Galvanometer product long-term stability detection device
By designing a long-term stability testing device for galvanometer products that includes a base, an autocollimator, and optical components, the problem that traditional devices can only test a single unit is solved, enabling efficient stability testing of multiple galvanometer products and improving testing efficiency and accuracy.
Patent Information
- Application Number
- CN202520149823.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-22
- Publication Date
- 2026-01-23
- Estimated Expiration
- 2035-01-22
AI Technical Summary
Traditional galvanometer repeatability and zero-point drift detection devices can only test one galvanometer product, resulting in low testing efficiency.
A long-term stability testing device for galvanometer products was designed, including a base, an autocollimator, optical components, and a linear module. It can simultaneously test multiple galvanometer products. The autocollimator moves under the drive of the linear module to perform optical testing and record the repeatability and zero-point drift of the galvanometer.
It improves the efficiency of stability testing of galvanometer products, enables efficient testing of multiple galvanometer products, and features a simple testing structure and high testing accuracy.
Smart Images
Figure CN223827255U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of galvanometers, specifically to a device for testing the long-term stability of galvanometer products. Background Technology
[0002] Galvanometers are important optical devices widely used in laser processing, optical communication, and precision measurement. In these applications, the repeatability and zero-point drift of a galvanometer are crucial indicators. Repeatability refers to the ability of a galvanometer to maintain a stable position or angle during multiple measurements or operations, ensuring the accuracy of its performance. Zero-point drift refers to the deviation between the initial position (zero point) and the set position after prolonged operation. Traditional devices for testing the repeatability and zero-point drift of galvanometers typically only test one galvanometer at a time. When the galvanometer is in operation for extended periods, the testing device remains in standby mode, significantly reducing the efficiency of galvanometer stability testing. Utility Model Content
[0003] The present invention aims to solve the above-mentioned technical problems, namely, that traditional galvanometer repeatability and zero-point drift detection devices can usually only detect one galvanometer product, resulting in low efficiency in galvanometer product stability detection.
[0004] In a first aspect, the present invention provides a long-term stability testing device for galvanometer products, comprising: a base having a first station and a second station, wherein an autocollimator movable along a first direction is disposed on the first station, and at least two sets of galvanometers to be tested are disposed along the first direction on the second station; and an optical component disposed on the second station for assisting the autocollimator in optical testing, wherein the optical component includes at least a linearly polarized beam splitter disposed at the entrance aperture of the galvanometer, a first reflecting mirror located directly below the linearly polarized beam splitter, and a second reflecting mirror located directly below the exit aperture of the galvanometer.
[0005] In the preferred technical solution of the above-mentioned long-term stability testing device for galvanometer products, a linear module is configured on the first station, and the autocollimator is driven to move along the first direction by the linear module.
[0006] In the preferred embodiment of the above-mentioned long-term stability testing device for galvanometer products, the second station is equipped with a support for fixing the galvanometer and the first reflector.
[0007] In the preferred technical solution of the above-mentioned long-term stability testing device for galvanometer products, the support is made of Invar steel.
[0008] In the preferred technical solution of the above-mentioned long-term stability testing device for galvanometer products, the base is configured on a shock-absorbing platform, and the base is made of marble.
[0009] In the preferred technical solution of the above-mentioned long-term stability testing device for galvanometer products, the linearly polarized beam splitter cube is configured in the second station by means of a snap-fit structure.
[0010] In the preferred technical solution of the above-mentioned long-term stability testing device for galvanometer products, the first reflector and the second reflector are configured to have the same structure.
[0011] Secondly, this application also provides a method for testing the long-term stability of a galvanometer product, comprising the following steps:
[0012] A collimated laser beam is emitted toward a linearly polarized beam splitter using a self-collimator. The linearly polarized beam splitter divides the laser beam into two linearly polarized beams. The first linearly polarized beam is reflected vertically downward toward the first reflector, and the second linearly polarized beam is incident along a horizontal straight line into a zero-position galvanometer and reflected vertically downward to the second reflector.
[0013] The first path-polarized beam, after being reflected by the first mirror, returns to the autocollimator via the linearly polarized beam splitter cube. The autocollimator records the landing point of the first path-polarized beam as the reference coordinate S(a, b). The second path-polarized beam, after being reflected by the second mirror, returns to the autocollimator sequentially via the galvanometer and the linearly polarized beam splitter cube. The autocollimator records the landing point of the second path-polarized beam as the test coordinate P(c, d). The initial relative coordinates of the galvanometer during initialization are obtained as T(x, y), where x = a - c, y = b – d.
