Clamping jaw supporting structure and clamping jaw device

Abstract

The utility model relates to the technical field of photovoltaics and semiconductors, in particular to a clamping jaw supporting structure and a clamping jaw device, and aims to solve the problem that a boat carrying manipulator cannot carry a plurality of carriers at the same time. The clamping jaw supporting structure comprises at least one cross beam, the cross beam extends in the first direction, and the two ends, in the first direction, of the cross beam are configured to support at least one first clamping jaw respectively; a through groove extending in the first direction is formed in the lower surface of the supporting piece, at least part of the cross beam is embedded into the through groove, the upper surface of the cross beam abuts against the groove bottom of the through groove, the supporting piece is arranged in the middle area of the cross beam, the middle area is the area between the two ends of the cross beam in the first direction, and the supporting piece is configured to support the second clamping jaw; the second clamping jaw is configured to be matched with the at least two first clamping jaws to grab the two carriers, so that the number of products capable of being borne by the clamping jaw supporting structure is increased, and the number of products carried by the boat carrying manipulator comprising the clamping jaw supporting structure is increased.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of photovoltaic and semiconductor technology, and in particular to a gripper support structure and a gripper device. BACKGROUND

[0002] Semiconductor and photovoltaic tube type equipment, such as diffusion furnaces, annealing furnaces, oxidation furnaces, low pressure chemical vapor deposition (LPCVD), plasma enhanced chemical vapor deposition (PECVD), etc., are basically multi-tube equipment. The multi-tube equipment shares a purification table and loading and unloading equipment. The purification table includes a boat handling robot. The boat handling robot carries a boat carrier between a paddle position and a buffer position. With the increasing demand for production capacity in the market, the size of the product is getting larger and larger, the number of single tubes is getting more and more, and the number of products that the robot needs to carry is also getting more and more. However, the boat handling robot in the related art cannot simultaneously carry multiple carriers. CONTENT OF THE UTILITY MODEL

[0003] Therefore, the embodiments of the present application provide a gripper support structure and a gripper device to solve the problem that the boat handling robot cannot simultaneously carry multiple carriers.

[0004] In a first aspect, an embodiment of the present application provides a gripper support structure, comprising: at least one cross beam, the cross beam extending along a first direction, and both ends of the cross beam in the first direction being configured to support at least one first gripper; a support member, a lower surface of the support member having a through slot extending along the first direction, the cross beam being at least partially embedded in the through slot, and an upper surface of the cross beam abutting a slot bottom of the through slot, the support member being arranged in a middle region of the cross beam, the middle region being a region between both ends of the cross beam in the first direction, and the support member being configured to support a second gripper, the second gripper being configured to cooperate with at least two first grippers respectively to grasp two carriers.

[0005] In combination with the first aspect, in some implementations of the first aspect, the support member has a first through hole extending along a second direction, the first through hole being in communication with the slot bottom of the through slot to enable the first through hole to expose the cross beam, and the second direction being perpendicular to the lower surface of the support member; and wherein an inner wall of the first through hole close to the cross beam is welded to the cross beam.

[0006] In combination with the first aspect, in some implementations of the first aspect, the support member has a plurality of mounting portions arranged in sequence along the first direction, and the mounting portions are configured to mount the second gripper.

[0007] In conjunction with the first aspect, in some implementations of the first aspect, the mounting portion includes at least one first elongated hole penetrating the support member along a second direction, the length direction of the first elongated hole being perpendicular to the first direction and parallel to the lower surface of the support member, the second direction being a direction perpendicular to the lower surface of the support member.

[0008] In conjunction with the first aspect, in some implementations of the first aspect, the plurality of mounting portions are symmetrically arranged with respect to the crossbeam in the orthographic projection of the upper surface of the crossbeam; and / or, the mounting portion includes a plurality of the first elongated holes, the plurality of the first elongated holes being equally spaced along the first direction.

[0009] In conjunction with the first aspect, in some implementations of the first aspect, the number of crossbeams is multiple, the multiple crossbeams are arranged sequentially along a third direction, adjacent crossbeams are welded together, the support member is welded to the multiple crossbeams respectively, the third direction is perpendicular to the first direction and parallel to the lower surface of the support member, wherein the gripper support structure further includes: at least one reinforcing member, the reinforcing member is welded to the multiple crossbeams respectively; and / or, the crossbeams include square tubes.

