Furnace door assembly and reaction furnace system

Abstract

The utility model relates to the technical field of semiconductors and photovoltaic cells, in particular to a furnace door assembly and a reaction furnace system, and aims to solve the problem that a bearing column of the furnace door assembly is seriously abraded. The furnace door assembly comprises a supporting piece, an outer furnace door, an inner furnace door, a bearing piece, a driving piece and a wear-resisting piece. The bearing column is supported by the wear-resisting part, friction between the bearing column and the outer furnace door is reduced or even avoided, the bearing column and the outer furnace door are prevented from being abraded, the bearing function and the guiding function of the bearing column are guaranteed, and the sealing effect of the outer furnace door and the inner furnace door on the outer furnace opening and the inner furnace opening of the furnace body assembly is improved.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the technical field of semiconductor and photovoltaic technology, and particularly relates to a furnace door assembly and a reaction furnace system. BACKGROUND

[0002] Silicon wafer is gradually becoming a common process of silicon wafer processing, after the silicon wafer is cut, the silicon wafer will appear a fracture surface, repairing the fracture surface will improve the photovoltaic conversion efficiency of the silicon wafer, therefore, after the silicon wafer is cut, a fracture surface repairing device needs to be used to process the fracture surface of the silicon wafer, among which, the film plated by using atomic layer deposition technology has the best passivation effect, therefore, in order to realize the passivation effect of the fracture surface, an edge passivation deposition (EPD) device is put on the market. The atomic layer deposition process is carried out in the cavity of the EPD device, and the conditions for carrying out the process need to be strictly controlled, for example, the pressure, temperature, gas inlet amount, cavity leakage rate and the like during the reaction, if one of them has a problem, the whole process will fail, therefore, the furnace door assembly needs to be able to seal the furnace port of the furnace body assembly.

[0003] However, the furnace door assembly of the related art has a problem of serious wear of the load-bearing column, which causes the furnace door assembly to be difficult to accurately seal the furnace port of the furnace body assembly. CONTENT OF THE INVENTION

[0004] Therefore, the present disclosure provides a furnace door assembly and a reaction furnace system to solve the problem of serious wear of the load-bearing column of the furnace door assembly.

[0005] In a first aspect, the embodiments of the present disclosure provide a furnace door assembly applied to a furnace body assembly, the furnace body assembly having an outer furnace port and an inner furnace port, the furnace door assembly comprising: a support member connected with a boat pushing assembly and capable of moving under the drive of the boat pushing assembly; an outer furnace door vertically arranged and connected with the support member and capable of closing or opening the outer furnace port under the drive of the boat pushing assembly, the outer furnace door having at least one first through hole; an inner furnace door arranged in parallel with the outer furnace door; a bearing member arranged on a side of the outer furnace door away from the inner furnace door; at least one load-bearing column, a first end of the load-bearing column being connected with the inner furnace door, and a second end of the load-bearing column penetrating through the first through hole and being connected with the bearing member; a drive member arranged on the support member and connected with the bearing member, the drive member being configured to drive the bearing member to be close to or away from the outer furnace door, so that the bearing member drives the inner furnace door to be away from or close to the outer furnace door through the load-bearing column, to close or open the inner furnace port; and a wear-resistant member connected with the outer furnace door, arranged between the outer furnace door and the inner furnace door, arranged below the load-bearing column and abutting against the load-bearing column.

[0006] In some embodiments, the wear-resistant piece comprises: a mounting portion connected with the outer furnace door;

[0007] a contact portion detachably connected with the mounting portion and abutting against the load-bearing column.

[0008] In some embodiments, the mounting portion has a mounting groove with an opening facing upward, the bottom of the contact portion is arranged in the mounting groove, and the top of the contact portion abuts against the load-bearing column; and / or, the top of the contact portion has an arc-shaped groove extending along the axial direction of the load-bearing column, the load-bearing column abuts against the inner wall of the arc-shaped groove, and the shape of the cross section of the arc-shaped groove is adapted to the shape of the cross section of the load-bearing column.

