Environmental maintenance device and sampling system

Abstract

According to the environment maintaining device and the sampling system, a box body in the environment maintaining device comprises an internal space, a first side wall of the box body is provided with a connecting port used for being in butt joint with a sampling port of a chemical machine table, and the top of the box body is provided with a positive pressure air supply device which is communicated with the internal space and supplies air to the internal space so as to maintain a positive pressure state; a sealing unit is arranged between the connecting port and the sampling port of the box body, and an operation window is arranged on a second side wall, opposite to the first side wall, of the box body. Therefore, when the environment maintaining device works, an independent internal space is formed through the box body, the positive pressure state of the internal space is maintained through the positive pressure air supply device, and external air is effectively prevented from permeating; secondly, the sealing unit is arranged between the connecting port and the sampling port, so that the sealing performance of the sampling environment is ensured; and thirdly, a connector and an operation window are arranged on two opposite sides of the box body, so that an operator can conveniently perform sampling operation through the operation window.

Description

Technical Field

[0001] This utility model relates to the semiconductor field, and more particularly to an environmental maintenance device and sampling system. Background Technology

[0002] Semiconductor manufacturing is a highly precise process with extremely stringent environmental requirements. Chemicals, as key raw materials, play an irreplaceable role in processes such as wafer cleaning and etching. The quality of chemicals directly affects the yield and performance of chips, especially critical indicators such as the content of metal ions, which must be strictly controlled at the nanometer level. This places extremely high demands on the quality control of chemicals.

[0003] To achieve source management of chemical quality, the plant's chemical supply system employs regular sampling and testing for monitoring. This sampling and testing constitutes a crucial link in the chemical quality control system. By analyzing the sampling results, abnormalities such as pipeline corrosion and impurity contamination during transportation can be detected promptly. Furthermore, the sampling and testing data can be used to establish trend analyses of chemical quality, providing important data for process optimization and preventative maintenance.

[0004] However, the sampling process in the existing technology has the following technical problems: First, the sampling box cover needs to be opened during sampling, which causes the sampling environment to come into direct contact with the outside air. This makes it susceptible to interference from the external environment (such as construction dust, airborne particulate matter, etc.) and personnel operations. In particular, when cleaning and capping the sampling bottles, pollutants in the environment can easily enter the sampling system. Second, the existing sampling system adopts a negative pressure design to prevent acidic gases from escaping. However, this design continuously draws outside air into the system, increasing the risk of pollution. Furthermore, the airflow disturbance under negative pressure will further exacerbate the introduction of pollutants. Utility Model Content

[0005] The problem solved by this utility model is to provide an environmental maintenance device and sampling system that has good sealing performance, provides a clean environment, and allows operators to easily perform sampling operations.

[0006] To address the aforementioned problems, this utility model provides an environmental maintenance device for sampling from a chemical processing machine via its sampling port. The environmental maintenance device includes: a housing comprising an internal space, the housing including a first side wall and a second side wall directly opposite the first side wall; a connection port located on the first side wall of the housing for docking with the sampling port of the chemical processing machine; an operation window located on the second side wall of the housing; a positive pressure ventilation device disposed at the top of the housing, communicating with the internal space for supplying air to the internal space to maintain a positive pressure state; and a sealing unit disposed between the connection port and the sampling port of the housing.

[0007] Optionally, the connection port may be rectangular, square, or circular.

[0008] Optionally, the sealing unit includes a sealing strip disposed at the edge of the connection port for surface contact with the chemical equipment.

[0009] Optionally, the positive pressure air supply device further includes: a filter screen disposed at the air inlet of the positive pressure air supply device; and a power supply unit connected to the positive pressure air supply device for supplying power to the positive pressure air supply device.

[0010] Optionally, the operating window includes a slit made of an elastic material.

[0011] Optionally, a recessed area is provided at the bottom center of the enclosure; the environmental maintenance device further includes a liquid support plate disposed in the recessed area of ​​the enclosure, the liquid support plate being made of polytetrafluoroethylene.

[0012] Optionally, the environmental maintenance device further includes: an exhaust window disposed on the side wall of the housing; and filter cotton disposed on the exhaust window.

[0013] Optionally, the environmental maintenance device further includes: a plurality of support legs disposed at the bottom of the housing for supporting the housing; and casters disposed at the bottom of the support legs.

[0014] Optionally, the environmental maintenance device further includes: an opening and closing door, disposed on the first side wall and located in the internal space of the housing, the opening and closing door moving parallel to the first side wall to open or close the connection port.

