Pipeline structure with air supplementing opening

Abstract

The utility model provides a pipeline structure with an air supplement port, which comprises a pipe body, the pipe body is provided with an arc-shaped bending part, a flow channel penetrating through two ends of the pipe body is arranged in the pipe body, an upper ventilation port and a lower ventilation port are formed, a window is arranged above the bending part, the window is communicated with the flow channel, and an air volume adjusting component is arranged outside the window to adjust the air volume of the window. The air volume adjusting assembly comprises an air supplementing housing, the interior of the air supplementing housing is of a hollow cavity structure, an air supplementing opening is formed in the upper portion of the air supplementing housing and communicated with the window, the air supplementing housing covers the window and is fixedly installed on the pipe body, a baffle is movably installed in the air supplementing housing, the baffle is located above the window, and an adjusting mechanism is installed on the air supplementing housing. The turning angle of the baffle in the air supplementing housing is controlled through the adjusting mechanism so that the air inlet amount can be adjusted. According to the pipeline structure with the air supplementing opening, the adjusting structure is additionally arranged at the window position of the pipeline and used for adjusting the air supplementing amount in the pipeline, the air inlet amount can be accurately controlled, and the load of air draft equipment is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor processing equipment, and specifically relates to a pipeline structure with a make-up air port. BACKGROUND

[0002] In the field of semiconductor manufacturing, in order to ensure the cleanliness of the production environment and the stable operation of the equipment, the semiconductor equipment is usually equipped with multiple exhaust pipelines for discharging waste gas, heat and micro-particles and other pollutants generated during the production process. During the operation of the exhaust system, considering that the internal air of the exhaust pipeline will be lost due to continuous exhaust, in order to maintain the stable operation of the system and ensure sufficient air supply, the pipeline needs to be supplemented with air. Therefore, through rigorous design and planning, an opening is specially added to the exhaust pipeline to serve as an air supplement channel, ensuring that fresh air from the outside can smoothly enter the pipeline to meet the air demand of the system. The difference in exhaust volume may cause pressure fluctuations in the pipeline system, and this unstable pressure environment may affect the normal operation of some pressure-sensitive semiconductor equipment. Moreover, when there is a ventilation problem or equipment failure, it is difficult to quickly and accurately determine the problem. SUMMARY

[0003] The utility model aims at providing a pipeline structure with a make-up air port to solve the technical problems in the background art.

[0004] To achieve the foregoing purposes, the utility model provides the following technical scheme:

[0005] A pipeline structure with a make-up air port, comprising a pipe body, the pipe body is provided with a curved portion with an arc-shaped bend, the pipe body is provided with a flow channel penetrating through both ends thereof, and an upper ventilation port and a lower ventilation port are formed, a window is formed above the curved portion, the window is communicated with the flow channel, and an air volume adjusting assembly is arranged outside the window to adjust the air volume of the window, the air volume adjusting assembly comprises a make-up air cover shell, the make-up air cover shell is provided with a hollow cavity structure, a make-up air port is arranged above the make-up air cover shell and communicated with the window, the make-up air cover shell covers the window and is fixedly installed with the pipe body, a baffle is movably installed in the make-up air cover shell, the baffle is flipped in the Y-axis direction in the make-up air cover shell, the baffle is above the window, an adjusting mechanism is installed on the make-up air cover shell, and the flipping angle of the baffle in the make-up air cover shell is controlled through the adjusting mechanism to adjust the air inlet volume.

[0006] The adjusting mechanism comprises a rotating shaft, a first mounting block, a second mounting block and a worm gear assembly, the baffle is fixed on the rotating shaft, the left and right ends of the rotating shaft are respectively rotationally connected with the side walls of the air supplement cover shell, the axis of the rotating shaft is perpendicular to the center of the pipe body, the first mounting block and the second mounting block are respectively fixed on the outer side walls of the air supplement cover shell, the left and right ends of the rotating shaft respectively pass into the first mounting block and the second mounting block, the worm gear assembly comprises a worm wheel and a worm, the worm wheel is fixed on one side of the rotating shaft and coaxially installed with the rotating shaft, the worm is threadedly connected above the worm wheel, the worm wheel and the worm are both in the second mounting block, one end of the worm is provided with a knob, and the knob is outside the second mounting block.

[0007] The first sealing gasket is arranged between the first mounting block and the outer side wall of the pipe body, and the second sealing gasket is arranged between the second mounting block and the outer side wall of the pipe body.

