Fine adjustment structure of precision equipment

Abstract

The utility model discloses a fine-tuning structure of precision equipment, which comprises a transverse transmission mechanism, two groups of height adjusting mechanisms and an executive component mounting mechanism, the transverse transmission mechanism comprises two groups of parallel transverse transmission components, the height adjusting mechanisms are respectively arranged on the transverse transmission mechanism, and two ends of the executive component mounting mechanism are arranged on the two groups of height adjusting mechanisms. The height adjusting mechanism comprises a first linear driving assembly, a first inclined block and two sliding assemblies, the first linear driving assembly is arranged on the mounting plate, one end of the first inclined block is connected to the first linear driving assembly, the first inclined block is in a regular trapezoid shape, and the two sliding assemblies are arranged above and below the first inclined block correspondingly; and the mounting plates are mounted on the mounting plate and the executive component mounting mechanism respectively. In the embodiment, the high-precision change of the height of the coating execution component is realized by utilizing the change of the inclined plane when the first inclined block transversely moves, namely the front-back direction is changed into the vertical direction, so that the conversion of the dominant space is facilitated to achieve the conversion of the direction, the equipment volume is effectively reduced, and meanwhile, the adjustment precision is effectively improved.

Description

Technical Field

[0001] This utility model relates to the field of mechanical adjustment technology, specifically to a fine-tuning structure for precision equipment. Background Technology

[0002] In fields such as precision manufacturing, optical instruments, and semiconductor processing, the fine-tuning structure of precision equipment is a core component for achieving high-precision operation, and its performance directly affects the processing accuracy, reliability, and service life of the equipment. For example, in semiconductor chip manufacturing, precision optical component assembly, or high-end machining equipment, the fine-tuning structure needs to adjust the position of the actuators (such as coating actuators, cutting tools, optical lenses, etc.) at the sub-millimeter or even micrometer level to meet process requirements.

[0003] In existing adjustment structures, the adjustment of the actuators is usually achieved by using a screw drive for lifting and lowering. This method is not only inaccurate but also bulky. When process parameters are adjusted or equipment malfunctions, there is a risk of component collision, which can affect equipment lifespan and production safety. Utility Model Content

[0004] To address the shortcomings of existing technologies, this utility model provides a fine-tuning structure for precision equipment, comprising: a transverse transmission mechanism, which includes two sets of parallel transverse transmission components, each set of transverse transmission components having a mounting plate;

[0005] Two height adjustment mechanisms are located on two separate mounting plates; and

[0006] The actuator mounting mechanism has two ends respectively mounted on two sets of height adjustment mechanisms. The actuator mounting mechanism is used to install the paint actuator.

[0007] Each height adjustment mechanism includes a first linear drive assembly, a first inclined block, and two sets of sliding assemblies. The first linear drive assembly is mounted on the mounting plate and is parallel to the transverse transmission assembly. One end of the first inclined block is fixed to the drive end of the first linear drive assembly, and its shape is a regular trapezoid. The two sets of sliding assemblies are respectively located above and below the first inclined block, and are respectively mounted on the mounting plate and one end of the actuator mounting mechanism.

[0008] According to one embodiment of the present invention, the invention is characterized by further comprising two sets of limiting mechanisms, which are disposed on the mounting plate and adjacent to the height adjustment mechanism, located directly below the execution component mounting mechanism, and each set of limiting mechanisms has an abutting block. When the execution component mounting mechanism moves downward, the abutting block moves upward and abuts against the bottom of the execution component mounting mechanism.

[0009] According to one embodiment of the present invention, the limiting mechanism includes a second linear drive assembly and a limiting assembly. The limiting assembly includes a housing, a second inclined block, and an abutment block. The second linear drive assembly and the housing are fixed to a mounting plate. The top surface of the mounting plate has an opening. The second inclined block is slidably disposed inside the housing. Its top surface has a first inclined surface. The second linear drive assembly is drively connected to the second inclined block. One end of the abutment block is located in the housing and has a second inclined surface corresponding to the first inclined surface. Its other end passes through the opening and protrudes outside the housing.

[0010] According to one embodiment of the present invention, the abutting block includes an abutting head and a limiting head. The limiting head is located inside the housing, and a second inclined surface is provided on the bottom surface of the limiting head. One end of the abutting head is connected to the limiting head, and the other end passes through the opening and protrudes outside the housing. The outer diameter of the abutting head cross-section is smaller than the opening diameter, and the outer diameter of the limiting head cross-section is larger than the opening diameter.

[0011] According to one embodiment of the present invention, the first linear drive assembly includes a first drive member and a first transmission assembly. The first transmission assembly includes a coupling and a lead screw assembly. The coupling is installed on the drive end of the first drive member, the lead screw assembly is drivenly connected to the coupling, and the first swash block is drivenly connected to the lead screw assembly.

[0012] According to one embodiment of the present invention, the lead screw assembly includes a first lead screw and two mounting seats, the two mounting seats are arranged facing each other, and each mounting seat is provided with a bearing, the first lead screw is mounted on the two mounting seats and is connected to the bearing for transmission.

