Photoresist coating device

Abstract

The utility model discloses a photoresist coating device, which relates to the technical field of coating devices and comprises a base, the top of the base is provided with a longitudinal adjusting frame, the top of the longitudinal adjusting frame is provided with a transverse adjusting frame, the bottom of the transverse adjusting frame is movably provided with an ultrasonic spraying head, and the bottom of the ultrasonic spraying head is provided with an ultrasonic spraying head. An electric push rod is fixedly arranged at the top of the base, a workbench is fixedly arranged at the extending end of the electric push rod, an adsorption cavity is formed in the workbench, a plurality of adsorption holes are formed in the top face of the workbench and communicate with the adsorption cavity, and a piston disc is movably arranged in the adsorption cavity. And a driving rod is rotationally arranged on the inner top wall of the adsorption cavity. When the driving rod rotates, the piston disc is promoted to move downwards, air flow in the adsorption cavity is pushed into the air spraying head along with continuous downward movement of the piston disc, the air spraying head sprays the air flow to blow the surface of the LCD glass substrate, and therefore blowing of the surface of the LCD glass substrate is more convenient.

Description

TECHNICAL FIELD

[0001] The utility model relates to coating device technical field especially is related to a photoresist coating device. BACKGROUND

[0002] Photoresist, also known as photoresist, is a kind of etching film material whose solubility changes by irradiation or radiation of ultraviolet light, electron beam, ion beam, X-ray etc., used as anticorrosive coating material in photoetching process, and LCD glass substrate needs to be coated with photoresist on the LCD glass substrate during processing.

[0003] The prior art (publication number: CN221056826U) discloses a photoresist coating device, which improves the convenience of chip glue cleaning before coating, reduces the labor intensity of manual coating operation, and improves the coating quality;Including suction box and workbench, the workbench is installed at the top of the suction box, and the top of the workbench is provided with suction holes in the middle part.In the process of realizing the scheme, it is found that the following problems exist in the prior art, which have not been well solved: the device needs to send air to the air blowing box inside through an external air source when in use, so that multiple air blowing pipes blow air to clean the chip surface, so that the chip surface is cleaned more troublesome. UTILITY MODEL CONTENTS

[0004] In order to improve the above-mentioned problem that the device needs to send air to the air blowing box inside through an external air source when in use, so that multiple air blowing pipes blow air to clean the chip surface, so that the chip surface is cleaned more troublesome.

[0005] The utility model provides a photoresist coating device, adopts the following technical scheme:

[0006] A photoresist coating device, comprising a base, the top of the base is provided with a longitudinal adjusting frame, the top of the longitudinal adjusting frame is provided with a transverse adjusting frame, the bottom of the transverse adjusting frame is movably provided with an ultrasonic wave spraying head, the top of the base is fixedly provided with an electric push rod, the protruding end of the electric push rod is fixedly provided with a workbench, the workbench is provided with a suction cavity, the top surface of the workbench is provided with a plurality of suction holes, the suction holes are communicated with the suction cavity, the suction cavity is movably provided with a piston disc, the inner top wall of the suction cavity is rotatably provided with a driving rod, the driving rod penetrates through the piston disc and protrudes out of the workbench and is movably inserted with the top surface of the base, the base and the piston disc are both provided with a semicircular block, the semicircular block is slidably matched with the outer wall of the driving rod, the bottom of the workbench is fixedly inserted with a gas jet head, and the gas outlet end of the gas jet head penetrates through the workbench and protrudes out of the top surface of the workbench.

[0007] Through the technical scheme, the LCD glass substrate is placed on the workbench, and then the workbench and the driving rod are pushed up by the electric push rod, the semicircular block in the base moves along the outer wall of the driving rod with the movement of the driving rod, so as to rotate the driving rod, the semicircular block in the piston disc moves along the outer wall of the driving rod with the rotation of the driving rod, so as to move the piston disc down, and the adsorption hole is used for adsorbing and fixing the LCD glass substrate with the movement of the piston disc.

