Multifunctional detection equipment

Abstract

The utility model provides multifunctional detection equipment, and belongs to the technical field of detection equipment. The equipment comprises a feeding and discharging streamline which comprises a normal feeding and discharging streamline and an NG discharging streamline which extend in the first direction; the transverse moving track extends in the second direction; the carrying module can move along the transverse moving track and is used for grabbing the multiple chip jigs, and the carrying module is further used for moving the detected chip jigs to the normal feeding and discharging streamline or the NG discharging streamline; the multiple detection systems are sequentially arranged on one side of the feeding and discharging streamline in the second direction, each detection system comprises a detection device and a material receiving streamline extending in the first direction, and the carrying module can move to the position aligned with the material receiving streamlines in the first direction; wherein the number of the detection systems with long detection time in the plurality of detection systems is greater than the number of the detection systems with short detection time. According to the multifunctional detection equipment, the occupied volume of the equipment can be reduced, and the detection efficiency is improved.

Description

Technical Field

[0001] This application relates to the field of chip testing equipment technology, and in particular to a multifunctional testing device. Background Technology

[0002] The types of chip testing vary depending on the chip itself. For a given chip, multiple tests are required, such as structural airtightness, chip appearance, gaps between specific structures on the chip, and testing of components on the chip, such as the continuity testing of thermistors and temperature control testing of temperature sensors. Therefore, chip testing requires multiple testing stations to be set up sequentially, forming a pipeline testing equipment.

[0003] However, such equipment often performs one type of test at a time, and is arranged in a straight line. This makes the entire equipment large in size, and the sequential testing method is inefficient. Utility Model Content

[0004] One objective of this invention is to provide a multifunctional testing device that can reduce the device's footprint and improve testing efficiency.

[0005] Another objective of this invention is to simplify the operational process.

[0006] A further objective of this invention is to simplify the structure and reduce costs.

[0007] An embodiment of this utility model provides a multifunctional detection device, comprising:

[0008] The infeed and discharge flow lines include normal infeed and discharge flow lines and NG discharge flow lines, both of which extend along the first direction;

[0009] The transverse track extends along a second direction perpendicular to the first direction;

[0010] The transport module can move along the transverse track and is used to grab multiple chip fixtures on the normal infeed and outfeed flow line. Chips are positioned inside the chip fixtures. The transport module is also used to move the chip fixtures that have been inspected to the normal infeed and outfeed flow line or the NG outfeed flow line.

[0011] Multiple detection systems are arranged sequentially along one side of the feed / discharge flow line in the second direction. Each detection system includes a detection device and a receiving flow line extending along the first direction. The transport module can be moved to a position aligned with each receiving flow line in the first direction. The receiving flow line is used to transfer the chip fixture back and forth between the transport module and the detection device. The number of detection systems with longer detection times is greater than the number of detection systems with shorter detection times among the multiple detection systems.

[0012] Optionally, the receiving flow line of each of the detection systems includes a receiving platform that moves along the first direction, and each receiving platform has the same height.

[0013] Optionally, the plurality of detection systems include:

[0014] A first detection system is used to detect the appearance of the chip and the gaps between the target layers of the chip.

[0015] Multiple second detection systems, all located downstream of the first detection system, are used to detect the hermeticity and resistance of the chip.

[0016] Optionally, the first detection system includes a camera for detecting the appearance of the chip, and the second detection mechanism includes an airtightness detection mechanism for detecting the airtightness between the first target structures of the chip, wherein the camera and the airtightness detection mechanism are on the same side of the receiving platform.

[0017] Optionally, the second detection system further includes a resistance detection mechanism, which and the airtightness detection mechanism are located on opposite sides of the receiving platform.

[0018] Optionally, the multi-functional testing equipment also includes a lifting and flipping mechanism, which is located directly above the first preset position of the normal infeed and outfeed flow line and below the conveying module. The lifting and flipping mechanism includes a first gripping component that can rotate around a preset horizontal axis and can be lifted and lowered.

[0019] The first gripping component is used to grip the chip fixture at the first preset position, lift and rotate it 180 degrees, so that the transport module can grip the rotated chip fixture;

[0020] The first gripping component is also used to grip the chip fixture that has been inspected at the transport module, lower it and rotate it 180 degrees, so as to transfer the inspected chip fixture to the first preset position of the normal infeed and outfeed flow line.