[0013] According to one embodiment of the present invention, the lead screw assembly further includes two buffer members, which are respectively disposed on the opposite side of the two mounting seats.

[0014] According to one embodiment of the present invention, the first driving component is a servo motor.

[0015] The beneficial effects of this utility model are as follows: by utilizing the change of the inclined surface when the first inclined block moves laterally, the height of the coating execution component can be changed with high precision, that is, the front-to-back direction is changed to the vertical direction, which is conducive to the conversion of advantageous space to achieve the conversion of direction. This not only effectively reduces the size of the equipment, but also effectively improves the adjustment accuracy. Attached Figure Description

[0016] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0017] Figure 1 This is a schematic diagram of the fine-tuning structure of the precision device in the embodiment;

[0018] Figure 2 for Figure 1 Enlarged view of section A in the middle;

[0019] Figure 3 This is a schematic diagram of the limiting mechanism in the embodiment. Detailed Implementation

[0020] The following drawings will disclose several embodiments of this utility model. For clarity, many practical details will be described in the following description. However, it should be understood that these practical details should not be used to limit this utility model. That is, in some embodiments of this utility model, these practical details are not essential. In addition, for the sake of simplicity, some conventional structures and components will be shown in the drawings in a simple schematic manner.

[0021] Furthermore, in this utility model, the use of terms such as "first" and "second" is for descriptive purposes only and does not specifically refer to any order or sequence, nor is it intended to limit the utility model. They are merely used to distinguish components or operations described with the same technical terms and should not be construed as indicating or implying their relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the technical solutions of various embodiments can be combined with each other, but only if they are feasible for those skilled in the art. If a combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this utility model.

[0022] See Figures 1-3 , Figure 1 This is a schematic diagram of the fine-tuning structure of the precision device in the embodiment. Figure 2 for Figure 1 Enlarged view of part A in the middle. Figure 3 This is a schematic diagram of the limiting mechanism structure in the embodiment. The fine-tuning structure of a precision device in this example includes a horizontal transmission mechanism 1, two sets of height adjustment mechanisms 2, and an actuator mounting mechanism 3. The actuator mounting mechanism 3 is used to mount the coating actuator, the horizontal transmission mechanism 1 is used to adjust the horizontal position of the coating actuator, and the height adjustment mechanism 3 is used to adjust the height of the coating actuator.

[0023] Specifically, the transverse transmission mechanism 1 includes two sets of parallel transverse transmission components 11, each with a mounting plate 111. Two height adjustment mechanisms 2 are respectively mounted on the two mounting plates 111. Each height adjustment mechanism 2 includes a first linear drive component 21, a first inclined block 22, and two sets of sliding components 23. The first linear drive component 21 is mounted on the mounting plate 111 and parallel to the transverse transmission components 11. One end of the first inclined block 22 is fixed to the drive end of the first linear drive component 21, and its shape is a regular trapezoid. The two sets of sliding components 23 are respectively located above and below the first inclined block 22, and are respectively mounted on the mounting plate 111 and one end of the actuator mounting mechanism 3. During operation, the first linear drive component 21 drives the first inclined block 22 to move. The height of the actuator is adjusted by changing the width of the inclined block 22. That is, the height of the paint actuator is changed with high precision by changing the slope of the first inclined block 22, which not only effectively reduces the size of the equipment but also effectively improves the adjustment accuracy.

[0024] Furthermore, it also includes two sets of limiting mechanisms 4, which are located on the mounting plate 111 and adjacent to the height adjustment mechanism 2, directly below the actuator mounting mechanism 3. Each set of limiting mechanisms 4 has an abutment block 423. When the actuator mounting mechanism 3 moves downward, the abutment block 423 moves upward and abuts against the bottom of the actuator mounting mechanism 3.

[0025] The limiting mechanism 4 includes a second linear drive assembly 41 and a limiting assembly 42. The limiting assembly 42 includes a housing 421, a second inclined block 422, and an abutment block 423. The second linear drive assembly 41 and the housing 421 are fixed to the mounting plate 111. The top surface of the mounting plate 111 has an opening 4211. The second inclined block 422 is slidably disposed in the housing 421. Its top surface has a first inclined surface 4221. The second linear drive assembly 41 is connected to the second inclined block 422. One end of the abutment block 423 is located in the housing 421 and has a second inclined surface 4231 corresponding to the first inclined surface 4221. Its other end passes through the opening 4211 and protrudes outside the housing 421. Understandably, when the actuator is adjusted to the specified height, under the drive of the second linear drive assembly 41, the second inclined block 422 moves linearly, causing the first inclined surface 4221 to press against the second inclined surface 4231, which in turn pushes the abutment block 423 upward and abuts against the actuator mounting mechanism 3, thereby forming a hard limit on the actuator mounting mechanism 3, restricting its excessive descent and preventing the components from colliding. In this example, the second linear drive assembly 41 consists of a servo motor (not shown) and a second lead screw 411.