[0008] Optionally, in the photoresist coating device, the longitudinal adjusting frame comprises two supports, the top of one of the supports is rotationally provided with a first screw rod, the outer wall of the support is fixedly provided with a first motor, the rotating shaft of the first motor is fixedly connected with one end of the first screw rod, and the top of the other support is fixedly provided with a circular rod.

[0009] Through the technical scheme, the two supports are used for supporting the transverse adjusting frame, the first motor is used for rotating the first screw rod, and the transverse adjusting frame is moved with the rotation of the first screw rod.

[0010] Optionally, in the photoresist coating device, the transverse adjusting frame comprises a movable frame, the two ends of the movable frame are inserted into the two supports and are sleeved on the first screw rod and the circular rod respectively, one end of the movable frame is threadedly connected with the first screw rod, the bottom of the movable frame is rotationally provided with a second screw rod, the outer wall of the movable frame is fixedly provided with a second motor, the rotating shaft of the second motor is fixedly connected with one end of the second screw rod, and the ultrasonic spraying head is threadedly sleeved on the second screw rod.

[0011] Through the technical scheme, the second motor is used for rotating the second screw rod, and the ultrasonic spraying head is moved with the rotation of the second screw rod, so that the position of the ultrasonic spraying head is adjusted transversely.

[0012] Optionally, in the photoresist coating device, the top of the base is fixedly provided with a circular ring, the driving rod is movably inserted into the circular ring, and the semicircular block is fixedly arranged in the circular ring.

[0013] Through the technical scheme, when the workbench moves, the driving rod moves along the inner wall of the circular ring, and at this time, the semicircular block slides along the outer wall of the driving rod, so as to rotate the driving rod.

[0014] Optionally, in the photoresist coating device, the outer wall of the piston disc is fixedly provided with a plurality of limiting blocks, the limiting blocks are in sliding cooperation with the inner wall of the adsorption cavity, the top surface of the piston disc is provided with a through hole for the driving rod to pass through, and the semicircular block is fixedly arranged in the through hole.

[0015] When the driving rod rotates, the semicircular block in the base slides along the inner wall of the helical groove, so as to drive the driving rod to rotate.

[0016] Optionally, in the photoresist coating device, the outer wall of the driving rod is provided with a helical groove, and the semicircular block is in sliding fit with the inner wall of the helical groove.

[0017] When the workbench drives the driving rod to rotate, the semicircular block in the base slides along the inner wall of the helical groove, so as to drive the driving rod to rotate.

[0018] Optionally, in the photoresist coating device, the air jet head is vertically inserted into the top surface of the workbench, the air inlet end of the air jet head is fixedly inserted into the bottom surface of the workbench, and the air inlet end of the air jet head is in communication with the bottom of the adsorption cavity.

[0019] When the piston disc moves downward, the air flow in the adsorption cavity is pushed into the air jet head, and then the air flow is sprayed by the air jet head to blow the surface of the LCD glass substrate.

[0020] The utility model discloses at least one beneficial effect as follows:

[0021] When the driving rod rotates, the piston disc moves downward, and the air flow in the adsorption cavity is pushed into the air jet head, and then the air flow is sprayed by the air jet head to blow the surface of the LCD glass substrate, so that the surface of the LCD glass substrate is blown more conveniently.

[0022] The workbench and the driving rod are driven by the electric push rod to move upward, the semicircular block in the base slides along the outer wall of the driving rod, so as to drive the driving rod to rotate, the semicircular block in the piston disc slides along the outer wall of the driving rod, so as to drive the piston disc to move downward, and the adsorption hole adsorbs and fixes the LCD glass substrate. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 is the three-dimensional structure schematic diagram of the utility model;

[0024] Figure 2 is the local three-dimensional structure section view of the utility model;

[0025] Figure 3 is the local three-dimensional structure section view of the utility model;

[0026] Figure 4 is the local three-dimensional structure section view of the workbench of the utility model.

