Laser stripping device

Abstract

The utility model provides a laser stripping device which comprises a machine table, a product carrying platform, a laser module, a material frame, a separation and adsorption module, a transfer mechanical arm, a feeding carrying table and a discharging carrying table, and the feeding carrying table and the discharging carrying table are distributed around the transfer mechanical arm in a fan-shaped mode. The product carrying platform is arranged on one side of the transfer manipulator, the product carrying platform comprises a Y-axis linear module, a rotating platform and an adsorption platform and is used for carrying products, the laser module and the separation and adsorption module are erected above the product carrying platform, the transfer manipulator comprises two moving arms and a lifting mechanism, and the lifting mechanism is used for lifting the two moving arms. The two moving arms are arranged on the lifting mechanism, and a plurality of clamping plugs are detachably arranged on the feeding carrying table and the discharging carrying table. The device is simple and compact in structure, small in size, high in efficiency, convenient to use and high in applicability.

Description

Technical Field

[0001] This utility model relates to the field of lasers, and in particular to a laser stripping device. Background Technology

[0002] The separation technology between sapphire substrates and GaN (gallium nitride) mainly adopts laser lift-off technology. That is, a laser beam is used to irradiate the gallium nitride film from the sapphire substrate side. The laser energy is selectively absorbed by the gallium nitride layer, causing the film to heat up rapidly in a local area, which in turn causes thermal expansion and stress accumulation. When a certain degree is reached, the interface between the gallium nitride film and the sapphire substrate separates, thus achieving the lift-off of the film.

[0003] Currently, there are still some problems with this type of laser stripping equipment in practical applications. For example, the equipment generally uses a linear conveyor line to sequentially transport the products to be stripped to the laser for scanning and stripping. In this way, the loading and unloading of the equipment are located at the two ends of the linear conveyor line, which makes the overall size of the equipment large, the floor space large, the cost high, the requirements for the factory building high, the overall efficiency low, and the applicability generally poor. Utility Model Content

[0004] In view of the above, this utility model provides a laser ablation device with a simple and compact structure, small size, high efficiency, convenient use, and strong applicability.

[0005] The present invention specifically adopts the following technical solution: a laser peeling device, comprising a machine base, a product transport platform, a laser module, a material frame, a separation and adsorption module, a transfer robot, and a loading platform and a unloading platform distributed in a fan shape around the transfer robot. The material frame is located on one side of the product transport platform, and the product transport platform is located on one side of the transfer robot. The product transport platform includes a Y-axis linear module, a rotating platform, and an adsorption platform for transporting products. The laser module and the separation and adsorption module are mounted above the product transport platform. The transfer robot includes two moving arms and a lifting mechanism. The two moving arms are mounted on the lifting mechanism. The loading platform and the unloading platform are detachably provided with multiple clips.

[0006] As a further improvement of the present invention, the laser module is mounted on the machine platform via a stand, and the separation and adsorption module is mounted on the stand via a connecting frame. The separation and adsorption module includes an X-axis linear module, a servo electric cylinder, and a vacuum suction cup. The servo electric cylinder is mounted on the X-axis linear module, and the vacuum suction cup is mounted on the servo electric cylinder.

[0007] As a further improvement of the present invention, the adsorption platform is disposed on the rotating platform, the rotating platform is disposed on the Y-axis linear module, the adsorption platform is a horseshoe-shaped structure with a notch, and adsorption holes are provided on the adsorption platform.

[0008] As a further improvement of the present invention, the laser module includes a laser, a laser galvanometer, a laser head, and a lifting drive module. The laser is fixed on the stand, and the laser galvanometer and the laser head are disposed on the lifting drive module, which is also disposed on the stand.

[0009] As a further improvement of the present invention, the material frame includes a base and a frame. A window is provided in the center of the base, and a top column is provided through the window. A lifting drive mechanism is provided inside the machine base. The bottom end of the top column is set on the lifting drive mechanism, and the lifting drive mechanism drives the top column to shuttle up and down within the frame.

[0010] As a further improvement of the present invention, the moving arm includes a first rotating support arm, a second rotating support arm, and a third rotating support arm. The first rotating support arm is disposed on the lifting mechanism, the second rotating support arm is disposed on the first rotating support arm, and the third rotating support arm is disposed on the second rotating support arm.