[0010] In conjunction with the first aspect, in some implementations of the first aspect, when the number of crossbeams is multiple and the gripper support structure includes the reinforcing member, the gripper support structure further includes: at least two fixing seats, respectively connected to both ends of the crossbeam in the first direction, the fixing seats being welded to the multiple crossbeams respectively, and the fixing seats being configured to mount the first gripper; wherein, the reinforcing member is disposed on a first side of the crossbeam in a second direction, and the fixing seats are disposed on a second side of the crossbeam in the second direction, the second direction being a direction perpendicular to the lower surface of the support member.

[0011] In conjunction with the first aspect, in some implementations of the first aspect, the fixing base has a second elongated hole penetrating the fixing base along the second direction, the length direction of the second elongated hole being the first direction; and / or, the support member has a plurality of mounting portions arranged sequentially along the first direction, the mounting portions being configured to mount the second gripper, the crossbeam having a plurality of first wire-passing holes arranged sequentially along the first direction, the first wire-passing holes penetrating the crossbeam along the third direction, the first wire-passing holes corresponding one-to-one with the mounting portions, the first wire-passing holes being configured to allow the cable of the second gripper to pass through; and / or, the gripper support structure has at least one second wire-passing hole, the second wire-passing hole penetrating sequentially through the end of the crossbeam in the first direction and the fixing base, the second wire-passing hole being configured to allow the cable of the first gripper to pass through.

[0012] In conjunction with the first aspect, in some implementations of the first aspect, when the gripper support structure has the second wire hole and the crossbeam includes a square tube, the sides of the crossbeam near the reinforcing member at both ends have chamfers.

[0013] Secondly, one embodiment of this application provides a gripper device, including: the gripper support structure mentioned in the first aspect; at least two first grippers, respectively connected to both ends of the crossbeam of the gripper support structure; and a second gripper connected to a support member of the gripper support structure, wherein the second gripper is configured to cooperate with at least two of the first grippers to grip two carriers.

[0014] The gripper support structure provided in this application embodiment can carry at least two first grippers and at least one second gripper. The second gripper can cooperate with the two first grippers respectively to grasp two carriers, thereby increasing the number of products that the gripper support structure can carry, and thus increasing the number of products handled by the boat handling robot including the gripper support structure.

[0015] In addition, the crossbeam of the gripper support structure of this application is not slotted due to the installation of support components, that is, the original structure of the crossbeam is maintained, thereby ensuring the strength of the crossbeam, improving the strength of the gripper support structure, and providing sufficient strength for the gripper support structure to support more products. Attached Figure Description

[0016] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 The diagram shown is a schematic diagram of a gripper support structure provided in an embodiment of this application.

[0018] Figure 2 The image shown is an embodiment provided by this application. Figure 1 The enlarged view of the gripper support structure in region A is shown.

[0019] Figure 3 The image shown is an embodiment provided by this application. Figure 1 The image shows a magnified view of the gripper support structure in region B.

[0020] Figure 4 The diagram shown is a structural schematic of a support member provided in an embodiment of this application.

[0021] Figure 5The diagram shown is a structural schematic of a gripper device provided in an embodiment of this application.

[0022] Figure 6 The diagram shown is a structural schematic of a gripper device and a carrier provided in an embodiment of this application.

[0023] Figure label:

[0024] 1. Gripper device; 10. Gripper support structure; 100. Crossbeam; 110. Square tube; 120. First through hole; 130. Second through hole; 140. Chamfer; 200. Support member; 210. Through groove; 220. First through hole; 230. Mounting part; 231. First elongated hole; 240. Recess; 300. Reinforcing part; 400. Fixing base; 410. Second elongated hole; 20. First gripper; 30. Second gripper; 2. Carrier; X, first direction; Y, second direction; Z, third direction. Detailed Implementation

[0025] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0026] Figure 1 The diagram shown is a schematic diagram of a gripper support structure provided in an embodiment of this application. Figure 2 The image shown is an embodiment provided by this application. Figure 1 The enlarged view of the gripper support structure in region A is shown. Figure 3 The image shown is an embodiment provided by this application. Figure 1 The image shows a magnified view of the gripper support structure in region B. Figure 4 The diagram shown is a structural schematic of a support member provided in an embodiment of this application. Figure 5 The diagram shown is a structural schematic of a gripper device provided in an embodiment of this application. Figure 6 The diagram shown is a structural schematic of a gripper device and a carrier provided in one embodiment of this application. Figures 1 to 6 As shown, the gripper support structure 10 includes at least one crossbeam 100 and a support member 200.

