Nozzle fixing device of gluing developer

Abstract

The utility model discloses a nozzle fixing device of a gluing developer, and relates to the technical field of developer nozzle installation, the nozzle fixing device comprises a nozzle piece and a connecting piece, the bottom of the connecting piece is provided with a second installation groove, the outer wall of the nozzle piece is in threaded fit with the inner wall of the second installation groove, the outer surface of the connecting piece is provided with an external thread, and the nozzle piece and the second installation groove are in threaded fit. An annular groove is formed in the upper surface of the connecting piece, a spring is fixedly installed at the bottom of the annular groove, and an extrusion plate is fixedly connected to the upper end of the spring. Through the arrangement of the extrusion plate and the spring, when the nozzle is rotationally installed in a threaded hole of the gluing developer, the extrusion plate can be extruded into the annular groove and extrudes the spring; the acting force generated when the spring recovers the deformation enables the nozzle to be subjected to the acting force in the direction away from the threaded hole of the gluing developer, so that the friction force between the external thread of the nozzle and the threaded hole of the gluing developer is increased, and the firmness between the nozzle and the gluing developer is improved.

Description

Technical Field

[0001] This utility model relates to the field of nozzle installation technology for developing machines, specifically a nozzle fixing device for a coating developing machine. Background Technology

[0002] Development is a photolithography technique in which the photoresist in the exposed areas of positive photoresist and the unexposed areas of negative photoresist is dissolved in a developing solution, forming a three-dimensional pattern on the photoresist. There are many methods for development, with spraying being a widely used method. This development method can be divided into three stages: the silicon wafer is placed on a rotating stage, and developing solution is sprayed onto its surface; then the wafer is developed while stationary; after development, it needs to be rinsed and then dried.

[0003] Nozzles are required when spraying developer. Existing nozzles are usually fixed to the glue outlet of the developer by a threaded connection, lacking additional reinforcement measures. After long-term use, the threaded connection between the nozzle and the developer is prone to loosening. To address this, a nozzle fixing device for a glue-coating developer is proposed. Utility Model Content

[0004] The purpose of this invention is to provide a nozzle fixing device for a coating and developing machine to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a nozzle fixing device for a coating and developing machine, comprising a nozzle component and a connector, wherein a second mounting groove is provided at the bottom of the connector, and the outer wall of the nozzle component and the inner wall of the second mounting groove are threaded together, an external thread is provided on the outer surface of the connector, and an annular groove is provided on the upper surface of the connector, wherein a spring is fixedly installed at the bottom of the annular groove, and a pressing plate is fixedly connected to the upper end of the spring, and the pressing plate slides and engages with the annular groove.

[0006] As a further preferred embodiment of this technical solution, the upper surface of the nozzle component is provided with a first mounting groove, the bottom of the first mounting groove is provided with a nozzle core, the bottom of the nozzle core slides through the bottom of the first mounting groove and extends to the bottom of the nozzle component, a connecting inner core is provided in the first mounting groove, and the outer wall of the connecting inner core is threadedly engaged with the inner wall of the first mounting groove.

[0007] As a further preferred embodiment of this technical solution, the upper surface of the nozzle core is provided with a liquid outlet hole that penetrates the nozzle core, the bottom of the connecting inner core is fixedly connected with a No. 1 connector that is compatible with the liquid outlet hole, and the upper end of the connecting inner core is provided with a connecting hole that extends to the bottom of the No. 1 connector.

[0008] As a further preferred embodiment of this technical solution, a second connector that is compatible with the connecting hole is fixedly installed on the top wall of the inner cavity of the second mounting groove, and an inlet extending to the second connector is provided on the upper surface of the connector.

[0009] As a further preferred embodiment of this technical solution, a regular hexagonal plate is fitted on the outer wall of the connector and is fixedly connected to the regular hexagonal plate.

[0010] As a further preferred embodiment of this technical solution, four limiting blocks are fixedly connected to the outer wall of the extrusion plate. The four limiting blocks are arranged in a ring array. Four limiting grooves are opened on the inner wall of the ring groove, and the four limiting grooves slide and engage with the four limiting blocks respectively.

