Self-adaptive spherical surface structure for output shaft installation

Abstract

The self-adaptive spherical surface structure comprises a convex ball body, a concave ball body and a pressing plate, the pressing plate is used for pressing the convex ball body on a furnace wall, the spherical surface shape of the convex ball body is matched with that of the concave ball body, the concave ball body is movably installed on the convex ball body, the top of the spherical surface of the convex ball body and the top of the spherical surface of the concave ball body are each provided with an open hole, and the output shaft can penetrate through the open holes. And an insulating ring is also arranged in the hole of the concave ball body. The spherical structure can be adjusted in multiple directions, adaptive adjustment of multiple dimensions such as the length, the height and the level of an output shaft is achieved, the position of the output shaft of the coil does not need to be adjusted, it is guaranteed that the installation precision of the primary coil is not damaged, and therefore the crystal growth quality is guaranteed.

Description

Technical Field

[0001] This utility model relates to the field of crystal growth equipment technology, and in particular to an adaptive spherical structure for output shaft mounting. Background Technology

[0002] Currently, silicon carbide crystal growth equipment generally uses induction coils to heat the temperature zone. There are two main installation methods for induction coils: one is to mount them outside the vacuum quartz chamber, and the other is to place them inside the stainless steel vacuum chamber. Placing the coil inside the vacuum chamber involves technical issues such as vacuum sealing, water supply, and power supply. Currently, the installation of the coil inside the vacuum chamber is mainly achieved by adjusting the position and angle of the coil itself. However, adjusting the coil position greatly affects the alignment accuracy between the coil and the crucible, and has a certain impact on the temperature uniformity of the crucible's temperature zone, thus affecting the crystal growth quality. Utility Model Content

[0003] Purpose of the invention: To address the above-mentioned shortcomings, this invention provides an adaptive spherical structure for output shaft mounting, which eliminates the need to adjust the coil position. By adapting the spherical structure to the coil position, the installation accuracy between the coil and the crucible is ensured, thereby guaranteeing the quality of crystal growth.

[0004] Technical solution: To solve the above problems, this utility model adopts an adaptive spherical structure for shaft installation, including a convex sphere, a concave sphere, and a pressure plate. The pressure plate is used to press the convex sphere onto the furnace wall. The spherical shapes of the convex sphere and the concave sphere are matched. The concave sphere is movably installed on the convex sphere. The top of the spherical surface of both the convex sphere and the concave sphere is provided with an opening for the shaft to pass through. An insulating ring is also provided in the opening of the concave sphere.

[0005] Furthermore, the convex sphere includes a convex spherical surface and a first mounting surface, and the pressure plate is movably mounted on the first mounting surface to fix the convex sphere to the furnace wall.

[0006] Furthermore, the concave sphere includes a concave spherical surface and a second mounting surface, the concave spherical surface being fitted onto the convex spherical surface, and the second mounting surface being fixed to the first mounting surface by bolts.

[0007] Furthermore, a sealing ring is provided on the end face of the first mounting surface away from the concave sphere to achieve a seal between the convex sphere and the furnace wall.

[0008] Furthermore, a sealing ring is provided on the end face of the convex spherical surface near the concave spherical surface to achieve a seal between the convex spherical surface and the concave spherical surface.

[0009] Furthermore, a sealing ring is provided inside the insulating ring to achieve a seal between the concave sphere and the coil output shaft.

[0010] Furthermore, both the convex and concave spheres are made of metal.

[0011] Beneficial effects: Compared with the prior art, the significant advantages of this utility model are (1) the spherical structure can be adjusted in multiple directions to achieve adaptive adjustment of multiple dimensions such as the length, height, and level of the output shaft, without adjusting the position of the coil output shaft, ensuring that the installation accuracy of the original coil is not damaged, thereby ensuring the quality of crystal growth; (2) the position of the convex sphere is easily adjusted by fixing it with a pressure plate; (3) multiple sealing rings are set at the same time to ensure the sealing of the structure, solving the problems of vacuum sealing, water supply, power supply and insulation of the coil output shaft part from the chamber. Attached Figure Description

[0012] Figure 1 This is a cross-sectional schematic diagram of the adaptive spherical structure of this utility model. Detailed Implementation

