Pre-pumping filter of silicon wafer groove type cleaning machine
By designing a pre-pump filter in the silicon wafer tank cleaning machine, using threaded connections and a multi-stage filter structure, the problem of damage caused by debris entering the circulating pump is solved, achieving the effect of protecting the circulating pump and ensuring production.
Patent Information
- Application Number
- CN202520150344.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-22
- Publication Date
- 2026-01-20
- Estimated Expiration
- 2035-01-22
AI Technical Summary
In existing silicon wafer tank cleaning machines, debris can easily enter the circulation pipeline and damage expensive circulation pumps during processing, leading to downtime and reduced production.
Design a pre-pump filter for a silicon wafer tank cleaning machine. The front and rear housings are threadedly connected with internal and external threads. A primary filter and a secondary filter are installed with filter diameters of 1-2 mm and 0.5-1 mm, respectively. The filter section is 2-3 times the size of the pipeline and is used to filter and protect the circulating pump.
It effectively prevents debris from entering the circulating pump, protects the circulating pump, prevents damage, reduces downtime and production reduction, and ensures production continuity.
Smart Images
Figure CN223810851U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the field of silicon wafer processing, and particularly relates to a pump front filter of a silicon wafer tank cleaning machine, which can effectively avoid the problem of damage to a circulating pump caused by broken silicon wafers entering a tank position circulating pipeline. BACKGROUND
[0002] After each processing procedure such as cutting, grinding, and polishing of a silicon wafer, the silicon wafer needs to be cleaned in order to remove particles, metals, and prevent defects. The tank cleaning machine is the most commonly used cleaning equipment in the grinding and polishing procedure, and the cleaning medium includes acid liquid, alkali liquid, and deionized water. The acid liquid tank and the alkali liquid tank are generally provided with a circulating system, and a high-cleanliness pneumatic pump such as a diaphragm pump or a bellows pump is used as a circulating power source. The circulating flow of the chemical is generally tank body→pump→filter→online heater→tank body. If a broken piece occurs during the processing procedure, the broken piece will fall into the circulating pipeline and deposit in the pump after falling into the tank body, which can easily pierce the pump membrane and the bellows, and even damage the pump body. SUMMARY
[0003] In view of the problem that the broken piece of the tank cleaning machine can cause damage to the circulating pump, and even cause serious consequences such as loss expansion and shutdown and production reduction, the utility model aims to provide a pump front filter of a silicon wafer tank cleaning machine, which can make the large silicon piece debris that can cause damage to the circulating pump after the broken piece to stay before the pump front filter, only allow the fine debris to enter the pump, protect the internal structure of the circulating pump, and reduce the influence on the circulating flow.
[0004] To achieve the above-mentioned purpose, the utility model adopts the following technical scheme:
[0005] A pump front filter of a silicon wafer tank cleaning machine, the main part of the pump front filter includes a front end shell, a rear end shell, a primary filter screen, a secondary filter screen, a lock nut, and a gasket. Wherein,
[0006] The front end shell and the rear end shell are threadedly connected, the primary filter screen and the secondary filter screen are installed in the same direction inside the shell, the primary filter screen is close to the front end shell, the secondary filter screen is close to the rear end shell, and the gasket is installed between the front end shell and the rear end shell.
[0007] The front end shell is connected with the liquid inlet pipeline and locked by the lock nut, and the rear end shell is connected with the liquid outlet pipeline and locked by the lock nut.
[0008] Further, the front end shell and the rear end shell respectively have a pipeline connecting part, a shell connecting part, and a locking part and a clamping part arranged between the pipeline connecting part and the shell connecting part.
[0009] Further, the shell connecting part of the front end shell is provided with internal thread, and the shell connecting part of the rear end shell is provided with external thread of corresponding specification, and a gasket is sleeved on the external thread of the shell connecting part of the rear end shell.
[0010] Further, the front end shell and the rear end shell are respectively provided with bosses at the primary filter screen and the secondary filter screen mounting parts.