[0011] As a further preferred embodiment of this technical solution, cross sections are respectively provided on both sides of the outer wall of the connecting inner core.

[0012] This utility model provides a nozzle fixing device for a coating and developing machine, which has the following beneficial effects:

[0013] This invention utilizes a compression plate and a spring. When the nozzle is rotated and installed into the threaded hole of the coating and developing machine, the compression plate is squeezed into the annular groove and compresses the spring. The spring's restoring deformation force causes the nozzle to experience a force in a direction away from the threaded hole of the coating and developing machine, thereby increasing the friction between the nozzle's external thread and the threaded hole of the coating and developing machine, and thus improving the firmness between the nozzle and the coating and developing machine. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0015] Figure 2 This is a disassembled sectional view of the overall structure of this utility model;

[0016] Figure 3 This is a disassembled sectional view of the connector in this utility model;

[0017] Figure 4 This is a schematic diagram of the bottom structure of the connector in this utility model;

[0018] In the diagram: 1. Nozzle component; 2. Connector; 3. Nozzle core; 4. Extrusion plate; 5. Limiting block; 6. Regular hexagonal plate; 7. Connecting inner core; 8. Connector No. 1; 9. Liquid outlet; 10. Connecting hole; 11. Cross-section; 12. Connector No. 2; 13. Annular groove; 14. Limiting groove; 15. Spring; 16. Liquid inlet; 17. Mounting groove No. 1; 18. Mounting groove No. 2. Detailed Implementation

[0019] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention.

[0020] This utility model provides a technical solution: such as Figures 1 to 4 As shown in this embodiment, a nozzle fixing device for a coating and developing machine includes a nozzle component 1 and a connector 2. The bottom of the connector 2 is provided with a second mounting groove 18. The outer wall of the nozzle component 1 and the inner wall of the second mounting groove 18 are threaded together. The outer surface of the connector 2 is provided with an external thread 19. The upper surface of the connector 2 is provided with an annular groove 13. A spring 15 is fixedly installed at the bottom of the annular groove 13. An extrusion plate 4 is fixedly connected to the upper end of the spring 15. The extrusion plate 4 slides and engages with the annular groove 13.

[0021] The nozzle component 1 has a first mounting groove 17 on its upper surface. A nozzle core 3 is provided at the bottom of the first mounting groove 17. The bottom of the nozzle core 3 slides through the bottom of the first mounting groove 17 and extends to the bottom of the nozzle component 1. A connecting inner core 7 is provided inside the first mounting groove 17. The outer wall of the connecting inner core 7 is threadedly engaged with the inner wall of the first mounting groove 17.

[0022] The nozzle core 3 has an outlet hole 9 through the nozzle core 3 on its upper surface. The bottom of the connecting core 7 is fixedly connected to a first connector 8 that is compatible with the outlet hole 9. The upper end of the connecting core 7 has a connecting hole 10 that extends to the bottom of the first connector 8.

[0023] Among them, a second connector 12 that is compatible with the connecting hole 10 is fixedly installed on the top wall of the inner cavity of the second mounting groove 18, and an inlet 16 extending to the second connector 12 is opened on the upper surface of the connector 2.

[0024] Among them, a regular hexagonal plate 6 is fitted on the outer wall of the connector 2 and is fixedly connected to the regular hexagonal plate 6.

[0025] The hexagonal plate 6 allows for easy rotation of the connector 2.

[0026] Among them, four limiting blocks 5 are fixedly connected to the outer wall of the extrusion plate 4. The four limiting blocks 5 are arranged in a ring array. Four limiting grooves 14 are opened on the inner wall of the ring groove 13. The four limiting grooves 14 are respectively slidably engaged with the four limiting blocks 5.

[0027] By using the limiting block 5 and the limiting groove 14, the rotation of the extrusion plate 4 can be prevented, which would cause the spring 15 to twist.

[0028] Among them, the outer walls of the inner core 7 are respectively provided with cross sections 11.

[0029] The section 11 allows the user to easily rotate the inner core 7.

