Cavity inner surface grinding jig

Abstract

The utility model relates to the technical field of surface treatment grinding, in particular to a cavity inner surface grinding jig which comprises a supporting platform formed by fixedly connecting a base, a supporting column, a base plate and a base plate, a cavity part to be ground is fixed on the base plate, two positioning seats are fixedly connected on the upper surface of the base, and rotating holes are formed in the centers of the positioning seats. The center distance between the rotating holes in the two positioning seats is equal to the center distance between the two circle center through holes, a third through hole and a sixth through hole which are concentric with the two rotating holes are formed in the base plate and the base plate respectively, and one end of a rotating shaft penetrates through the sixth through hole and the third through hole and then is inserted into the rotating holes in a clearance fit mode. The other end of the rotating shaft extends out of the cavity part to be ground and is connected with a clamping block through a needle bearing, an electric grinding head is installed on the clamping block, and a grinding tool used for grinding is installed on the electric grinding head. The grinding jig for the inner surface of the cavity effectively solves the problems that a traditional manual polishing method is low in efficiency, unstable in quality and the like.

Description

TECHNICAL FIELD

[0001] The utility model relates to surface treatment grinding technical field, concretely relates to a cavity inner surface grinding jig. BACKGROUND

[0002] With the continuous evolution of integrated circuit process technology node, the roughness requirement of cavity inner surface is increasingly strict. In advanced process technology, the quality of cavity inner surface directly influences the performance and reliability of integrated circuit. Figure 11 As shown in the to-be-ground cavity part 16, due to space limitation, the traditional manual polishing method is difficult to be applied to the machining of such precision parts. Manual polishing is not only inefficient, but also requires higher technical level and experience of the operator, and is easy to cause polishing failure due to improper operation, such as wavy defect, surface spot and unevenness, thereby affecting the overall quality of the product.

[0003] In addition, there are many uncertain factors in the manual polishing process, such as inconsistency of polishing method and selection of polishing wheel, which may further exacerbate the problem of surface roughness. Therefore, in order to improve the machining quality of cavity inner surface, reduce production cost and reduce the influence of human factors on the machining process, it is urgent to develop a high-efficiency, stable and easy-to-operate grinding and polishing jig.

[0004] In view of the above problems, a jig suitable for cavity inner surface grinding and polishing is urgently needed. UTILITY MODEL CONTENTS

[0005] In order to solve the above problems, the utility model provides a cavity inner surface grinding jig, which effectively solves the problems of low efficiency and unstable quality of traditional manual polishing method through accurate positioning and clamping mechanism, stable grinding method and flexible structure design, improves the machining quality and production efficiency of cavity inner surface, reduces the production cost, and reduces the influence of human factors on the machining process.

[0006] The technical scheme of the utility model is as follows:

[0007] The utility model provides a cavity inner surface grinding jig, which is used for grinding a cavity part to be ground, and the cavity part to be ground has a cuboid structure and is provided with two circular cavities partially overlapping in the middle, and a center hole is arranged at the center of each circular cavity, the cavity inner surface grinding jig is used for grinding the bottom surface of the circular cavity, and the cavity inner surface grinding jig comprises a support platform composed of a base, a support column, a base plate and a backing plate, the base and the base plate are arranged in parallel, the support column is arranged between the base and the base plate, the backing plate is arranged on the upper surface of the base plate, the cavity part to be ground is fixed on the backing plate, two positioning seats are fixedly connected on the upper surface of the base, a rotating hole is arranged at the center of each positioning seat, the center distance between the rotating holes of the two positioning seats is equal to the center distance between the two center holes, a through hole three and a through hole six concentric with the two rotating holes are arranged on the base plate and the backing plate respectively, one end of a rotating shaft is inserted into the rotating hole in a clearance fit after passing through the through hole six and the through hole three, the other end of the rotating shaft extends out of the cavity part to be ground and is connected to a clamping block through a needle bearing, an electric grinding head is installed on the clamping block, and a grinding tool for grinding is installed on the electric grinding head.

[0008] The base, the positioning seat, the support column, the base plate, the clamping block and the rotating shaft are made of 45 steel, and the backing plate is made of Teflon.

