Wafer box locking protection device for semiconductor production line transfer robot
By designing a wafer cassette locking and protection device with a transparent organic plate protective cover and elastic locking airbags on a semiconductor production line handling robot, the problem of wafer cassettes falling or shifting during transportation is solved, achieving stable clamping and protection of wafer cassettes.
Patent Information
- Application Number
- CN202520170500.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-25
- Publication Date
- 2026-01-20
- Estimated Expiration
- 2035-01-25
AI Technical Summary
Existing semiconductor production line handling robots lack a locking and protection structure for wafer cassettes, which makes the wafer cassettes prone to falling or shifting during transport.
A wafer cassette locking and protection device was designed, comprising a protective cover made of transparent organic plate and an elastic locking airbag. By moving the protective cover up and down and inflating and deflating the elastic locking airbag, the wafer cassette is securely clamped, preventing relative displacement.
It effectively prevents relative displacement between the wafer cassette and the placement stage during handling, ensuring the stability and safety of the wafer cassette.
Smart Images
Figure CN223816402U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to mechanical technical field relates to a kind of wafer box locking protection device for semiconductor production line handling robot. BACKGROUND
[0002] Semiconductor production line is highly automated production line, wherein handling robot plays a vital role, they are responsible for the accurate and efficient transfer work between different workstations with wafer box.
[0003] However, the handling robot on the market at present is merely wafer box is simply placed on placement table, lack of necessary locking protection structure. In this way, in the process of transfer, wafer box is easily moved relative to placement table, this movement can cause wafer box to appear to fall or shift situation, therefore, design a kind of wafer box locking protection device for semiconductor production line handling robot is very necessary. SUMMARY
[0004] The utility model aims at the above-mentioned problems existing in prior art, proposes a kind of wafer box locking protection device for semiconductor production line handling robot.
[0005] The utility model can realize the purpose by the following technical scheme: the wafer box locking protection device for semiconductor production line handling robot, the handling robot includes the body with wheel, the body both sides have placement table, the placement groove for placing wafer box is opened on the placement table, it is characterized in that, the wafer box locking protection device includes the protection cover that is through and through from top to bottom, the protection cover is set on placement table, the protection cover is connected with the drive structure that can make it go up and down, two inner sides of the protection cover are equipped with elastic locking air bag, the elastic locking air bag is connected with the gas source of filling and discharging by pipeline.
[0006] The protection cover is made of transparent organic plate.
[0007] The drive structure includes guide rail, sliding block, rack, gear and power motor, the guide rail is vertically installed on the body, the sliding block is slidably connected on the guide rail, the protection cover is connected by connecting block and sliding block, the rack is vertically connected on the sliding block, the power motor is connected by mounting seat and the body, the gear is installed on the output shaft of power motor, and the gear is engaged with the rack.
[0008] The body middle part is also provided with mechanical arm, and the electric hand claw for grabbing wafer box is installed on the mechanical arm.
[0009] The elastic locking air bag is also provided with antiskid pad.
[0010] Compared with the prior art, the wafer box locking protection device for the semiconductor production line carrying robot has the advantages that:
[0011] In the utility model, after the wafer box is placed on the carrying robot, the wafer box is completely wrapped through the upward movement of the protective cover; at the same time, through the inflation of the elastic locking air bag, the wafer box is firmly clamped, and relative displacement between the wafer box and the placing table is prevented, so that the wafer box is effectively protected. BRIEF DESCRIPTION OF DRAWINGS
[0012] Figure 1 is the plane structure schematic diagram of the utility model;
[0013] Figure 2 is the local enlarged view of A place;
[0014] Figure 3 is the three-dimensional structure schematic diagram of the protective cover in the utility model;
[0015] Figure 4 is the three-dimensional structure schematic diagram of the wafer box in the utility model;
[0016] In the figure, 1, the main body;2, the wheel;3, the mechanical arm;4, the electric hand claw;5, the wafer box;6, the placing table;6a, the placing groove;7, the protective cover;8, the connecting block;9, the sliding block;10, the rack;11, the guide rail;12, the mounting seat;13, the power motor;14, the gear;15, the elastic locking air bag;16, the pipeline;17, the non-slip pad. DETAILED DESCRIPTION
[0017] The following is the specific embodiment of the utility model and is combined with the drawings, and the technical scheme of the utility model is further described, but the utility model is not limited to these embodiments.
