Cleaning tool for high-vacuum material growth substrate carrier

Abstract

The utility model discloses a cleaning tool for a high-vacuum material growth substrate carrier, and relates to the technical field of semiconductor material processing, and the cleaning tool comprises a fixed rod, a first flower basket body and a second flower basket body; the first flower basket body and the second flower basket body are stacked from bottom to top; the first flower basket body is provided with a first containing cavity used for containing a carrier. The second flower basket body is provided with a second containing cavity used for containing a carrier. The first flower basket body is provided with a connecting hole which allows one end of the fixing rod to be inserted and is detachably connected with the fixing rod; the second flower basket body is provided with a first through hole for one end of the fixing rod to movably penetrate through. By means of the design, two carriers can be cleaned at the same time, and the working efficiency is effectively improved; meanwhile, the design structure is simple, assembling and disassembling are convenient, the fixing rod, the first flower basket body and the second flower basket body can be independently disassembled, and follow-up maintenance is facilitated.

Description

Technical Field

[0001] This application relates to the field of semiconductor material processing technology, and in particular to a cleaning tool for a high-vacuum material growth substrate carrier. Background Technology

[0002] Molecular beam epitaxy (MBE) is an epitaxial growth technique for semiconductor materials. In an ultra-high vacuum chamber, ultra-high purity elemental substances of various elements are thermally evaporated and broken down to form atomic or molecular beams. These beams are then mixed on a single-crystal substrate at a certain temperature and epitaxially grown with atomic-level precision to form semiconductor materials with specific compositions.

[0003] MBE (Metal-Oxide-Layer) equipment uses thermal radiation to heat the substrate, which is placed on a substrate tray (carrier) with holes and wafer steps corresponding to the substrate size. The substrate tray is typically made of molybdenum, hence the name "molybdenum tray." During this process, the epitaxial wafer is placed on the molybdenum tray for growth. To ensure the quality and performance of the epitaxial layer, the molybdenum tray needs to be cleaned. The main purpose of cleaning is to remove impurities such as dust particles, organic matter, process residues, and adsorbed metal ions from the surface. These impurities can affect the uniformity and quality of the epitaxial layer, leading to defects or unsatisfactory growth results. Furthermore, the molybdenum tray is prone to oxidation during high-temperature processing, resulting in black spots on the surface, which further affects the quality of the epitaxial layer. Therefore, regular cleaning of the molybdenum tray is necessary to keep its surface clean and prevent oxidation.

[0004] The cleaning process typically involves mechanical cleaning using chemical solutions and pure water, and sometimes ultrasonic cleaning is employed to enhance the cleaning effect. In short, cleaning the molybdenum substrate is to remove surface impurities and prevent oxidation, thereby ensuring the quality and performance of the epitaxial layer. This is a crucial step in MBE technology, ensuring the reliability and stability of semiconductor devices. However, current cleaning equipment designs are relatively simple, only capable of cleaning a single molybdenum substrate, and cleaning efficiency needs further improvement. Therefore, a solution is urgently needed to address these issues. Utility Model Content

[0005] In view of this, the purpose of this application is to provide a cleaning tool for a high vacuum material growth substrate carrier, so as to solve the technical problem that the existing cleaning tools are relatively simple in design, can only clean a single molybdenum tray, and the cleaning efficiency still needs to be further improved.

[0006] To achieve the above-mentioned technical objectives, this application provides a cleaning tool for a high-vacuum material growth substrate carrier, including a fixing rod, a first basket body, and a second basket body;

[0007] The first flower basket and the second flower basket are stacked from bottom to top;

[0008] The first flower basket body is provided with a first holding cavity for holding the vehicle;

[0009] The second flower basket body is provided with a second holding cavity for holding the vehicle;

[0010] The first flower basket body is provided with a connection hole for inserting one end of the fixing rod and detachably connecting it to the fixing rod;

[0011] The second basket body is provided with a first through hole through which one end of the fixing rod can move.

[0012] Furthermore, the first flower basket body includes a first support plate;

[0013] The first tray is provided with several first through holes;

[0014] The first pallet is provided with at least two first protrusions for supporting the vehicle and creating a gap between the vehicle and the first pallet;

[0015] The top of the first pallet is provided with at least two first limiting flanges distributed around the center circumference of the first pallet;

[0016] At least two of the first limiting flanges and the first tray form the first holding cavity;

[0017] The first tray is provided with a first connecting lug;

[0018] The connecting hole is formed on the first connecting lug;

[0019] The second flower basket body includes a second support plate;

[0020] The second tray is provided with several second through holes;

[0021] The second pallet is provided with at least two second protrusions for supporting the vehicle and creating a gap between the vehicle and the second pallet;

[0022] The top of the second tray is provided with at least two second limiting flanges distributed around the center circumference of the second tray;

[0023] At least two of the second limiting flanges and the second tray form the second holding cavity;

[0024] The second tray is provided with a second connecting lug;

[0025] The first through hole is formed on the second connecting lug.