[0027] A gripper support structure 10 is applied to a gripper device 1, which is mounted at the end of a boat-handling robot. A crossbeam 100 extends along a first direction X. Both ends of the crossbeam 100 in the first direction X are respectively configured to support at least one first gripper 20. Exemplarily, the first direction X is a horizontal direction, or the first direction X is at an acute angle to the horizontal direction. Exemplarily, the crossbeam 100 can be a rod-like structure, a column-like structure, etc. Exemplarily, such as... Figure 2 As shown, the crossbeam 100 can be a profile, such as a square tube.

[0028] like Figure 3 and Figure 4 As shown, the lower surface of the support member 200 has a through groove 210 extending along a first direction X. The crossbeam 100 is at least partially embedded in the through groove 210, and the upper surface of the crossbeam 100 abuts against the bottom of the through groove 210. The support member 200 is disposed in the middle region of the crossbeam 100, which is the region between the two ends of the crossbeam 100 in the first direction X. The support member 200 is configured to support second grippers 30, which are configured to engage with at least two first grippers 20 respectively to grip two carriers 2.

[0029] For example, the carrier 2 is a structure such as a boat support, boat, or flower basket that can carry products such as silicon wafers, crystal wafers, glass substrates, and solar panels.

[0030] The gripper support structure 10 can carry at least two first grippers 20 and at least one second gripper 30. The second gripper 30 can cooperate with the two first grippers 20 respectively to grip two carriers 2, thereby increasing the number of products that the gripper support structure 10 can carry, and thus increasing the number of products handled by the boat handling robot including the gripper support structure 10.

[0031] In addition, the crossbeam 100 of the gripper support structure 10 is not slotted due to the installation of the support member 200, thus maintaining the original structure of the crossbeam 100, thereby ensuring the strength of the crossbeam 100, improving the strength of the gripper support structure 10, and providing sufficient strength for the gripper support structure 10 to support more products.

[0032] For example, the support member 200 can be welded to the crossbeam 100. Welding does not require drilling holes in the crossbeam 100 and will not damage the original structure of the crossbeam 100, thereby further ensuring the strength of the crossbeam 100 and further improving the strength of the gripper support structure 10, providing higher strength for the gripper support structure 10 to carry more products.

[0033] In some embodiments, the support member 200 has a first through hole 220 extending along a second direction Y. The first through hole 220 communicates with the bottom of the through groove 210, so that the first through hole 220 can expose the crossbeam 100. The second direction Y is a direction perpendicular to the lower surface of the support member 200. The inner wall of the first through hole 220 near the crossbeam 100 is welded to the crossbeam 100, thereby further improving the connection strength between the support member 200 and the crossbeam 100 and ensuring the reliability of the second gripper 30 installation.

[0034] In some embodiments, the support member 200 has a plurality of mounting portions 230 arranged sequentially along a first direction X, and the mounting portions 230 are configured to mount the second gripper 30. Exemplarily, the second gripper 30 can be mounted on any one of the mounting portions 230 as needed, thereby adjusting the mounting position of the second gripper 30 in the first direction X as needed.

[0035] In some embodiments, such as Figure 3 As shown, the orthographic projections of multiple mounting parts 230 on the upper surface of the crossbeam 100 are symmetrically arranged relative to the crossbeam 100, so that a second gripper 30 can be fixed by two symmetrical mounting parts 230, which further improves the reliability of the second gripper 30 installation.

[0036] In some embodiments, such as Figure 3 As shown, there is a recess 240 between multiple mounting portions 230 on the same side of the crossbeam 100. The recess 240 can provide clearance space for the installation of the second gripper 30, which facilitates the installation of the second gripper 30.

[0037] In some embodiments, the mounting portion 230 includes at least one first elongated hole 231 extending through the support member 200 along a second direction Y. The length direction of the first elongated hole 231 is perpendicular to the first direction X and parallel to the lower surface of the support member 200. In other words, as Figure 3 As shown, the length direction of the first elongated hole 231 is the third direction Z. The second direction Y is perpendicular to the lower surface of the support member 200.

