Online thermal imaging temperature measurement rack

By designing an online thermal imaging temperature measurement platform, and adopting a constant temperature water bath and gear transmission system, the problems of high cost and complex operation of existing equipment have been solved, realizing high-precision and rapid temperature measurement of semiconductor components, which is suitable for the widespread use of infrared thermal imagers.

CN223815159UActive Publication Date: 2026-01-20NANJING CHUANGLIAN INTELLIGENT SOFT INFORMATION TECH CO LTD
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Patent Information

Application Number
CN202520596941.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-04-01
Publication Date
2026-01-20
Estimated Expiration
2035-04-01

AI Technical Summary

Technical Problem

Existing infrared thermal imaging temperature measurement equipment is expensive, difficult to operate and maintain, and cannot be widely adopted. In particular, in the semiconductor industry, the accuracy of temperature measurement is affected by inaccurate emissivity and ambient temperature, resulting in low efficiency.

Method used

An online thermal imaging temperature measurement platform is designed, which adopts a constant temperature water bath and gear transmission system, combined with an infrared thermal imager, to build a stable background temperature, simplify the operation process, and is suitable for rapid temperature measurement of micro-sized semiconductor components.

Benefits of technology

It achieves high-precision and rapid temperature measurement in semiconductor components, reduces equipment costs, simplifies operation, and is suitable for the temperature measurement needs of general infrared thermal imagers.

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Abstract

The utility model discloses an online thermal imaging temperature measuring rack, which relates to the technical field of thermal imaging temperature measuring equipment and comprises a bottom plate, a stand column is fixedly arranged on one side of the bottom plate, a rack is vertically fixed on one side, corresponding to the bottom plate, of the stand column, a sliding seat is arranged on the stand column and located on one side of the rack in a sliding mode, and a gear meshed with the rack is arranged in the sliding seat. A locking mechanism for locking the gear is also arranged in the sliding seat; a temperature control table is fixedly arranged on the bottom plate and is connected with a constant-temperature water tank; and an infrared thermal imager is fixedly arranged on one side, corresponding to the temperature control table, of the sliding seat. According to the utility model, a stable background temperature can be established for the infrared temperature measurement of the semiconductor component, the operation is simple, the temperature measurement is rapid, and an infrared thermal imager can be assisted to rapidly and accurately measure the temperature of a micro-miniature semiconductor component.
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Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of thermal imaging temperature measuring equipment, specifically relates to an online thermal imaging temperature measuring rack. BACKGROUND

[0002] With the maturity of infrared thermal imaging technology, more and more industries adopt infrared thermal imager to measure temperature rapidly, and infrared thermal imaging technology has been widely applied in forest fire prevention, security and fire protection, electronic system, gold manufacturing and other industries. In recent years, with the rise of semiconductor industry, infrared thermal imaging technology is also applied to the temperature detection of small semiconductor materials such as power devices, which can quickly measure the heating temperature of semiconductor components during work, and can quickly select unqualified components by observing temperature anomalies, thereby accelerating the detection efficiency of electronic components.

[0003] Since infrared thermal imaging technology adopts the thermal reflectivity calculation principle, the accuracy of the temperature measurement result depends seriously on the accuracy of the reflectivity estimation. The semiconductor material has low emissivity at room temperature, and when using infrared temperature measurement, temperature error is prone to occur due to inaccurate emissivity measurement. At the same time, the component needs to be measured in the powered working state, and its own heating will cause the ambient temperature to gradually increase, further affecting the measurement of emissivity. Therefore, when measuring the temperature of electronic components by using thermal imaging, a high and stable background temperature needs to be created for the components to improve the temperature measurement accuracy. At present, there are existing thermal testing equipment for semiconductor industry temperature measurement on the market. This kind of equipment uses a built-in liquid nitrogen circulation system to build a low-temperature constant temperature environment, and the system has high integration, accurate temperature measurement, but the use cost is high, the operation and maintenance are difficult, the efficiency is low, and it cannot be popularized in a large range. Based on this, we provide an online thermal imaging test rack. UTILITARIAN CONTENT

[0004] The utility model aims at solving the shortcomings of high cost, difficult operation and maintenance, low efficiency and wide range of popularization in the prior art, and provides an online thermal imaging temperature measuring rack. The online thermal imaging temperature measuring rack can build a stable background temperature for infrared temperature measurement of semiconductor components, and is simple to operate, rapid in temperature measurement and suitable for general infrared thermal imager component temperature measurement requirements.