[0021] Optionally, the lifting and flipping mechanism is configured to move relative to the normal feed / discharge flow line along the first direction.

[0022] Optionally, the multifunctional testing equipment also includes a testing module for detecting whether the chip fixture has reached the first preset position of the normal feed-out flow line.

[0023] Optionally, the conveying module includes a second gripping component that can be vertically raised and lowered. The second gripping component is used to move the chip fixture corresponding to the defective chip to directly above the NG discharge flow line, lower it to a second preset position on the NG discharge flow line, and release the chip fixture.

[0024] Optionally, the first preset position and the second preset position are aligned in the second direction.

[0025] According to a first aspect of this utility model, a multifunctional testing device includes a normal infeed / outfeed flow line, an NG (Not From Good) discharge flow line, and a transport module. The movement direction of the transport module is perpendicular to the extension direction of the normal infeed / outfeed flow line. The device also includes multiple testing systems, each arranged sequentially on one side of the normal infeed / outfeed flow line. Each testing system includes a testing device and a receiving flow line, which is arranged parallel to the normal infeed / outfeed flow line. The transport module can move to a position aligned with each receiving flow line so that the receiving flow lines can receive materials from the transport module for testing. After testing, the materials are discharged to the transport module. The overall flow arrangement of the device is reasonable and occupies little space. Furthermore, the transport module can pick up multiple chip fixtures at once, and the number of various testing systems and the testing time are matched. Therefore, the transport module can transport multiple chip fixtures at once, realizing synchronous testing of chips at various testing systems, saving overall testing time and improving testing efficiency.

[0026] According to a second aspect of this invention, the height of the receiving platforms of each testing system is set to be consistent. Therefore, the transport module does not need to adjust the height when moving the chip fixture to each receiving platform, simplifying the operation process. By placing the camera and the airtightness testing mechanism on the same side of the receiving platform, it is not necessary to flip the chip fixture during each test, further simplifying the movement and improving testing efficiency. Furthermore, placing the camera on the upper side of the receiving platform allows for better lighting conditions.

[0027] According to a third aspect of this invention, the position detection of the chip fixture can be achieved through the setting of the detection module, facilitating the gripping of the chip fixture by the lifting and flipping mechanism. The lifting and flipping mechanism can meet the requirements of the previous process, the current equipment's detection, and the next process, which require the chip to be in different front and back postures. For the NG (Not Found) discharge line, since no further detection is performed on the next normal process, there is no need to set up a lifting and flipping mechanism at the NG discharge line, thereby simplifying the structure and saving costs.

[0028] Furthermore, the lifting and flipping mechanism is configured to move along the first direction, thus enabling it to expose or align with the first preset position. When the first preset position is exposed, the transport module can directly place the inspected and qualified products to the normal infeed and outfeed flow line. This satisfies the requirement that the front and back orientations of the chips do not need to be changed during the next process and / or the previous process when the equipment is inspected, thereby enabling the entire equipment to adapt to more usage scenarios. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of the structure of a multifunctional testing device according to an embodiment of the present invention;

[0030] Figure 2 yes Figure 1 A top view of the multifunctional detection device in an embodiment;

[0031] Figure 3 This is a schematic diagram of the structure of the first detection system of a multifunctional detection device according to an embodiment of the present invention;

[0032] Figure 4 This is a cross-sectional structural schematic diagram of the second detection system of a multifunctional detection device according to an embodiment of the present invention;

[0033] Figure 5 This is a cross-sectional structural schematic diagram of the lifting and flipping mechanism of a multifunctional testing device according to an embodiment of the present utility model;

[0034] Figure label:

[0035] 100-Multifunctional testing equipment, 10-Normal infeed / outfeed flow line, 20-NG outfeed flow line, 30-Transverse track, 40-Transportation module, 50-Chip fixture, 60-First testing system, 61-Camera, 62-Gap testing mechanism, 63-First receiving platform, 64-First mounting frame, 65-First slide rail, 70-Second testing system, 71-Air tightness testing mechanism, 72-Resistance testing mechanism, 73-Second receiving platform, 74-Second mounting frame, 75-Second slide rail, 80-Lifting and flipping mechanism, 81-Adsorption component, 82-Rotation, 83-Lifting block, 84-Fixing plate. Detailed Implementation

[0036] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0037] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on the other component or there may be an intermediate component. When a component is considered to be "connected to" another component, it can be directly connected to the other component or there may be an intermediate component present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application's specification are for illustrative purposes only and do not represent the only possible implementation.