[0026] Furthermore, the top of the inner side surface of the first limiting flange is provided with a first chamfer;

[0027] The top of the inner side of the second limiting flange is provided with a second chamfer.

[0028] Furthermore, it also includes a third flower basket body;

[0029] The third flower basket body is stacked on the second flower basket body, and the third flower basket body is provided with a second through hole through which one end of the fixing rod can move;

[0030] The third basket body is provided with a third holding cavity for holding the vehicle.

[0031] Furthermore, the third basket body includes a third support plate;

[0032] The third support plate is provided with several third through holes;

[0033] The third support plate is provided with at least two third protrusions for supporting the vehicle and creating a gap between the vehicle and the third support plate.

[0034] The top of the third tray is provided with at least two third limiting flanges distributed around the center circumference of the third tray;

[0035] At least two of the third limiting flanges and the third support plate form the third holding cavity;

[0036] The third support plate is provided with a third connecting lug;

[0037] The second through hole is formed on the third connecting lug.

[0038] Furthermore, the top of the inner side of the third limiting flange is provided with a third chamfer.

[0039] Furthermore, the fixing rod is provided with a handle.

[0040] Furthermore, the handle is a rod structure;

[0041] The upper part of the fixing rod is provided with a through mounting hole;

[0042] The handle is movably inserted through the mounting hole and is perpendicular to the fixing rod.

[0043] Furthermore, the connecting hole is a threaded hole;

[0044] One end of the fixing rod is provided with an external thread structure that is threadedly connected to the threaded hole;

[0045] There are at least two fixing rods, which are distributed circumferentially;

[0046] There are at least two connecting holes, each corresponding to one end of the fixing rod;

[0047] There are at least two first through holes, each corresponding to one end of the fixing rod, which can be moved through them.

[0048] Furthermore, the fixing rod, the first flower basket body, the second flower basket body, and the third flower basket body are all made of polytetrafluoroethylene material.

[0049] As can be seen from the above technical solutions, the cleaning equipment for the high-vacuum material growth substrate carrier designed in this application has the following beneficial effects:

[0050] 1. The stacked design of the first and second flower baskets enables two vehicles to clean simultaneously, effectively improving work efficiency.

[0051] 2. The first flower basket is fixedly connected to the fixing rod, so that the first flower basket serves as the base flower basket, and the second flower basket is stacked on the first flower basket along the fixing rod (allowing for flexible placement and removal on the first flower basket). This design is simple in structure and easy to assemble and disassemble. The fixing rod, the first flower basket and the second flower basket can be removed independently, which is beneficial for subsequent maintenance. Attached Figure Description

[0052] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0053] Figure 1 This is a schematic diagram of a cleaning tool for a high-vacuum material growth substrate carrier provided in this application, which includes a third basket body.

[0054] Figure 2 This is a top view of the first basket body of a cleaning tool for a high-vacuum material growth substrate carrier provided in this application;

[0055] Figure 3 This is a first cross-sectional view of the first basket body of a cleaning tool for a high-vacuum material growth substrate carrier provided in this application;

[0056] Figure 4 This is a second cross-sectional view of the first basket body of a cleaning tool for a high-vacuum material growth substrate carrier provided in this application;

[0057] Figure 5 This is a top view of the second basket body of a cleaning tool for a high-vacuum material growth substrate carrier provided in this application;

[0058] Figure 6This is a first cross-sectional view of the second basket body of a cleaning tool for a high-vacuum material growth substrate carrier provided in this application;

[0059] Figure 7 This is a second cross-sectional view of the second basket body of a cleaning tool for a high-vacuum material growth substrate carrier provided in this application;

[0060] Figure 8 This is a top view of the third basket body of a cleaning tool for a high-vacuum material growth substrate carrier provided in this application;

[0061] Figure 9 This is a first cross-sectional view of the third basket body of a cleaning tool for a high-vacuum material growth substrate carrier provided in this application;

[0062] Figure 10 This is a second cross-sectional view of the third basket body of a cleaning tool for a high-vacuum material growth substrate carrier provided in this application;

[0063] Figure 11 This is a side view of the fixing rod of a cleaning tool for a high-vacuum material growth substrate carrier provided in this application;

[0064] In the diagram: 1. First basket body; 10. Connecting hole; 11. First holding cavity; 12. First support plate; 121. First through hole; 122. First limiting flange; 123. First chamfer; 13. First connecting lug; 14. First protrusion; 2. Second basket body; 20. First through hole; 21. Second holding cavity; 22. Second support plate; 221. Second through hole; 222. Second limiting flange; 223. Second chamfer; 23. Second connecting lug; 24. Second protrusion; 3. Third basket body; 30. Second through hole; 31. Third holding cavity; 32. Third support plate; 321. Third through hole; 322. Third limiting flange; 323. Third chamfer; 33. Third connecting lug; 4. Fixing rod; 41. Mounting hole; 42. Handle; 43. External thread structure. Detailed Implementation

[0065] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the embodiments of this application.

