Wafer slice flatness visual detection device

Abstract

The utility model relates to the technical field of semiconductor manufacturing, and discloses a wafer slice flatness visual detection device which comprises a cabinet, a semiconductor wafer tray is arranged at the top of the cabinet, longitudinal sliding rails are arranged on the adjacent sides of the semiconductor wafer tray, two sets of sliding seats are sequentially arranged on the longitudinal sliding rails from top to bottom, and the two sets of sliding seats are arranged on the cabinet. The two groups of sliding seats are respectively provided with a longitudinal visual camera seat and a longitudinal optical filter frame and are connected with the longitudinal sliding rail in a sliding manner, and a longitudinal visual camera is arranged on the longitudinal visual camera seat. The longitudinal sliding rail and the transverse sliding rail are matched with the longitudinal vision camera and the transverse vision camera, comprehensive flatness detection of the wafer slices in the longitudinal direction and the transverse direction can be achieved, and the detection accuracy and efficiency are improved. And meanwhile, the position of the camera can be flexibly changed through adjustment of the manual screw module I and the manual screw module II, so that accurate detection of different positions of the wafer slices is realized, and the detection accuracy is further improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, specifically to a visual inspection device for wafer slice flatness. Background Technology

[0002] In semiconductor manufacturing, the flatness of wafer slicing has a decisive impact on the quality of subsequent processes. Poor wafer flatness can lead to deviations in critical process steps such as photolithography and etching, thereby affecting the performance and production yield of the final chip. Traditionally, flatness inspection mainly relies on contact measurement tools, such as probe gauges. Although these tools offer high measurement accuracy, they suffer from drawbacks such as slow inspection speed, potential damage to the wafer surface, and difficulty in achieving fully automated inspection. With the advancement of machine vision technology, non-contact visual inspection methods have begun to be applied to wafer flatness inspection.

[0003] However, current visual inspection equipment typically only performs inspections from a single viewpoint (e.g., only from above or the side), which limits their ability to comprehensively assess wafer slice flatness and surface quality. Furthermore, existing equipment lacks the flexibility to adapt to wafer slices of different sizes, leading to reduced inspection efficiency.

[0004] Therefore, based on the above-mentioned technical problems, it is necessary for those skilled in the art to develop a visual inspection device for wafer slice flatness. Utility Model Content

[0005] The purpose of this invention is to provide a visual inspection device for wafer slice flatness to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] A technical solution for a wafer slicing flatness visual inspection device includes a cabinet. A semiconductor wafer tray is provided on the top of the cabinet. A longitudinal slide rail is provided on the adjacent side of the semiconductor wafer tray. Two sets of slide blocks are arranged sequentially from top to bottom on the longitudinal slide rail. A longitudinal vision camera mount and a longitudinal filter holder are respectively mounted on the two sets of slide blocks and slidably connected to the longitudinal slide rail. A longitudinal vision camera is mounted on the longitudinal vision camera mount. A longitudinal filter is mounted on the longitudinal filter holder. A transverse slide rail is provided on the adjacent side of the semiconductor wafer tray. Two sets of slide blocks are slidably connected on the transverse slide rail. A manual screw module one and a manual screw module two are respectively provided on the two sets of slide blocks. A movable end is provided on the manual screw module one and connected to the movable end. A transverse vision camera mount is installed on the movable end. A transverse filter holder is installed on the transverse filter holder. A transverse filter is installed on the transverse filter holder.

[0008] As a preferred technical solution, both the slide blocks on the longitudinal slide rail and the slide blocks on the transverse slide rail are equipped with locking bolts.

[0009] As a preferred technical solution, the cabinet has a door on the front, and the door is movably connected to the cabinet via hinges.

[0010] As a preferred technical solution, the longitudinal vision camera is used to detect the longitudinal flatness of the wafer slice, and the transverse vision camera is used to detect the transverse flatness of the wafer slice. By adjusting the manual screw module one and the manual screw module two, accurate detection of different positions of the wafer slice can be achieved.

[0011] As a preferred technical solution, a support rod is installed on the top of the cabinet, and a display screen is installed on the support rod.