[0005] In order to achieve the above purpose, the utility model adopts the following technical scheme:

[0006] The utility model designs an online thermal imaging temperature measuring rack, which comprises a base plate, a stand column fixed on one side of the base plate, a rack vertically fixed on the side of the base plate corresponding to the stand column, a sliding seat slidingly arranged on the stand column and located on one side of the rack, a gear meshing with the rack arranged in the sliding seat, and a locking mechanism for locking the gear in the sliding seat; a temperature control table is fixed on the base plate and connected with a constant temperature water tank; an infrared thermal imager is fixed on one side of the sliding seat corresponding to the temperature control table.

[0007] Further, the cross section of the stand column is in a stepped shape, which is narrow in front and wide at the back, and a convex part is arranged in front of the narrowest part to form an inner recessed sliding groove with the back step, and the sliding seat is slidingly connected in the sliding groove.

[0008] Further, the sliding seat is composed of an upper iron plate, a left iron plate, a lower iron plate and a right iron plate, and the left iron plate and the right iron plate are provided with sliding blocks matched with the sliding groove on the side of the stand column.

[0009] Further, the rack is a helical rack, and the gear is a helical gear.

[0010] Further, the utility model further comprises a limiting block in an arc shape, which is clamped on the stand column at both ends and located below the sliding seat, and a limiting clamping strip is arranged on the limiting block corresponding to the position of the rack, and the limiting clamping strip is fixed by bolts and meshed with the rack.

[0011] Further, the locking mechanism comprises a pull-tab switch, a ratchet wheel, a rotating shaft, a spring and a buckle, the ratchet wheel is fixedly connected with the rotating shaft on the left and right iron plates by a key, one end of the pull-tab switch is a pull-tab, the other end is an incomplete cylinder, and a convex angle limiting part is further arranged in the middle, the pull-tab switch passes through the right iron plate and is movably connected with the right iron plate, an angle limiting hole is arranged on the right iron plate, and the angle limiting part on the pull-tab switch movably cooperates with the angle limiting hole on the right iron plate; first and second fixed pins are arranged on the right iron plate, one end of the buckle is a pointed body, the other end is a slotted column, and a pin hole is arranged, the buckle is installed on the first fixed pin through the pin hole, the spring is a tensile spring and is in a tensile state during work, one end of the spring is connected with the column of the buckle, and the other end is connected with the second fixed pin.

[0012] Further, at least three through holes are arranged on the base plate in parallel, the through holes are wide at the bottom and narrow at the top, have steps, and the temperature control table is fixedly connected with the through holes by bolts.

[0013] Further, the temperature control table is a block-shaped body with a ladder section, and a serpentine pipeline is arranged in the temperature control table, the serpentine pipeline has an outlet and an inlet, and the outlet and the inlet of the serpentine pipeline are respectively communicated with the constant temperature water tank.

[0014] Further, the front of the sliding seat is fixedly provided with a vertical plate for mounting the infrared thermal imager.

[0015] The online thermal imaging temperature measuring rack has the advantages that a stable background temperature can be constructed for infrared temperature measurement of semiconductor components, operation is simple, temperature measurement is rapid, and the infrared thermal imager can be used to rapidly and accurately measure the temperature of small semiconductor components. BRIEF DESCRIPTION OF DRAWINGS

[0016] The accompanying drawings are used to provide a further understanding of the present application, and constitute a part of the specification, and are used to explain the present application together with embodiments of the present application, and do not constitute a limitation on the present application. In the drawings:

[0017] Figure 1 is a structural schematic view of the present application;

[0018] Figure 2 is a schematic view of the bottom of the bottom plate in the present application;

[0019] Figure 3 is a schematic view of the internal structure of the temperature control plate table in the present application;

[0020] Figure 4 is an exploded structural schematic view of the sliding seat in the present application;