[0015] Accordingly, this utility model also provides an exhaust system, including: a chemical processing unit, including: a sampling pipeline; a sampling valve disposed on the sampling pipeline; a sampling port disposed on the sampling pipeline, and the sampling port being disposed downstream of the sampling valve on the sampling pipeline; and an environmental maintenance device, wherein the connection port of the environmental maintenance device is used to correspond to the sampling port.

[0016] Compared with the prior art, the technical solution of this utility model has the following advantages:

[0017] In the environmental maintenance device provided by this embodiment, the housing includes an internal space. A connection port is provided on the first side wall of the housing for docking with the sampling port of a chemical processing machine. A positive pressure ventilation device is provided on the top of the housing, communicating with the internal space and supplying air to maintain a positive pressure state. A sealing unit is provided between the connection port and the sampling port, and an operating window is provided on the second side wall of the housing opposite the first side wall. Thus, when the environmental maintenance device is working, the housing forms an independent internal space, and the positive pressure ventilation device maintains a positive pressure state within the internal space, effectively preventing external air from seeping in. Secondly, the sealing unit between the connection port and the sampling port ensures the sealing performance of the sampling environment. Thirdly, the connection port and operating window on opposite sides of the housing allow operators to conveniently perform sampling operations through the operating window. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of an environmental maintenance device from one perspective.

[0019] Figure 2 This is a structural schematic diagram of an environmental maintenance device from another perspective;

[0020] Figure 3 This is a structural schematic diagram of a housing in an environmental maintenance device from one perspective.

[0021] Figure 4 This is a structural schematic diagram of a viewing angle adjustment baffle in an environmental maintenance device.

[0022] Figure 5 This is a cross-sectional structural diagram of a housing in an environmental maintenance device. Detailed Implementation

[0023] As can be seen from the background technology, the sampling process in the prior art has the following technical problems: First, the sampling box cover needs to be opened during sampling, which causes the sampling environment to come into direct contact with the outside air. This makes it susceptible to interference from the external environment (such as construction dust, airborne particulate matter, etc.) and personnel operations. In particular, when cleaning and capping the sampling bottle, pollutants in the environment can easily enter the sampling system. Second, the existing sampling system adopts a negative pressure design to prevent acidic gases from escaping. However, this design continuously draws outside air into the system, increasing the risk of contamination. Furthermore, the airflow disturbance under negative pressure will further exacerbate the introduction of pollutants.

[0024] To address the technical problem, this utility model provides an environmental maintenance device in which the housing includes an internal space. A first side wall of the housing has a connection port for docking with the sampling port of a chemical processing machine. A positive pressure ventilation device is located on the top of the housing, communicating with the internal space and supplying air to maintain a positive pressure state. A sealing unit is provided between the connection port and the sampling port, and an operating window is provided on the second side wall of the housing opposite the first side wall. Thus, when the environmental maintenance device is in operation, the housing forms an independent internal space, and the positive pressure ventilation device maintains a positive pressure state within the internal space, effectively preventing external air infiltration. Secondly, the sealing unit between the connection port and the sampling port ensures the sealing performance of the sampling environment. Thirdly, the connection port and operating window on opposite sides of the housing allow operators to conveniently perform sampling operations through the operating window.

[0025] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0026] Figures 1 to 5 This is a schematic diagram of the structure of the environmental maintenance device of this utility model.

[0027] An environmental maintenance device is used to sample from a chemical processing machine through a sampling port. The environmental maintenance device includes: a housing 100, which includes an internal space within it; a first side wall 101 and a second side wall 102 opposite to the first side wall 101; a connection port 105 located on the first side wall 101 of the housing 100 for docking with the sampling port of the chemical processing machine; an operation window 106 located on the second side wall 102 of the housing 100; a positive pressure ventilation device (not shown in the figure) disposed at the top of the housing 100, which communicates with the internal space and supplies air to the internal space to maintain a positive pressure state; and a sealing unit 200 (e.g., ...). Figure 1 As shown in the figure, it is located between the connection port 105 and the sampling port of the housing 100.

