (2) is arranged on the lower fixture (1). The lower fixture (1) comprises a first bottom plate (11), wherein four support columns (12) are arranged on the upper surface of the first bottom plate (11) at the four corners, a first baffle (13) is fixed between the upper ends of the two front support columns (12), a plurality of first partition plates (14) are fixed on the upper surface of the first bottom plate (11) from left to right, the upper portion of the front end face of each first partition plate (14) is fixed with the first baffle (13), a first bottom flow through hole (15) is arranged on the first bottom plate (11), a first side flow through hole (16) is arranged on each first partition plate (14), and an insertion column (17) is arranged on the top of each support column (12). The upper fixture (2) comprises a second bottom plate (21), wherein a plurality of second partition plates (22) are fixed on the upper surface of the second bottom plate (21) from left to right, a second baffle (23) is arranged on the upper portion of the front end face and the upper portion of the rear end face of each second partition plate (22), a second bottom flow through hole (24) is arranged on the second bottom plate (21), a second side flow through hole (25) is arranged on each second partition plate (22), a socket (26) is arranged on the left side face and the right side face of the second bottom plate (21) and corresponds to each support column (12), a socket hole (27) is arranged at the bottom of the socket (26), and the top of the insertion column (17) is inserted into the socket hole (27).
2. The anti-collision jig for cleaning a PVD component according to claim 1, wherein First handles (18) are arranged on the outer side walls of the leftmost and rightmost first partition plates (14).
3. The anti-collision jig for cleaning a PVD component according to claim 2, wherein, An inner insertion hole is arranged on the top of each support column (12) and penetrates downward.
4. The anti-collision jig for cleaning a PVD component according to claim 3, wherein Second handles (28) are arranged on the outer side walls of the leftmost and rightmost second partition plates (22).
5. The anti-collision jig for cleaning a PVD component according to claim 4, wherein, The first handles (18) and the second handles (28) are both in U-shaped structures.
6. The anti-collision jig for cleaning a PVD component according to claim 5, wherein, The first bottom flow through hole (15) is arranged between two adjacent first partition plates (14).
7. The anti-collision jig for cleaning a PVD component according to claim 6, wherein The second bottom flow through hole (24) is arranged between two adjacent second partition plates (22).