Ventilation device and cleaning equipment

Abstract

The utility model discloses a ventilation device and cleaning equipment, and the ventilation device comprises a first ventilation plate which is provided with a plurality of first ventilation holes, and the plurality of first ventilation holes are arranged at intervals; the second ventilation plate is provided with a plurality of second ventilation holes, and the plurality of second ventilation holes are in one-to-one correspondence with the plurality of first ventilation holes; and the driving part is in transmission connection with the second ventilation plate, and the driving part drives the second ventilation plate to move relative to the first ventilation plate, so that the second ventilation holes are aligned with or staggered from the corresponding first ventilation holes. According to the embodiment of the utility model, the ventilation degree can be conveniently adjusted according to ventilation requirements, and the ventilation effect and the cleaning effect are guaranteed.

Description

Technical Field

[0001] This utility model relates to the field of new energy processing technology, and in particular to a ventilation device and a cleaning equipment. Background Technology

[0002] During wafer cleaning, ventilation and other operations are typically required to prevent the accumulation of acid and alkali vapors and hydrogen gas, thereby reducing the risk of corrosion and combustion. However, continuous high-power ventilation can negatively impact cleaning effectiveness. Therefore, how to adjust the ventilation level to meet both ventilation requirements and cleaning results is a pressing issue that needs to be addressed. Utility Model Content

[0003] This utility model provides a ventilation device and a cleaning equipment, which can conveniently adjust the ventilation level according to ventilation needs to ensure ventilation and cleaning effects.

[0004] The ventilation device proposed in this utility model includes: a first ventilation plate, the first ventilation plate having a plurality of first ventilation holes, the plurality of first ventilation holes being spaced apart;

[0005] The second ventilation plate is provided with a plurality of second ventilation holes, and the plurality of second ventilation holes correspond one-to-one with the plurality of first ventilation holes;

[0006] A driving component is connected to the second ventilation plate in a transmission manner. The driving component drives the second ventilation plate to move relative to the first ventilation plate, so that the second ventilation hole is aligned with or offset from the corresponding first ventilation hole.

[0007] Optionally, the ventilation device further includes a side sealing plate, which is connected to the first ventilation plate. The first ventilation plate and the side sealing plate form a ventilation channel, and the second ventilation plate and the driving component are located within the ventilation channel.

[0008] Optionally, the ventilation device further includes a guide member disposed on the first ventilation plate, the guide member being used to guide the second ventilation plate to move relative to the first ventilation plate.

[0009] Optionally, the guide includes two limiting members, which are respectively located on both sides of the second ventilation plate. Each limiting member is provided with a limiting groove, and both ends of the second ventilation plate are respectively accommodated in the limiting grooves of the two limiting members.

[0010] Optionally, the driving member drives the second ventilation plate to move along a first direction, and the ventilation device includes a plurality of guide members arranged sequentially along the first direction.

[0011] Optionally, the ventilation device further includes an upper sealing plate and an exhaust valve. The upper sealing plate is located at one end of the ventilation channel, and the exhaust valve is located on the upper sealing plate and communicates with the ventilation channel.

[0012] Optionally, along the second direction, the spacing between the plurality of first ventilation holes gradually decreases, and the spacing between the plurality of second ventilation holes gradually decreases along with the spacing between the corresponding first ventilation holes.

[0013] Optionally, the driving component includes a power component and a transmission component, the power component is disposed on the first ventilation plate, and the transmission component connects the output end of the power component and the second ventilation plate.

[0014] Optionally, the ventilation device further includes a hydrogen detector, which is electrically connected to the drive unit.

[0015] This utility model also proposes a cleaning device, including a ventilation device as described in any of the above embodiments.