[0028] In the environmental maintenance device provided in this embodiment of the utility model, the housing 100 includes an internal space. The first side wall 101 of the housing 100 is provided with a connection port 105 for docking with the sampling port of the chemical machine. The top of the housing 100 is provided with a positive pressure air supply device that communicates with the internal space and supplies air to the internal space to maintain a positive pressure state. A sealing unit 200 is provided between the connection port 105 and the sampling port of the housing 100. An operation window 106 is provided on the second side wall 102 of the housing 100 that is directly opposite the first side wall 101. Thus, when the environmental maintenance device is working, an independent internal space is formed by the housing 100, and the positive pressure state of the internal space is maintained by the positive pressure air supply device, effectively preventing the infiltration of external air; secondly, by setting a sealing unit 200 between the connection port 105 and the sampling port, the sealing performance of the sampling environment is ensured; thirdly, by setting the connection port 105 and the operation window 106 on opposite sides of the housing 100, the operator can conveniently perform sampling operations through the operation window 106.

[0029] The internal space of the enclosure 100 provides a stable microenvironment for chemical sampling and cleaning processes, effectively isolating it from external environmental interference, thereby ensuring environmental stability during the sampling process and making the sampling results more accurate and reliable.

[0030] In this embodiment, the enclosure 100 is made of transparent CPVC (Clean PVC) and has a cuboid structure. This structural design not only facilitates real-time observation of the internal status by operators, improving operational accuracy and safety, but also provides excellent corrosion resistance. In other embodiments, the enclosure 100 can also be made of other corrosion-resistant transparent materials, such as polycarbonate (PC) or polymethyl methacrylate (PMMA).

[0031] CPVC refers to polyethylene plastic (PVC) material that does not contain any impurities, contaminants or additives that may affect its characteristics or performance. This material is widely used in applications such as medical devices and food packaging. Whether it is ultrapure water pipelines in semiconductor plants, pharmaceutical delivery pipelines or drinking water pipelines, the use of Clean PVC material can be seen in large quantities.

[0032] In this embodiment, a connection port 105 is provided on the first side wall 101 of the housing 100 for docking with the sampling port of the chemical machine.

[0033] The dimensions of the connection port 105 are matched to the dimensions of the sampling port of the chemical instrument. As an example, the connection port 105 is rectangular, square, or circular.

[0034] It should be noted that the environmental maintenance device also includes: an opening / closing door 107 (e.g., Figure 5As shown), it is disposed on the first side wall 101 and located in the internal space of the box. The opening and closing door 107 moves parallel to the first side wall 101 to open or close the connection port 105.

[0035] When a sample is obtained from the sampling port of the machine through the connection port 105 of the environmental maintenance device, the connection port 105 is opened using the opening and closing door 107, allowing the internal space of the environmental maintenance device to communicate with the sampling port of the machine; after sampling, the connection port 105 is closed using the opening and closing door 107. Therefore, the opening and closing door 107 is used to reduce the contact time between the chamber 100 and the external environment, reduce the risk of external air and pollutants entering the chamber 100, ensure the stability of the internal microenvironment of the chamber 100, and keep the sampling process under control, which is beneficial to improving the accuracy and reliability of the sampling results.

[0036] As an example, a slide rail 110 is provided on the first side wall 101 of the interior space, and the opening and closing door 107 is slidably disposed on the slide rail 110. The opening and closing door 107 is disposed in the interior space, and will not interfere with the sealing unit 200 outside the housing 100 during the steps of opening or closing the connection port 105.

[0037] In this embodiment, the hinged door 107 is made of CPVC (Clean PVC) sheet. In other embodiments, the housing 100 may also be made of other corrosion-resistant materials, such as polycarbonate (PC), polymethyl methacrylate (PMMA), etc.

[0038] In this embodiment, an operation window 106 is provided on the second side wall 102 of the housing 100. The second side wall 102 is opposite to the first side wall 101 with the connection port 105, which facilitates the operator to perform sampling operations.

[0039] The second side wall 102 of the housing 100 is positioned directly opposite the first side wall 101, allowing the operator to directly align the sampling port of the first side wall 101 with the operation window 106 of the second side wall 102 for sampling operations. This reduces unnecessary actions during the operation process and significantly improves the convenience and efficiency of the sampling operation.

[0040] In this embodiment, the second sidewall 102 is arranged parallel to the first sidewall 101, and the distance between the two sidewalls is determined according to ergonomic requirements to ensure that the operator can complete the sampling operation comfortably and naturally.

[0041] It should be noted that the operation window 106 includes a pore made of elastic material.