[0014] When performing interval testing on several of the aforementioned galvanometers, the autocollimator emits a collimated laser beam to the linearly polarized beam cube corresponding to one group of the galvanometers, enabling the autocollimator to record the real-time reference coordinates S'(a', b') reflected by the first reflector and the real-time test coordinates P'(c', d') reflected by the second reflector, thereby obtaining the real-time relative coordinates T'(x', y') of the galvanometer returning to its initial origin after a predetermined working time, where x' = a' - c' and y' = b' - d'.
[0015] By comparing whether the real-time relative coordinates T'(x', y') of the galvanometer at different times deviate from the threshold range of the initial relative coordinates T(x, y) of the galvanometer, the stability of the galvanometer after long-term operation can be confirmed.
[0016] The beneficial effects of this utility model are: by configuring at least two sets of galvanometer products to be tested on the base, and using a linear module to drive the autocollimator to move between each galvanometer product, the repeatability and zero-point drift of each galvanometer product are tested at intervals, so that the autocollimator is always in working condition, thereby greatly improving the testing efficiency of the stability of each galvanometer product. Attached Figure Description
[0017] Figure 1 This is the front view of the present invention;
[0018] Figure 2 This is a schematic diagram of the optical path of the detection device;
[0019] Figure 3 This is a schematic diagram illustrating the detection principle of the detection device;
[0020] In the figure: base 1, autocollimator 2, first line polarized beam 21, second line polarized beam 22, galvanometer 3, linear polarization beam splitter cube 41, first reflector 42, second reflector 43, linear module 5, support 6, vibration damping table 7. Detailed Implementation
[0021] Preferred embodiments of the present invention will now be described with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of the present invention and are not intended to limit the scope of protection of the present invention.
[0022] It should be noted that in the description of this utility model, terms such as "upper," "lower," "left," "right," "front," and "rear," which indicate direction or positional relationships, are based on the direction or positional relationships shown in the accompanying drawings. These are used merely for ease of description and do not indicate or imply that the device or element must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0023] Furthermore, it should be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "set," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.
[0024] See Figures 1 to 3The long-term stability testing device for galvanometer products of this utility model includes: a base 1, having a first station and a second station, wherein an autocollimator 2 that can move along a first direction is arranged on the first station, and at least two sets of galvanometers 3 to be tested are arranged along the first direction on the second station; and an optical component, which is arranged on the second station to assist the autocollimator 2 in optical testing, wherein the optical component includes at least a linearly polarized beam splitter cube 41 arranged at the entrance aperture of the galvanometer 3, a first reflecting mirror 42 located directly below the linearly polarized beam splitter cube 41, and a second reflecting mirror 43 located directly below the exit aperture of the galvanometer 3.
[0025] See Figure 1 The first direction is the length direction of the base 1, and the second direction is the width direction of the base 1. The autocollimator 2 can move along the first direction at the first station and emit a collimated laser beam along the second direction. At least two sets of galvanometers 3 to be tested are arranged along the first direction at the second station. In this application, five galvanometers 3 to be tested are used as an example.
[0026] See Figure 1 , Figure 2 The optical components include at least a linearly polarized beam splitter cube 41, a first reflector 42, and a second reflector 43. The collimated laser beam incident on the linearly polarized beam splitter cube 41 can separate two mutually perpendicularly propagating linearly polarized beams. The first linearly polarized beam 21 is reflected perpendicularly toward the first reflector 42, and the second linearly polarized beam 22 is incident on a horizontal straight line through the entrance hole of the galvanometer 3 and reflected vertically downwards to the second reflector 43 by the reflection of the galvanometer 3.