[0009] In some embodiments, the furnace door assembly further comprises: an elastic sealing tube sleeved on the outer side of the load-bearing column, a first end of the elastic sealing tube being connected with the outer furnace door, and a second end of the elastic sealing tube being connected with the load-bearing piece.

[0010] In some embodiments, the support piece comprises a first plate-shaped structure, the load-bearing piece comprises a second plate-shaped structure, the first plate-shaped structure and the second plate-shaped structure are arranged in parallel with the outer furnace door, the first plate-shaped structure is arranged on the side of the second plate-shaped structure away from the outer furnace door, and the first plate-shaped structure has a second through hole; the driving piece comprises: a fixing piece arranged on the side of the first plate-shaped structure away from the second plate-shaped structure; and a telescopic piece connected with the fixing piece and connected with the load-bearing piece through the second through hole, the telescopic piece being driven to extend or retract by the fixing piece to drive the inner furnace door to close or open the inner furnace opening.

[0011] In some embodiments, the furnace door assembly further comprises: a first heat insulation piece arranged between the outer furnace door and the inner furnace door and connected with the outer furnace door; and / or, the driving piece comprises a pneumatic cylinder, the furnace door assembly further comprises: a pressure regulating valve in communication with the air inlet of the pneumatic cylinder and further in communication with a gas source.

[0012] In some embodiments, the support piece has a third through hole, the load-bearing piece has a fourth through hole, the furnace door assembly further comprises: a guide bearing seat arranged on the support piece and coaxially arranged with the third through hole; a linear bearing arranged in the fourth through hole and coaxially arranged with the fourth through hole; and a guide shaft, a first end of the guide shaft being connected with the outer furnace door, and a second end of the guide shaft sequentially passing through the linear bearing, the third through hole and the guide bearing seat.

[0013] In some embodiments, the support member comprises a first plate structure and a third plate structure connected vertically, and the bearing member comprises a second plate structure, the first plate structure and the second plate structure are arranged in parallel with the outer furnace door; the furnace door assembly further comprises: a sensing member connected with the second plate structure; a sensor arranged on the third plate structure and arranged correspondingly with the sensing member, wherein, when the inner furnace door covers the inner furnace opening, the sensor can detect the sensing member and send a signal indicating that the inner furnace door is in place.

[0014] In some embodiments, the furnace door assembly further comprises: at least one first reinforcing rib connecting the outer furnace door, the first plate structure and the third plate structure; and at least one second reinforcing rib connecting the first plate structure and the first reinforcing rib.

[0015] In a second aspect, an embodiment of the present disclosure provides a reaction furnace system, comprising: a furnace body assembly having an outer furnace opening and an inner furnace opening; the furnace door assembly of the first aspect configured to cover the outer furnace opening and the inner furnace opening; and a push boat assembly connected with the furnace door assembly and configured to drive the furnace door assembly to cover the outer furnace opening.

[0016] The furnace door assembly provided by the embodiment of the present disclosure uses the wear-resistant member to support the bearing column, reduces or even avoids the friction between the bearing column and the outer furnace door, prevents the bearing column and the outer furnace door from being worn, ensures the bearing effect and guiding effect of the bearing column, and improves the sealing effect of the outer furnace door and the inner furnace door on the outer furnace opening and the inner furnace opening of the furnace body assembly. BRIEF DESCRIPTION OF DRAWINGS

[0017] The above and other objects, features and advantages of the present disclosure will become more apparent from the following detailed description when taken in conjunction with the accompanying drawings. The accompanying drawings provide further understanding of the embodiments of the present disclosure and form a part of the specification, together with the description, to explain the present disclosure and do not constitute a limitation of the present disclosure. In the drawings, like reference numerals refer to the same or similar components throughout.

[0018] Figure 1 Fig. 1 shows a structural schematic diagram of a reaction furnace system provided by an embodiment of the present disclosure.

[0019] Figure 2 Fig. 2 shows a structural schematic diagram of a furnace door assembly provided by an embodiment of the present disclosure.