[0008] The longitudinal section of the flow channel is of a rectangular structure, and the window and the baffle are both of a rectangular structure.

[0009] The rotating shaft is fixedly installed with the baffle through screws.

[0010] Compared with the prior art, the pipe structure with an air supplement opening of the application adds an adjusting structure at the window position of the pipe for adjusting the air supplement amount in the pipe, can accurately control the air inlet amount, can avoid unnecessary air inflow, reduce the load of the air extraction equipment, prevent the air extraction equipment from being overloaded due to too large air inlet amount, or cause waste of equipment resources due to too small air inlet amount, adjusts the rotation angle of the baffle by using the adjusting mechanism in the application, drives the baffle to rotate by using the structure of the worm gear, ensures the accuracy and stability of angle adjustment, can finely adjust the component to the required accurate angle, meets the high-precision angle adjustment requirement, so that the air amount of several pipes on the equipment can be controlled, and the stability of the equipment operation environment can be maintained. BRIEF DESCRIPTION OF DRAWINGS

[0011] Figure 1 The three-dimensional structure of the application;

[0012] Figure 2 The sectional view structure of the application;

[0013] Figure 3 The three-dimensional structure of the pipe body;

[0014] Figure 4 The three-dimensional structure of the adjusting mechanism and the baffle installation;

[0015] Figure 5 The three-dimensional structure of the adjusting mechanism. DETAILED DESCRIPTION

[0016] The technical solutions in the embodiments of the utility model will be clearly and completely described in connection with the drawings in the embodiments of the utility model.

[0017] Specific embodiment 1: please refer to Figures 1 to 5 In the embodiment of the utility model, a pipeline structure with a supplementary air port 301 comprises a pipe body 1, the pipe body 1 is provided with a curved portion 101 bent in an arc shape, the pipe body 1 is internally provided with a flow channel penetrating through both ends thereof, and an upper air vent 102 and a lower air vent 103 are formed, the longitudinal section of the flow channel is in a rectangular structure, a window 104 is formed above the curved portion 101, the window 104 is communicated with the flow channel, the window 104 is in a rectangular structure, and a wind volume adjusting assembly 2 is arranged outside the window 104 to adjust the wind volume of the window 104, the wind volume adjusting assembly 2 comprises a supplementary air cover shell 3, the supplementary air cover shell 3 is internally provided with a hollow cavity structure, the supplementary air cover shell 3 is provided with a supplementary air port 301 above the supplementary air cover shell 3 and communicated with the window 104, the supplementary air cover shell 3 covers the window 104 and is fixedly installed with the pipe body 1, and a baffle 5 is movably installed in the supplementary air cover shell 3, in the embodiment, the baffle 5 is in a rectangular structure, the baffle 5 is flipped in the Y-axis direction in the supplementary air cover shell 3, the baffle 5 is above the window 104, and an adjusting mechanism 4 is installed on the supplementary air cover shell 3, the flipping angle of the baffle 5 in the supplementary air cover shell 3 is controlled through the adjusting mechanism 4 to adjust the air inlet volume.

[0018] Due to different working scenes and time, the supplementary air volume demand is different, the air inlet volume adjusting mechanism can accurately adjust the supplementary air volume according to the actual working condition, ensures that the air exhaust system is always in the best operating state, effectively exhausts waste gas and waste heat, and maintains a good working environment. When the supplementary air operation is not needed, the cover plate is used to cover and fix at the supplementary air port 301, and the supplementary air cover shell 3 can be sealed.

[0019] In the application, the adjusting mechanism 4 comprises a rotating shaft 403, a first mounting block 401, a second mounting block 402 and a worm and gear assembly, the baffle 5 is fixedly arranged on the rotating shaft 403, and the rotating shaft 403 is fixedly installed with the baffle 5 through a screw.