[0011] As a further improvement of this utility model, the end of the third rotating support arm is provided with a suction cup for adsorbing products.

[0012] As a further improvement of the present invention, the loading platform and the unloading platform have the same structure. Both the loading platform and the unloading platform are provided with two workstations. Each workstation is provided with a first positioning component and a second positioning component for positioning and placing plugs of different sizes and specifications.

[0013] As a further improvement of the present invention, the first positioning component is located in the inner ring of the second positioning component. The first positioning component includes a first locking block, a first spring piece, and a first groove. The second positioning component includes a second locking block, a second spring piece, and a second groove.

[0014] As a further improvement of the present invention, the machine platform is covered with a machine cover, the top of the machine cover is provided with a fan filter unit, and an upward-opening transparent material door is opened at the machine cover where the loading platform and the unloading platform are located.

[0015] This utility model's laser stripping device features a loading and unloading platform arranged in a fan shape around a transfer robot. The transfer robot employs a multi-axis, dual-arm structure, with the two arms working alternately to achieve efficient and rapid product transfer. Simultaneously, the separation and adsorption module and the laser module are mounted on a single frame. The vacuum suction cups of the separation and adsorption module are used to adsorb and transfer the separated sapphire. The adsorption platform is driven to rotate by a rotating platform, thus enabling comprehensive laser scanning of the product without the need for additional moving mechanisms. This configuration results in a simple, compact, small-sized, and low-cost overall device. Furthermore, two easily removable and replaceable clips are provided on the loading and unloading platforms to accommodate products of various sizes, further enhancing the device's adaptability. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall device of the laser ablation device of this utility model.

[0017] Figure 2 This is a schematic diagram of the internal three-dimensional structure of the laser ablation device of this utility model.

[0018] Figure 3 for Figure 2 Enlarged diagram of point A in the middle.

[0019] Figure 4 This is a schematic diagram of the material frame structure of this utility model.

[0020] Figure 5 This is a schematic diagram of the transfer robot of this utility model.

[0021] Figure 6 This is a partial structural diagram of a loading or unloading platform. Detailed Implementation

[0022] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0023] Reference Figures 1-3The laser stripping device of this embodiment includes a machine base 1, a product transport platform 2, a laser module 3, a material frame 4, a separation and adsorption module 5, a transfer robot 6, and a loading platform 7 and a unloading platform 8 arranged in a fan shape around the transfer robot 6. The material frame 4 is located on one side of the product transport platform 2, and the product transport platform 2 is located on one side of the transfer robot 6. The product transport platform 2 includes a Y-axis linear module 21, a rotating platform 22, and an adsorption platform 23 for transporting products. The laser module 3 and the separation and adsorption module 4 are mounted above the product transport platform 2. The transfer robot 6 includes two moving arms 61 and a lifting mechanism 62. The two moving arms 61 are mounted on the lifting mechanism 62 and are driven by the lifting mechanism 62 to perform vertical lifting movements. In this embodiment, the lifting mechanism 62 is a lifting linear motor. Multiple detachable latches 9 are provided on the loading platform 7 and the unloading platform 8.

[0024] Specific combination Figure 3 The laser module 3 is mounted on the machine platform via a marble stand 35, and the separation and adsorption module 5 is mounted on the stand 31 via a connecting frame 51. The separation and adsorption module 5 includes an X-axis linear module 52, a servo cylinder 53, and a vacuum chuck 54. The servo cylinder 53 is mounted on the X-axis linear module 52 and is driven by the X-axis linear module 52 to perform translational movement. The vacuum chuck 54 is mounted on the servo cylinder 53 and is driven by the servo cylinder 53 to perform vertical lifting and lowering movement. After lowering to pick up the sapphire substrate on the adsorption platform 23, it rises. The X-axis linear module 52 is activated to move the peeled sapphire substrate into the material frame 4 for storage.

[0025] The laser module 3 includes a laser 31, a laser galvanometer 32, a laser head 33, and a lifting drive module 34. The laser 31 is fixed on the platform 35, and the laser galvanometer 32 and laser head 33 are mounted on the lifting drive module 34, which in turn is mounted on the platform 35. The lifting drive module 34 drives the laser galvanometer 32 and laser head 33 to move up and down, so as to perform laser focused scanning on the product on the adsorption platform 23. The laser head 33 is the processing objective lens, used to focus the laser emitted from the laser galvanometer 32 to perform laser scanning processing on the product. In this embodiment, the lifting drive module 34 can be a linear motor module or a lead screw linear module.

