Driving mechanism, coupling detection assembly and semiconductor device processing equipment

Abstract

The utility model discloses a driving mechanism, a coupling detection assembly and semiconductor device processing equipment, and the driving mechanism comprises a motor fixed on a mounting seat, and the motor is connected with a rotating shaft or a lead screw through a coupling. A looseness detection assembly used for detecting whether locking screws at hubs of the coupler are loosened or not is arranged on the installation base, and the looseness detection assembly comprises two detection sensors corresponding to the two hubs of the coupler respectively. According to the structure disclosed by the utility model, the two detection sensors are arranged on the mounting seat to respectively detect the change conditions of the edges of the two hubs, in the locking state, of the coupler, and when the sensors detect the edges of the hubs, it is confirmed that the locking screws are loosened; therefore, the loosening condition of the coupler can be found in time and prompted or stopped, and the problem that the loosening condition of the coupler is difficult to find can be effectively solved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor device processing, and in particular to drive mechanisms, coupling detection components, and semiconductor device processing equipment. Background Technology

[0002] In the field of semiconductor device processing, such as wafer and panel manufacturing, dicing machines and thinning machines are commonly used processing equipment.

[0003] In these processing equipment, such as the dicing machine disclosed in authorization announcement number CN219114444U and the thinning machine authorized in authorization announcement number CN220660208U, a linear motion mechanism consisting of a motor and a lead screw is used to achieve various linear movements. The motor needs to be connected to the lead screw through a coupling.

[0004] During equipment operation, the coupling may experience misalignment between the lead screw rotation and the motor shaft rotation due to loose locking screws or fatigue failure. This affects the positional accuracy of the lead screw-driven cutter and grinding wheel, thus impacting machining quality. Current technology lacks monitoring of these coupling connection conditions, preventing companies from promptly detecting coupling abnormalities. Utility Model Content

[0005] The purpose of this invention is to solve the above-mentioned problems in the prior art and to provide a drive mechanism, a coupling detection component, and a semiconductor device processing equipment.

[0006] The objective of this utility model is achieved through the following technical solution:

[0007] The drive mechanism includes a motor fixed on a mounting base, the motor being connected to a rotating shaft or lead screw via a coupling. The mounting base is provided with a loosening detection component for detecting whether the locking screws at the hubs of the coupling are loose. The loosening detection component includes two detection sensors corresponding to the two hubs of the coupling, respectively.

[0008] Preferably, in the drive mechanism, the mounting base includes a mounting plate for mounting the motor, the mounting plate is provided with a through hole for the motor shaft to pass through, a sensor mounting plate is provided on one side of the mounting plate, the sensor mounting plate includes two support plates located on both sides of the coupling, and two detection sensors are provided on the two support plates, the detection sensors are through-beam sensors or self-reflective sensors and reflectors.

[0009] Preferably, in the drive mechanism, the support plate is provided with mounting holes whose axes are perpendicular to both the axis of the support plate and the axis of the coupling, for mounting the detection sensor.

[0010] Preferably, in the driving mechanism, the mounting hole is a round hole, and the support plate is also provided with a set screw hole that is perpendicularly connected to the mounting hole.

[0011] Preferably, in the drive mechanism, the mounting hole is an elongated hole, and the length direction of the elongated hole is perpendicular to the axis of the coupling.

[0012] Preferably, in the drive mechanism, the sensor mounting plate is further provided with a fatigue detection device for detecting the consistency between the number of rotations of the coupling and the number of rotations of the motor shaft.

[0013] Preferably, in the driving mechanism, the fatigue detection device is a visual detection device and / or a proximity sensor and / or a distance sensor.

[0014] Preferably, in the driving mechanism, the fatigue detection device uses a CCD for image acquisition, and the sensor mounting plate is provided with a light source located on the same side as the CCD.

[0015] A coupling detection assembly includes a mounting base disposed on the outer periphery of the coupling. The mounting base is provided with a loosening detection component for detecting whether the locking screws of the coupling hubs are loose. The loosening detection component includes two detection sensors corresponding to the two hubs of the coupling, respectively.

[0016] Semiconductor device processing equipment, including any of the drive mechanisms described above.

[0017] The advantages of this utility model's technical solution are mainly reflected in:

[0018] In the structure disclosed in this utility model, two detection sensors are set on the mounting base to detect the changes in the edges of the two hubs of the coupling in the locked state. When the sensor detects the edge of the hub, it confirms that there is a problem of loose locking screws. Thus, the loosening of the coupling can be detected in time and prompts or shutdowns can be carried out, which can effectively solve the problem of difficulty in detecting loose couplings.

[0019] The structure of this utility model also includes a rotation count detection device, which can detect the number of rotations of the hub and compare it with the number of rotations of the motor shaft to determine whether the coupling is fatigued, and can detect abnormalities in a timely manner for handling. Attached Figure Description

[0020] Figure 1 This is a first-view perspective perspective view of the drive mechanism in this utility model;

[0021] Figure 2 This is a second-view perspective perspective view of the drive mechanism of this utility model;

[0022] Figure 3This is a schematic diagram showing the positional relationship between the detection light beam of the through-beam sensor of this utility model and the wheel hub. Detailed Implementation

[0023] The purpose, advantages, and features of this utility model will be illustrated and explained through the following non-limiting description of preferred embodiments. These embodiments are merely typical examples of applying the technical solutions of this utility model, and all technical solutions formed by equivalent substitutions or equivalent transformations fall within the scope of protection claimed by this utility model.