[0030] This utility model provides a nozzle fixing device for a coating and developing machine, the specific working principle of which is as follows:

[0031] In use, the connecting inner core 7 is rotated and installed into the first mounting slot 17, so that the bottom of the connecting inner core 7 presses against the upper end of the nozzle core 3, thereby fixing the nozzle core 3. At this time, the upper end of the connecting inner core 7 is aligned with the upper end of the nozzle component 1, and the first connector 8 at the bottom of the connecting inner core 7 is inserted into the liquid outlet hole 9 of the nozzle core 3. Then, the nozzle component 1 is rotated and inserted into the second mounting slot 18 at the bottom of the connector 2, so that the top wall of the inner cavity of the second mounting slot 18 presses against the upper end of the connecting inner core 7. At the same time, the second connector 12 on the top wall of the second mounting slot 18 is inserted into the connecting hole 10 of the connecting inner core 7, thereby connecting the liquid inlet 16 with the nozzle core 3. Next, the connector 2 is rotated and installed in the threaded hole at the glue outlet of the coating and developing machine, so that the glue outlet and the liquid inlet 16 are connected. After the connector 2 is installed, the extrusion plate 4 will be squeezed into the annular groove 13 and squeeze the spring 15. The force of the spring 15 restoring its deformation will cause the connector 2 to be subjected to a force in the direction away from the threaded hole of the coating and developing machine, which will increase the pressure at the contact part between the external thread 19 on the outer surface of the connector 2 and the threaded hole of the coating and developing machine, thereby increasing the friction between the external thread 19 on the outer surface of the connector 2 and the threaded hole of the coating and developing machine, and thus improving the firmness between the connector 2 and the coating and developing machine.

[0032] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A nozzle fixing device for a coating and developing machine, comprising a nozzle component (1) and a connecting component (2), characterized in that: The bottom of the connector (2) is provided with a second mounting groove (18). The outer wall of the nozzle (1) and the inner wall of the second mounting groove (18) are threaded together. The outer surface of the connector (2) is provided with an external thread (19). The upper surface of the connector (2) is provided with an annular groove (13). A spring (15) is fixedly installed at the bottom of the annular groove (13). An extrusion plate (4) is fixedly connected to the upper end of the spring (15). The extrusion plate (4) slides and engages with the annular groove (13).

2. The nozzle fixing device for a coating and developing machine according to claim 1, characterized in that: The upper surface of the nozzle component (1) has a first mounting groove (17), and the bottom of the first mounting groove (17) is provided with a nozzle core (3). The bottom of the nozzle core (3) slides through the bottom of the first mounting groove (17) and extends to the bottom of the nozzle component (1). A connecting inner core (7) is provided inside the first mounting groove (17), and the outer wall of the connecting inner core (7) is threadedly engaged with the inner wall of the first mounting groove (17).

3. The nozzle fixing device for a coating and developing machine according to claim 2, characterized in that: The upper surface of the nozzle core (3) is provided with a liquid outlet hole (9) that penetrates the nozzle core (3). The bottom of the connecting inner core (7) is fixedly connected with a No. 1 connector (8) that is compatible with the liquid outlet hole (9). The upper end of the connecting inner core (7) is provided with a connecting hole (10) that extends to the bottom of the No. 1 connector (8).

4. The nozzle fixing device for a coating and developing machine according to claim 3, characterized in that: The inner wall of the second mounting groove (18) is fixedly installed with a second connector (12) that is compatible with the connecting hole (10). The upper surface of the connector (2) is provided with a liquid inlet (16) extending to the second connector (12).

5. The nozzle fixing device for a coating and developing machine according to claim 1, characterized in that: The outer wall of the connector (2) is fitted with a regular hexagonal plate (6) and is fixedly connected to the regular hexagonal plate (6).

6. The nozzle fixing device for a coating and developing machine according to claim 1, characterized in that: Four limiting blocks (5) are fixedly connected to the outer wall of the extrusion plate (4). The four limiting blocks (5) are arranged in a ring array. Four limiting grooves (14) are opened on the inner wall of the ring groove (13). The four limiting grooves (14) are respectively slidably engaged with the four limiting blocks (5).

7. The nozzle fixing device for a coating and developing machine according to claim 2, characterized in that: The outer walls of the connecting inner core (7) are respectively provided with cross sections (11).

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