[0016] The ventilation device and cleaning equipment provided in this embodiment of the utility model have a driving component that can drive the second ventilation plate to move so that the second ventilation hole is aligned with or offset from the corresponding first ventilation hole. When the second ventilation hole is aligned with the corresponding first ventilation hole, the hole size for ventilation is larger, which facilitates rapid ventilation and air exchange. When the second ventilation hole is offset from the corresponding first ventilation hole, the hole size for ventilation is smaller, which reduces the impact on production during ventilation and air exchange. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the structure of an embodiment of the ventilation device of this utility model;

[0019] Figure 2 This is a schematic diagram of another embodiment of the ventilation device of this utility model;

[0020] Figure 3 for Figure 2 A magnified view of a section at point A in the middle;

[0021] Figure 4 for Figure 1 A magnified view of a section at point B in the middle;

[0022] Figure 5This is a schematic diagram of another embodiment of the ventilation device of this utility model;

[0023] Figure 6 for Figure 5 A magnified view of a section at point C;

[0024] Explanation of icon numbers:

[0025] Ventilation device 100;

[0026] First ventilation panel 10, first ventilation hole 11;

[0027] Second ventilation panel 20, second ventilation hole 21;

[0028] Drive component 30, power component 31, transmission component 33;

[0029] Side sealing plate 40;

[0030] Ventilation passage 45;

[0031] Guide component 50, limiting component 51, limiting groove 511;

[0032] Top sealing plate 60;

[0033] Exhaust valve 70;

[0034] Hydrogen detector 80.

[0035] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0036] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0037] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0038] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0039] It should be understood that the term "and / or" as used in this specification and the appended claims refers to any combination of one or more of the associated listed items and all possible combinations, and includes such combinations.

[0040] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0041] Please see Figures 1 to 3 This utility model provides a ventilation device 100, including a first ventilation plate 10, a second ventilation plate 20, and a driving member 30. The first ventilation plate 10 has a plurality of first ventilation holes 11, which are spaced apart. The second ventilation plate 20 has a plurality of second ventilation holes 21, which correspond one-to-one with the plurality of first ventilation holes 11. The driving member 30 is driven to the second ventilation plate 20, and drives the second ventilation plate 20 to move relative to the first ventilation plate 10, so that the second ventilation holes 21 are aligned with or offset from the corresponding first ventilation holes 11.

[0042] In this embodiment of the present invention, the driving member 30 can drive the second ventilation plate 20 to move so that the second ventilation hole 21 is aligned with or offset from the corresponding first ventilation hole 11. When the second ventilation hole 21 is aligned with the corresponding first ventilation hole 11, the hole size for ventilation is larger, which facilitates rapid ventilation. When the second ventilation hole 21 is offset from the corresponding first ventilation hole 11, the hole size for ventilation is smaller, which reduces the impact on production during ventilation.

[0043] Understandably, the ventilation device 100 may also include an air intake structure, which drives the gas to exit through the first ventilation hole 11 and the second ventilation hole 21 to achieve ventilation. Understandably, during the cleaning process, the ventilation device 100 needs to promptly extract and exhaust acid and alkali vapors and hydrogen to reduce corrosion hazards and combustion risks. However, during the extraction and exhaust process, the airflow driven by the ventilation device 100 may affect the cleaning effect. Therefore, the ventilation device 100 needs to reduce ventilation when the danger is low to minimize the impact on the cleaning process. That is, it needs to be able to adjust the ventilation volume of the ventilation device 100 to ensure the exhaust of acid and alkali vapors and hydrogen while also reducing the impact on the cleaning effect.

[0044] It is understood that the first ventilation plate 10 may have 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, or 20 first ventilation holes 11. The number of first ventilation holes 11 can be adjusted according to ventilation needs, and this application does not impose specific limitations. There are many ways to arrange the first ventilation holes 11. The first ventilation holes 11 can be arranged linearly or unevenly. The arrangement of the first ventilation holes 11 can be adjusted according to ventilation needs, and this application does not impose specific limitations.

[0045] It is understandable that the first ventilation hole 11 can have many shapes, such as circular, rectangular, or elliptical. In one embodiment, the first ventilation hole 11 is an oblong hole. This is because the manufacturing technology is relatively mature, and the elongated hole can provide good ventilation. It is also understandable that multiple first ventilation holes 11 can have the same shape, or they can have different shapes, or their shapes can be partially the same and partially different; this application does not impose specific limitations.

[0046] Understandably, the second ventilation plate 20 may have 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, or 20 second ventilation holes 21. The number of second ventilation holes 21 can be adjusted according to ventilation needs, and this application does not impose specific limitations. There are many ways to arrange the second ventilation holes 21; they can be arranged linearly or unevenly. The arrangement of the second ventilation holes 21 can be adjusted according to ventilation needs, and this application does not impose specific limitations.