[0012] Compared with the prior art, the beneficial effects of this utility model are:

[0013] This invention relates to a visual inspection device for wafer slice flatness. The device features longitudinal and transverse slide rails, working in conjunction with a longitudinal vision camera and a transverse vision camera to achieve comprehensive flatness inspection of wafer slices in both the longitudinal and transverse directions, improving inspection accuracy and efficiency. Furthermore, by adjusting manual screw modules one and two, the camera position can be flexibly changed, enabling precise inspection of different locations on the wafer slice, further enhancing inspection accuracy. In addition, the locking bolt ensures the stability of the slide during inspection, preventing inspection errors caused by slide movement. The cabinet door design on the front of the unit not only facilitates maintenance and repair for operators but also ensures the overall aesthetics of the inspection device. The display screen allows for intuitive display of inspection results, facilitating observation and analysis by operators. This invention has advantages such as simple structure, convenient operation, high inspection accuracy, and strong applicability. Attached Figure Description

[0014] Figure 1 A schematic diagram of the front structure of a visual inspection device for wafer slice flatness;

[0015] Figure 2 A schematic diagram of a three-dimensional structure of a visual inspection device for wafer slice flatness;

[0016] Figure 3 This is a schematic diagram of the isometric structure of a visual inspection device for wafer slice flatness.

[0017] In the attached diagram, the following are the reference numerals: 1. Cabinet; 11. Cabinet door; 12. Support rod; 13. Display screen; 21. Vertical slide rail; 22. Vertical filter holder; 23. Vertical filter; 24. Vertical vision camera mount; 25. Vertical vision camera; 26. Locking bolt; 31. Horizontal slide rail; 32. Manual screw module one; 33. Manual screw module two; 34. Horizontal vision camera mount; 35. Horizontal vision camera; 36. Horizontal filter holder; 37. Horizontal filter; 4. Semiconductor wafer tray. Detailed Implementation

[0018] The features and exemplary embodiments of various aspects of this utility model will now be described in detail. To make the objectives, technical solutions, and advantages of this utility model clearer, the following description, in conjunction with the accompanying drawings and specific embodiments, will provide a further detailed description. For those skilled in the art, this utility model can be implemented without some of these specific details. The following description of the embodiments is merely intended to provide a better understanding of this utility model by illustrating examples.

[0019] like Figure 1 , Figure 2 and Figure 3 As shown, this utility model provides a technical solution for a wafer slice flatness visual inspection device: it includes a cabinet 1, and a semiconductor wafer tray 4 is provided on the top of the cabinet 1. The wafer tray 4 is used to place the wafer slice to be inspected. A longitudinal slide rail 21 is provided on the adjacent sides of the wafer tray 4, and two sets of slide blocks are arranged sequentially from top to bottom on the longitudinal slide rail 21. A longitudinal vision camera mount 24 and a longitudinal filter holder 22 are respectively installed on each set of slide blocks and are slidably connected to the longitudinal slide rail 21. A longitudinal vision camera 25 is installed on the longitudinal vision camera mount 24 for longitudinal flatness inspection of the wafer slice. A longitudinal filter 23 is installed on the longitudinal filter holder 22 for optimizing the camera's shooting effect.

[0020] The wafer tray 4 is also provided with a horizontal slide rail 31 on the adjacent side, and two sets of slide blocks are slidably connected on the horizontal slide rail 31. Each set of slide blocks is provided with a manual screw module 1 32 and a manual screw module 2 33 respectively.

[0021] The manual screw module 32 is equipped with a moving end, which is connected to a lateral vision camera mount 34. A lateral vision camera 35 is mounted on the lateral vision camera mount 34 for detecting the lateral flatness of the wafer slice.

[0022] The manual screw module 2 33 is equipped with a moving end, which is connected to a transverse filter holder 36, and a transverse filter 37 is installed on the transverse filter holder 36.

[0023] Both the slide blocks on the longitudinal slide rail and the slide blocks on the transverse slide rail are equipped with locking bolts 26, which are used to lock the position of the slide blocks during the testing process to ensure the stability of the testing.