[0027] In the figure: 1, base; 2, longitudinal adjusting frame; 21, support; 22, first screw; 23, first motor; 24, round rod; 3, transverse adjusting frame; 31, movable frame; 32, second screw; 33, second motor; 4, ultrasonic spraying head; 5, electric push rod; 6, workbench; 7, adsorption cavity; 8, adsorption hole; 9, piston disc; 91, limiting block; 92, through hole; 10, driving rod; 101, spiral groove; 11, semicircular block; 12, air jet head; 13, circular ring. DETAILED DESCRIPTION

[0028] The following will be described in detail in combination with the accompanying drawings. Figures 1-4 The utility model makes further detailed explanation.

[0029] Please refer to the accompanying drawings in the specification Figures 1-4 The utility model provides a kind of photoresist coating device, including base 1, the top of base 1 is provided with longitudinal adjusting frame 2, the top of longitudinal adjusting frame 2 is provided with transverse adjusting frame 3, and the bottom of transverse adjusting frame 3 is movably provided with ultrasonic spraying head 4, longitudinal adjusting frame 2 includes two supports 21, and the top of one of support 21 is rotatably provided with first screw 22, and the outer wall of support 21 is fixedly provided with first motor 23, and the rotating shaft of first motor 23 is fixedly connected with one end of first screw 22, and the top of another support 21 is fixedly provided with round rod 24, and transverse adjusting frame 3 is supported by two supports 21 cooperation, first motor 23 is conveniently driven first screw 22 rotation, with the rotation of first screw 22, the position of transverse adjusting frame 3 and ultrasonic spraying head 4 is conveniently controlled to be longitudinally adjusted.

[0030] Transverse adjusting frame 3 includes movable frame 31, and the both ends of movable frame 31 are inserted into two supports 21 respectively and are respectively sleeved on first screw 22 and round rod 24, and one end of movable frame 31 is threadedly connected with first screw 22, and the bottom of movable frame 31 is rotatably provided with second screw 32, and the outer wall of movable frame 31 is fixedly provided with second motor 33, and the rotating shaft of second motor 33 is fixedly connected with one end of second screw 32, and ultrasonic spraying head 4 is threadedly sleeved on second screw 32, when first screw 22 is rotated, the position of transverse adjusting frame 3 and ultrasonic spraying head 4 is conveniently adjusted longitudinally, and the stability when transverse adjusting frame 3 moves is increased by limiting transverse adjusting frame 3 through round rod 24, so that the position of ultrasonic spraying head 4 is conveniently adjusted transversely by the rotation of second motor 33 conveniently driven second screw 32, with the rotation of second screw 32, ultrasonic spraying head 4 is conveniently controlled to move.

[0031] It should be noted that ultrasonic spraying head 4 is prior art equipment.

[0032] The top of the base 1 is fixedly provided with an electric push rod 5, and the extending end of the electric push rod 5 is fixedly provided with a workbench 6. The workbench 6 is moved by the electric push rod 5, and the distance between the LCD glass substrate and the ultrasonic spraying head 4 on the workbench 6 is adjusted.

[0033] The workbench 6 is provided with a suction cavity 7, and the top surface of the workbench 6 is provided with a plurality of suction holes 8. The suction holes 8 are communicated with the suction cavity 7, and the suction cavity 7 is movably provided with a piston disc 9. When the piston disc 9 moves downward, the suction holes 8 are used to adsorb and fix the LCD glass substrate.