[0038] By setting the first elongated hole 231, the installation position of the second gripper 30 in the third direction Z can be adjusted, thereby making the gripper support structure 10 suitable for various types of second grippers 30.

[0039] In some embodiments, the mounting portion 230 includes a plurality of first elongated holes 231, which are equally spaced along a first direction X, thereby enabling the mounting of a second gripper 30 using the plurality of first elongated holes 231, further improving the reliability of the mounting of the second gripper 30.

[0040] In some embodiments, there are multiple crossbeams 100, thereby further increasing the strength of the gripper support structure 10 and enabling it to support more products. The multiple crossbeams 100 are arranged sequentially along a third direction Z, with adjacent crossbeams 100 welded together. The support member 200 is welded to each of the multiple crossbeams 100. The third direction Z is perpendicular to the first direction X and parallel to the lower surface of the support member 200. The gripper support structure 10 also includes at least one reinforcing member 300. The reinforcing member 300 is welded to each of the multiple crossbeams 100, increasing the connection strength between the multiple crossbeams 100 and further improving the strength of the gripper support structure 10.

[0041] In some embodiments, such as Figure 2 As shown, the crossbeam 100 includes a square tube 110. The square tube 110 is a hollow structure, which is lightweight and high-strength. It can reduce the weight of the crossbeam 100 while ensuring that the crossbeam 100 has sufficient strength, thereby reducing the load requirements on the handling robot.

[0042] In some embodiments, when there are multiple crossbeams 100, the gripper support structure 10 further includes at least two fixing seats 400. The at least two fixing seats 400 are respectively connected to both ends of the crossbeams 100 in the first direction X. The fixing seats 400 are welded to the multiple crossbeams 100, increasing the connection strength between the multiple crossbeams 100, thereby further improving the strength of the gripper support structure 10. The fixing seats 400 are configured to mount the first gripper 20.

[0043] In some embodiments, the reinforcing member 300 is disposed on a first side of the crossbeam 100 in the second direction Y, and the fixing seat 400 is disposed on a second side of the crossbeam 100 in the second direction Y. The second direction Y is a direction perpendicular to the lower surface of the support member 200. In other words, the crossbeam 100 is connected on the first side of the second direction Y by the reinforcing member 300 and on the second side of the second direction Y by the fixing seat 400, further increasing the connection strength between the multiple crossbeams 100.

[0044] In some embodiments, the mounting base 400 has a second elongated hole 410 extending through the mounting base 400 along the second direction Y. The length direction of the second elongated hole 410 is the first direction X, so that the first gripper 20 can be installed using the second elongated hole 410, and the installation position of the first gripper 20 in the first direction X can be adjusted, so that the gripper device 1 can grip carriers 2 of different sizes.

[0045] In some embodiments, such as Figure 3As shown, the support member 200 has a plurality of mounting portions 230 arranged sequentially along the first direction X, and the mounting portions 230 are configured to mount the second gripper 30. The crossbeam 100 has a plurality of first wire-passing holes 120 arranged sequentially along the first direction X, and the first wire-passing holes 120 penetrate the crossbeam 100 along the third direction Z. The first wire-passing holes 120 correspond one-to-one with the mounting portions 230. The first wire-passing holes 120 are configured to allow the cable of the second gripper 30 to pass through, so as to prevent the cable from being messy and affecting the gripping operation of the gripper device 1.

[0046] In some embodiments, such as Figure 2 As shown, the gripper support structure 10 has at least one second wire hole 130. The second wire hole 130 passes through the end of the crossbeam 100 in the first direction and the fixing seat 400 in sequence. The second wire hole 130 is configured to allow the cable of the first gripper 20 to pass through, so as to prevent the cable from being messy and affecting the gripping operation of the gripper device 1.

[0047] In some embodiments, when the gripper support structure 10 has a second wire-passing hole 130 and the crossbeam 100 includes a square tube 110, the sides of the crossbeam 100 near the reinforcement 300 at both ends have chamfers 140, thereby providing operating space for passing the cable of the first gripper 20 through the second wire-passing hole 130. Exemplarily, the chamfer 140 is a rounded chamfer or a beveled chamfer.

[0048] This application embodiment also provides a gripper device 1, such as Figure 5 and Figure 6 As shown, the gripper device 1 includes the gripper support structure 10 in the above embodiment, at least two first grippers 20 and second grippers 30.

