Housing with electromagnetic shielding function and heating equipment

Abstract

The utility model discloses a housing with electromagnetic shielding function and heating equipment, the housing comprises a shielding base, a heightening ring and a shielding top shell, the shielding base and the heightening ring are cylindrical with open upper and lower ends, the shielding top shell comprises a cylindrical side wall and an annular top surface, the heightening ring is installed on the shielding base, and the shielding base and the heightening ring are arranged on the shielding top shell. The shielding top shell is installed on the heightening ring, and the shielding base, the heightening ring and the shielding top shell are all made of metal materials. According to the utility model, the upper side coil and the lower side coil are completely isolated through the housing, so that the shielding effectiveness is greatly improved, electromagnetic coupling during simultaneous working of multiple coils is reduced, and the stability of equipment is improved; meanwhile, the design of the heightening ring can flexibly meet the requirement for up-down movement of the coil, so that the temperature gradient required by crystal growth is met, and equipment is prevented from being damaged; and the spigot connection design facilitates quick disassembly and assembly, and the operation is very convenient.

Description

Technical Field

[0001] This utility model relates to the field of crystal growth technology, and in particular to a housing and heating device with electromagnetic shielding function. Background Technology

[0002] Most commercial crystal growth equipment currently uses medium-frequency induction heating equipment for crystal growth. Induction heating has advantages such as non-contact, high heating efficiency, and fast speed. In order to meet the temperature gradient required for large-size crystal growth and adapt to various complex process conditions, heating equipment often adopts dual-coil or even multi-coil heating methods.

[0003] When multiple coils operate simultaneously, severe electromagnetic coupling occurs, posing significant challenges to process adjustments and potentially damaging heating equipment. Currently, there are two main solutions to this problem: one is to use a decoupling control strategy with the same frequency and phase to eliminate power coupling between coils. However, this solution typically requires a transformer for load matching due to the very low load impedance, resulting in a large size, numerous switching transistors, and low reliability. The other mainstream solution involves placing a shielding plate between the induction coils to absorb some of the induced current, achieving a shielding effect. However, this solution merely inserts a metal plate between the coils, failing to completely isolate them, resulting in low shielding effectiveness and persistent severe electromagnetic coupling. Utility Model Content

[0004] Purpose of the invention: To address the above-mentioned shortcomings, this utility model provides a housing and heating device with electromagnetic shielding function.

[0005] Technical solution: To solve the above problems, this utility model adopts a cover with electromagnetic shielding function, including a shielding base, a heightening ring, and a shielding top shell. The shielding base and the heightening ring are both cylindrical with open upper and lower ends. The shielding top shell includes cylindrical side walls and an annular top surface. The heightening ring is installed on the shielding base, and the shielding top shell is installed on the heightening ring. The shielding base, the heightening ring, and the shielding top shell are all made of metal.

[0006] Furthermore, the shielding base, the heightening ring, and the shielding top shell are all spliced ​​structures composed of two symmetrical structures.

[0007] Furthermore, the joints of the shielding base, the heightening ring, and the shielding top shell are all connected with Z-shaped stop joints.

[0008] Furthermore, the shielding base, the heightening ring, and the shielding top shell are connected by a Z-shaped stop joint.

[0009] Furthermore, the shielding base, the heightening ring, and the shielding top shell all have the same shell thickness δ, and

[0010]

[0011] Where f is the operating frequency of the coil, μ is the permeability of the shield, and σ is the conductivity of the shield.

[0012] Furthermore, the shielding base, the heightening ring, and the shielding top shell are made of steel plate, aluminum alloy, or permalloy.

[0013] This utility model also provides a heating device with an electromagnetic shielding shell, which further includes a lower flange, an upper flange, a cylinder installed between the lower flange and the upper flange, an upper coil and a lower coil disposed on the outside of the cylinder, the shell is installed on the lower flange and surrounds the outside of the lower coil, and the inner circle of the top surface of the shielding shell surrounds the outer wall of the cylinder.

[0014] Beneficial effects: Compared with the prior art, the significant advantage of this utility model is that the upper coil and the lower coil are completely isolated by the cover, which greatly improves the shielding effectiveness, reduces electromagnetic coupling when multiple coils work at the same time, and improves the stability of the equipment; at the same time, the heightened ring design can flexibly meet the needs of the coil to move up and down, so as to meet the temperature gradient required for crystal growth and prevent damage to the equipment; the stop connection design facilitates quick disassembly and assembly and is very convenient to operate. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of the heating device of this utility model;

[0016] Figure 2 This is a partial cross-sectional schematic diagram of the cover of this utility model;

[0017] Figure 3 This is a schematic diagram of the heightened ring structure of this utility model. Detailed Implementation

[0018] like Figures 1 to 3As shown, this embodiment of an electromagnetic shielding enclosure includes a shielding base 2-1, heightening rings (2-2, 2-3), and a shielding top shell 2-4. The shielding base 2-1 and heightening rings (2-2, 2-3) are both cylindrical with open top and bottom ends. The shielding top shell 2-4 includes cylindrical sidewalls and an annular top surface. This embodiment uses two layers of heightening rings, and the number and height of the rings can be adjusted according to the actual equipment size and requirements, allowing the enclosure to adapt to coil movement. The shielding base 2-1, heightening rings (2-2, 2-3), and shielding top shell 2-4 are all spliced ​​structures composed of two symmetrical structures, with the splicing points of the two symmetrical structures forming a Z-shaped stop connection. The heightening rings (2-2, 2-3) are mounted on the shielding base 2-1, and the shielding top shell 2-4 is mounted on the heightening rings (2-2, 2-3), also using a Z-shaped stop connection. The stop-joint connection eliminates the need for threaded connections, minimizing magnetic leakage, simplifying operation, reducing electromagnetic coupling between coils, and lowering the difficulty of process adjustments.