[0047] It is understood that the shape of the second ventilation hole 21 can be the same as the shape of the first ventilation hole 11, or the shape of the second ventilation hole 21 can be different from the shape of the first ventilation hole 11. This application does not impose specific limitations. Multiple second ventilation holes 21 can have the same shape, multiple second ventilation holes 21 can have different shapes, and multiple second ventilation holes 21 can have partially the same shape and partially different shapes. This application does not impose specific limitations.

[0048] It is understood that the first ventilation hole 11 and the second ventilation hole 21 can correspond one-to-one, or multiple second ventilation holes 21 can correspond to one first ventilation hole 11, or one second ventilation hole 21 can correspond to multiple first ventilation holes 11; this application does not impose specific limitations. It is understood that when the first ventilation hole 11 and the second ventilation hole 21 are aligned, the corresponding first ventilation hole 11 and the second ventilation hole 21 are connected; when the first ventilation hole 11 and the second ventilation hole 21 are misaligned, the projection directions of the corresponding first ventilation hole 11 and the second ventilation hole 21 partially overlap or are spaced apart. It is understood that when the corresponding first ventilation hole 11 and the second ventilation hole 21 are misaligned, the non-corresponding first ventilation holes 11 and second ventilation holes 21 maintain a projection interval.

[0049] It is worth noting that the second ventilation hole 21 is offset from the first ventilation hole 11. This can mean that the second ventilation hole 21 and the first ventilation hole 11 partially overlap along the projection direction, or that the second ventilation hole 21 and the first ventilation hole 11 are spaced apart along the projection direction. The meaning of the second ventilation hole 21 and the first ventilation hole 11 being overlapped is that the second ventilation hole 21 and the first ventilation hole 11 are aligned along the projection direction.

[0050] In one embodiment, the first ventilation hole 11 corresponds one-to-one with the second ventilation hole 21, and the shape and size of the second ventilation hole 21 are the same as those of the corresponding first ventilation hole 11. Thus, when the second ventilation hole 21 is aligned with the first ventilation hole 11, the first ventilation hole 11 can overlap with the second ventilation hole 21, achieving a better ventilation effect.

[0051] It is understandable that the driving component 30 can drive the second ventilation plate 20 to move in the vertical direction, the driving component 30 can also drive the second ventilation plate 20 to move in the horizontal direction, and the driving component 30 can also drive the second ventilation plate 20 to move in a direction at a certain angle to the vertical direction. The driving component 30 can make the second ventilation hole 21 aligned with or offset from the corresponding first ventilation hole 11. This application does not impose specific limitations.

[0052] It is understood that the drive component 30 may include structures such as cylinders and motors, and this application does not impose specific limitations.

[0053] Please see Figure 2 and Figure 3In this embodiment of the present invention, the ventilation device 100 further includes a side sealing plate 40, which is connected to the first ventilation plate 10. The first ventilation plate 10 and the side sealing plate 40 are arranged to form a ventilation channel 45, and the second ventilation plate 20 and the driving component 30 are located in the ventilation channel 45.

[0054] Thus, the first ventilation plate 10 and the side sealing plate 40 form a ventilation channel 45, which facilitates the suction and discharge of gas. In addition, the second ventilation plate 20 and the driving component 30 are located in the ventilation channel 45. The first ventilation plate 10 and the side sealing plate 40 can jointly protect the second ventilation plate 20 and the driving component 30, avoiding bumps and damage to the second ventilation plate 20 and the driving component 30.

[0055] Understandably, the relative positional relationship between the first ventilation panel 10 and the side sealing panel 40 does not need to be changed, so they can be connected relatively stably. However, since the second ventilation panel 20 needs to be movably connected to the first ventilation panel 10, the connection between the second ventilation panel 20 and the first ventilation panel 10 is less stable and it is more necessary to avoid collisions in order to maintain the connection between the second ventilation panel 20 and the first ventilation panel 10.

[0056] It is understandable that the side sealing plate 40 and the first ventilation plate 10 can be connected by welding, bolts or other means, and this application does not impose any specific restrictions.