[0020] Figure 3 Fig. 3 shows a structural schematic diagram of a furnace door assembly provided by another embodiment of the present disclosure.

[0021] Figure 4 Fig. 4 shows a top view of the furnace door assembly provided by an embodiment of the present disclosure.

[0022] Figure 5 Fig. 1 shows a schematic view of a cross section of a wear-resistant part according to an embodiment of the present disclosure.

[0023] Reference signs:

[0024] 1, reaction furnace system; 10, furnace door assembly; 100, support; 101, first plate structure; 1011, second through hole; 1012, third through hole; 103, third plate structure; 110, outer furnace door; 111, first through hole; 120, inner furnace door; 130, bearing; 131, second plate structure; 132, fourth through hole; 140, load-bearing column; 141, first end of load-bearing column; 142, second end of load-bearing column; 150, driving member; 151, fixing member; 152, telescopic member; 153, air cylinder; 1531, air inlet; 160, wear-resistant part; 161, mounting portion; 1611, mounting groove; 162, contact portion; 1621, arc-shaped groove; 170, elastic sealing tube; 171, first end of elastic sealing tube; 172, second end of elastic sealing tube; 180, first heat insulation member; 190, pressure regulating valve; 200, guide bearing seat; 210, linear bearing; 220, guide shaft; 221, first end of guide shaft; 222, second end of guide shaft; 230, inductive member; 240, sensor; 250, first reinforcing rib; 260, second reinforcing rib; 270, electromagnetic valve; 20, boat pushing assembly; 90, furnace body assembly; 91, outer furnace mouth; 92, inner furnace mouth. DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the present disclosure will be clearly and completely described below with reference to the drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, rather than all the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present disclosure.

[0026] Figure 1 Fig. 1 shows a schematic view of a cross section of a wear-resistant part according to an embodiment of the present disclosure. Figure 2 Fig. 2 shows a schematic view of a structure of a furnace door assembly according to an embodiment of the present disclosure. Figure 3 Fig. 3 shows a schematic view of a structure of a furnace door assembly according to another embodiment of the present disclosure. Figure 4 Fig. 4 shows a top view of a furnace door assembly according to an embodiment of the present disclosure. Figure 5 Fig. 1 shows a schematic view of a cross section of a wear-resistant part according to an embodiment of the present disclosure. Figures 1 to 5 According to an embodiment of the present disclosure, the furnace door assembly 10 comprises a support 100, an outer furnace door 110, an inner furnace door 120, a bearing 130, at least one load-bearing column 140, a driving member 150, and a wear-resistant part 160.

[0027] Specifically, as shown in Figures 1 to 4 The support 100 is connected with the pushboat assembly 20 and can move under the driving of the pushboat assembly 20. The outer furnace door 110 is vertically arranged and connected with the support 100, and can be driven by the pushboat assembly 20 to close or open the outer furnace opening 91. The outer furnace door 110 has at least one first through hole 111. The inner furnace door 120 is arranged in parallel with the outer furnace door 110. The load bearing 130 is arranged on the side of the outer furnace door 110 away from the inner furnace door 120. The first end 141 of the load bearing column is connected with the inner furnace door 120, and the second end 142 of the load bearing column passes through the first through hole 111 and is connected with the load bearing 130. The driving member 150 is arranged on the support 100 and connected with the load bearing 130. The driving member 150 is configured to drive the load bearing 130 to move close to or away from the outer furnace door 110, so that the load bearing 130 drives the inner furnace door 120 to move away from or close to the outer furnace door 110 through the load bearing column 140, so as to close or open the inner furnace opening 92.

[0028] The wear-resistant member 160 is connected with the outer furnace door 110 and arranged between the outer furnace door 110 and the inner furnace door 120, and below the load bearing column 140 and abuts against the load bearing column 140, so as to support the load bearing column 140 by the wear-resistant member 160, reduce or even avoid the friction between the load bearing column 140 and the outer furnace door 110, prevent the load bearing column 140 and the outer furnace door 110 from being worn, ensure the load bearing and guiding functions of the load bearing column 140, and improve the sealing effect of the outer furnace door 110 and the inner furnace door 120 on the outer furnace opening 91 and the inner furnace opening 92 of the furnace body assembly 90.