[0038] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0039] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature and the second feature are in indirect contact through an intermediate medium. Furthermore, "above," "over," and "on top" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0040] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in this application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and / or" as used in this application includes any and all combinations of one or more of the associated listed items.

[0041] Figure 1 This is a structural schematic diagram of a multifunctional testing device 100 according to an embodiment of the present invention. Figure 2 yes Figure 1 A top view of the multifunctional detection device 100 of an embodiment. (See attached image.) Figure 1 As shown, you can also participate. Figure 2 In one embodiment, the multifunctional testing device 100 of this application includes an inlet / outlet flow line, a transverse track 30, a conveying module 40, and multiple testing systems. The inlet / outlet flow line includes components all along a first direction ( Figure 2The normal feed / discharge flow line 10 and the NG discharge flow line 20 extend in the direction of the middle arrow A. The normal feed / discharge flow line 10 is responsible for feeding and discharging normal products, and the NG discharge flow line 20 is responsible for discharging non-conforming products. The transverse track 30 extends along the second direction (…). Figure 2 Extending in the direction of arrow B, the second direction is perpendicular to the first direction. The transport module 40 can move along the transverse track 30 and is used to grip multiple chip fixtures 50 on the normal infeed / outfeed flow line 10. Chips are positioned within each chip fixture 50. For example, multiple pneumatic grippers are provided below the transport module 40, each gripper gripping one chip fixture 50. The transport module 40 is also used to move the inspected chip fixtures 50 to the normal infeed / outfeed flow line 10 or the NG outfeed flow line 20. Multiple inspection systems are sequentially arranged along one side of the infeed / outfeed flow line along the second direction. Each inspection system includes an inspection device and a receiving flow line extending along the first direction. The transport module 40 can move to a position aligned with each receiving flow line in the first direction. The receiving flow lines are used to transfer the chip fixtures 50 back and forth between the transport module 40 and the inspection device. Among these multiple inspection systems, the number of inspection systems with longer inspection times is greater than the number of inspection systems with shorter inspection times. For example… Figure 1 In the embodiment shown, the detection system includes a first detection system 60 and two second detection systems 70, wherein the detection time of the second detection system 70 is longer.

[0042] This embodiment provides a multifunctional testing device 100, including a normal infeed / outfeed flow line 10, an NG (Not From Good) discharge flow line 20, and a transport module 40. The moving direction of the transport module 40 is perpendicular to the extending direction of the normal infeed / outfeed flow line 10. The device also includes multiple testing systems, each arranged sequentially on one side of the normal infeed / outfeed flow line 10. Each testing system includes a testing device and a receiving flow line, which is arranged parallel to the normal infeed / outfeed flow. The transport module 40 can move to a position aligned with each receiving flow line, so that the receiving flow lines can receive materials from the transport module 40 for testing. After testing, the materials are discharged to the transport module 40. The overall flow arrangement of the device is reasonable and occupies little space. Furthermore, in this embodiment, the transport module 40 can pick up multiple chip fixtures 50 at once, and the number of various testing systems and the testing time are matched. Therefore, the transport module 40 can transport multiple chip fixtures 50 at once, realizing synchronous testing of chips at various testing systems, saving overall testing time and improving testing efficiency.