[0026] Furthermore, for the product transport platform 2, the adsorption platform 23 is mounted on the rotating platform 22, which is mounted on the Y-axis linear module 21. Driven by the Y-axis linear module 21, it moves linearly to a position below the laser module 3. The adsorption platform 23 has a horseshoe-shaped structure with a notch 231 to provide movement and clearance space for the moving arm 61. Adsorption holes are provided on the solid portion of the adsorption platform 23 outside the notch for adsorbing and fixing the product. When scanning one side of the sapphire substrate with a laser, the rotating platform 22 drives the adsorption platform 23 to rotate for a full scan. When loading material onto the adsorption platform 23, the rotating platform 22 drives the adsorption platform 23 to rotate, so that the transfer robot at the notch 231 faces the substrate. This allows the moving arm 61 to extend into the notch 231, drop the product onto the adsorption platform 23, and then remove it. When removing material from the adsorption platform 23, the rotating platform 22 drives the adsorption platform 23 to rotate, so that the transfer robot at the notch 231 faces the substrate. This allows the moving arm 61 to extend into the notch 231, gradually rise to support the separated gallium nitride layer, and then remove it. The X-axis linear module 52 and the Y-axis linear module 21 are two linear motor modules arranged in mutually perpendicular directions.

[0027] Reference Figure 4 The material frame 4 includes a base 41 and a frame 42. A window is provided in the center of the base 41, and a top column 43 is provided through the window. A lifting drive mechanism 44 is provided inside the machine. In this embodiment, the lifting drive mechanism 44 adopts a lifting linear motor. The bottom end of the top column 43 is set on the lifting drive mechanism 44. The lifting drive mechanism 44 drives the top column 43 to shuttle up and down within the frame 42. When the vacuum suction cup 54 puts the sapphire substrate into the material frame 4, the lifting drive mechanism 44 drives the top column 43 to rise, shortening the drop height of the sapphire substrate and avoiding damage to the sapphire substrate due to excessive drop. As the sapphire substrates are successively transferred into the material frame 4, the lifting drive mechanism 44 drives the top column 43 to gradually descend. When the lifting drive mechanism 44 drives the top column 43 to the lowest point, that is, away from the window of the base, the material frame 4 is manually disassembled and removed to collect the sapphire substrates.

[0028] Reference Figure 5 The moving arm 61 includes a first rotating support arm 611, a second rotating support arm 612, and a third rotating support arm 613. The first rotating support arm 611 is mounted on the lifting mechanism 62, the second rotating support arm 612 is mounted on the first rotating support arm 611, and the third rotating support arm 613 is mounted on the second rotating support arm 612. The rotating support arms are rotatably connected to each other, allowing for flexible rotation and loading / unloading of products at the loading station, product adsorption platform, and unloading station. A suction cup is provided at the end of the rotating support arm 613 for adsorbing products.

[0029] In this embodiment, the two moving arms 61 can work in turn to complete the loading and unloading tasks. For example, at the adsorption platform 23, one moving arm 61 adsorbs and transfers the stripped gallium nitride layer to the unloading chuck, while the other moving arm 61 transfers the product to be separated from the loading chuck to the empty adsorption platform 23. This alternating operation improves the detection efficiency.

[0030] Further integration Figure 1 , Figure 6 The loading platform 7 and unloading platform 8 have the same structure. Each loading platform 7 and unloading platform 8 has two workstations. Each workstation has a first positioning component and a second positioning component, which are used to position and place plugs of different sizes and specifications. The first positioning component is located in the inner circle of the second positioning component. That is, the plug size fixed on the second positioning component is larger than the plug size fixed on the first positioning component. The first positioning component includes a first locking block 10, a first spring piece 11, and a first groove 12. The second positioning component includes a second locking block 13, a second spring piece 14, and a second groove 15. One end of the first spring piece 11 is fixed in the first groove 12, and the other end is raised. Similarly, one end of the second spring piece 14 is fixed in the second groove 15, and the other end is raised. When the plug 9 is inserted and fixed in alignment with the groove on the first locking block 10, the first spring piece 11 presses against the plug 9 on the side. When the plug 9 is inserted and fixed in alignment with the groove on the second locking block 13, the second spring piece 15 presses against the plug 9 on the side. This structure facilitates the disassembly and installation of plugs of various sizes.