[0066] In the description of the embodiments of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0067] In the description of the embodiments of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a replaceable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this application based on the specific circumstances.

[0068] This application discloses a cleaning tool for a high-vacuum material growth substrate carrier.

[0069] Please see Figure 1 One embodiment of a cleaning tool for a high-vacuum material growth substrate carrier provided in this application includes:

[0070] Fixed rod 4, first flower basket body 1 and second flower basket body 2.

[0071] The first flower basket body 1 and the second flower basket body 2 are stacked from bottom to top. The first flower basket body 1 is provided with a first holding cavity 11 for holding the vehicle, and the second flower basket body 2 is provided with a second holding cavity 21 for holding the vehicle.

[0072] The first flower basket body 1 is provided with a connecting hole 10 for inserting one end of the fixing rod 4 and detachably connecting it to the fixing rod 4, and the second flower basket body 2 is provided with a first through hole 20 for one end of the fixing rod 4 to move through.

[0073] The cleaning equipment for the high-vacuum material growth substrate carrier designed in this application has the following beneficial effects:

[0074] 1. The stacked design of the first flower basket 1 and the second flower basket 2 enables two vehicles to clean simultaneously, effectively improving work efficiency.

[0075] 2. The first flower basket body 1 is fixedly connected to the fixing rod 4, so that the first flower basket body 1 serves as the base flower basket, and the second flower basket body 2 is stacked on the first flower basket body 1 along the fixing rod 4 (which allows for flexible placement and removal on the first flower basket body 1). This design is simple in structure and easy to assemble and disassemble. The fixing rod 4, the first flower basket body 1 and the second flower basket body 2 can be removed independently, which is beneficial for subsequent maintenance.

[0076] The above is Embodiment 1 of a cleaning tool for a high-vacuum material growth substrate carrier provided in this application. The following is Embodiment 2 of a cleaning tool for a high-vacuum material growth substrate carrier provided in this application. Please refer to the following for details. Figures 1 to 11 .

[0077] Furthermore, such as Figures 2 to 4 As shown, the design of the first flower basket body 1 includes a first support plate 12.

[0078] The first tray 12 is provided with a number of first through holes 121; the first through holes 121 can reduce the overall weight and save materials, while allowing the carrier to fully contact the cleaning solution and achieve a better cleaning effect.

[0079] like Figure 3 As shown, the first pallet 12 is provided with at least two first protrusions 14 for supporting the carrier and creating a gap between the carrier and the first pallet 12; four first protrusions 14 can be designed to suspend the carrier so that the bottom of the carrier can fully contact the cleaning solution.

[0080] The top of the first pallet 12 is provided with at least two first limiting flanges 122 distributed around the center circumference of the first pallet 12. The at least two first limiting flanges 122 and the first pallet 12 form a first holding cavity 11. The first limiting flanges 122 play a limiting role to prevent the carrier from falling off the first pallet 12. The first limiting flanges 122 are arc-shaped protrusions that can be integrally formed with the first pallet 12. In this application, four first limiting flanges 122 are designed. In actual design, the number can be changed according to actual needs and is not limited.

[0081] The first tray 12 is provided with a first connecting lug 13, and a connecting hole 10 is formed on the first connecting lug 13. The first connecting lug 13 provides a dedicated and reinforced connection part for connection. Compared with directly forming a connecting hole 10 on the first tray 12, the connecting lug can more effectively distribute the external forces borne during connection. For example, when subjected to tension, compression, or torsion, its structure can evenly transmit the force to the tray body, thereby significantly enhancing the stability of the connection, reducing the risk of loosening, deformation, or even breakage of the connection part, and ensuring the reliability and safety of the overall structure during long-term use.

[0082] The presence of the first connecting lug 13 makes the spatial layout of the connecting components more rational. By concentrating the connecting function in the lug area, the random distribution of the connecting holes 10 on the surface of the first tray 12 is avoided, thereby freeing up more regular space for the arrangement of other components on the tray, which is conducive to improving the compactness and space utilization of the entire equipment or device.

[0083] The height of the first connecting lug 13 can be designed according to actual needs. Different heights can make the distance between the first basket body 1 and the second basket body 2 different, and there is no specific limitation.

[0084] like Figures 5 to 7 The second basket body 2 includes the second support plate 22.