[0034] The inner top wall of the suction cavity 7 is rotatably provided with a driving rod 10. The driving rod 10 extends out of the workbench 6 through the piston disc 9 and is movably inserted into the top surface of the base 1. The base 1 and the piston disc 9 are both provided with a semicircular block 11. The semicircular block 11 is slidably connected with the outer wall of the driving rod 10. Then the workbench 6 and the driving rod 10 are moved upward by the electric push rod 5. When the driving rod 10 moves, the semicircular block 11 in the base 1 slides along the outer wall of the driving rod 10, so as to rotate the driving rod 10. When the driving rod 10 rotates, the semicircular block 11 in the piston disc 9 slides along the outer wall of the driving rod 10, so as to move the piston disc 9 downward.

[0035] The top of the base 1 is fixedly provided with a circular ring 13, and the driving rod 10 is movably inserted into the circular ring 13. The semicircular block 11 is fixedly arranged in the circular ring 13. When the workbench 6 moves, the driving rod 10 moves along the inner wall of the circular ring 13. At this time, the semicircular block 11 slides along the outer wall of the driving rod 10, so as to rotate the driving rod 10.

[0036] The outer wall of the piston disc 9 is fixedly provided with a plurality of limiting blocks 91, and the limiting blocks 91 are slidably connected with the inner wall of the suction cavity 7. The top surface of the piston disc 9 is provided with a through hole 92 for the driving rod 10 to pass through, and the semicircular block 11 is fixedly arranged in the through hole 92. When the driving rod 10 rotates, the semicircular block 11 in the piston disc 9 slides along the outer wall of the driving rod 10. At the same time, the piston disc 9 is limited by the limiting blocks 91, so as to move the piston disc 9 up and down along the inner wall of the suction cavity 7. When the piston disc 9 moves downward, the LCD glass substrate is adsorbed and fixed by the suction holes 8. At the same time, the airflow in the suction cavity 7 is pushed into the air jet head 12. When the piston disc 9 moves upward, the suction holes 8 lose suction, so as to facilitate the operator to take the LCD glass substrate.

[0037] The outer wall of the driving rod 10 is provided with a spiral groove 101 at both ends, and the semicircular block 11 is in sliding fit with the inner wall of the spiral groove 101, when the workbench 6 drives the driving rod 10 to rotate, the semicircular block 11 in the base 1 slides along the inner wall of the spiral groove 101, so as to drive the driving rod 10 to rotate, and with the rotation of the driving rod 10, the semicircular block 11 in the piston disc 9 slides along the inner wall of the spiral groove 101, so as to drive the piston disc 9 to move up and down along the inner wall of the adsorption cavity 7.

[0038] The bottom of the workbench 6 is fixedly provided with a jet head 12, the gas outlet end of the jet head 12 penetrates through the workbench 6 and extends out of the top surface of the workbench 6, the jet head 12 is vertically inserted into the top surface of the workbench 6, the gas inlet end of the jet head 12 penetrates through the workbench 6 and is fixedly inserted into the bottom surface of the workbench 6, and the gas inlet end of the jet head 12 is in communication with the bottom of the adsorption cavity 7, when the piston disc 9 moves downward, the airflow in the adsorption cavity 7 is pushed into the jet head 12, and then the airflow is sprayed through the jet head 12 to blow the surface of the LCD glass substrate.

[0039] The working principle is as follows: when the photoresist coating device is used, the LCD glass substrate is placed on the workbench 6, then the workbench 6 and the driving rod 10 are pushed upward by the electric push rod 5, with the movement of the driving rod 10, the semicircular block 11 in the base 1 slides along the outer wall of the driving rod 10, so as to drive the driving rod 10 to rotate, with the rotation of the driving rod 10, the semicircular block 11 in the piston disc 9 slides along the outer wall of the driving rod 10, so as to drive the piston disc 9 to move downward, with the movement of the piston disc 9, the adsorption hole 8 adsorbs and fixes the LCD glass substrate, when the piston disc 9 moves downward, the airflow in the adsorption cavity 7 is pushed into the jet head 12, then the airflow is sprayed through the jet head 12 to blow the surface of the LCD glass substrate, then the ultrasonic spraying head 4 is adjusted in four directions through the cooperation of the longitudinal adjusting frame 2 and the transverse adjusting frame 3, and the photoresist is uniformly sprayed on the LCD glass substrate through the ultrasonic spraying head 4.