[0049] At least two first grippers 20 are respectively connected to both ends of the crossbeam 100 of the gripper support structure 10. The second gripper 30 is connected to the support member 200 of the gripper support structure 10, and the second gripper 30 is configured to cooperate with at least two first grippers 20 to grip two carriers 2.

[0050] Since the gripper device 1 includes the gripper support structure 10 in the above embodiments, the gripper device 1 has all the technical features and effects of the gripper support structure 10, which will not be repeated here.

[0051] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0052] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0053] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0054] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0055] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A gripper support structure, characterized in that, include: At least one crossbeam extends along a first direction, and each end of the crossbeam in the first direction is configured to support at least one first gripper. A support member has a lower surface having a through groove extending along the first direction, a crossbeam being at least partially embedded in the through groove, and the upper surface of the crossbeam abutting the bottom of the through groove. The support member is disposed in the middle region of the crossbeam, the middle region being the region between the two ends of the crossbeam in the first direction. The support member is configured to support a second gripper, the second gripper being configured to engage with at least two of the first grippers to grip two vehicles.

2. The gripper support structure according to claim 1, characterized in that, The support member has a first through hole extending in a second direction, the first through hole communicating with the bottom of the through groove, so that the first through hole can expose the crossbeam, the second direction being a direction perpendicular to the lower surface of the support member; The inner wall of the first through hole near the crossbeam is welded to the crossbeam.

3. The gripper support structure according to claim 1, characterized in that, The support member has a plurality of mounting portions arranged sequentially along the first direction, the mounting portions being configured to mount the second gripper.

4. The gripper support structure according to claim 3, characterized in that, The mounting portion includes at least one first elongated hole penetrating the support member along a second direction. The length direction of the first elongated hole is perpendicular to the first direction and parallel to the lower surface of the support member. The second direction is a direction perpendicular to the lower surface of the support member.

5. The gripper support structure according to claim 4, characterized in that, The orthographic projections of the plurality of mounting parts on the upper surface of the crossbeam are symmetrically arranged with respect to the crossbeam; And / or, The mounting portion includes a plurality of first elongated holes, which are equally spaced along the first direction.

6. The gripper support structure according to any one of claims 1 to 5, characterized in that, The number of crossbeams is multiple, and the multiple crossbeams are arranged sequentially along a third direction. Adjacent crossbeams are welded together. The support member is welded to the multiple crossbeams respectively. The third direction is perpendicular to the first direction and parallel to the lower surface of the support member. The gripper support structure further includes: at least one reinforcing member, which is welded to the multiple crossbeams respectively. And / or, The crossbeam includes a square tube.

7. The gripper support structure according to claim 6, characterized in that, When there are multiple crossbeams and the gripper support structure includes the reinforcing member, the gripper support structure further includes: At least two fixing seats are respectively connected to both ends of the crossbeam in the first direction, the fixing seats are respectively welded to the multiple crossbeams, and the fixing seats are configured to install the first gripper; The reinforcement member is disposed on the first side of the crossbeam in the second direction, and the fixing seat is disposed on the second side of the crossbeam in the second direction, wherein the second direction is perpendicular to the lower surface of the support member.

8. The gripper support structure according to claim 7, characterized in that, The fixing base has a second elongated hole that extends through the fixing base along the second direction, and the length direction of the second elongated hole is the first direction; And / or, The support member has a plurality of mounting portions arranged sequentially along the first direction, the mounting portions being configured to mount the second gripper, the crossbeam having a plurality of first wire holes arranged sequentially along the first direction, the first wire holes penetrating the crossbeam along the third direction, the first wire holes corresponding one-to-one with the mounting portions, and the first wire holes being configured to allow the cable of the second gripper to pass through. And / or, The gripper support structure has at least one second wire hole, which passes sequentially through the end of the crossbeam in a first direction and the fixing seat, and is configured to allow the cable of the first gripper to pass through.

9. The gripper support structure according to claim 8, characterized in that, When the gripper support structure has the second wire hole and the crossbeam includes a square tube, the sides of the crossbeam near the reinforcing member at both ends have chamfers.

10. A gripper device, characterized in that, include: The gripper support structure according to any one of claims 1 to 9; At least two first grippers are respectively connected to both ends of the crossbeam of the gripper support structure; The second gripper is connected to the support member of the gripper support structure, and the second gripper is configured to engage with at least two of the first grippers to grip two vehicles.

Images