[0009] A through hole one, a through hole two and a through hole four concentric with each other are arranged at the four corners of the base, the base plate and the backing plate, threaded holes two are arranged at the two ends of the support column, a bolt two is screw-connected to the threaded hole two at one end of the support column after passing through the through hole four and the through hole two, and a bolt five is screw-connected to the threaded hole two at the other end of the support column after passing through the through hole one.

[0010] The positioning seat is composed of a circular plate and a circular cylinder, the rotating hole is arranged at the center of the circular cylinder, a mounting hole is arranged on the circular plate, a threaded hole one corresponding to the mounting hole is arranged on the base, and a bolt three is screw-connected to the threaded hole one after passing through the mounting hole.

[0011] The cavity part to be ground is fixed on the support platform through a pressing plate, the pressing plate is an L-shaped plate, two pressing plates are respectively pressed on the two sides of the cavity part to be ground, a long hole is arranged on the horizontal straight plate of the pressing plate, threaded holes three and a through hole five matching the positions of the two pressing plates are respectively arranged on the base plate and the backing plate, and a bolt one is screw-connected to the threaded hole three after passing through the through hole five.

[0012] The pressing plate is made of 45 steel.

[0013] A bearing hole is arranged on the clamping block, and a needle bearing is installed in the bearing hole.

[0014] A grinding head hole is arranged on the clamping block, the grinding head hole is provided with an opening, two opposite clamping edges are arranged at the opening, and the electric grinding head is inserted into the grinding head hole and clamped through the clamping edges.

[0015] The through hole seven and the threaded hole four are arranged on the two clamping edges respectively, the bolt four is screwed with the threaded hole four after passing through the through hole seven, and the clamping edge drives the grinding head hole to clamp the electric grinding head.

[0016] The gasket of the ring structure is sleeved on the rotating shaft, and the lower surface of the gasket abuts against the upper surface of the positioning seat, so as to reduce the swing amplitude of the rotating shaft.

[0017] The utility model discloses the beneficial effect lies in:

[0018] 1. The cavity inner surface grinding jig disclosed by the utility model can ensure the stability and consistency in the grinding process, and avoid the problems of wavy defects, surface spots and unevenness that may occur in manual polishing.

[0019] 2. The cavity inner surface grinding jig disclosed by the utility model can reduce production cost. On the one hand, the jig realizes mechanized grinding, improves production efficiency, and reduces the time of manual operation. On the other hand, due to the stability and consistency of the grinding process, the scrap rate caused by grinding failure is reduced, thereby reducing material cost and production cost.

[0020] 3. The cavity inner surface grinding jig disclosed by the utility model fully considers the influence of human factors on the machining process, and ensures the consistency and repeatability of the grinding result through accurate mechanical positioning and clamping mechanism and stable grinding mode, thereby reducing the requirement for the technical level and experience of the operator.

[0021] 4. The cavity inner surface grinding jig disclosed by the utility model has reasonable structure design, and can be adjusted according to the specific shape and size of the cavity part to be ground. For example, by adjusting the positions of the rotating shaft, the clamping block and the grinding tool, the grinding demand of the circular inner cavity of different sizes and shapes can be met.

[0022] 5. The cavity inner surface grinding jig disclosed by the utility model is easy to operate and maintain. The operator only needs to install and adjust according to the specified steps, and then the grinding work can be started. Meanwhile, all the components of the jig are easy to disassemble and clean, which is convenient for maintenance and maintenance. BRIEF DESCRIPTION OF DRAWINGS

[0023] The scheme and advantages of the present application will become clear to those skilled in the art through reading the detailed description of the preferred embodiments below. The drawings are only for the purpose of illustrating the preferred embodiments and are not considered as limiting the utility model.