[0042] The operating window 106 uses a flexible material for its opening, which can automatically adjust its size according to the operator's arm length. During actual operation, the operator can perform sampling through the opening in the second side wall 102. Thus, throughout the sampling process, the internal space of the housing 100 remains isolated from the external environment, which helps improve the accuracy and reliability of the sampling results.

[0043] In this embodiment, the housing 100 includes a first side wall 101 and a second side wall 102, with the second side wall 102 directly opposite the first side wall 101. The housing 100 also includes a third side wall 103 and a fourth side wall 104.

[0044] In this embodiment, the first sidewall 101, the third sidewall 103, the second sidewall 102, and the fourth sidewall 104 are connected sequentially with high-strength sealant to ensure the airtightness of the structure; and a reinforcing rib structure can be provided at the bottom of the box 100 to improve the overall rigidity and prevent deformation during use.

[0045] In this embodiment, the environmental maintenance device further includes an exhaust window 108, which is disposed on the side wall of the housing. The exhaust window 108 is used to discharge gas when the positive pressure ventilation device is working.

[0046] In this embodiment, the environmental maintenance device further includes a filter cotton (not shown in the figure), which is disposed on the exhaust window. The filter cotton is used to filter the exhaust gas.

[0047] As an example, the side walls of the enclosure 100 are formed by welding, which helps to ensure the airtightness of the enclosure 100.

[0048] It should be noted that the bottom of the housing 100 is made of stainless steel, and the surface of the stainless steel has an anti-rust coating. The stainless steel is, for example, 304 stainless steel or 316L stainless steel, and the anti-rust coating includes one or more of the following: epoxy anti-rust coating, polyurethane anti-rust coating, and zinc-rich anti-rust coating.

[0049] The bottom, top, first sidewall 101, second sidewall 102, third sidewall 103 and fourth sidewall 104 of the box 100 constitute the structure of the box 100.

[0050] In this embodiment, the box 100 is rectangular in shape. In other embodiments, the shape of the box 100 can also be adjusted according to actual needs, such as using a hexagonal or octagonal structure, as long as the requirements of sealing and ease of operation are met.

[0051] In this embodiment, the sealing unit 200 includes a sealing strip disposed at the edge of the connection port 105 for surface contact with the chemical equipment.

[0052] A sealing strip is positioned on the outer edge of the connection port 105 of the housing 100 and is designed to contact the surface of the chemical analyzer. When sampling is performed from the chemical analyzer via the environmental maintenance device, the sealing strip undergoes adaptive deformation under the pressure of the microenvironment maintenance chamber and the chemical analyzer, thereby forming a reliable seal. This effectively prevents the infiltration of outside air, maintains a stable sampling environment, and helps improve the accuracy of the sampling results.

[0053] In this embodiment, the width of the sealing strip is designed to be 5 cm. This size fully considers the gaps that may exist in practical applications, ensuring a reliable sealing effect when the microenvironment maintenance box is connected to the chemical equipment, and solving the problem of external air infiltration caused by excessive gaps. It should be noted that the width of the sealing strip is 5 cm, which means that the sealing strip protrudes 5 cm from the surface of the second sidewall 102.

[0054] In this embodiment, when the environmental maintenance device is not in use, the sealing strip and the opening / closing door 107 work together to completely seal the connection port 105, thereby maintaining the stability of the internal space of the enclosure 100. When sampling is required, after removing the opening / closing door 107, the sealing strip can automatically form a sealed connection with the sampling port, ensuring that the stability of the microenvironment is not affected throughout the sampling process.

[0055] It should be noted that the sealing strip has acid and alkali resistance.

[0056] In this embodiment, a positive pressure air supply device is installed at the top of the housing 100. The positive pressure air supply device is connected to the internal space and is used to supply air to the internal space to maintain a positive pressure state.

[0057] The positive pressure air supply device is used to continuously deliver filtered clean gas into the internal space of the chamber 100, thereby forming a stable micro-positive pressure environment inside the chamber 100. This effectively prevents the infiltration of external air, keeping the sampling environment clean at all times, which helps to improve the accuracy and reliability of the sampling results.

[0058] In this embodiment, the positive pressure air supply device further includes a filter screen (not shown in the figure), which is disposed at the air inlet of the positive pressure air supply device.

[0059] The filter screen, installed at the air inlet of the positive pressure air supply device, can effectively filter particulate matter in the gas supplied, thereby ensuring that the cleanliness of the gas delivered into the chamber 100 meets the requirements. Therefore, it provides a reliable cleanliness guarantee for the sampling environment, so that the entire sampling process is not affected by external pollutants, which is conducive to ensuring the accuracy of the test results.

