Vacuum chuck and chip sorting machine

Abstract

The utility model relates to the technical field of sorting machines, and particularly discloses a vacuum chuck and a chip sorting machine, the vacuum chuck comprises a chuck body, a sealing plate and a fixing assembly, one end face of the chuck body along a preset direction is arranged as an adsorption surface, and the other end face is concavely provided with a negative pressure cavity with an opening along the preset direction; a plurality of negative pressure holes and first threaded holes are formed in the bottom wall, opposite to the opening, of the negative pressure cavity, and the negative pressure holes extend to the adsorption surface from the negative pressure cavity; the sealing plate is inserted into the opening, the sealing plate is provided with an air exhaust hole and a through hole which are communicated with the negative pressure cavity, and the through hole corresponds to the first threaded hole; the fixing assembly comprises a first bolt and a first sealing ring, the first bolt penetrates through the through hole and the first sealing ring and is in threaded connection with the hole wall of the first threaded hole, and the first sealing ring is clamped by the disc body and the sealing plate. Compared with the mode that a suction cap can only suck part of the carrier film, the suction force and the suction area of the vacuum suction cup on the carrier film are larger, the arrangement precision of the chips on the carrier film is improved, electrostatic discharge caused by sliding is avoided, and the chips are prevented from being damaged.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of sorting machine especially relates to vacuum chuck and chip sorting machine. BACKGROUND

[0002] Chip sorting machine is high-precision equipment, can divide chip into different specifications and grades. It adopts advanced optical measurement technology and image processing technology, thereby realizing high-precision sorting. The working principle of chip sorting machine is to scan the surface of chip through optical sensor, generate image, and analyze and process the image to judge the quality and specification of chip, realize the automatic sorting of chip. This kind of equipment has high-speed processing capacity and ultrahigh precision, can greatly shorten the production cycle, reduce production cost and improve enterprise competitiveness. In modern industrial mode, chip sorting machine is a kind of efficient, accurate and automated equipment, which has important significance for improving production efficiency and product quality.

[0003] In the prior art, the film-carrying side of the empty tray is usually adsorbed by the suction cap, and then the sorted chips are attached to the other side of the film opposite to the suction cap to realize the sorting of the chips. In this process, since the suction cap can only adsorb the local area of the film, the adsorption force of the suction cap on the film is limited, and the film is flexible, which can easily cause relative sliding between the film and the suction cap, resulting in poor arrangement accuracy of the chips on the film, and relative sliding can easily cause electrostatic discharge and damage the chips.

[0004] Therefore, there is an urgent need for a vacuum chuck to solve the above problems. UTILITY MODEL CONTENTS

[0005] The utility model aims at providing a vacuum chuck and a chip sorting machine to solve the problem that in the related art, the suction cap can only adsorb the local area of the film, the adsorption force of the suction cap on the film is limited, and the film is flexible, which can easily cause relative sliding between the film and the suction cap, resulting in poor arrangement accuracy of the chips on the film, and relative sliding can easily cause electrostatic discharge and damage the chips.

[0006] On the one hand, the utility model provides a vacuum chuck, which comprises:

[0007] A disc body is provided with an adsorption surface at one end face along a predetermined direction, and the other end face is recessed with a negative pressure cavity with an opening along the predetermined direction. A plurality of negative pressure holes and first threaded holes are arranged on the bottom wall opposite to the opening of the negative pressure cavity. The negative pressure holes extend from the negative pressure cavity to the adsorption surface.

[0008] A sealing plate is inserted into the opening and closes the opening. The sealing plate is provided with a gas extraction hole and a through hole. The gas extraction hole and the through hole are respectively connected to the negative pressure cavity. The through hole is arranged corresponding to the first threaded hole.

[0009] The fixing assembly comprises a first bolt and a first sealing ring, the first bolt passes through the through hole and the first sealing ring and is screwed with the hole wall of the first threaded hole, and the disc body and the sealing plate clamp the first sealing ring.

[0010] As the preferred technical scheme of the vacuum chuck, the bottom wall opposite to the opening of the negative pressure cavity is provided with a first annular groove, the first threaded hole is located inside the first annular groove, and the first sealing ring is arranged in the first annular groove.