[0029] Exemplarily, the materials of the load bearing column 140 and the wear-resistant member 160 can be selected to have high hardness and good wear resistance, so as to further prevent the load bearing column 140 from being worn. Exemplarily, the materials of the load bearing column 140 and the wear-resistant member 160 can be high-carbon chromium stainless steel and tungsten steel. In some embodiments, the material of the load bearing column 140 is high-carbon chromium stainless steel, and the material of the wear-resistant member 160 is tungsten steel. Exemplarily, the wear-resistant member 160 can have a block structure or a columnar structure.

[0030] Exemplarily, the driving member 150 can be any component capable of providing linear motion, such as a pneumatic cylinder or an electric push rod. Exemplarily, the support 100, the outer furnace door 110, the inner furnace door 120 and the load bearing 130 can all have a plate structure. Exemplarily, the support 100 and the load bearing 130 can also have a frame structure.

[0031] In some embodiments, as Figures 3 to 5As shown, the wear-resistant piece 160 includes a mounting portion 161 and a contact portion 162. The mounting portion 161 is connected with the outer furnace door 110. The contact portion 162 is detachably connected with the mounting portion 161 and abuts against the load-bearing column 140, facilitating replacement of the contact portion 162.

[0032] In some embodiments, the mounting portion 161 has a mounting groove 1611 with an opening facing upward, and the bottom of the contact portion 162 is arranged in the mounting groove 1611, and the top of the contact portion 162 abuts against the load-bearing column 140. By arranging the contact portion 162 in the mounting groove 1611, the installation of the contact portion 162 is achieved, further improving the convenience of replacement of the contact portion.

[0033] In some embodiments, as shown in Figure 5 The top of the contact portion 162 has an arc-shaped groove 1621 extending along the axial direction of the load-bearing column 140, the load-bearing column 140 abuts against the inner wall of the arc-shaped groove 1621, and the cross-sectional shape of the arc-shaped groove 1621 is adapted to the cross-sectional shape of the load-bearing column 140, improving the stability of the wear-resistant piece 160 supporting the load-bearing column 140. Exemplarily, the cross-sectional shape of the arc-shaped groove 1621 and the cross-sectional shape of the load-bearing column 140 can be circular arc, rectangular, trapezoidal, etc.

[0034] In some embodiments, as shown in Figure 4 The elastic sealing tube 170 is sleeved on the outer side of the load-bearing column 140, the first end 171 of the elastic sealing tube is connected with the outer furnace door, and the second end 172 of the elastic sealing tube is connected with the load-bearing piece 130, thereby preventing process gas from leaking from the outer furnace door 110. In addition, the elastic sealing tube 170 has elasticity, thereby achieving elastic connection of the load-bearing piece 130 and the outer furnace door 110. Furthermore, the elastic sealing tube 170 can achieve sealed connection between the load-bearing piece 130 and the outer furnace door 110, preventing dust from polluting the load-bearing column 140, thereby further reducing wear of the load-bearing column 140.

[0035] In some embodiments, as shown in Figures 1 to 4 The support 100 includes a first plate structure 101, and the load-bearing piece 130 includes a second plate structure 131, both of which are arranged parallel to the outer furnace door 110, the first plate structure 101 is arranged on the side of the second plate structure 131 away from the outer furnace door 110, and the first plate structure 101 has a second through hole 1011.