[0024] In the drawings:

[0025] Figure 1 A three-dimensional structural schematic view of a cavity inner surface grinding jig according to an embodiment of the present application is shown in FIG. 1;

[0026] Figure 2 A three-dimensional structural schematic view of a base of a cavity inner surface grinding jig according to an embodiment of the present application is shown in FIG. 2;

[0027] Figure 3 A three-dimensional structural schematic view of a positioning seat of a cavity inner surface grinding jig according to an embodiment of the present application is shown in FIG. 3;

[0028] Figure 4 A three-dimensional structural schematic view of a support column of a cavity inner surface grinding jig according to an embodiment of the present application is shown in FIG. 4;

[0029] Figure 5 A three-dimensional structural schematic view of a base plate of a cavity inner surface grinding jig according to an embodiment of the present application is shown in FIG. 5;

[0030] Figure 6 A three-dimensional structural schematic view of a backing plate of a cavity inner surface grinding jig according to an embodiment of the present application is shown in FIG. 6;

[0031] Figure 7 A three-dimensional structural schematic view of a clamping block of a cavity inner surface grinding jig according to an embodiment of the present application is shown in FIG. 7;

[0032] Figure 8 A three-dimensional structural schematic view of a rotating shaft of a cavity inner surface grinding jig according to an embodiment of the present application is shown in FIG. 8;

[0033] Figure 9 A three-dimensional structural schematic view of a pressing plate of a cavity inner surface grinding jig according to an embodiment of the present application is shown in FIG. 9;

[0034] Figure 10 A three-dimensional structural schematic view of a gasket of a cavity inner surface grinding jig according to an embodiment of the present application is shown in FIG. 10;

[0035] Figure 11 A three-dimensional structural schematic view of a cavity part to be ground according to an embodiment of the present application is shown in FIG. 11;

[0036] Figure 12 A three-dimensional structural schematic view of a cavity inner surface grinding jig according to an embodiment of the present application is shown in FIG. 12 from another perspective;

[0037] The components represented by the reference numerals in the figures are as follows:

[0038] The utility model discloses: 1, base, 1a, through -hole one, 1b, screw hole one, 2, positioning seat, 2a, round plate, 2a1, mounting hole, 2b, cylinder, 2b1, rotation hole, 3, support column, 3a, screw hole two, 4, base plate, 4a, through -hole two, 4b, screw hole three, 4c, through -hole three, 5, backing plate, 5a, through -hole four, 5b, through -hole five, 5c, through -hole six, 6, grinding tool, 7, electric grinder head, 8, clamping block, 8a, bearing hole, 8b, grinder head hole, 8c, clamping edge, 8c1, through -hole seven, 8c2, screw hole four, 9, rotating shaft, 10, pressing plate, 10a, long hole, 11, bolt one, 12, bolt two, 13, bolt three, 14, bolt four, 15, needle roller bearing, 16, to be ground cavity part, 16a, circular inner cavity, 16a1, center through -hole, 17, gasket, 18, bolt five. DETAILED DESCRIPTION

[0039] As Figure 1 and Figure 12 Indicated, cavity inner surface grinding jig, including base 1, support column 3, base plate 4, backing plate 5, positioning seat 2, rotating shaft 9, clamping block 8, electric grinder head 7 and grinding tool 6 etc. component, specific structure is as follows:

[0040] Base 1 is the firm flat plate structure, and the parallel base plate 4 is arranged on it, and the support column 3 is arranged between base 1 and base plate 4, for supporting and fixing the whole structure.

[0041] As Figure 4 Indicated, the both ends of support column 3 are respectively equipped with screw hole two 3a, as Figure 2 Indicated, four corners on base 1 are provided with through -hole one 1a, for being connected with the screw hole two 3a of one end of support column 3, as Figure 5 Indicated, four corners on base plate 4 are provided with through -hole two 4a, for being connected with the screw hole two 3a of the other end of support column 3.

[0042] The upper surface of base plate 4 is provided with backing plate 5, and the material of backing plate 5 is Teflon, to reduce friction and wear, as Figure 6 Indicated, four corners on backing plate 5 are provided with through -hole four 5a, and correspond with through -hole two 4a on base plate 4.

[0043] As Figure 11 Indicated, the shape of to be ground cavity part 16 is cuboid structure, and two circular inner cavities 16a with partial overlap are arranged in the middle, and the center of each circular inner cavity 16a is provided with center through -hole 16a1, and to be ground cavity part 16 is fixed on backing plate 5 through pressing plate 10, as Figure 9As shown, the pressing plate 10 is an "L" shaped plate, two pressing plates 10 are respectively pressed on two sides of the cavity part 16 to be ground, the horizontal plate of the pressing plate 10 is provided with a long hole 10a, the base plate 5 is provided with a through hole five 5b matched with the positions of the two pressing plates 10, the base plate 4 is provided with a threaded hole three 4b matched with the positions of the two pressing plates 10, the bolt one 11 is screwed with the threaded hole three 4b after passing through the through hole five 5b, so as to fix the cavity part 16 to be ground.