[0011] As the preferred technical scheme of the vacuum chuck, the through hole is provided with a plurality of through holes, and the first threaded hole is provided with a plurality of first threaded holes.

[0012] The fixing assembly is provided with a plurality of fixing assemblies, a plurality of through holes and a plurality of first threaded holes, and the three are one-to-one corresponding.

[0013] As the preferred technical scheme of the vacuum chuck, the second sealing ring is arranged in the negative pressure cavity, and the negative pressure hole and the air suction hole are located inside the second sealing ring, and the sealing plate and the disc body press the second sealing ring.

[0014] As the preferred technical scheme of the vacuum chuck, the bottom wall opposite to the opening of the negative pressure cavity is provided with a second annular groove, and the second sealing ring is arranged in the second annular groove.

[0015] As the preferred technical scheme of the vacuum chuck, the third annular groove is arranged on the adsorption surface, and part of the negative pressure holes are located in the third annular groove.

[0016] As the preferred technical scheme of the vacuum chuck, the second threaded hole is a blind hole.

[0017] As the preferred technical scheme of the vacuum chuck, the bottom wall opposite to the opening of the negative pressure cavity is provided with a protrusion, and the sealing plate abuts against the protrusion.

[0018] As the preferred technical scheme of the vacuum chuck, the first threaded hole is a blind hole.

[0019] In another aspect, the utility model provides a chip sorting machine, including the vacuum chuck in any scheme.

[0020] The utility model has the advantages of:

[0021] The utility model provides a vacuum chuck and chip sorting machine, this vacuum chuck includes disc body, sealing plate and fixed component, disc body is arranged as adsorption surface one end surface along the preset direction, the other end surface is recessed with the negative pressure chamber with the open mouth along the preset direction, the bottom wall of negative pressure chamber and open mouth is provided with a plurality of negative pressure holes and first threaded hole, and the negative pressure hole extends to adsorption surface from the negative pressure chamber, sealing plate is inserted in the open mouth and closes the open mouth, sealing plate is provided with the air extraction hole and the through -hole, the air extraction hole and the through -hole are connected negative pressure chamber respectively, and the through -hole is correspondingly provided with first threaded hole, fixed component includes first bolt and first sealing ring, first bolt passes through the through -hole and first sealing ring and is connected with the hole wall screwing of first threaded hole, and disc body and sealing plate clamp first sealing ring. The air extraction hole of this vacuum chuck is connected after negative pressure equipment, and the negative pressure is formed in the negative pressure chamber, because the negative pressure hole extends to adsorption surface from the negative pressure chamber, so, when the carrier film is pasted on adsorption surface, the negative pressure hole on adsorption surface will adsorb the carrier film on adsorption surface. Because the adsorption surface of vacuum chuck adsorbs the whole carrier film, compared with the adsorption of suction cap only to part carrier film, the adsorption force of vacuum chuck to carrier film is greater, and then makes the carrier film and vacuum chuck not to have relative movement, improves the arrangement precision of chip on carrier film, avoids the static electricity release due to sliding, to avoid damaging chip. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 It is the structure diagram of vacuum chuck in the utility model embodiment Figure 1 ;

[0023] Figure 2 It is the explosion diagram of vacuum chuck in the utility model embodiment

[0024] Figure 3 It is the structure diagram of vacuum chuck in the utility model embodiment Figure 2 ;

[0025] Figure 4 It is the sectional view of A-A in the utility model embodiment Figure 3

[0026] In the drawing:

[0027] X, preset direction

[0028] 1, disc body; 11, adsorption surface; 12, negative pressure chamber; 13, negative pressure hole; 14, first threaded hole; 15, first annular groove; 16, second annular groove; 17, third annular groove; 18, protrusion; 19, second threaded hole

[0029] 2, sealing plate; 21, air extraction hole; 22, through -hole

[0030] 3, fixed component; 31, first bolt; 32, first sealing ring

[0031] 4, second sealing ring; 5, negative pressure connector​ DETAILED DESCRIPTION