[0057] Understandably, the drive unit 30 and the second ventilation plate 20 can be placed on the first ventilation plate 10 first, and then the side sealing plate 40 can be placed on the first ventilation plate 10 to form a ventilation channel 45. In this way, the ventilation channel 45 can be formed to facilitate suction and exhaust, and the second ventilation plate 20 and the drive unit 30 can be conveniently placed inside the ventilation channel 45.

[0058] For further details, please refer to Figure 1 , Figures 4 to 6 The ventilation device 100 also includes a guide member 50, which is disposed on the first ventilation plate 10 and is used to guide the second ventilation plate 20 to move relative to the first ventilation plate 10.

[0059] In this way, the guide member 50 can guide the second ventilation plate 20 to move relative to the first ventilation plate 10, reduce the limiting requirement of the drive member 30 for the second ventilation plate 20, and prevent the second ventilation plate 20 from shifting and damaging the drive member 30.

[0060] Understandably, the structure of the guide member 50 can be varied. The guide member 50 may include a guide rail, and the second ventilation plate 20 may be slidably connected to the guide rail. The guide member 50 may include a chain, and the second ventilation plate 20 may be disposed on the chain. The structures of the guide member 50 will not be listed one by one.

[0061] For further details, please refer to Figure 1 , Figures 4 to 6The guide member 50 includes two limiting members 51, which are located on both sides of the second ventilation plate 20. Each limiting member 51 has a limiting groove 511, and both ends of the second ventilation plate 20 are respectively accommodated in the limiting grooves 511 of the two limiting members 51.

[0062] In this way, the groove wall of the limiting groove 511 limits the second ventilation plate 20, which not only plays a guiding and limiting role, but also has a simple structure and low manufacturing and installation costs.

[0063] For further details, please refer to Figure 1 , Figures 4 to 6 The driving component 30 drives the second ventilation plate 20 to move along the first direction. The ventilation device 100 includes a plurality of guide components 50, which are arranged sequentially along the first direction.

[0064] In this way, multiple guide members 50 can guide the second ventilation plate 20 together, further limiting and guiding the second ventilation plate 20, and preventing the second ventilation plate 20 from deviating from its movement path.

[0065] Please see Figure 2 and Figure 3 In this embodiment of the present invention, the ventilation device 100 further includes an upper sealing plate 60 and an exhaust valve 70. The upper sealing plate 60 is disposed at one end of the ventilation channel 45, and the exhaust valve 70 is disposed on the upper sealing plate 60 and is connected to the ventilation channel 45.

[0066] In this way, the ventilation duct 45 can be closed and opened as a whole, making it convenient to control the opening and closing of the ventilation device 100.

[0067] Please see Figure 2 and Figure 3 In this embodiment of the present invention, along the second direction, the spacing between the plurality of first ventilation holes 11 gradually decreases, and the spacing between the plurality of second ventilation holes 21 gradually decreases along with the spacing between the corresponding first ventilation holes 11.

[0068] In this way, a relatively dense first ventilation hole 11 and second ventilation hole 21 can be set in places where acid and alkali vapors, hydrogen gas, etc. are generated, and a relatively sparse first ventilation hole 11 and second ventilation hole 21 can be set in places where acid and alkali vapors, hydrogen gas are dispersed, so as to achieve a better ventilation effect.

[0069] Understandably, to facilitate explanation, the spacing between the multiple second ventilation holes 21 gradually decreases as the spacing between the corresponding first ventilation holes 11 decreases. An example is provided below. In one embodiment, the first ventilation holes 11 and the second ventilation holes 21 correspond one-to-one. Along the second direction, the spacing between the first ventilation holes 11 is 10, 7, 5, and 1 respectively. Therefore, the spacing between the second ventilation holes 21 is also 10, 7, 5, and 1 to ensure the correspondence between the second ventilation holes 21 and the first ventilation holes 11.

[0070] It is understandable that the first direction may coincide with the second direction, or the first direction may be at an angle to the second direction; this application does not impose any specific restrictions.

[0071] Please see Figure 1 , Figures 4 to 6 In this embodiment of the utility model, the driving component 30 includes a power component 31 and a transmission component 33. The power component 31 is disposed on the first ventilation plate 10, and the transmission component 33 is connected to the output end of the power component 31 and the second ventilation plate 20.