[0021] Figure 5 is a principle diagram of the operation of the pull-tab switch in the present application;

[0022] In the drawings, 1 is a bottom plate, 101 is a through hole groove, 2 is a stand, 3 is a limiting block, 4 is a sliding seat, 5 is a temperature control table, 501 is a serpentine pipe, 6 is a constant-temperature water tank, 7 is an infrared thermal imager, 8 is a rack, 9 is a limiting clamping strip, 10 is a vertical plate, 11 is a pull-tab switch, 1101 is a cylinder, 1102 is an angle limiting part, 12 is a gear, 13 is a ratchet, 14 is a rotating shaft, 15 is a spring, 16 is a buckle, 17 is an upper iron plate, 18 is a left iron plate, 19 is a lower iron plate, 20 is a right iron plate, 2001 is a first fixed pin, 2002 is a second fixed pin, and 2003 is an angle limiting hole. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application; obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application, and all other embodiments obtained by those skilled in the art on the basis of the embodiments of the present application without creative labor belong to the scope of protection of the present application.

[0024] In the description of the utility model, it needs to explain, the terms "upper", "lower", "left", "right", "internal", "external", "top / bottom end" and so on indicate the orientation or position relation based on the orientation or position relation shown in the drawing, only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as the restriction to the utility model. In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0025] In the description of the utility model, it needs to explain, unless another explicit provision and limitation, the terms "installation", "set with", "sleeve set / interface", "connection" and so on, should do the broad sense, for example "connection", can be fixed connection, also can be detachable connection, or integrally connected, can be mechanical connection, also can be electrical connection, can be directly connected, also can be indirectly connected through the intermediate medium, can be the communication inside two elements. For the ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0026] Now the structure characteristics of the utility model are described in detail in combination with the drawings of the specification.

[0027] Referring to Figures 1-5 , an online thermal imaging temperature measurement rack, including the bottom plate 1, the bottom plate 1 is rectangular metal sheet, the bottom plate 1 is opened ten parallel through holes 101, the through hole 101 is wide below and narrow above, and the width above is 7mm, and the width below is 11mm, and the hole groove between upper and lower forms a step, the bottom plate 1 also has four groups of M6 bolts and nuts, the bolt passes through the through hole 101 on the bottom plate 1 from above, and the nut is clamped on the hole groove step below the bottom plate 1, the four corners of the bottom plate 1 are round corners, there are screw holes in the center of the round corners, four rubber seats are installed, and the rubber seat can reduce the vibration of the bottom plate 1 by deformation. One side of the bottom plate 1 is fixedly provided with a stand 2, and the stand 2 below contains a rectangular mounting table, the rectangular mounting table has four screw holes, the bottom plate 1 also has four screw holes, and the stand 2 is fixedly connected with the bottom plate 1 through the screw on the rectangular mounting table. The stand 2 vertically fixes a rack 8 corresponding to one side of the bottom plate 1, and the stand 2 is slidably provided with a sliding seat 4 on one side of the rack 8, in order to stably connect the sliding seat 4 on the stand 2, wherein the cross section of the stand 2 is ladder-shaped, the front is narrow and the rear is wide, and the front of the narrowest part contains a protruding part, and the protruding part and the rear ladder form an inner recessed sliding groove, and the sliding seat 4 is slidably connected in the sliding groove.

[0028] Further comprising a limiting block 3, the limiting block 3 is arched, and is clamped on the stand column 2 and below the sliding seat 4, the limiting block 3 is provided with a limiting clamping strip 9 corresponding to the position of the rack 8, the limiting clamping strip 9 is fixed by bolts and engaged with the rack 8. The limiting block 3 and the limiting clamping strip 9 are flatly matched, and after being fixedly connected by bolts, the limiting clamping strip 9 is clamped on the rack 8, so that the limiting block 3 is fixed. The limiting block 3 prevents the upper sliding seat 4 from falling suddenly and damaging the lens of the infrared thermal imager 7 installed above.