[0032] The technical solutions of the present application will be described clearly and completely below in conjunction with the drawings. Obviously, the described embodiments are some embodiments of the present application, but not all embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0033] In the description of the present application, it should be noted that the orientations or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", etc. are only for the purpose of description, and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions, and moreover, the "above", "upper" and "upper surface" of the first feature relative to the second feature include the vertical direction of the first feature above and obliquely above the second feature, or only indicate that the horizontal height of the first feature is higher than that of the second feature. The "below", "below" and "below" of the first feature relative to the second feature include the vertical direction of the first feature below and obliquely below the second feature, or only indicate that the horizontal height of the first feature is less than that of the second feature.

[0034] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0035] The embodiments of the present application will be described in detail below, and examples of the embodiments are shown in the drawings, wherein the same or similar reference numerals represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0036] As Figures 1-4As shown, the embodiment provides a vacuum chuck, which comprises a disc body 1, a sealing plate 2 and a fixing assembly 3. An end surface of the disc body 1 along a preset direction X is provided as an adsorption surface 11. The other end surface along the preset direction X is recessed with an open negative pressure cavity 12. The bottom wall of the negative pressure cavity 12 opposite to the opening is provided with a plurality of negative pressure holes 13 and a first threaded hole 14. The negative pressure holes 13 extend from the negative pressure cavity 12 to the adsorption surface 11. The sealing plate 2 is inserted into and closes the opening. The sealing plate 2 is provided with a gas extraction hole 21 and a through hole 22. The gas extraction hole 21 and the through hole 22 are respectively communicated with the negative pressure cavity 12. The through hole 22 is correspondingly provided with the first threaded hole 14. The fixing assembly 3 comprises a first bolt 31 and a first sealing ring 32. The first bolt 31 passes through the through hole 22 and the first sealing ring 32 and is screwed with the hole wall of the first threaded hole 14. The disc body 1 and the sealing plate 2 clamp the first sealing ring 32. After the gas extraction hole 21 of the vacuum chuck is connected with a negative pressure device, a negative pressure is formed in the negative pressure cavity 12. Since the negative pressure holes 13 extend from the negative pressure cavity 12 to the adsorption surface 11, when a carrier film is attached to the adsorption surface 11, the negative pressure holes 13 on the adsorption surface 11 adsorb the carrier film on the adsorption surface 11. Since the adsorption surface 11 of the vacuum chuck adsorbs the entire carrier film, compared with the suction cap which can only adsorb part of the carrier film, the adsorption force of the vacuum chuck on the carrier film is greater, thereby preventing the carrier film from moving relative to the vacuum chuck, improving the arrangement accuracy of the chips on the carrier film and avoiding static electricity release due to sliding to avoid damage to the chips.

[0037] Specifically, the first bolt 31 passes through the through hole 22 of the sealing plate 2 and is screwed with the hole wall of the first threaded hole 14 on the disc body 1 to realize the relative fixation of the disc body 1 and the sealing plate 2. In order to ensure the adsorption force of the vacuum chuck, therefore, it is necessary to avoid the external gas from entering the negative pressure cavity 12 through the through hole 22 or the first threaded hole 14. Therefore, the first sealing ring 32 is sleeved on the first bolt 31. When the first bolt 31 relatively fixes the disc body 1 and the sealing plate 2, the disc body 1 and the sealing plate 2 clamp the first sealing ring 32, thereby avoiding the external gas from entering the negative pressure cavity 12 through the through hole 22 or the first threaded hole 14. Specifically, the first sealing ring 32 is made of rubber.

[0038] In order to improve the stability of the relative fixation of the sealing plate 2 and the disc body 1, optionally, the through hole 22 is provided with a plurality of through holes 22 which are arranged at intervals on the sealing plate 2. The first threaded hole 14 is provided with a plurality of first threaded holes 14 which are arranged at intervals on the bottom wall of the negative pressure cavity 12. The first bolt 31 is provided with a plurality of first bolts 31. The first sealing ring 32 is provided with a plurality of first sealing rings 32. The plurality of first bolts 31, the plurality of first sealing rings 32, the plurality of through holes 22 and the plurality of first threaded holes 14 are one-to-one corresponding.