[0031] Additionally, refer to Figure 1 The machine base 1 is covered by a machine cover 16, and a fan filter unit 17 is installed on the top of the machine cover 16. A flip-up transparent material door 18 is opened at the location of the loading platform 7 and the unloading platform 8 on the machine cover 16 for easy observation and loading / unloading. A movable door is also opened on the machine cover 16 corresponding to the internal material frame. It is opened when picking up or placing the material frame or when maintaining the inside, and closed at other times.

[0032] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "set up," "connect," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances. Furthermore, the terms "first" and "second" are used for descriptive purposes only to distinguish different objects, not to describe a specific order, and should not be construed as indicating or implying relative importance.

[0033] Furthermore, the above embodiments are only used to illustrate the present utility model and are not intended to limit the technical solutions described in the present utility model. The understanding of this specification should be based on those skilled in the art. Although the present utility model has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still make modifications or equivalent substitutions to the present utility model. All technical solutions and improvements that do not depart from the spirit and scope of the present utility model should be covered within the scope of the claims of the present utility model.

Claims

1. A laser ablation device, characterized in that: The system includes a machine base, a product transport platform, a laser module, a material frame, a separation and adsorption module, a transfer robot, and loading and unloading platforms distributed in a fan shape around the transfer robot. The material frame is located on one side of the product transport platform, and the product transport platform is located on one side of the transfer robot. The product transport platform includes a Y-axis linear module, a rotating platform, and an adsorption platform for transporting products. The laser module and the separation and adsorption module are mounted above the product transport platform. The transfer robot includes two moving arms and a lifting mechanism. The two moving arms are mounted on the lifting mechanism. The loading and unloading platforms are detachably equipped with multiple clips.

2. The laser ablation device according to claim 1, characterized in that: The laser module is mounted on the machine platform via a stand, and the separation and adsorption module is mounted on the stand via a connecting frame. The separation and adsorption module includes an X-axis linear module, a servo electric cylinder, and a vacuum suction cup. The servo electric cylinder is mounted on the X-axis linear module, and the vacuum suction cup is mounted on the servo electric cylinder.

3. The laser ablation device according to claim 1, characterized in that: The adsorption platform is set on the rotating platform, which is located on the Y-axis linear module. The adsorption platform has a horseshoe-shaped structure with a notch and adsorption holes.

4. The laser ablation device according to claim 2, characterized in that: The laser module includes a laser, a laser galvanometer, a laser head, and a lifting drive module. The laser is fixed on the stand, and the laser galvanometer and the laser head are mounted on the lifting drive module, which is also mounted on the stand.

5. The laser ablation device according to claim 1, characterized in that: The material frame includes a base and a frame. A window is provided in the center of the base, and a top column is provided through the window. A lifting drive mechanism is provided inside the machine. The bottom end of the top column is set on the lifting drive mechanism, and the lifting drive mechanism drives the top column to shuttle up and down within the frame.

6. The laser ablation device according to claim 1, characterized in that: The moving arm includes a first rotating support arm, a second rotating support arm, and a third rotating support arm. The first rotating support arm is mounted on the lifting mechanism, the second rotating support arm is mounted on the first rotating support arm, and the third rotating support arm is mounted on the second rotating support arm.

7. The laser ablation device according to claim 6, characterized in that: The end of the third rotating support arm is equipped with a suction cup.

8. The laser ablation device according to claim 1, characterized in that: The loading platform and the unloading platform have the same structure. Each loading platform and the unloading platform is provided with two workstations. Each workstation is provided with a first positioning component and a second positioning component for positioning and placing plugs of different sizes and specifications.

9. The laser ablation device according to claim 8, characterized in that: The first positioning component is located within the inner ring of the second positioning component. The first positioning component includes a first locking block, a first spring piece, and a first groove. The second positioning component includes a second locking block, a second spring piece, and a second groove.

10. The laser ablation device according to claim 1, characterized in that: The machine platform is covered with a machine cover, and a fan filter unit is installed on the top of the machine cover. An upward-opening transparent material door is opened at the machine cover where the loading platform and the unloading platform are located.

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