[0029] The sliding seat 4 is composed of an upper iron plate 17, a left iron plate 18, a lower iron plate 19 and a right iron plate 20, the left iron plate 18 and the right iron plate 20 are provided with sliding blocks matched with the sliding grooves on one side of the stand column 2. The sliding seat 4 is provided with a gear 12 engaged with the rack 8, the gear 12 and the rack 8 are engaged and transmitted, the gear 12 is a 1.5-groove 20-toothed bevel gear, and the rack 8 is a bevel rack, and the sliding seat 4 is further provided with a locking mechanism for locking the gear 12, wherein the locking mechanism comprises a pull-tab switch 11, a ratchet wheel 13, a rotating shaft 14, a spring 15 and a buckle 16, the ratchet wheel 13 is fixedly connected with the rotating shaft 14 on the left iron plate 18 and the right iron plate 20 through a key, and the left and right ends of the rotating shaft 14 are located in the shaft holes on the left iron plate 18 and the right iron plate 20 respectively. One end of the pull-tab switch 11 is a pull-tab, the other end is an incomplete cylinder 1101, and a protruding angle limiting part 1102 is further included in the middle, the pull-tab switch 11 passes through the right iron plate 20 and is movably connected with the right iron plate 20, the right iron plate 20 is provided with an angle limiting hole 2003, the angle limiting part 1102 on the pull-tab switch 11 is placed in the angle limiting hole 2003 on the right iron plate 20, and the angle limiting hole 2003 is a sector hole, and after cooperation with the angle limiting part 1102, the rotation angle range of the pull-tab switch 11 is limited to 90 degrees. The right iron plate 20 is further provided with a first fixed pin 2001 and a second fixed pin 2002, one end of the buckle 16 is a triangular pointed body, the other end is a slotted cylinder, and there is a pin hole, the buckle 16 is installed on the first fixed pin 2001 of the right iron plate 20 through the pin hole in the pointed body, the spring 15 is a tensile spring, one end of the spring 15 is hooked in the cylinder slot of the buckle 16, and the other end is hooked on the second fixed pin 2002 on the right iron plate 20, and is kept in a tensile state. When Figure 5 When the pull-tab switch 11 shown in the figure is pulled to the right, the buckle 16 is above the ratchet wheel 13 and does not contact the ratchet wheel 13, at this time the ratchet wheel 13, the gear 12 and the rotating shaft 14 can rotate together, and when the pull-tab switch 11 is turned to the left by 90 degrees, the buckle 16 clamps the ratchet wheel 13, thereby locking the gear 12.

[0030] The temperature control table 5 is fixedly arranged on the bottom plate 1, is fixedly connected on the through hole groove 101 through a bolt and a nut, is fixed on the bottom plate 1, and is connected with the constant-temperature water tank 6. The temperature control table 5 is a block-shaped body with a "convex" letter-shaped stepped section, is made of aluminum alloy, is internally provided with a serpentine pipeline 501, and has one outlet and one inlet. The outlet and the inlet of the serpentine pipeline 501 are respectively connected with the water inlet and the water outlet of the constant-temperature water tank 6 through hoses. The constant-temperature water tank 6 is internally provided with circulating pure water, has heating and cooling temperature control functions, and can stabilize the temperature of the temperature control table 5 by controlling the flow of the circulating cooling water.

[0031] The infrared thermal imager 7 is fixedly arranged on one side of the sliding seat 4 corresponding to the temperature control table 5. The infrared thermal imager 7 is a mature product, can measure a temperature value by calculating the thermal radiation emissivity of a material, and can output a temperature cloud picture by using software calculation. The vertical plate 10 for mounting the infrared thermal imager 7 is fixedly arranged in front of the sliding seat 4. The vertical plate 10 is fixed on the left iron plate 18 and the right iron plate 20 of the sliding seat 4 through six "I" letter head screws.

[0032] The online thermal imaging temperature measurement rack has simple structure, is easy to operate, can construct a stable background temperature for infrared temperature measurement of semiconductor components, is simple to operate, can rapidly measure temperature, and is suitable for general infrared thermal imager component temperature measurement requirements.

[0033] The above only describes preferred embodiments of the utility model and is not used for limiting the utility model. Although the utility model is described in detail with reference to the foregoing embodiments, the skilled in the art can still modify the technical solutions recorded in the foregoing embodiments or make equivalent replacement to some technical features. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the utility model should be included in the protection scope of the utility model.