[0013] like Figure 1 As shown, an adaptive spherical structure for coil output shaft installation in this embodiment includes a convex sphere 2, a concave sphere 3, and a pressure plate 6. Both the convex sphere 2 and the concave sphere 3 are made of metal. The convex sphere 2 includes a convex spherical surface and a first mounting surface, and the concave sphere 3 includes a concave spherical surface and a second mounting surface. The convex sphere and the concave sphere are shaped to match, allowing the concave sphere to fit snugly onto the convex sphere. Both the convex sphere and the concave sphere have openings at their tops for the coil output shaft 5 to pass through. The pressure plate 6 is used to press the convex sphere 2 onto the furnace wall 1. The first mounting surface and the second mounting surface have screw holes for mounting bolts. The second mounting surface is fixed to the first mounting surface by bolts to fix the concave sphere 3 onto the convex sphere 2. The screw hole size on the mounting surface is slightly larger than the bolt size, allowing for some adjustment margin during bolt installation. The installation angle between the convex sphere 2 and the concave sphere 3 can be adjusted by adjusting the bolt feed rate.

[0014] To ensure the sealing of the coil output shaft installation, a sealing ring 7 is provided on the end face of the first mounting surface away from the concave sphere 3 to achieve a seal between the convex sphere 2 and the furnace wall; a sealing ring 7 is also provided on the end face of the convex sphere near the concave sphere 3 to achieve a seal between the convex sphere 2 and the concave sphere 3. An insulating ring 4 is also provided inside the opening of the concave sphere 3, and a sealing ring 7 is provided inside the insulating ring 4 to achieve a seal between the concave sphere 3 and the coil output shaft 5.

[0015] In use, after the coil and crucible are coaxially installed and fixed (not shown in the attached diagram), the coil output shaft 5 is installed and fixed. The convex sphere 2 with the sealing ring 7 and the pressure plate 6 are then fitted onto the coil output shaft 5. The pressure plate 6 gently presses the convex sphere 2 against the furnace wall 1, allowing the convex sphere 2 to be both fixed to the furnace wall 1 and able to slide and adjust on it. Next, the concave sphere 3 with the insulating ring 4 and the sealing ring is installed along the coil output shaft 5 onto the convex sphere 2, so that the insulating ring 4 is fitted onto the coil output shaft 5. Simultaneously, the position of the convex sphere 2 is adjusted appropriately to fit the position of the coil output shaft 5. After adjustment, all bolts are finally tightened to fix the spherical structure.

[0016] The spherical structure of this invention can be adjusted in multiple directions, enabling adaptive adjustments to multiple dimensions such as the length, height, and level of the output shaft. This eliminates the need to adjust the position of the coil output shaft, ensuring the original coil's installation accuracy is not compromised and thus guaranteeing crystal growth quality. The pressure plate fixing method facilitates adjustment of the convex sphere's position. Furthermore, multiple sealing rings ensure the structure's airtightness, solving the problems of vacuum sealing, water and electricity supply, and insulation from the chamber in the coil output shaft section.

Claims

1. A self-adapting spherical structure for out-of-axis mounting, characterized in that, The application relates to a convex ball (2), a concave ball (3) and a pressing plate (6) used for pressing the convex ball (2) on a furnace wall, wherein the convex ball (2) and the concave ball (3) are matched in spherical surface shape, the concave ball (3) is movably installed on the convex ball (2), the spherical top of the convex ball (2) and the concave ball (3) is provided with an opening through which an outgoing shaft passes, and an insulating ring (4) is arranged in the opening of the concave ball (3).

2. The self-adapting spherical structure for out-of-axis mounting of claim 1, wherein, The convex ball (2) comprises a convex spherical surface and a first installation surface, and the pressing plate (6) is movably installed on the first installation surface to fix the convex ball (2) on the furnace wall.

3. The self-adapting spherical structure for out-of-axis mounting of claim 2, wherein, The concave ball (3) comprises a concave spherical surface and a second installation surface, and the concave spherical surface is attached and installed on the convex spherical surface, and the second installation surface is fixed on the first installation surface through bolts.

4. The self-adapting spherical structure for out-of-axis mounting of claim 3, wherein, A sealing ring (7) is arranged on the end surface of the first installation surface away from the concave ball (3) to realize sealing between the convex ball (2) and the furnace wall.

5. The self-adapting spherical structure for out-of-axis mounting of claim 4, wherein, A sealing ring (7) is arranged on the end surface of the convex spherical surface close to the concave ball (3) to realize sealing between the convex ball (2) and the concave ball (3).

6. The self-adapting spherical structure for out-of-axis mounting of claim 5, wherein, A sealing ring (7) is arranged in the insulating ring (4) to realize sealing between the concave ball (3) and the outgoing shaft of the coil.

7. The self-adapting spherical structure for out-of-axis mounting of claim 1, wherein, The convex ball (2) and the concave ball (3) are both made of metal.

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