[0026] The abutment block 423 includes an abutment head 4232 and a limiting head 4233. The limiting head 4233 is located inside the housing 421. The second inclined surface 4231 is provided on the bottom surface of the limiting head 4233. One end of the abutment head 4232 is connected to the limiting head 4233, and the other end passes through the opening 4211 and protrudes outside the housing 421. The outer diameter of the cross-section of the abutment head 4232 is smaller than the diameter of the opening 4211, and the outer diameter of the cross-section of the limiting head 4233 is larger than the diameter of the opening 4211, so as to prevent the abutment block from detaching from the housing and ensure the reliability of the limiting.

[0027] Specifically, the first linear drive assembly 21 includes a first drive member 211 and a first transmission assembly 212. The first transmission assembly 212 includes a coupling 2121 and a lead screw assembly 2122. The coupling 2121 is installed at the drive end of the first drive member 211, the lead screw assembly 2122 is drivenly connected to the coupling 2121, and the first wedge block 22 is drivenly connected to the lead screw assembly 2122.

[0028] The lead screw assembly 2122 includes a first lead screw 21221 and two mounting seats 21222. The two mounting seats 21222 are arranged facing each other, and each mounting seat 21222 is provided with a bearing. The first lead screw 21221 is mounted on the two mounting seats 21222 and is connected to the bearing for transmission.

[0029] The lead screw assembly 2122 also includes two buffers 21223, which are respectively disposed on the opposite sides of the two mounting bases 21222. In this example, the first drive component 211 is a servo motor, and the buffer 21223 is a buffer urethane rubber.

[0030] In summary, in this example, the change of the inclined plane during the lateral movement of the first inclined block achieves a high-precision change in the height of the actuator, that is, the front-to-back direction is transformed into the vertical direction. This facilitates the conversion of advantageous space to achieve directional conversion, which not only effectively reduces the size of the equipment, but also effectively improves the adjustment accuracy.

[0031] The above description is merely an embodiment of this utility model and is not intended to limit the scope of this utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principle of this utility model should be included within the scope of the claims of this utility model.

Claims

1. A fine-tuning structure for a precision device, characterized in that, include: A transverse transmission mechanism comprising two sets of parallel transverse transmission components, each set of said transverse transmission components having a mounting plate; Two sets of height adjustment mechanisms are respectively located on the two mounting plates; and An actuator mounting mechanism is provided, with its two ends respectively mounted on two sets of height adjustment mechanisms. The actuator mounting mechanism is used to mount the actuator. Each set of height adjustment mechanisms includes a first linear drive assembly, a first inclined block, and two sets of sliding assemblies. The first linear drive assembly is disposed on the mounting plate and is parallel to the transverse transmission assembly. One end of the first inclined block is fixed to the drive end of the first linear drive assembly, and its shape is a regular trapezoid. The two sets of sliding assemblies are respectively disposed above and below the first inclined block, and are respectively installed on the mounting plate and one end of the actuator mounting mechanism.

2. The fine-tuning structure of the precision equipment according to claim 1, characterized in that, It also includes two sets of limiting mechanisms, which are located on the mounting plate and adjacent to the height adjustment mechanism, directly below the actuator mounting mechanism. Each set of limiting mechanisms has an abutment block. When the actuator mounting mechanism moves downward, the abutment block moves upward and abuts against the bottom of the actuator mounting mechanism.

3. The fine-tuning structure of the precision equipment according to claim 2, characterized in that, The limiting mechanism includes a second linear drive assembly and a limiting assembly. The limiting assembly includes a housing, a second inclined block, and an abutment block. The second linear drive assembly and the housing are fixed to a mounting plate. The top surface of the mounting plate has an opening. The second inclined block is slidably disposed inside the housing. Its top surface has a first inclined surface. The second linear drive assembly is drively connected to the second inclined block. One end of the abutment block is located in the housing and has a second inclined surface corresponding to the first inclined surface. Its other end passes through the opening and protrudes outside the housing.

4. The fine-tuning structure of the precision equipment according to claim 3, characterized in that, The abutting block includes an abutting head and a limiting head. The limiting head is located inside the housing. The second inclined surface is provided on the bottom surface of the limiting head. One end of the abutting head is connected to the limiting head, and the other end passes through the opening and protrudes outside the housing. The outer diameter of the abutting head cross-section is smaller than the opening diameter, and the outer diameter of the limiting head cross-section is larger than the opening diameter.

5. The fine-tuning structure of the precision equipment according to claim 1, characterized in that, The first linear drive assembly includes a first drive member and a first transmission assembly. The first transmission assembly includes a coupling and a lead screw assembly. The coupling is installed on the drive end of the first drive member, the lead screw assembly is drivenly connected to the coupling, and the first swash block is drivenly connected to the lead screw assembly.

6. The fine-tuning structure of the precision equipment according to claim 5, characterized in that, The lead screw assembly includes a first lead screw and two mounting seats. The two mounting seats are arranged facing each other, and each mounting seat is provided with a bearing. The first lead screw is mounted on the two mounting seats and is connected to the bearings for transmission.

7. The fine-tuning structure of the precision equipment according to claim 6, characterized in that, The lead screw assembly also includes two buffer components, which are respectively located on the opposite side of the two mounting seats.

8. The fine-tuning structure of the precision equipment according to claim 5, characterized in that, The first driving component is a servo motor.

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