[0024] The front of the cabinet 1 is provided with a cabinet door 11, which is movably connected to the cabinet 1 by hinges, making it convenient for operators to perform maintenance and repair.

[0025] A support rod 12 is installed on the top of the cabinet 1, and a display screen 13 is installed on the support rod 12 to intuitively display the test results, making it convenient for operators to observe and analyze.

[0026] This novel wafer slab flatness visual inspection device enables comprehensive flatness inspection of wafer slabs in both longitudinal and transverse directions, improving inspection accuracy and efficiency. Simultaneously, by adjusting manual screw modules one and two, the camera position can be flexibly changed, achieving precise inspection of different locations on the wafer slab and further enhancing inspection accuracy. The locking bolt ensures the stability of the slide during inspection, avoiding inspection errors caused by slide movement. The cabinet door design on the front of the unit not only facilitates maintenance and repair for operators but also ensures the overall aesthetics of the inspection device. The display screen allows for intuitive display of inspection results, facilitating observation and analysis by operators.

[0027] The working principle and usage process of this utility model: After assembling the various components of this solution in sequence, work according to the above implementation methods according to actual needs to complete all working steps.

[0028] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

[0029] In the description of this utility model, it should be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "other end", "upper", "side", "top", "inner", "front", "center", "both ends", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0030] In this utility model, unless otherwise explicitly specified and limited, the terms "installation", "setting", "connection", "fixing", "screw connection", etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal connection of two components or the interaction between two components. Unless otherwise explicitly limited, those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0031] The embodiments described above are not exhaustive, nor do they limit the invention to specific implementations. Clearly, many modifications and variations can be made based on the above description. These embodiments are selected and specifically described in this specification to better explain the principles and practical applications of the invention, enabling those skilled in the art to effectively utilize the invention and its modifications. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the invention should be included within the protection scope of the invention.

Claims

1. A visual inspection device for wafer slice flatness, characterized in that, The system includes a cabinet (1), on the top of which is a semiconductor wafer tray (4). A longitudinal slide rail (21) is provided on the adjacent side of the semiconductor wafer tray (4). Two sets of slide blocks are arranged sequentially from top to bottom on the longitudinal slide rail (21), and each set of slide blocks is respectively equipped with a longitudinal vision camera mount (24) and a longitudinal filter holder (22), and is slidably connected to the longitudinal slide rail (21). A longitudinal vision camera (25) is mounted on the longitudinal vision camera mount (24), and a longitudinal filter (23) is mounted on the longitudinal filter holder (22). The semiconductor wafer tray (4) is located on the adjacent side... A horizontal slide rail (31) is provided, and two sets of slide blocks are slidably connected on the horizontal slide rail (31). Manual screw module one (32) and manual screw module two (33) are respectively provided on the two sets of slide blocks. The manual screw module one (32) is provided with a moving end, and the moving end is connected to a horizontal vision camera mount (34). A horizontal vision camera (35) is installed on the horizontal vision camera mount (34). The manual screw module two (33) is provided with a moving end, and the moving end is connected to a horizontal filter holder (36). A horizontal filter (37) is installed on the horizontal filter holder (36).

2. The wafer slice flatness visual inspection device according to claim 1, characterized in that: The slides on the longitudinal slide rail (21) and the slides on the transverse slide rail (31) are both equipped with locking bolts (26).

3. The wafer slice flatness visual inspection device according to claim 1, characterized in that: The cabinet (1) has a cabinet door (11) on the front, and the cabinet door (11) is movably connected to the cabinet (1) by a hinge.

4. The wafer slice flatness visual inspection device according to claim 1, characterized in that: The longitudinal vision camera (25) is used to detect the longitudinal flatness of the wafer slice, and the transverse vision camera (35) is used to detect the transverse flatness of the wafer slice. By adjusting the manual screw module one (32) and the manual screw module two (33), accurate detection of different positions of the wafer slice can be achieved.

5. The wafer slice flatness visual inspection device according to claim 1, characterized in that: The top of the cabinet (1) is equipped with a support rod (12), and a display screen (13) is installed on the support rod (12).

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