[0039] Optionally, the first threaded hole 14 is a blind hole. This arrangement can ensure that the external gas cannot enter the negative pressure cavity 12 from the first threaded hole 14, thereby further improving the adsorption capacity of the vacuum chuck.

[0040] In the process of the sealing plate 2 and the disc body 1 pressing the first sealing ring 32, the first sealing ring 32 may be deformed along the radial direction of the first sealing ring 32 into the through hole 22, thereby causing the sealing failure of the through hole 22. To solve this problem, the bottom wall opposite to the opening of the negative pressure cavity 12 is provided with a first annular groove 15, the first threaded hole 14 is located inside the first annular groove 15, and the first sealing ring 32 is arranged in the first annular groove 15. In this embodiment, the first annular groove 15 is arranged outside the first threaded hole 14, the first threaded hole 14 and the first annular groove 15 are arranged in a spaced manner, and the first sealing ring 32 is arranged in the first annular groove 15. In the process of the sealing plate 2 and the disc body 1 pressing the first sealing ring 32, the first annular groove 15 can limit the deformation of the first sealing ring 32 along the radial direction of the first sealing ring 32, thereby avoiding the sealing failure of the through hole 22.

[0041] Optionally, the vacuum chuck further comprises a second sealing ring 4, the second sealing ring 4 is arranged in the negative pressure cavity 12, the negative pressure hole 13 and the air suction hole 21 are located inside the second sealing ring 4, and the sealing plate 2 and the disc body 1 press the second sealing ring 4. In this embodiment, the sealing plate 2 and the disc body 1 press the second sealing ring 4, thereby avoiding the external gas entering the negative pressure cavity 12 through the gap between the sealing plate 2 and the disc body 1, and further improving the adsorption performance of the vacuum chuck.

[0042] In the process of the sealing plate 2 and the disc body 1 pressing the second sealing ring 4, the second sealing ring 4 may be deformed along the radial direction of the second sealing ring 4 into the gap between the sealing plate 2 and the disc body 1, or the through hole 22 or the air suction hole 21 is located outside the second sealing ring 4, thereby causing the sealing failure. To solve this problem, the bottom wall opposite to the opening of the negative pressure cavity 12 is provided with a second annular groove 16, and the second sealing ring 4 is arranged in the second annular groove 16. In this embodiment, the second sealing ring 4 is arranged in the second annular groove 16, and in the process of the sealing plate 2 and the disc body 1 pressing the second sealing ring 4, the second annular groove 16 can limit the deformation of the second sealing ring 4 along the radial direction of the second sealing ring 4, thereby avoiding the sealing failure of the second sealing ring 4.

[0043] Optionally, the adsorption surface 11 is provided with a third annular groove 17, and part of the negative pressure holes 13 are located in the third annular groove 17. In this embodiment, when the carrier film is attached to the adsorption surface 11, the carrier film covers the third annular groove 17. Since the negative pressure holes 13 are arranged in the third annular groove 17, when the negative pressure cavity 12 is under negative pressure, a negative pressure ring will also be formed in the third annular groove 17, thereby adsorbing the edge of the carrier film, and further improving the adsorption stability between the vacuum chuck and the carrier film.

[0044] Optionally, the second threaded hole 19 is arranged on the side of the sealing plate 2 away from the disc body 1, and the second threaded hole 19 is a blind hole. In this embodiment, the sealing plate 2 can be threadedly connected with other execution elements, thereby facilitating the fixation of the vacuum chuck.

[0045] Optionally, the bottom wall of the negative pressure cavity 12 opposite to the opening is provided with a protrusion 18, and the sealing plate 2 abuts against the protrusion 18. In this embodiment, the protrusion 18 functions as a limiting part for the sealing plate 2, so that the sealing plate 2 and the bottom wall of the negative pressure cavity 12 are arranged at a fixed interval, thereby avoiding the abutment of the sealing plate 2 and the bottom wall of the negative pressure cavity 12, which causes the connection of the air suction hole 21 and the negative pressure hole 13 to be disconnected, or avoiding the interval between the sealing plate 2 and the bottom wall of the negative pressure cavity 12 being too small, which affects the adsorption capacity of the vacuum chuck.