[0060] In this embodiment, the positive pressure air supply device is a High Efficiency Particulate Arrestment (HEPA) air supply device, which is a device that integrates air filtration and air supply functions. It typically consists of a high-efficiency filter, a static pressure box, a diffuser plate, and an air outlet, and can effectively filter particulate matter and microorganisms in the air, providing clean air to meet the requirements of a high-cleanliness environment.

[0061] The positive pressure air supply device further includes a power supply unit 201, which is connected to the positive pressure air supply device and is used to supply power to the positive pressure air supply device.

[0062] In this embodiment, the power supply unit 201 adopts an uninterruptible power supply (UPS) power supply system as the power supply unit 201, which can provide uninterrupted power support for the positive pressure air supply device, ensuring that the positive pressure air supply device can operate continuously and stably, avoiding the positive pressure air supply device from stopping work due to sudden situations such as power outages, so that the internal space of the box 100 can always maintain a slightly positive pressure state, so that external gas cannot enter the internal space of the box 100.

[0063] A recessed area (not shown in the figure) is provided at the center of the bottom of the housing 100. The recessed area is used to place the sample bottles during the sampling process and to place the contaminants generated during sampling.

[0064] The environmental maintenance device further includes a liquid support plate 109, which is disposed in the sinking area of ​​the housing 100.

[0065] The liquid support plate 109 is located at the bottom of the box 100 to receive residual chemical liquid generated during operation. This helps to prevent the residual chemical liquid from directly contacting the box 100, avoids corrosion damage to the box 100 caused by chemicals, and gives the box 100 a longer service life.

[0066] As an example, the liquid support plate 109 is connected to the bottom of the box 100 in a detachable manner, which facilitates the regular cleaning of collected chemical residues and the maintenance and replacement of the liquid support plate 109.

[0067] Specifically, the liquid support plate 109 is made of polytetrafluoroethylene (PTFE). By selecting PTFE, a material with excellent corrosion resistance, the liquid support plate 109 can effectively resist the corrosive effects of various acids and alkalis, thereby ensuring that the liquid support plate 109 maintains good physical and chemical properties during long-term use and extending its service life.

[0068] The environmental maintenance device also includes a plurality of support legs 300, which are disposed at the bottom of the housing 100 to support the housing 100.

[0069] Multiple support legs 300 provide a stable support structure for the housing 100, thereby ensuring that the environmental maintenance device remains stable during operation and effectively preventing tilting or swaying, making sampling operations more accurate and reliable. Furthermore, it should be noted that the positions of the support legs 300 are coordinated with the center of gravity distribution of the housing 100, and their reasonable layout forms a good working relationship with components such as the positive pressure air supply device.

[0070] In this embodiment, there are four support legs 300, which are arranged in a rectangle at the four corners of the bottom of the box body 100 to ensure sufficient support strength.

[0071] The environmental maintenance device further includes a fixing plate 400, which is fixedly mounted on the side wall of the plurality of support legs 300. The fixing plate 400 is used to place the power supply unit 201.

[0072] In this embodiment, the fixing plate 400 and the plurality of support legs 300 are connected by welding.

[0073] In this embodiment, the fixing plate 400 is made of stainless steel, such as 304 stainless steel or 316L stainless steel.

[0074] The environmental maintenance device also includes: casters 500 (e.g., casters 500) Figure 1 As shown, casters 500 are installed at the bottom of the support leg 300. By installing casters 500 at the bottom of the support leg 300, the environmental maintenance device is made mobile, which facilitates the transfer of the device between different sampling locations. This significantly improves the practicality of the device, allowing one device to serve multiple sampling points and improving the utilization rate of the device.

[0075] It should be noted that the 500 caster wheel has a brake structure, which fixes the position when the environmental maintenance device moves to the preset position.

[0076] refer to Figure 5 The present invention also provides a sampling system, comprising: a chemical processing unit, including: a sampling pipeline; a sampling valve disposed on the sampling pipeline; a sampling port disposed on the sampling pipeline, wherein the sampling port is disposed downstream of the sampling valve on the sampling pipeline; and an environmental maintenance device, wherein the connection port 105 of the environmental maintenance device is used to correspond to the sampling valve.