[0036] The driving member 150 comprises a fixed member 151 and a telescopic member 152. The fixed member 151 is arranged on the side of the first plate structure 101 away from the second plate structure 131. The telescopic member 152 is connected with the fixed member 151 and connected with the bearing member 130 through the second through hole 1011. The telescopic member 152 is driven to extend or retract by the fixed member 151 to drive the inner door 120 to close or open the inner opening 92. By arranging the fixed member 151 of the driving member 150 on the side of the first plate structure 101 away from the second plate structure 131, the fixed member 151 is away from the outer door, and the influence of high temperature in the furnace assembly 90 on the fixed member 151 is reduced. In addition, the driving member 150 is generally provided with a sensor, and the sensor is generally arranged on the fixed member 151, so that the sensor of the driving member 150 is away from the outer door, the influence of high temperature in the furnace assembly 90 on the sensor of the driving member 150 is reduced, and the failure probability of the sensor of the driving member 150 is reduced.

[0037] Exemplarily, the driving member 150 is a cylinder, the fixed member 151 is a cylinder barrel, the telescopic member 152 is a cylinder rod, and the sensor of the driving member 150 is a displacement sensor.

[0038] In some embodiments, as shown in Figure 3 and Figure 4 The first heat insulation member 180 is arranged between the outer door 110 and the inner door 120 and connected with the outer door 110, so as to reduce the heat transferred from the inner opening 92 to the outer door 110, and further reduce the influence of high temperature on the sensor of the driving member 150. Exemplarily, the first heat insulation member 180 can be a heat insulation sheet metal, a metal plate or other structure with heat insulation effect.

[0039] As shown in Figure 2 The driving member 150 comprises a cylinder 153. The furnace door assembly 10 further comprises a pressure regulating valve 190, which is in communication with the air inlet 1531 of the cylinder 153. The pressure regulating valve 190 is also in communication with a gas source, so as to adjust the air inlet pressure by the pressure regulating valve 190, so as to control the extension and retraction speed and force of the cylinder 153, to prevent the deformation of the furnace door assembly 10 and the furnace assembly 90 caused by the excessive pushing force of the cylinder 153.

[0040] Exemplarily, as shown in Figure 2 A solenoid valve 270 can be further arranged between the pressure regulating valve 190 and the air inlet 1531 of the cylinder 153, to control the air inlet and air outlet of the cylinder 153. For example, the solenoid valve 270 can be a three-position five-way normally open solenoid valve.

[0041] In some embodiments, as shown in Figure 1 and Figure 2As shown, the support 100 has a third through hole 1012, and the carrier 130 has a fourth through hole 132. The oven door assembly 10 further comprises a guide bearing seat 200, a linear bearing 210, and a guide shaft 220. The guide bearing seat 200 is arranged on the support 100 and coaxially arranged with the third through hole 1012. The linear bearing 210 is arranged in the fourth through hole 132 and coaxially arranged with the fourth through hole 132. A first end 221 of the guide shaft is connected with the outer oven door 110, and a second end 222 of the guide shaft sequentially passes through the linear bearing 210, the third through hole 1012, and the guide bearing seat 200, thereby providing guidance for the movement of the carrier 130.

[0042] In some embodiments, as shown in Figure 2 As shown, the support 100 comprises a first plate structure 101 and a third plate structure 103 connected vertically, and the carrier 130 comprises a second plate structure 131, both of which are arranged in parallel with the outer oven door 110. The oven door assembly 10 further comprises a sensing member 230 and a sensor 240. The sensing member 230 is connected with the second plate structure 131. The sensor 240 is arranged on the third plate structure 103 and correspondingly arranged with the sensing member 230. In the case that the inner oven door 120 covers the inner oven port 92, the sensor 240 can detect the sensing member 230 and send a signal indicating that the inner oven door 120 is in place.

[0043] Illustratively, the sensor 240 is a slot photoelectric sensor, a displacement sensor, or the like. The sensing member 230 is a baffle, a sheet metal member, or the like structure. Illustratively, the sensor 240 can be mounted on the second plate structure 131 through a profile, a bracket, or the like.

[0044] In some embodiments, as shown in Figure 2 and Figure 4 As shown, the oven door assembly 10 further comprises at least one first reinforcing rib 250 and at least one second reinforcing rib 260. The first reinforcing rib 250 connects the outer oven door 110, the first plate structure 101, and the third plate structure 103, thereby improving the stability of the support for the outer oven door 110 and preventing the outer oven door 110 from deforming. The second reinforcing rib 260 connects the first plate structure 101 and the first reinforcing rib 250, thereby further improving the stability of the support for the outer oven door 110.