[0046] Optionally, the protrusion 18 is annular, and the protrusion 18 is arranged around the circumference of the negative pressure cavity 12, which can improve the stability of the support of the protrusion 18 on the sealing plate 2.

[0047] Optionally, the vacuum chuck further comprises a negative pressure connector 5, and the negative pressure connector 5 is in communication with the air suction hole 21.

[0048] The embodiment further provides a chip handler comprising the vacuum chuck in the above-mentioned solution.

[0049] Obviously, the above-mentioned embodiments of the present application are only examples for clearly illustrating the present application, and are not intended to limit the implementation modes of the present application. For those skilled in the art, other different forms of changes or modifications can be made on the basis of the above-mentioned description. Here, all the implementation modes are not required or can not be exhausted. Any modification, equivalent replacement and improvement made within the spirit and principle of the present application shall be included in the protection scope of the claims of the present application.

Claims

1. A vacuum suction cup, characterized in that, include: The disc body (1) has one end face along a preset direction (X) set as an adsorption surface (11), and the other end face along the preset direction (X) is recessed with a negative pressure cavity (12) with an opening. The bottom wall of the negative pressure cavity (12) opposite to the opening is provided with a plurality of negative pressure holes (13) and a first threaded hole (14). The negative pressure holes (13) extend from the negative pressure cavity (12) to the adsorption surface (11). A sealing plate (2) is inserted into the opening and closes the opening. The sealing plate (2) is provided with an air extraction hole (21) and a through hole (22). The air extraction hole (21) and the through hole (22) are respectively connected to the negative pressure chamber (12). The through hole (22) is correspondingly provided with the first threaded hole (14). The fixing component (3) includes a first bolt (31) and a first sealing ring (32), the first bolt (31) passing through the through hole (22) and the first sealing ring (32) and being screwed to the wall of the first threaded hole (14), the disc body (1) and the sealing plate (2) clamping the first sealing ring (32).

2. The vacuum suction cup according to claim 1, characterized in that, The negative pressure chamber (12) has a first annular groove (15) on its bottom wall opposite to the opening. The first threaded hole (14) is located inside the first annular groove (15), and the first sealing ring (32) is located inside the first annular groove (15).

3. The vacuum suction cup according to claim 1, characterized in that, Multiple through holes (22) are provided, and the multiple through holes (22) are spaced apart; multiple first threaded holes (14) are provided, and the multiple first threaded holes (14) are spaced apart. The fixing component (3) is provided in multiple ways, and the multiple fixing components (3), the multiple through holes (22) and the multiple first threaded holes (14) are provided in a one-to-one correspondence.

4. The vacuum suction cup according to claim 1, characterized in that, It also includes a second sealing ring (4), which is disposed in the negative pressure chamber (12), and the negative pressure hole (13) and the air extraction hole (21) are both located inside the second sealing ring (4). The sealing plate (2) and the disc body (1) press the second sealing ring (4) tightly.

5. The vacuum suction cup according to claim 4, characterized in that, The bottom wall of the negative pressure chamber (12) opposite to the opening is provided with a second annular groove (16), and the second sealing ring (4) is disposed in the second annular groove (16).

6. The vacuum suction cup according to claim 1, characterized in that, A third annular groove (17) is provided on the adsorption surface (11), and part of the negative pressure hole (13) is located in the third annular groove (17).

7. The vacuum suction cup according to claim 1, characterized in that, The sealing plate (2) is provided with a second threaded hole (19) on the side away from the disc body (1), and the second threaded hole (19) is a blind hole.

8. The vacuum suction cup according to claim 1, characterized in that, The negative pressure chamber (12) has a protrusion (18) on its bottom wall opposite to the opening, and the sealing plate (2) abuts against the protrusion (18).

9. The vacuum suction cup according to claim 1, characterized in that, The first threaded hole (14) is a blind hole.

10. A chip sorting machine, characterized in that, Includes the vacuum chuck as described in any one of claims 1-9.

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