[0072] Thus, the transmission component 33 drives the second ventilation plate 20 and the power component 31 to move the second ventilation plate 20 relative to the first ventilation plate 10, thereby aligning or offsetting the first ventilation hole 11 and the second ventilation hole 21.

[0073] Please see Figure 2 and Figure 3 In this embodiment of the utility model, the ventilation device 100 also includes a hydrogen detector 80, which is electrically connected to the drive component 30.

[0074] In this way, the hydrogen content can be detected in a timely manner. When there is a lot of hydrogen, the misalignment between the first and second vents can be reduced or aligned to increase the ventilation. When the hydrogen content is insufficient, the misalignment between the first and second vents can be increased to avoid ventilation affecting the cleaning effect.

[0075] This utility model embodiment also provides a cleaning device, which includes a ventilation device 100. The specific structure of the ventilation device 100 is as described in the above embodiments. Since this cleaning device adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought about by the technical solutions of the above embodiments.

[0076] In the cleaning equipment of this utility model embodiment, the driving component 30 can drive the second ventilation plate 20 to move so that the second ventilation hole 21 is aligned with or offset from the corresponding first ventilation hole 11. When the second ventilation hole 21 is aligned with the corresponding first ventilation hole 11, the hole size for ventilation is larger, which facilitates rapid ventilation. When the second ventilation hole 21 is offset from the corresponding first ventilation hole 11, the hole size for ventilation is smaller, which reduces the impact on production during ventilation.

[0077] The above description is only a preferred embodiment of the present utility model and does not limit the patent scope of the present utility model. All equivalent structural transformations made under the inventive concept of the present utility model using the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present utility model.

Claims

1. A ventilation device, characterized in that, include: A first ventilation panel, wherein the first ventilation panel is provided with a plurality of first ventilation holes, the plurality of first ventilation holes being spaced apart; The second ventilation plate is provided with a plurality of second ventilation holes, and the plurality of second ventilation holes correspond one-to-one with the plurality of first ventilation holes; A driving component is connected to the second ventilation plate in a transmission manner. The driving component drives the second ventilation plate to move relative to the first ventilation plate, so that the second ventilation hole is aligned with or offset from the corresponding first ventilation hole.

2. The ventilation device as described in claim 1, characterized in that, The ventilation device further includes a side sealing plate, which is connected to the first ventilation plate. The first ventilation plate and the side sealing plate form a ventilation channel, and the second ventilation plate and the driving component are located within the ventilation channel.

3. The ventilation device as described in claim 2, characterized in that, The ventilation device further includes a guide member disposed on the first ventilation plate, the guide member being used to guide the second ventilation plate to move relative to the first ventilation plate.

4. The ventilation device as described in claim 3, characterized in that, The guide includes two limiting members, which are respectively located on both sides of the second ventilation plate. Each limiting member has a limiting groove, and both ends of the second ventilation plate are respectively accommodated in the limiting grooves of the two limiting members.

5. The ventilation device as described in claim 4, characterized in that, The driving component drives the second ventilation plate to move along the first direction, and the ventilation device includes a plurality of guide components, which are arranged sequentially along the first direction.

6. The ventilation device as described in claim 2, characterized in that, The ventilation device further includes an upper sealing plate and an exhaust valve. The upper sealing plate is located at one end of the ventilation channel, and the exhaust valve is located on the upper sealing plate and is connected to the ventilation channel.

7. The ventilation device as claimed in claim 1, characterized in that, Along the second direction, the spacing between the plurality of first ventilation holes gradually decreases, and the spacing between the plurality of second ventilation holes gradually decreases along with the spacing between the corresponding first ventilation holes.

8. The ventilation device as described in claim 1, characterized in that, The driving component includes a power component and a transmission component. The power component is disposed on the first ventilation plate, and the transmission component connects the output end of the power component and the second ventilation plate.

9. The ventilation device as claimed in claim 1, characterized in that, The ventilation device also includes a hydrogen detector, which is electrically connected to the drive unit.

10. A cleaning device, characterized in that, Includes the ventilation device as described in any one of claims 1 to 9.

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