Claims

1. An online thermal imaging temperature measurement platform, comprising a base plate (1), a vertical column (2) is fixed on one side of the base plate (1), characterized in that, The vertical column (2) is vertically fixed with a rack (8) on one side of the bottom plate (1), a sliding seat (4) is slidably arranged on the vertical column (2) and located on one side of the rack (8), the sliding seat (4) is internally provided with a gear (12) engaged with the rack (8), and the sliding seat (4) is further internally provided with a locking mechanism for locking the gear (12); The bottom plate (1) is fixedly provided with a temperature control table (5), and the temperature control table (5) is connected with a constant-temperature water tank (6); An infrared thermal imager (7) is fixedly arranged on one side of the temperature control table (5) of the sliding seat (4).

2. The online thermal imaging temperature measurement platform according to claim 1, wherein, The vertical column (2) has a stepped cross section, which is narrow in front and wide at the back, and a protruding part is arranged in front of the narrowest part to form a concave sliding groove with the back step, and the sliding seat (4) is slidably connected in the sliding groove.

3. An online thermal imaging temperature measurement platform according to claim 2, wherein, The sliding seat (4) is composed of an upper iron plate (17), a left iron plate (18), a lower iron plate (19) and a right iron plate (20) which are fixedly connected by splicing, the left iron plate (18) and the right iron plate (20) are provided with sliding blocks matched with the sliding groove on one side of the vertical column (2).

4. The online thermal imaging temperature measurement platform according to claim 1, wherein, The rack (8) is a helical rack, and the gear (12) is a helical gear.

5. The online thermal imaging temperature measurement platform according to claim 1, wherein, Further comprising a limiting block (3) which is arc-shaped, clamped on the vertical column (2) at both ends and located below the sliding seat (4), the limiting block (3) is provided with a limiting clamping strip (9) corresponding to the position of the rack (8), the limiting clamping strip (9) is fixed by bolts and engaged with the rack (8).

6. The online thermal imaging temperature measurement platform according to claim 3, wherein, The locking mechanism comprises a pull-tab switch (11), a ratchet wheel (13), a rotating shaft (14), a spring (15) and a buckle (16), the ratchet wheel (13) is fixedly connected with the rotating shaft (14) on the left and right iron plates (18, 20) through a key, one end of the pull-tab switch (11) is a pull-tab, the other end is an incomplete cylinder (1101), and a protruding angle limiting part (1102) is further arranged in the middle, the pull-tab switch (11) passes through the right iron plate (20) and is movably connected with the right iron plate (20), the right iron plate (20) is provided with an angle limiting hole (2003), and the angle limiting part (1102) of the pull-tab switch (11) is movably matched with the angle limiting hole (2003) of the right iron plate (20); The right iron plate (20) is further provided with a first fixed pin (2001) and a second fixed pin (2002), one end of the buckle (16) is a pointed body, the other end is a slotted column, and there is a pin hole, the buckle (16) is installed on the first fixed pin (2001) through the pin hole, the spring (15) is a tensile spring and is in a stretched state during work, one end of the spring (15) is connected to the column of the buckle (16), and the other end is connected to the second fixed pin (2002).

7. The online thermal imaging temperature measurement platform according to claim 1, wherein, The bottom plate (1) is provided with at least three parallel through holes (101), the through holes (101) are wide at the bottom and narrow at the top, have steps, and the temperature control table (5) is fixedly connected to the through holes (101) by bolts.

8. The online thermal imaging temperature measurement platform according to claim 1, wherein, The temperature control platform (5) is a stepped section block, and a serpentine pipeline (501) is arranged in the temperature control platform (5), wherein the serpentine pipeline (501) has an outlet and an inlet, and the outlet and the inlet of the serpentine pipeline (501) are communicated with the constant-temperature water tank (6) respectively.

9. The online thermal imaging temperature measurement platform according to claim 1, wherein, A vertical plate (10) for mounting the infrared thermal imager (7) is arranged at the front of the sliding seat (4).