[0077] In the sampling system provided by this embodiment, both the sampling valve and the sampling port are located on the sampling pipeline, and the sampling port is positioned downstream of the sampling valve on the sampling pipeline. Since the connection port 105 of the environmental maintenance device corresponds to the sampling valve, sampling can be performed through the connection port 105 of the environmental maintenance device to obtain a sample from the sampling port. This is because, when the environmental maintenance device is working, the housing 100 forms an independent internal space, and the positive pressure state of the internal space is maintained by the positive pressure air supply device, effectively preventing external air from infiltrating. Secondly, by providing a sealing unit 200 between the connection port 105 and the sampling port, the sealing performance of the sampling environment is ensured. Thirdly, by providing the connection port 105 and the operation window 106 on opposite sides of the housing 100, operators can conveniently perform sampling operations through the operation window 106.

[0078] As a valve device with switching function, the sampling valve regulates the sampling process by controlling the flow of chemicals, ensuring the accuracy and controllability of the sampling. Therefore, it can effectively prevent excessive or insufficient flow of chemicals, making the entire sampling process safer and more reliable.

[0079] In this embodiment, the sampling valve can adopt a pneumatic ball valve structure, the valve body is made of corrosion-resistant PTFE material, and the sealing ring is made of perfluororubber material, which has excellent corrosion resistance.

[0080] The sampling port is located downstream of the sampling valve and connected to the sampling pipeline to form a complete sampling channel.

[0081] In this embodiment, the size of the sampling port is adapted to the size of the connection port 105 of the environmental maintenance device to ensure that it can be accurately docked with the environmental maintenance box.

[0082] The sampling pipeline is located between the sampling valve and the sampling port, establishing a stable delivery channel to guide chemicals from the sampling valve to the sampling port, ensuring the stability of the chemical delivery process and thus effectively avoiding the risk of contamination during delivery.

[0083] In this embodiment, the sampling pipeline is made of a corrosion-resistant material, such as PTFE.

[0084] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. An environmental maintenance device, characterized in that, The environmental maintenance device includes a sampling port for taking samples from the chemical processing unit, and includes: A housing, including an interior space located therein, the housing including a first sidewall and a second sidewall directly opposite the first sidewall; The connection port, located on the first side wall of the housing, is used to connect with the sampling port of the chemical processing machine; The operation window is located on the second side wall of the enclosure; A positive pressure air supply device is installed at the top of the housing. The positive pressure air supply device is connected to the internal space and is used to supply air to the internal space to maintain a positive pressure state. A sealing unit is disposed between the connection port and the sampling port of the housing.

2. The environmental maintenance device as described in claim 1, characterized in that, The connection port is rectangular, square, or circular.

3. The environmental maintenance device as described in claim 1, characterized in that, The sealing unit includes: A sealing strip is provided at the edge of the connection port for surface contact of the chemical equipment.

4. The environmental maintenance device as described in claim 1, characterized in that, The positive pressure air supply device also includes: A filter screen is installed at the air inlet of the positive pressure air supply device; The power supply unit is connected to the positive pressure air supply device and is used to supply power to the positive pressure air supply device.

5. The environmental maintenance device as described in claim 1, characterized in that, The operating window includes a pore made of elastic material.

6. The environmental maintenance device as claimed in claim 1, characterized in that, A recessed area is provided at the bottom center of the box body; The environmental maintenance device further includes a liquid support plate disposed in the lower area of ​​the container, the liquid support plate being made of polytetrafluoroethylene.

7. The environmental maintenance device as claimed in claim 1, characterized in that, The environmental maintenance device also includes: An exhaust window is provided on the side wall of the enclosure; Filter cotton is installed on the exhaust window.

8. The environmental maintenance device as claimed in claim 1, characterized in that, The environmental maintenance device also includes: Multiple support legs are provided at the bottom of the box to support the box. The casters are located at the bottom of the support legs.

9. The environmental maintenance device as claimed in claim 1, characterized in that, The environmental maintenance device also includes: An opening and closing door is provided on the first side wall and located in the internal space of the box. The opening and closing door moves parallel to the first side wall and is used to open or close the connection port.

10. A sampling system, characterized in that, include: A chemical processing unit includes: a sampling pipeline; and a sampling valve disposed on the sampling pipeline. A sampling port is provided on the sampling pipeline, and the sampling port is located downstream of the sampling valve on the sampling pipeline; The environmental maintenance device as described in any one of claims 1 to 9, wherein the connection port of the environmental maintenance device is used to correspond to the sampling port.

Images