[0011] Further, the primary filter screen and the secondary filter screen are respectively cup-shaped, and the bottom of the cup is densely provided with circular holes, the filter diameter of the primary filter screen is 1-2 mm, and the filter diameter of the secondary filter screen is 0.5-1 mm.
[0012] Further, the cooperation gap between the primary filter screen and the secondary filter screen and the shell is less than 0.5 mm.
[0013] Further, the filter part of the primary filter screen and the secondary filter screen is 2-3 times the size of the liquid inlet and outlet pipeline.
[0014] The advantages of the utility model lie in:
[0015] The pump pre-filter of the silicon wafer tank type cleaning machine of the utility model has simple structure, convenient installation and cleaning, can effectively avoid the problem of damage of the circulating pump caused by the broken silicon wafer entering the tank position circulating pipeline, prevent the problem of loss expansion, even shutdown and production reduction, and guarantee production. BRIEF DESCRIPTION OF DRAWINGS
[0016] Figure 1 It is the use scene schematic diagram of the utility model, Figure 1 (a) shows the original circulating pipeline; Figure 1 (b) shows the circulating pipeline after the pump pre-filter of the utility model is additionally installed.
[0017] Figure 2 It is the three-dimensional explosion view of the utility model.
[0018] Figure 3 It is the cross-sectional view of the utility model after assembly.
[0019] Figure 4 It is the front view of the utility model after assembly.
[0020] Figure 5 It is the perspective view of the front end shell.
[0021] Figure 6 It is the perspective view of the rear end shell.
[0022] Reference signs:
[0023] 1-Front end housing; 2-Rear end housing; 3-Gasket; 4-Secondary filter; 5-Primary filter; 6-Lock nut; 7-Boss; 11-Front end housing pipeline connection; 12-Front end housing locking part; 13-Front end housing clamping part; 14-Front end housing connection part; 21-Rear end housing pipeline connection; 22-Rear end housing locking part; 23-Rear end housing clamping part; 24-Rear end housing connection part. Detailed Implementation
[0024] The present invention will now be described in detail with reference to the accompanying drawings. However, the embodiments described are only for explaining the present invention and are not intended to limit the scope of the present invention.
[0025] like Figure 1 As shown, the pre-pump filter of the silicon wafer tank cleaning machine proposed in this utility model is installed between the tank and the circulating pump, so that larger silicon wafer fragments that would damage the circulating pump are kept before the pre-pump filter.
[0026] like Figure 2 , Figure 3 , Figure 4 As shown, the main body of the pre-pump filter of this utility model includes a front housing 1, a rear housing 2, a gasket 3, a secondary filter screen 4, a primary filter screen 5, and a lock nut 6. The front housing 1 and the rear housing 2 are connected by threads. The primary filter screen 5 and the secondary filter screen 4 are installed in the same direction inside the housing, with the primary filter screen 5 closer to the front housing 1 and the secondary filter screen 4 closer to the rear housing 2. The gasket 3 is installed between the front housing 1 and the rear housing 2. In this pre-pump filter, the primary filter screen 5 and the secondary filter screen 4 constitute a two-stage filtration system. The filter screens are cup-shaped with densely packed round holes at the bottom. The filter diameter of the primary filter screen 5 is 1-2 mm, and the filter diameter of the secondary filter screen 4 is 0.5-1 mm. During installation, the primary filter screen 5 is installed near the front housing 1 at the inlet end, and the secondary filter screen 4 is installed near the rear housing 2 at the outlet end. The clearance between the filter screen and the housing does not exceed 0.5 mm.
[0027] like Figure 5 , Figure 6 As shown, the front housing 1 consists of a front housing pipe connection part 11, a front housing locking part 12, a front housing clamping part 13, and a front housing housing connection part 14; the rear housing 2 consists of a rear housing pipe connection part 21, a rear housing locking part 22, a rear housing clamping part 23, and a rear housing housing connection part 24; the housing connection part 14 of the front housing 1 is provided with an internal thread, and the housing connection part 24 of the rear housing 2 is provided with an external thread of the corresponding specification. The front housing clamping part 13 and the rear housing clamping part 23 are used for clamping with tightening tools when the front housing 1 and the rear housing 2 are assembled. The front housing locking part 12 is used to lock with the lock nut 6 when connecting the liquid inlet pipe; the rear housing locking part 22 is used to lock with the lock nut 6 when connecting the liquid outlet pipe.