[0044] Two positioning seats 2 are fixedly connected on the upper surface of the base 1, as shown in the figure. Figure 3 As shown, the positioning seat 2 is composed of a circular plate 2a and a cylindrical body 2b, the center of the cylindrical body 2b is provided with a rotating hole 2b1 for installing the rotating shaft 9, the circular plate 2a is provided with a mounting hole 2a1, the base 1 is provided with a threaded hole one 1b corresponding to the mounting hole 2a1, the bolt three 13 is screwed with the threaded hole one 1b after passing through the mounting hole 2a1, so as to fix the positioning seat 2; the center distance between the rotating holes 2b1 of the two positioning seats 2 is equal to the center distance between the two circular center through holes 16a1 of the cavity part 16 to be ground.

[0045] One end of the rotating shaft 9 is inserted into the rotating hole 2b1 of the positioning seat 2 through the through hole three 4c of the base plate 4 and the through hole six 5c of the base plate 5, and the other end of the rotating shaft 9 extends out of the cavity part 16 to be ground and is connected with the clamping block 8 through the needle bearing 15.

[0046] As shown in the figure, the clamping block 8 is provided with a bearing hole 8a for installing the needle bearing 15, and from the figure it can be seen that the bearing hole 8a is provided with two, which can further expand the grinding range; the clamping block 8 is also provided with a grinding head hole 8b, the grinding head hole 8b is provided with an opening, and the opening is provided with two opposite clamping edges 8c; the electric grinding head 7 is inserted into the grinding head hole 8b and clamped by the clamping edges 8c. Figure 7 The two clamping edges 8c are respectively provided with a through hole seven 8c1 and a threaded hole four 8c2, the bolt four 14 is screwed with the threaded hole four 8c2 after passing through the through hole seven 8c1, so as to clamp the electric grinding head 7 by the clamping edges 8c.

[0047] The grinding tool 6 for grinding is installed on the electric grinding head 7, the electric grinding head 7 is driven to rotate by electricity, and the grinding tool 6 grinds the bottom surface of the circular inner cavity 16a of the cavity part 16 to be ground.

[0048] Figure 10 The gasket 17 of ring structure is sleeved on the rotating shaft 9, as shown in the figure.

[0049] ​The base 1, the positioning seat 2, the support column 3, the base plate 4, the clamping block 8 and the rotating shaft 9 are made of 45 steel, having good mechanical properties and wear resistance; the pad 5 is made of Teflon to reduce friction and wear.

[0050] The pressing plate 10 is also made of 45 steel, ensuring the stability of the fixed cavity part 16 to be ground.

[0051] In use, the cavity part 16 to be ground is fixed on the pad 5 and is stabilized by the pressing plate 10 and the bolt 11; then, the position of the rotating shaft 9 and the electric grinding head 7 is adjusted so that the grinding tool 6 can accurately contact and grind the bottom surface of the circular inner cavity 16a; after the electric grinding head 7 is started, the grinding tool 6 rotates under the drive of the electric grinding head 7 to efficiently and accurately grind the bottom surface of the circular inner cavity 16a.

[0052] The cavity inner surface grinding jig can stably fix the cavity part to be ground, ensuring the stability and consistency during the grinding process; the efficient and accurate grinding of the cavity inner surface is realized by the electric grinding method; the specific shape and size of the cavity part to be ground can be adjusted to meet different grinding requirements; the operation is simple and easy to install, adjust and maintain.