[0027] Specifically, when performing stability testing on the five sets of galvanometers 3, one set of galvanometers 3 is selected as the test object. Then, the autocollimator 2 is moved to the zero position in front of the galvanometer 3. The autocollimator 2 emits a collimated laser beam towards the entrance aperture of the galvanometer 3. After passing through the linearly polarized beam splitter 41, the collimated laser beam is split into two paths. The first path-polarized beam 21 is reflected towards the first reflecting mirror 42. After reflection by the first reflecting mirror 42, the first path-polarized beam 21 returns to the autocollimator 2 after passing through the linearly polarized beam splitter 41. The autocollimator 2 records the first path-polarized beam. The landing point of beam 21 is the real-time reference coordinate S'(a', b'). The second path-polarized beam 22 is reflected by the zero-position galvanometer 3 and then directed towards the second reflecting mirror 43. After reflection by the second reflecting mirror 43, the second path-polarized beam 22 returns to the galvanometer 3 and then returns to the autocollimator 2 via the linearly polarized beam splitter 41. The autocollimator 2 records the landing point of the second path-polarized laser beam as the real-time test coordinate P'(c', d'). At this point, the detection of the galvanometer 3 product is completed, and the real-time relative coordinates T'(x', y') of the galvanometer are obtained, where x' = Given a'-c' and y'= b'-d', the autocollimator 2 is then moved to other galvanometers 3 to be tested. This process is repeated to obtain the real-time relative coordinates of each group of galvanometers 3. After the five groups of galvanometers 3 have been working for a period of time, the stability of the five groups of galvanometers 3 is retested to obtain the real-time relative coordinates of each group of galvanometers 3 after returning to the initial origin at different working times. By analyzing the real-time relative coordinates of each group of galvanometers 3 and the corresponding initial relative coordinates, the repeatability and zero-point drift of each group of galvanometers 3 after long-term operation can be measured. This method features a simple testing structure, high testing accuracy, and practicality.
[0028] In one or more embodiments, a linear module 5 is configured on the first workstation, and the autocollimator 2 is driven to move along the first direction by the linear module 5.
[0029] See Figure 1 The method of using the linear module 5 to drive the autocollimator 2 has the characteristics of high displacement accuracy and high movement efficiency of the autocollimator 2, which greatly improves the efficiency of stability testing of each galvanometer 3 product in this application.
[0030] In one or more embodiments, the second station is provided with a support 6 for fixing the galvanometer 3 and the first reflector 42; the support 6 is made of Invar steel.
[0031] See Figure 2The galvanometer 3 is detachably mounted on the support 6, which is made of Invar steel, a material with an extremely low coefficient of thermal expansion. When the laser beam irradiates the support, or when heat generated by the galvanometer 3 or the first reflector 42 is conducted to the support, the Invar steel support effectively dissipates the heat, ensuring the reliability of the product testing data. Furthermore, the Invar steel support has high strength, ensuring effective fixation of the galvanometer 3 and the first reflector 42.
[0032] In one or more embodiments, the base 1 is disposed on the shock-absorbing platform 7, and the base 1 is made of marble.
[0033] See Figure 1 The marble base 1 has an extremely low coefficient of linear expansion, resulting in exceptionally high precision and stability, ensuring accurate measurements for the galvanometer 3. Furthermore, the marble base 1 possesses high hardness, compressive strength, and flexural strength, making it resistant to deformation or damage.
[0034] In one or more embodiments, the linearly polarized beam splitter 41 is configured in the second position by means of a snap-fit structure.
[0035] The attached figure does not show the snap-fit structure. The snap-fit structure can be configured on both sides of the linear polarization beam splitter cube 41 to clamp the linear polarization beam splitter cube 41 from both sides. The snap-fit structure can be a support rod installed on the support 6. The shape of the snap-fit structure is not specifically limited, as long as it can clamp the linear polarization beam splitter cube 41 onto the support 6 or the base 1.
[0036] In one or more embodiments, the first reflector 42 and the second reflector 43 are configured to have identical structures. The first reflector 42 and the second reflector 43 are made of the same material and have the same thickness and diameter. This arrangement ensures that the reflection of the first path-polarized beam 21 by the first reflector 42 is consistent with the reflection of the second path-polarized beam 22 by the second reflector 43, further ensuring the accuracy of the stability detection of the galvanometer 3 product in this application.
[0037] Furthermore, the repeatability and zero-point drift of galvanometer 3 may deviate during long-term operation. To ensure the working effect of galvanometer 3, it is necessary to monitor the repeatability and zero-point drift of galvanometer 3 during long-term operation. Specifically, the repeatability of galvanometer 3 refers to its ability to maintain a stable position or angle during multiple measurements or operations, ensuring the accuracy of its working effect. Zero-point drift refers to the positional offset error that occurs when galvanometer 3 returns to its initial position multiple times over a long period due to various factors.