[0028] In the utility model, for being convenient to install, the front end shell and rear end shell are designed as same specification and thread type with PFA flared pipe fitting, and interchangeability and practicability are increased.
[0029] In the utility model, for guaranteeing cleanliness requirement, all components in the utility model are made of PTFE material.
[0030] In the utility model, for guaranteeing circulation flow, primary filter screen 5 and secondary filter screen 4 filtering part size is 2-3 times of pipe size, and boss 7 is set on primary filter screen 5 and secondary filter screen 4 installation part (as shown in the figure). Figure 3
[0031] In the utility model, gasket 3 is fitted on the shell connecting portion 24 outer thread of rear end shell 2, and the function of preventing loosening and sealing is realized.
[0032] In actual application, the pump front filter installation process of the silicon wafer slot type cleaning machine in the utility model is as follows:
[0033] Firstly, secondary filter screen 4 and primary filter screen 5 are inserted into the cavity of rear end shell 2 in sequence, and the direction of two filter screens should be installed in the same direction; then, gasket 3 is fitted on the shell connecting portion 24 outer thread of rear end shell 2, the front end shell 1 and rear end shell 2 are screwed, and the corresponding size wrench is clamped on two shell clamping portions 13, 23 to lock the shell; finally, PFA pipe flared part is connected with pipe connecting portion 11 of front end shell 1 and pipe connecting portion 21 of rear end shell 2, and is locked by lock nut 6, and it should be noted that pipe connecting portion 11 is liquid inlet direction, and pipe connecting portion 21 is liquid outlet direction.
Claims
1. A pre-pump filter for a silicon wafer tank cleaner, characterized by, The main part of the pump front filter comprises a front end shell, a rear end shell, a primary filter screen, a secondary filter screen, a lock nut and a gasket, wherein, The front end shell is threadedly connected with the rear end shell, the primary filter screen and the secondary filter screen are installed in the same direction inside the shell, the primary filter screen is close to the front end shell, the secondary filter screen is close to the rear end shell, and the gasket is installed between the front end shell and the rear end shell; The front end shell is connected with the liquid inlet pipeline and locked by the lock nut, and the rear end shell is connected with the liquid outlet pipeline and locked by the lock nut.
2. The pre-pump filter for a silicon wafer tank cleaner of claim 1, wherein, The front end shell and the rear end shell are respectively provided with a pipeline connecting part, a shell connecting part and a locking part and a clamping part arranged between the pipeline connecting part and the shell connecting part.
3. The pre-pump filter for a silicon wafer tank cleaner of claim 2, wherein, The shell connecting part of the front end shell is provided with internal threads, the shell connecting part of the rear end shell is provided with external threads of corresponding specifications, and the gasket is sleeved on the external threads of the shell connecting part of the rear end shell.
4. The pre-pump filter for a silicon wafer tank cleaner of claim 1 or 2, wherein The front end shell and the rear end shell are respectively provided with bosses at the primary filter screen and the secondary filter screen installation parts.
5. The pre-pump filter for a silicon wafer tank cleaner of claim 1 or 2, wherein, The primary filter screen and the secondary filter screen are respectively cup-shaped, the bottom of the cup is densely covered with circular holes, the filter diameter of the primary filter screen is 1-2 mm, and the filter diameter of the secondary filter screen is 0.5-1 mm.
6. The pre-pump filter for a silicon wafer tank cleaner of claim 5, wherein, The cooperation gap between the primary filter screen and the secondary filter screen and the shell is less than 0.5 mm.
7. The pre-pump filter for a silicon wafer tank cleaner of claim 1 or 2, wherein The filter part size of the primary filter screen and the secondary filter screen is 2-3 times the size of the liquid inlet and outlet pipelines.