[0018] As Figures 1-4As shown, the wafer box locking protection device for the semiconductor production line conveying robot, the conveying robot includes the body 1 with the wheel 2, the body 1 can be moved to the required work station under the cooperation of the wheel 2, which adopts the prior art; the body 1 is further provided with a mechanical arm 3 in the middle, the mechanical arm 3 is provided with a motorized hand claw 4 for grabbing a wafer box 5, the wafer box 5 can be placed on the conveying robot or taken off from the conveying robot through the motorized hand claw 4, which adopts the prior art; the body 1 is provided with a placing table 6 on both sides, the placing table 6 is provided with a placing groove 6a for placing the wafer box 5, in the embodiment, two wafer boxes 5 can be placed on each body 1; the wafer box locking protection device comprises a protection cover 7 which is vertically through, the protection cover 7 is sleeved on the placing table 6, the protection cover 7 is connected with a driving structure capable of lifting up and down, the two inner sides of the protection cover 7 are provided with elastic locking air bags 15, the elastic locking air bags 15 are connected with a gas charging and discharging source through pipelines 16, the elastic locking air bags 15 adopt the existing products and can be inflated or deflated, which adopts the prior art.
[0019] The protection cover 7 is made of transparent organic plate.
[0020] The driving structure comprises a guide rail 11, a sliding block 9, a rack 10, a gear 14 and a power motor 13, the guide rail 11 is vertically installed on the body 1, the sliding block 9 is slidably connected on the guide rail 11, the protection cover 7 is connected with the sliding block 9 through a connecting block 8, the rack 10 is vertically connected on the sliding block 9, the power motor 13 is connected with the body 1 through a mounting seat 12, the gear 14 is installed on the output shaft of the power motor 13, and the gear 14 is engaged with the rack 10, by adopting the structure, when the protection cover 7 needs to be moved upward, the power motor 13 drives the gear 14 to rotate, the gear 14 is engaged with the rack 10, and under the cooperation of the guide rail 11 and the sliding block 9, the protection cover 7 can be moved upward.
[0021] The elastic locking air bag 15 is further provided with a non-slip pad 17, by adopting the structure, when the wafer box 5 is clamped through the non-slip pad 17, the friction between the two is increased, so that the clamping is more stable.
[0022] In the utility model, after the wafer box 5 is placed on the conveying robot, the wafer box 5 is completely wrapped by the upward movement of the protection cover 7; at the same time, by inflating the elastic locking air bag 15, the wafer box 5 is firmly clamped, and relative displacement between the wafer box 5 and the placing table 6 is prevented, so that the wafer box 5 is effectively protected.
[0023] The above components are all general standard components or components known by those skilled in the art, and the structure and principle thereof can be known by the technical personnel through a technical manual or through a conventional experimental method.
[0024] The specific embodiments described herein are merely illustrative of the spirit of the present application. Those skilled in the art of the present application can make various modifications or supplements to the described specific embodiments or replace them with similar ways, but will not deviate from the spirit of the present application or exceed the scope defined by the appended claims.
Claims
1. A wafer box locking protection device for a semiconductor production line carrying robot, said carrying robot comprising a body (1) with wheels (2), both sides of said body (1) having a placing table (6) with a placing groove (6a) for placing a wafer box (5), characterized in that, The wafer box locking protection device comprises a through protection cover (7) which is arranged on a placing table (6) and is connected with a driving structure which can make the protection cover (7) go up and down, and elastic locking air bags (15) are arranged on the two inner sides of the protection cover (7) and are connected with a gas charging and discharging source through pipelines (16).
2. The FOUP lock protection device for a semiconductor line handling robot according to claim 1, characterized by, The protection cover (7) is made of transparent organic plate.
3. The FOUP lock protection apparatus for a semiconductor line handling robot according to claim 1, wherein The driving structure comprises a guide rail (11), a sliding block (9), a rack (10), a gear (14) and a power motor (13), the guide rail (11) is vertically arranged on the body (1), the sliding block (9) is slidably connected with the guide rail (11), the protection cover (7) is connected with the sliding block (9) through a connecting block (8), the rack (10) is vertically connected with the sliding block (9), the power motor (13) is connected with the body (1) through a mounting base (12), the gear (14) is arranged on the output shaft of the power motor (13) and is engaged with the rack (10).
4. The FOUP lock protection apparatus for a semiconductor line handling robot according to claim 1, wherein The middle part of the body (1) is also provided with a mechanical arm (3), and an electric hand claw (4) for grabbing the wafer box (5) is arranged on the mechanical arm (3).
5. The FOUP lock protection apparatus for a semiconductor line handling robot according to Claim 1, wherein The elastic locking air bag (15) is also provided with a non-slip pad (17).