[0040] The above are preferred embodiments of the present application, which do not limit the protection scope of the present application, therefore: any equivalent changes made on the structure, shape and principle of the present application should be covered within the protection scope of the present application.

Claims

1. A photoresist coating apparatus comprising a base (1), characterized in that: The top of the base (1) is provided with a longitudinal adjusting frame (2), the top of the longitudinal adjusting frame (2) is provided with a transverse adjusting frame (3), the bottom of the transverse adjusting frame (3) is movably provided with an ultrasonic spraying head (4), the top of the base (1) is fixedly provided with an electric push rod (5), the extending end of the electric push rod (5) is fixedly provided with a workbench (6), the workbench (6) is internally provided with a suction cavity (7), the top surface of the workbench (6) is provided with a plurality of suction holes (8), the suction holes (8) are communicated with the suction cavity (7), the suction cavity (7) is movably provided with a piston disc (9), the inner top wall of the suction cavity (7) is rotatably provided with a driving rod (10), the driving rod (10) extends out of the workbench (6) through the piston disc (9) and movably inserts into the top surface of the base (1), the base (1) and the piston disc (9) are both provided with a semicircular block (11), the semicircular block (11) is slidably connected with the outer wall of the driving rod (10), the bottom of the workbench (6) is fixedly inserted with a jet head (12), the gas outlet end of the jet head (12) penetrates through the workbench (6) and extends out of the top surface of the workbench (6).

2. The photoresist coating apparatus according to claim 1, wherein: The longitudinal adjusting frame (2) comprises two supports (21), the top of one of the supports (21) is rotatably provided with a first screw rod (22), the outer wall of the support (21) is fixedly provided with a first motor (23), the rotating shaft of the first motor (23) is fixedly connected with one end of the first screw rod (22), and the top of the other support (21) is fixedly provided with a circular rod (24).

3. The photoresist coating apparatus of claim 2, wherein: The transverse adjusting frame (3) comprises a movable frame (31), the two ends of the movable frame (31) are respectively inserted into the two supports (21) and are respectively sleeved on the first screw rod (22) and the circular rod (24), one end of the movable frame (31) is threadedly connected with the first screw rod (22), the bottom of the movable frame (31) is rotatably provided with a second screw rod (32), the outer wall of the movable frame (31) is fixedly provided with a second motor (33), the rotating shaft of the second motor (33) is fixedly connected with one end of the second screw rod (32), and the ultrasonic spraying head (4) is threadedly sleeved on the second screw rod (32).

4. The photoresist coating apparatus of claim 1, wherein: The top of the base (1) is fixedly provided with a circular ring (13), the driving rod (10) movably inserts into the circular ring (13), and the semicircular block (11) is fixedly arranged in the circular ring (13).

5. The photoresist coating apparatus of claim 1, wherein: The outer wall of the piston disc (9) is fixedly provided with a plurality of limiting blocks (91), the limiting blocks (91) are slidably connected with the inner wall of the suction cavity (7), the top surface of the piston disc (9) is provided with a through hole (92) for the driving rod (10) to pass through, and the semicircular block (11) is fixedly arranged in the through hole (92).

6. The photoresist coating apparatus of claim 1, wherein: The outer wall of the driving rod (10) is provided with a spiral groove (101) at both ends, and the semicircular block (11) is slidably connected with the inner wall of the spiral groove (101).

7. The photoresist coating apparatus of claim 1, wherein: The jet head (12) is vertically inserted into the top surface of the workbench (6), the air inlet end of the jet head (12) is fixedly inserted through the workbench (6) and the bottom surface of the workbench (6), and the air inlet end of the jet head (12) communicates with the bottom of the adsorption cavity (7).

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