[0045] The embodiments of the present disclosure also provide a reaction furnace system. As shown in Figure 1 The reaction furnace system 1 comprises an oven body assembly 90, an oven door assembly 10, and a boat pushing assembly 20. The oven body assembly 90 has an outer oven port 91 and an inner oven port 92. The oven door assembly 10 is configured to cover the outer oven port 91 and the inner oven port 92. The boat pushing assembly 20 is connected with the oven door assembly 10 and is configured to drive the oven door assembly 10 to cover the outer oven port 91.

[0046] Exemplarily, the boat pushing assembly 20 can be a mechanical hand, or other assembly capable of realizing linear driving, and the present disclosure does not make specific limitation.

[0047] Since the reaction furnace system 1 comprises the furnace door assembly 10, the reaction furnace system 1 has all the technical features and technical effects of the furnace door assembly 10, which will not be repeated here.

[0048] In the embodiments of the present disclosure, if not specifically limited, the form of connection can be detachable connection through bolts and nuts, screws, buckles, magnetic attraction and the like. In some connections, if the form of detachable cooperation is not specifically limited, it can be connected in a non-detachable manner through welding, bonding and the like.

[0049] The above describes the basic principles of the present disclosure in combination with specific embodiments, but it should be pointed out that the advantages, advantages, effects and the like mentioned in the present disclosure are only examples and not limitations, and these advantages, advantages, effects and the like cannot be considered as the must-have of each embodiment of the present disclosure. In addition, the above specific details are only for the purpose of example and for the purpose of understanding, and the above details do not limit the present disclosure to the above specific details.

[0050] The block diagrams of the devices, apparatuses, equipment, systems involved in the present disclosure are only illustrative examples and are not intended to require or imply that the connection, arrangement, configuration must be as shown in the block diagram. As those skilled in the art will recognize, these devices, apparatuses, equipment, systems can be connected, arranged, configured in any manner. Words such as "include", "contain", "have" and the like are open-ended words, mean "including but not limited to", and can be used interchangeably. The words "or" and "and" used herein mean the word "and / or", and can be used interchangeably unless the context clearly indicates otherwise. The word "such as" used herein means the phrase "such as but not limited to", and can be used interchangeably.

[0051] It should also be noted that in the devices, equipment and methods of the present disclosure, each component or each step can be decomposed and / or recombined. These decompositions and / or recombinations should be considered as equivalent solutions of the present disclosure.

[0052] The above description of the disclosed aspects is provided so that any person skilled in the art can make or use the present disclosure. Various modifications to these aspects will be apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of the present disclosure. Therefore, the present disclosure is not intended to be limited to the aspects shown herein, but rather is to be accorded the broadest scope consistent with the principles and novel features disclosed herein.

[0053] The foregoing description has been presented for the purposes of illustration and description. Furthermore, the description is not intended to limit the embodiments of the disclosure to the forms disclosed herein. Although the various example aspects and embodiments have been described herein with regard to particular aspects and embodiments, those skilled in the art will recognize that certain modifications, changes, substitutions, additions and sub-combinations can be made without departing from the spirit of the disclosure.

Claims

1. A fire door assembly, characterized by, The application is applied to a furnace body assembly with an outer furnace mouth and an inner furnace mouth, and the furnace door assembly comprises: a support connected with a boat pushing assembly and capable of moving under the drive of the boat pushing assembly; an outer furnace door vertically arranged and connected with the support and capable of covering or opening the outer furnace mouth under the drive of the boat pushing assembly, the outer furnace door having at least one first through hole; an inner furnace door arranged in parallel with the outer furnace door; a bearing member arranged on a side of the outer furnace door away from the inner furnace door; at least one bearing column, a first end of the bearing column being connected with the inner furnace door, and a second end of the bearing column passing through the first through hole and being connected with the bearing member; a driving member arranged on the support and connected with the bearing member, the driving member being configured to drive the bearing member to move close to or away from the outer furnace door, so that the bearing member drives the inner furnace door to move away from or close to the outer furnace door through the bearing column, to cover or open the inner furnace mouth; a wear-resistant member connected with the outer furnace door, arranged between the outer furnace door and the inner furnace door, and arranged below the bearing column and in abutment with the bearing column.