[0043] Figure 3 This is a schematic diagram of the structure of the first detection system 60 of a multifunctional detection device 100 according to an embodiment of the present invention. Figure 4 This is a cross-sectional structural schematic diagram of the second detection system 70 of a multifunctional detection device 100 according to one embodiment of the present invention. In one embodiment, as... Figure 3As shown, the detection device of the first detection system 60 includes a camera 61 and a gap detection mechanism 62 (e.g., an interferometer). The camera 61 is used to detect the appearance of the chip, and the gap detection mechanism 62 is used to detect the gap between target layers of the chip. In one embodiment, the target layers are an optical glass plate and a functional film. Both the camera 61 and the gap detection mechanism 62 are mounted on the first mounting bracket 64. Figure 4 As shown, the second detection system 70 includes an airtightness detection mechanism 71 for detecting the airtightness between a first target structure (e.g., an optical glass plate and a chip substrate) of the chip, and a resistance detection mechanism 72 for detecting the resistance of a target element (e.g., a thermistor) of the chip. The airtightness detection mechanism 71 is mounted at the second mounting bracket 74. Multiple second detection systems 70 are located downstream of the first detection system 60. The receiving flow line of each detection system includes a receiving platform that moves along a first direction. Each receiving platform has the same height; that is, in this embodiment, the first receiving platform 63 of the first detection system 60 and the second receiving platform 73 of the second detection system 70 have the same height. The first receiving platform 63 is slidably disposed at a first slide rail 65, and the second receiving platform 73 is slidably disposed at a second slide rail 75. In this embodiment, the camera 61 is located above the first receiving platform 63, and the airtightness detection mechanism 71 and the resistance detection mechanism 72 are located on the upper and lower sides of the second receiving platform 73, respectively. This is because airtightness detection and appearance detection are performed on the same side of the chip.

[0044] In this embodiment, the height of the receiving platforms of each testing system is set to be consistent. Therefore, the transport module 40 does not need to adjust the height when moving the chip fixture 50 to each receiving platform, which simplifies the operation process. The camera 61 and the airtightness testing mechanism 71 are positioned on the same side of the receiving platform. Therefore, during each test, it is not necessary to flip the chip fixture 50, further simplifying the movement and improving testing efficiency. Furthermore, positioning the camera 61 on the upper side of the receiving platform allows for better lighting conditions.

[0045] Figure 5 This is a cross-sectional view of the lifting and flipping mechanism 80 of a multifunctional testing device 100 according to one embodiment of the present invention. In a further embodiment, the multifunctional testing device 100 also includes a testing module (not shown) and the lifting and flipping mechanism 80 (see [link to relevant documentation]). Figure 5The detection module is used to detect whether the chip fixture 50 has reached the first preset position of the normal infeed / outfeed flow line 10. The lifting and flipping mechanism 80 is located directly above the first preset position of the normal infeed / outfeed flow line 10 and below the transport module 40. The lifting and flipping mechanism 80 includes a first gripping component that can rotate around a preset horizontal axis and can be lifted and lowered. In one embodiment, the first gripping component may be an adsorption component 81 including a suction nozzle. The adsorption component 81 is fixed on a rotating block 82. The rotating block 82 can rotate relative to a lifting block 83, and the lifting block 83 can be lifted and lowered relative to a fixed plate 84. Of course, the implementation of the rotation and lifting actions also requires a corresponding driving source, such as a motor or cylinder. The first gripping component is used to grip the chip fixture 50 at the first preset position, lift and flip it 180 degrees so that the transport module 40 can grip the flipped chip fixture 50. The first gripping component is also used to grip the inspected chip fixture 50 at the transport module 40, lower and rotate it 180 degrees to transfer the inspected chip fixture 50 to a first preset position on the normal infeed / outfeed flow line 10. The transport module 40 includes a second gripping component that can be raised and lowered vertically. The second gripping component is used to move the chip fixture 50 corresponding to the defective chip to directly above the NG outfeed flow line 20, lower it to a second preset position on the NG outfeed flow line 20 and release the chip fixture 50. The first preset position and the second preset position are aligned in the second direction.

[0046] In this embodiment, the position detection of the chip fixture 50 is achieved through the setting of the detection module, which facilitates the lifting and flipping mechanism 80 to grasp the chip fixture 50. The setting of the lifting and flipping mechanism 80 can meet the requirements of the previous process, the current equipment's detection, and the next process, which require the chip to be in different front and back postures. As for the NG discharge flow line 20, since it does not undergo the detection of the next normal process, it is not necessary to set up the lifting and flipping mechanism 80 at the NG discharge flow line 20, thereby simplifying the structure and saving costs.