[0024] In the description of the solution, it should be noted that the terms "center," "upper," "lower," "left," "right," "front," "rear," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience and simplification of description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0025] Example 1

[0026] The driving mechanism disclosed in this utility model will now be described in conjunction with the accompanying drawings, as shown below. Figure 1 Appendix Figure 2 As shown, it includes a motor 200 fixed on a mounting base 100. The motor 200 is connected to a rotating shaft or a lead screw 400 via a coupling 300. The mounting base 100 is provided with a loosening detection component for detecting whether the locking screw 320 at the hub 310 of the coupling 300 is loose. The loosening detection component includes two detection sensors corresponding to the two hubs 310 of the coupling 300, respectively.

[0027] Specifically, the detection sensor can be a through-beam sensor or a self-reflective sensor and a reflector. Taking a through-beam sensor as an example, see attached... Figure 1 -Appendix Figure 3 As shown, it includes a transmitter 500 and a receiver 600. When the hub 310 of the coupling 300 is locked to the motor shaft and the screw or rotating shaft of the lead screw 400 by the locking screw 320, the detection light 510 emitted by the transmitter 500 is close to or tangential to the edge of the outer peripheral surface of the hub 310. At this time, the detection light emitted by the transmitter 500 can be received by the receiver 600. When the locking screw 320 is loosened, the outer peripheral surface of the hub 310 will expand outward due to the locking, thereby blocking the detection light emitted by the transmitter 500. At this time, the receiver 600 cannot receive the detection light, thus confirming that the locking screw 320 is loose. Correspondingly, the control device can control the motor 200 to stop rotating or issue an alarm to remind manual handling.

[0028] The specific installation position of the detection sensor on the mounting base 100 can be determined as needed, as shown in the attached figure. Figure 3 As shown, the two detection sensors are located near the upper edge of the hub 310.

[0029] To facilitate the installation of the detection sensors, the mounting base 100 includes a mounting plate 110 for mounting the motor 200. The mounting plate 110 has a through hole for the motor shaft to pass through. A sensor mounting plate 120 is provided on one side of the mounting plate 110. To facilitate the assembly of the coupling 300, the sensor mounting plate 120 is U-shaped. The sensor mounting plate 120 includes two support plates 121 located on both sides of the coupling 300. Two detection sensors are mounted on the two support plates 121. Mounting holes 122 with axes perpendicular to the axes of the support plates 121 and the coupling 300 are provided on the support plates 121 to mount the transmitter and receiver of the detection sensors.

[0030] The shape and type of the mounting hole 122 can be designed as needed, for example, in one embodiment, as shown in the attached figure. Figure 2 As shown, the mounting hole 122 is a circular hole. The transmitter and receiver of the through-beam sensor have external threads on their outer peripheries, and they can be fixed to the support plate 121 by two locking nuts 900 screwed onto them. The locking nuts are relatively thin. Of course, the circular hole can also be a threaded hole, so that the transmitter and receiver can be directly threaded to the threaded hole. Furthermore, in order to ensure the stability of the through-beam sensor installation, a set screw hole 123 is also provided on the support plate 121, which is perpendicular to the mounting hole 122. The transmitter and receiver at the mounting hole 122 are fixed by the set screw connected to the set screw hole 123.

[0031] In another embodiment, to facilitate adjustment of the mounting position of the through-beam sensor according to the position of the outer periphery of the hub 310 of the coupling 300, as shown in the attached... Figure 3 As shown, the mounting hole 122 is an elongated hole, the length of which is perpendicular to the axis of the coupling 300. For example, when the U-shaped opening of the sensor mounting plate 120 faces downwards or upwards, the elongated hole extends vertically, allowing the through-beam sensor to be adjusted vertically; when the U-shaped opening of the sensor mounting plate 120 faces sideways, the elongated hole extends horizontally, allowing the through-beam sensor to be adjusted horizontally. In this case, the transmitter and receiver of the through-beam sensor also have external threads on their outer peripheries, and they are also fixed to the support plate 121 by two locking nuts threaded onto them.

[0032] Furthermore, the sensor mounting plate 120 is also provided with a fatigue detection device for detecting the consistency between the number of rotations of the coupling and the number of rotations of the motor shaft. The fatigue detection device is located below the detection sensor and can correspond to one of the two hubs 310. Preferably, the fatigue detection device corresponds to the hub 310 of the lead screw 400 or the shaft. The rotation count detection sensor can be a visual inspection device and / or a proximity sensor and / or a distance sensor.