2. The fire door assembly of claim 1, wherein, The wear-resistant member comprises: a mounting portion connected with the outer furnace door; a contact portion detachably connected with the mounting portion and in abutment with the bearing column.

3. The furnace door assembly according to claim 2, wherein: the mounting portion has a mounting groove with an opening facing upward, the bottom of the contact portion being arranged in the mounting groove, and the top of the contact portion being in abutment with the bearing column; and / or, the top of the contact portion has an arc-shaped groove extending along the axial direction of the bearing column, the bearing column being in abutment with the inner wall of the arc-shaped groove, wherein the shape of the cross section of the arc-shaped groove is adapted to the shape of the cross section of the bearing column.

4. The fire door assembly of claim 1, wherein, Further comprising: an elastic sealing tube sleeved on the outer side of the bearing column, a first end of the elastic sealing tube being connected with the outer furnace door, and a second end of the elastic sealing tube being connected with the bearing member.

5. The fire door assembly of any one of claims 1 to 4, wherein, The support comprises a first plate-shaped structure, the bearing member comprises a second plate-shaped structure, the first plate-shaped structure and the second plate-shaped structure are arranged in parallel with the outer furnace door, the first plate-shaped structure is arranged on a side of the second plate-shaped structure away from the outer furnace door, and the first plate-shaped structure has a second through hole; the driving member comprises: a fixing member arranged on a side of the first plate-shaped structure away from the second plate-shaped structure; a telescopic member connected with the fixing member and connected with the bearing member through the second through hole, the telescopic member being telescopic under the drive of the fixing member to drive the inner furnace door to cover or open the inner furnace mouth.

6. The furnace door assembly according to claim 5, wherein: the furnace door assembly further comprises a first heat insulation member arranged between the outer furnace door and the inner furnace door and connected with the outer furnace door; and / or, the driving member comprises a pneumatic cylinder, and the furnace door assembly further comprises a pressure regulating valve in communication with the air inlet of the pneumatic cylinder and further in communication with a gas source.

7. The fire door assembly of any one of claims 1 to 4, wherein, The support has a third through hole, the bearing member has a fourth through hole, and the furnace door assembly further comprises: A guide bearing seat is arranged on the support and coaxially arranged with the third through hole; A linear bearing is arranged in the fourth through hole and coaxially arranged with the fourth through hole; A guide shaft, a first end of the guide shaft is connected with the outer furnace door, a second end of the guide shaft sequentially passes through the linear bearing, the third through hole and the guide bearing seat.

8. The fire door assembly of any one of claims 1 to 4, wherein, The support comprises a first plate structure and a third plate structure connected vertically, and the carrier comprises a second plate structure, and the first plate structure and the second plate structure are arranged in parallel with the outer furnace door; The furnace door assembly further comprises: A sensing member connected with the second plate structure; A sensor arranged on the third plate structure and arranged correspondingly with the sensing member, wherein, in the case that the inner furnace door covers the inner furnace port, the sensor can detect the sensing member and send a signal to the right position.

9. The fire door assembly of claim 8, wherein, Further comprising: At least one first reinforcing rib connecting the outer furnace door, the first plate structure and the third plate structure; At least one second reinforcing rib connecting the first plate structure and the first reinforcing rib.

10. A reactor system characterized by, Comprise: A furnace body assembly having an outer furnace port and an inner furnace port; The furnace door assembly of any one of claims 1 to 9 is configured to cover the outer furnace port and the inner furnace port; A push boat assembly connected with the furnace door assembly and configured to drive the furnace door assembly to cover the outer furnace port.

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