[0047] In a further embodiment, the lifting and flipping mechanism 80 is configured to move relative to the normal feed / discharge flow line 10 along a first direction. Therefore, the lifting and flipping mechanism 80 can move to be directly above a first preset position of the normal feed / discharge flow line 10, or it can move to a position that fully exposes the first preset position.

[0048] In this embodiment, the lifting and flipping mechanism 80 is configured to move along the first direction, thus forming a state where the first preset position is exposed or aligned with the first preset position. When the first preset position is exposed, the conveying module 40 can directly place the inspected and qualified product at the normal infeed and outfeed flow line 10. Therefore, it can meet the requirement that the front and back orientation of the chip does not need to be changed when the next process and / or the previous process are inspected by this equipment, thereby enabling the entire equipment to adapt to more usage scenarios.

[0049] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A multifunctional testing device, characterized in that, include: The infeed and discharge flow lines include normal infeed and discharge flow lines and NG discharge flow lines, both of which extend along the first direction; The transverse track extends along a second direction perpendicular to the first direction; The transport module can move along the transverse track and is used to grab multiple chip fixtures on the normal infeed and outfeed flow line. Chips are positioned inside the chip fixtures. The transport module is also used to move the chip fixtures that have been inspected to the normal infeed and outfeed flow line or the NG outfeed flow line. Multiple detection systems are arranged sequentially along one side of the feed / discharge flow line in the second direction. Each detection system includes a detection device and a receiving flow line extending along the first direction. The transport module can be moved to a position aligned with each receiving flow line in the first direction. The receiving flow line is used to transfer the chip fixture back and forth between the transport module and the detection device. The number of detection systems with longer detection times is greater than the number of detection systems with shorter detection times among the multiple detection systems.

2. The multifunctional testing device according to claim 1, characterized in that, The receiving flow line of each of the detection systems includes a receiving platform that moves along the first direction, and each receiving platform has the same height.

3. The multifunctional testing device according to claim 2, characterized in that, The plurality of detection systems include: A first detection system is used to detect the appearance of the chip and the gaps between the target layers of the chip. Multiple second detection systems, all located downstream of the first detection system, are used to detect the hermeticity and resistance of the chip.

4. The multifunctional testing device according to claim 3, characterized in that, The first detection system includes a camera for detecting the appearance of the chip, and the second detection system includes an airtightness detection mechanism for detecting the airtightness between the first target structures of the chip, wherein the camera and the airtightness detection mechanism are on the same side of the receiving platform.

5. The multifunctional testing device according to claim 4, characterized in that, The second detection system also includes a resistance detection mechanism, which and the airtightness detection mechanism are located on opposite sides of the receiving platform.

6. The multifunctional testing device according to any one of claims 1-5, characterized in that, It also includes a lifting and flipping mechanism, which is located directly above the first preset position of the normal material inlet and outlet flow line and below the conveying module. The lifting and flipping mechanism includes a first gripping component that can rotate around a preset horizontal axis and can be lifted and lowered. The first gripping component is used to grip the chip fixture at the first preset position, lift and rotate it 180 degrees, so that the transport module can grip the rotated chip fixture; The first gripping component is also used to grip the chip fixture that has been inspected at the transport module, lower it and rotate it 180 degrees, so as to transfer the inspected chip fixture to the first preset position of the normal infeed and outfeed flow line.

7. The multifunctional testing device according to claim 6, characterized in that, The lifting and flipping mechanism is configured to move relative to the normal feed and discharge flow line along the first direction.

8. The multifunctional testing device according to claim 6, characterized in that, It also includes a detection module for detecting whether the chip fixture has reached the first preset position of the normal feed and discharge flow line.

9. The multifunctional testing device according to claim 6, characterized in that, The transport module includes a second gripping component that can be raised and lowered vertically. The second gripping component is used to move the chip fixture corresponding to the defective chip to directly above the NG discharge flow line, lower it to a second preset position on the NG discharge flow line, and release the chip fixture.

10. The multifunctional testing device according to claim 9, characterized in that, The first preset position and the second preset position are aligned in the second direction.

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