[0038] Therefore, this application also provides a method for testing the long-term stability of galvanometer products, including the following steps:
[0039] A collimated laser beam is emitted towards the linearly polarized beam splitter cube 41 using the self-collimator 2. The linearly polarized beam splitter cube 41 splits the laser beam into two linearly polarized beams. The first linearly polarized beam 21 is reflected vertically downward toward the first reflector 42, and the second linearly polarized beam 22 is incident along a horizontal straight line into the zero-position galvanometer 3 and reflected vertically downward through the galvanometer 3 to the second reflector 43.
[0040] The first path-polarized beam 21, after being reflected by the first reflector 42, returns to the autocollimator 2 via the linearly polarized beam splitter 41. The autocollimator 2 records the landing point of the first path-polarized beam 21 as the reference coordinate S(a, b). The second path-polarized beam 22, after being reflected by the second reflector 43, returns to the autocollimator 2 via the galvanometer 3 and the linearly polarized beam splitter 41 in sequence. The autocollimator 2 records the landing point of the second path-polarized beam 22 as the test coordinate P(c, d). The initial relative coordinates of the galvanometer 3 during initialization are obtained as T(x, y), where x = a - c and y = bd.
[0041] When performing interval testing on several galvanometers 3, the autocollimator 2 emits a collimated laser beam to the linearly polarized beam splitter cube 41 corresponding to one set of galvanometers 3, so that the autocollimator 2 can record the real-time reference coordinates S'(a', b') reflected by the first reflecting mirror 42 and the real-time test coordinates P'(c', d') reflected by the second reflecting mirror 43, and obtain the real-time relative coordinates T'(x', y') of the galvanometer 3 returning to the initial origin after working for a predetermined time, where x' = a' - c' and y' = b' - d'.
[0042] By comparing whether the real-time relative coordinates T'(x', y') of galvanometer 3 at different times deviate from the threshold range of the initial relative coordinates T(x, y) of galvanometer 3, it can be confirmed whether the repeatability and zero-point drift data of galvanometer 3 after long-term operation meet expectations.
[0043] It should be noted that the device that drives the autocollimator 2 along the first direction is the linear module 5. The autocollimator 2 driven by the linear module 5 has high positional accuracy, which can reduce the error of the real-time relative coordinate T'(x', y') when the galvanometer 3 is detected each time. Even if there is a certain error between the measured real-time relative coordinate T'(x', y') and the initial relative coordinate T(x, y), if the error is still within a certain threshold range, it means that the repeatability and displacement drift of the galvanometer 3 after long-term operation still meet the standard.
[0044] Furthermore, this application can configure at least two sets of galvanometers 3 to be tested, and use the linear module 5 to drive the autocollimator 2 to move between the galvanometers 3 to be tested, thereby realizing the interval testing of several galvanometers 3 to be tested at different times, effectively improving the efficiency of this application for the long-term stability testing of galvanometers 3.
[0045] The above embodiments are only for illustrating the technical concept and features of this utility model. Their purpose is to enable those skilled in the art to understand the content of this utility model and implement it. They cannot be used to limit the protection scope of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be covered within the protection scope of this utility model.
Claims
1. A device for testing the long-term stability of galvanometer products, characterized in that, include: The base has a first station and a second station. The first station is equipped with an autocollimator that can move along a first direction, and the second station is equipped with at least two sets of galvanometers to be tested along the first direction. An optical component is configured at the second station to assist the autocollimator in optical detection. The optical component includes at least a linearly polarized beam splitter cube configured at the entrance aperture of the galvanometer, a first reflecting mirror located directly below the linearly polarized beam splitter cube, and a second reflecting mirror located directly below the exit aperture of the galvanometer.
2. The long-term stability testing device for galvanometer products according to claim 1, characterized in that: The first workstation is equipped with a linear module, and the autocollimator is driven to move along a first direction by the linear module.
3. The long-term stability testing device for galvanometer products according to claim 1, characterized in that: The second workstation is equipped with a support for fixing the galvanometer and the first reflector.
4. The long-term stability testing device for galvanometer products according to claim 3, characterized in that: The support is made of Invar steel.
5. The long-term stability testing device for galvanometer products according to claim 1, characterized in that: The base is mounted on a shock-absorbing platform and is made of marble.
6. The long-term stability testing device for galvanometer products according to claim 1, characterized in that: The linearly polarized beam splitter cube is configured in the second station by means of a snap-fit structure.
7. The long-term stability testing device for galvanometer products according to claim 1, characterized in that: The first reflector and the second reflector are configured to be structurally identical.