[0019] The shielding base 2-1, the heightening rings (2-2, 2-3), and the shielding top shell 2-4 are all made of metal, such as steel plate, aluminum alloy, or permalloy, which have excellent magnetic and electrical conductivity. The shell thickness δ of the shielding base 2-1, the heightening rings (2-2, 2-3), and the shielding top shell 2-4 is the same. The magnetic field strength decreases inversely with a cubic distance in space. To improve the shielding effect, the distance between the shield and the coil should be increased as much as possible while ensuring sufficient operating space. The thickness δ of the shielding shell should be greater than the skin depth at the operating frequency f.

[0020]

[0021] Where f is the coil operating frequency, μ is the magnetic permeability of the shield, and σ is the electrical conductivity of the shield. Taking aluminum alloy as an example, when the coil operating frequency is 8kHz, the skin depth of aluminum alloy at room temperature (20℃) is 1.2mm. For every increase in skin depth in the shield thickness, the absorption loss increases by 9dB. Considering factors such as mechanical strength, rigidity, and corrosion resistance, the thickness of the shield should be at least 2 to 3 times the skin depth at the current operating frequency. Alternatively, the thickness of the shield can be appropriately increased according to the shielding effect.

[0022] This utility model also provides a coil heating device, including a lower flange 1, an upper flange 7, a cylinder installed between the lower flange 1 and the upper flange 7, and an upper coil 4 and a lower coil 3 disposed on the outside of the cylinder. The cylinder includes an outer cylinder 5 and an inner cylinder 6. A cover 2 is installed on the lower flange 1 and surrounds the outside of the lower coil 3. The inner circle of the top surface of the shielding top shell 2-4 surrounds the outer wall of the outer cylinder 5. The cover 2 completely isolates the upper coil 4 and the lower coil 3, greatly improving the shielding effectiveness, reducing electromagnetic coupling when multiple coils work simultaneously, and improving the stability of the device. At the same time, the heightened ring design can flexibly meet the needs of coil vertical movement to meet the temperature gradient required for crystal growth and prevent damage to the device. The stop connection design facilitates quick assembly and disassembly and is very convenient to operate.

Claims

1. A housing with electromagnetic shielding function, characterized in that, The shield includes a shielding base (2-1), a heightening ring (2-2), and a shielding top shell (2-4). The shielding base (2-1) and the heightening ring (2-2) are both cylindrical with open upper and lower ends. The shielding top shell (2-4) includes cylindrical side walls and an annular top surface. The heightening ring (2-2) is mounted on the shielding base (2-1), and the shielding top shell (2-4) is mounted on the heightening ring (2-2). The shielding base (2-1), the heightening ring (2-2), and the shielding top shell (2-4) are all made of metal.

2. The electromagnetic shielding enclosure as described in claim 1, characterized in that, The shielding base (2-1), the heightening ring (2-2), and the shielding top shell (2-4) are all spliced ​​structures composed of two symmetrical structures.

3. The electromagnetic shielding enclosure as described in claim 2, characterized in that, The joints of the shielding base (2-1), the heightening ring (2-2), and the shielding top shell (2-4) are all connected with Z-shaped stop joints.

4. The electromagnetic shielding enclosure as described in claim 1, characterized in that, The shielding base (2-1), the heightening ring (2-2), and the shielding top shell (2-4) are connected by a Z-shaped stop.

5. The electromagnetic shielding enclosure as described in claim 1, characterized in that, The shielding base (2-1), the heightening ring (2-2), and the shielding top shell (2-4) have the same shell thickness δ, and Where f is the operating frequency of the coil, μ is the permeability of the shield, and σ is the conductivity of the shield.

6. The electromagnetic shielding enclosure as described in claim 1, characterized in that, The shielding base (2-1), the heightening ring (2-2), and the shielding top shell (2-4) are made of steel plate, aluminum alloy, or permalloy.

7. A heating device comprising a housing with electromagnetic shielding function as described in any one of claims 1-6, characterized in that, It also includes a lower flange (1), an upper flange (7), a cylinder installed between the lower flange (1) and the upper flange (7), an upper coil (4) and a lower coil (3) set on the outside of the cylinder, a cover (2) installed on the lower flange (1), and the cover surrounds the outside of the lower coil (3), and the inner circle of the top surface of the shielding top shell (2-4) surrounds the outer wall of the cylinder.

Images