Claims

1. A grinding fixture for grinding the inner surface of a cavity, used for grinding a cavity part (16) to be ground, the cavity part (16) having a cuboid shape, having two partially overlapping circular cavities (16a) in the middle of the cavity part (16), and having a central through hole (16a1) at the center of each circular cavity (16a), the grinding fixture for grinding the bottom surface of the circular cavity (16a), characterized in that, The support platform consists of a base (1), a support column (3), a base plate (4), and a pad (5) fixedly connected together. The base (1) and the base plate (4) are arranged in parallel. The support column (3) is arranged between the base (1) and the base plate (4). A pad (5) is provided on the upper surface of the base plate (4). The part (16) to be ground is fixed on the pad (5). Two positioning seats (2) are fixedly connected to the upper surface of the base (1). A rotating hole (2b1) is provided in the center of the positioning seat (2). The center distance between the rotating holes (2b1) on the two positioning seats (2) is through the two centers. The center distance between the holes (16a1) is equal. Through holes three (4c) and six (5c) concentric with the two rotating holes (2b1) are respectively provided on the base plate (4) and the pad plate (5). One end of the rotating shaft (9) passes through the through holes six (5c) and three (4c) and is inserted into the rotating hole (2b1) with clearance fit. The other end of the rotating shaft (9) extends out of the part (16) to be ground and is connected to the clamping block (8) through the needle roller bearing (15). An electric grinding head (7) is installed on the clamping block (8) and an abrasive (6) for grinding is installed on the electric grinding head (7).

2. The grinding fixture for the inner surface of a cavity according to claim 1, characterized in that, The base (1), positioning seat (2), support column (3), base plate (4), clamping block (8) and rotating shaft (9) are made of No. 45 steel, and the pad (5) is made of Teflon.

3. The grinding fixture for the inner surface of a cavity according to claim 1, characterized in that, On the four corners of the base (1), the base plate (4) and the pad (5), there are concentric through holes one (1a), two (4a) and four (5a). At both ends of the support column (3), there are threaded holes two (3a). Bolt two (12) passes through through holes four (5a) and two (4a) and is threaded to one end of the support column (3) through the threaded hole two (3a). Bolt five (18) passes through through hole one (1a) and is threaded to the other end of the support column (3) through the threaded hole two (3a).

4. A grinding fixture for the inner surface of a cavity according to claim 1, characterized in that, The positioning seat (2) is composed of a circular plate (2a) and a cylindrical cylinder (2b). A rotating hole (2b1) is set in the center of the cylindrical cylinder (2b). An installation hole (2a1) is provided on the circular plate (2a). A threaded hole (1b) corresponding to the installation hole (2a1) is provided on the base (1). Bolt three (13) passes through the installation hole (2a1) and is threadedly connected to the threaded hole (1b).

5. A grinding fixture for the inner surface of a cavity according to claim 1, characterized in that, The cavity part (16) to be ground is fixed on the support platform by the pressure plate (10). The pressure plate (10) is an "L" shaped plate. The two pressure plates (10) press on both sides of the cavity part (16) to be ground. There is an elongated hole (10a) on the horizontal plate of the pressure plate (10). There are threaded holes three (4b) and through holes five (5b) on the base plate (4) and the pad plate (5) respectively, which match the positions of the two pressure plates (10). Bolt one (11) passes through through hole five (5b) and is threaded to threaded hole three (4b).

6. A grinding fixture for the inner surface of a cavity according to claim 5, characterized in that, The pressure plate (10) is made of No. 45 steel.

7. A grinding fixture for the inner surface of a cavity according to claim 1, characterized in that, A bearing hole (8a) is provided on the clamping block (6), and a needle roller bearing (15) is installed in the bearing hole (8a).

8. A grinding fixture for the inner surface of a cavity according to claim 7, characterized in that, A grinding head hole (8b) is provided on the clamping block (6). The grinding head hole (8b) has an opening, and two opposing clamping edges (8c) are provided at the opening. The electric grinding head (7) is inserted into the grinding head hole (8b) and then clamped by the clamping edges (8c).

9. A grinding fixture for the inner surface of a cavity according to claim 8, characterized in that, Two clamping edges (8c) are respectively provided with through holes seven (8c1) and threaded holes four (8c2). After bolt four (14) passes through through hole seven (8c1) and is threadedly connected to threaded hole four (8c2), the clamping edge (8c) drives the grinding head hole (8b) to clamp the electric grinding head (7).

10. A grinding fixture for the inner surface of a cavity according to claim 1, characterized in that, A ring-shaped gasket (17) is fitted on the rotating shaft (9), and the lower surface of the gasket (17) is in contact with the upper surface of the positioning seat (2).

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