[0033] When a proximity sensor is used, a protrusion can be provided on the outer circumferential surface of the hub 310. The proximity sensor can detect the protrusion but cannot detect other parts of the outer circumferential surface of the hub 310. When the motor is in the initial position, the proximity sensor detects the protrusion. Subsequently, with each rotation of the motor shaft, it can be determined whether the proximity sensor detects the protrusion again or whether the difference between the time of one rotation of the motor shaft and the time of one rotation of the coupling determined by the proximity sensor is within a threshold range. The time interval between two consecutive detections of the protrusion by the proximity sensor is the time of one rotation of the coupling. If the proximity sensor detects the protrusion again after one rotation of the motor shaft, or if the difference between the time of one rotation of the motor shaft and the time of one rotation of the coupling is within the threshold range, then it is determined that the number of rotations of the coupling and the number of rotations of the motor shaft are consistent, and the coupling is normal; otherwise, it is determined that the coupling has fatigue failure.

[0034] When using a distance sensor, protrusions or grooves can be provided on the outer circumferential surface of the hub 310, or the original notch on the hub 310 can be used directly. The detection value when the distance sensor detects the protrusion, groove, or notch will show a sudden change compared to the detection value when it detects the outer circumferential surface of the hub 310. Therefore, whether the coupling has rotated one revolution can be determined based on whether the detection value of the distance sensor changes abruptly, or the time interval between two consecutive changes in detection value can be determined based on the duration of one revolution of the coupling. The specific principle for determining whether the coupling 300 has fatigue failure can refer to the principle of detection using a proximity sensor described above, and will not be elaborated here.

[0035] When using a visual inspection device, a CCD (charge-coupled device) 700 is preferably used for image acquisition. A light source 800 is provided on the sensor mounting plate 120, located on the same side as the CCD. The support plate has clearance holes corresponding to the light source and the CCD. Furthermore, a feature portion 311 also needs to be provided on the outer circumferential surface of the hub 310.

[0036] During testing, the motor is in its initial position so that the feature parts on the hub are directly facing the CCD, and the hub image at this time is acquired as a standard image. Subsequently, after the motor starts, the CCD is controlled to acquire an image every time the motor shaft rotates once, and the acquired image is compared with the standard image to determine whether the position of the feature parts on the acquired image is consistent with the position of the feature parts on the standard image or whether the position difference meets the requirements. If they are inconsistent or the position difference does not meet the requirements, it can be determined that the coupling 300 is fatigued.

[0037] Example 2

[0038] This embodiment discloses a coupling 300 detection assembly, including a mounting base 100 disposed on the outer periphery of the coupling 300. The mounting base 100 is provided with a loosening detection assembly for detecting whether the locking screw 320 of the hub 310 of the coupling 300 is loose. The loosening detection assembly includes two detection sensors corresponding to the two hubs 310 of the coupling 300 respectively.

[0039] Example 3

[0040] This embodiment discloses a semiconductor device processing apparatus, including the drive mechanism described above.

[0041] This utility model has many other embodiments. All technical solutions formed by equivalent transformation or equivalent transformation fall within the protection scope of this utility model.

Claims

1. A drive mechanism, comprising a motor fixed on a mounting base, the motor being connected to a rotating shaft or a lead screw via a coupling, characterized in that: The mounting base is equipped with a loosening detection component for detecting whether the locking screws at the hub of the coupling are loose. The loosening detection component includes two detection sensors corresponding to the two hubs of the coupling, respectively.

2. The driving mechanism according to claim 1, characterized in that: The mounting base includes a mounting plate for mounting a motor. The mounting plate has a through hole through which the motor shaft passes. A sensor mounting plate is provided on one side of the mounting plate. The sensor mounting plate includes two support plates located on both sides of the coupling. Two detection sensors are provided on the two support plates. The detection sensors are through-beam sensors or self-reflective sensors and reflectors.

3. The driving mechanism according to claim 2, characterized in that: The support plate is provided with mounting holes whose axes are perpendicular to both the support plate and the coupling axis, for mounting the detection sensor.

4. The driving mechanism according to claim 3, characterized in that: The mounting hole is a round hole, and the support plate is also provided with a set screw hole that is perpendicularly connected to the mounting hole.

5. The driving mechanism according to claim 3, characterized in that: The mounting hole is an elongated hole, and the length direction of the elongated hole is perpendicular to the axis of the coupling.

6. The driving mechanism according to claim 2, characterized in that: The sensor mounting plate is also equipped with a fatigue detection device for detecting the consistency between the number of rotations of the coupling and the number of rotations of the motor shaft.

7. The driving mechanism according to claim 6, characterized in that: The fatigue detection device is a visual detection device and / or a proximity sensor and / or a distance sensor.

8. The driving mechanism according to claim 7, characterized in that: The fatigue detection device uses a CCD for image acquisition, and a light source located on the same side as the CCD is provided on the sensor mounting plate.

9. A coupling detection assembly, comprising a mounting base disposed on the outer periphery of the coupling, characterized in that: The mounting base is equipped with a loosening detection component for detecting whether the locking screws of the coupling hub are loose. The loosening detection component includes two detection sensors corresponding to the two hubs of the coupling, respectively.

10. Semiconductor device processing equipment, characterized in that: Includes the drive mechanism as described in any one of claims 1-8.

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