[0020] The left and right ends of the rotating shaft 403 are rotatably connected with the side wall of the supplementary air cover shell 3, the axis of the rotating shaft 403 is perpendicular to the center in the pipe body 1, the first mounting block 401 and the second mounting block 402 are fixedly arranged on the outer side wall of the supplementary air cover shell 3, the left and right ends of the rotating shaft 403 are respectively penetrated into the first mounting block 401 and the second mounting block 402, the worm and gear assembly comprises a worm wheel 404 and a worm 405, the worm wheel 404 is fixedly arranged on one side of the rotating shaft 403 and coaxially installed with the rotating shaft 403, the worm 405 is screw-connected above the worm wheel 404, and the worm wheel 404 and the worm 405 are all arranged in the second mounting block 402, one end of the worm 405 is provided with a knob 406, and the knob 406 is arranged outside the second mounting block 402. The knob 406 is twisted to drive the screw to rotate, thereby driving the baffle 5 to rotate in the supplementary air cover shell 3,

[0021] The first sealing washer 407 is arranged between the first mounting block 401 and the outer sidewall of the pipe body 1, and the second sealing washer 408 is arranged between the second mounting block 402 and the outer sidewall of the pipe body 1, so that the sealing washers can prevent water vapor and corrosive substances from contacting the rotating shaft 403 in a humid environment or in a working condition where corrosive gases exist.

[0022] Compared with the prior art, the pipe structure with a make-up air port in the application adds an adjusting structure at the window position of the pipe for adjusting the make-up air volume in the pipe, which can accurately control the air inlet volume, avoid unnecessary air inflow, reduce the load of the air extraction equipment, prevent the air extraction equipment from being overloaded due to excessive air inlet volume, or cause waste of equipment resources due to insufficient air inlet volume, and the adjusting mechanism is used to adjust the rotation angle of the baffle in the application, the worm and gear structure is used to drive the baffle to rotate, the accuracy and stability of angle adjustment are ensured, the components can be finely adjusted to the required accurate angle, the high-precision angle adjustment requirement is met, so that the air volume of several pipes on the equipment can be controlled, and the stability of the equipment operating environment can be maintained.

[0023] It is obvious for those skilled in the art that the present application is not limited to the details of the foregoing exemplary embodiments, and the present application can be implemented in other specific forms without departing from the spirit or essential characteristics of the present application. Therefore, the embodiments should be regarded as exemplary and non-limiting, and the scope of the present application is defined by the appended claims rather than the foregoing description, and it is intended to include all changes falling within the meaning and scope of the equivalent elements of the claims. Any reference signs in the claims should not be regarded as limiting the claims.

[0024] In addition, it should be understood that, although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the description of the specification is only for the sake of clarity, and those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can be properly combined to form other embodiments that those skilled in the art can understand.

Claims

1. A duct structure having a make-up air opening, characterized by: The utility model provides a kind of air volume adjusting assembly, including pipe body, the pipe body is equipped with curved portion of arc bending, the flow channel is through its two ends in the pipe body, and upper vent and lower vent are formed, window is set on the curved portion, the window is communicated with flow channel, and air volume adjusting assembly is equipped outside the window to adjust the window air volume, the air volume adjusting assembly includes air supplement cover shell, the cavity structure is hollow in the air supplement cover shell, air supplement cover shell is equipped with air supplement vent in the upper and communicated with window, air supplement cover shell covers on window and is fixedly installed with pipe body, baffle is movably installed in air supplement cover shell, baffle flips in air supplement cover shell along Y axis direction, baffle is above window, adjusting mechanism is installed on air supplement cover shell, and the flipping angle of baffle in air supplement cover shell is controlled by adjusting mechanism to adjust air intake.

2. A duct structure having a supplementary air port according to claim 1, characterized in that: The adjusting mechanism includes a rotating shaft, a first mounting block, a second mounting block and a worm and gear assembly, the baffle is fixed on the rotating shaft, the left and right ends of the rotating shaft are respectively rotatably connected with the side walls of the air supplement cover shell, the axis of the rotating shaft is perpendicular to the center of the pipe body, the first mounting block and the second mounting block are respectively fixed on the outer side walls of the air supplement cover shell, the left and right ends of the rotating shaft respectively pass into the first mounting block and the second mounting block, the worm and gear assembly includes a worm wheel and a worm, the worm wheel is fixed on one side of the rotating shaft and coaxially installed with the rotating shaft, the worm is threadedly connected above the worm wheel, the worm wheel and the worm are both in the second mounting block, one end of the worm is provided with a knob, and the knob is outside the second mounting block.

3. A duct structure having a make-up air port according to claim 2, wherein: The first mounting block and the outer side wall of the pipe body are provided with a first sealing washer, and the second mounting block and the outer side wall of the pipe body are provided with a second sealing washer.

4. A duct structure having a make-up air port according to claim 3, wherein: The longitudinal section of the flow channel is a rectangular structure, and the window and the baffle are both rectangular structures.

5. A duct structure having a make-up air port according to claim 4, wherein: The rotating shaft is fixedly installed with the baffle by screws.

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