[0085] The second tray 22 is provided with several second through holes 221; the second through holes 221 can reduce the overall weight and save materials, while allowing the carrier to fully contact the cleaning solution, making the cleaning more uniform and achieving a better cleaning effect.

[0086] like Figure 6 As shown, the second support plate 22 is provided with at least two second protrusions 24 for supporting the carrier and creating a gap between the carrier and the second support plate 22; four second protrusions 24 can be designed to suspend the carrier so that the bottom of the carrier can fully contact the cleaning solution.

[0087] The top of the second pallet 22 is provided with at least two second limiting flanges 222 distributed around the center circumference of the second pallet 22. The at least two second limiting flanges 222 and the second pallet 22 form a second holding cavity 21. The second limiting flanges 222 play a limiting role to prevent the carrier from falling off the second pallet 22. The second limiting flanges 222 are arc-shaped protrusions that can be integrally formed with the second pallet 22. In this application, four second limiting flanges 222 are designed. In actual design, the number can be changed according to actual needs and is not limited.

[0088] The second support plate 22 is provided with a second connecting lug 23, and a first through hole 20 is formed on the second connecting lug 23.

[0089] The second connecting lug 23 provides a dedicated and reinforced connection point. Compared to directly opening the first through hole 20 on the second tray 22, the connecting lug can more effectively distribute the external forces borne during connection. For example, when subjected to tension, pressure, or torsion, its structure can evenly transmit the force to the tray body, thereby significantly enhancing the stability of the connection, reducing the risk of loosening, deformation, or even breakage of the connection point, and ensuring the reliability and safety of the overall structure during long-term use.

[0090] The presence of the second connecting lug 23 makes the spatial layout of the connecting components more rational. By concentrating the connecting function in the lug area, the random distribution of the first through hole 20 on the surface of the second tray 22 is avoided, thereby freeing up more regular space for the arrangement of other components on the tray, which is conducive to improving the compactness and space utilization of the entire equipment or device.

[0091] Furthermore, such as Figure 3 As shown, the top of the inner side of the first limiting flange 122 is provided with a first chamfer 123. The first chamfer 123 can play a guiding role (when the vehicle contacts and moves relative to the first limiting flange 122, the first chamfer 123 can play a guiding role); the first chamfer 123 can also effectively reduce the impact force and friction between the vehicle and the first limiting flange 122 at the moment of contact.

[0092] The inner side of the second limiting flange 222 is provided with a second chamfer 223. Similarly, the second chamfer 223 can play a guiding role (when the vehicle contacts and moves relative to the second limiting flange 222, the second chamfer 223 can play a guiding role); the second chamfer 223 can also effectively reduce the impact force and friction between the vehicle and the second limiting flange 222 at the moment of contact.

[0093] Furthermore, such as Figure 1 As shown, in order to further improve efficiency, this application also designs a third basket body 3.

[0094] The third flower basket body 3 is stacked on the second flower basket body 2, and the third flower basket body 3 is provided with a second through hole 30 for one end of the fixing rod 4 to pass through. The third flower basket body 3 is provided with a third holding cavity 31 for holding the vehicle.

[0095] When a third basket body 3 is designed, the height of the second connecting lug 23 of the second basket body 2 can also be changed according to actual needs, thereby adjusting the distance between the second basket body 2 and the third basket body 3.

[0096] If necessary, an additional (n+1)th flower basket can be designed, where n is ≥3 and is an integer.

[0097] Furthermore, such as Figures 8 to 10 As shown, the third basket body 3 includes a third support plate 32.

[0098] The third tray 32 is provided with several third through holes 321; the third through holes 321 can reduce the overall weight and save materials, while allowing the carrier to fully contact the cleaning solution and achieve better cleaning effect.

[0099] The third support plate 32 is provided with at least two third protrusions (not shown in the figure) for supporting the carrier and creating a gap between the carrier and the third support plate 32; four third protrusions can be designed to suspend the carrier so that the bottom of the carrier can fully contact the cleaning solution.

[0100] The top of the third pallet 32 ​​is provided with at least two third limiting flanges 322 distributed around the central circumference of the third pallet 32. The at least two third limiting flanges 322 and the third pallet 32 ​​form a third holding cavity 31. The third limiting flanges 322 serve a limiting function to prevent the vehicle from detaching from the third pallet 32. The third limiting flanges 322 are arc-shaped protrusions that can be integrally formed with the third pallet 32. In this application, four third limiting flanges 322 are designed. In actual design, the number can be changed according to actual needs and is not limited.

[0101] The third support plate 32 is provided with a third connecting lug 33, and the second through hole 30 is formed on the third connecting lug 33.

[0102] The third connecting lug 33 provides a dedicated and reinforced connection point. Compared to directly opening the second through hole 30 on the third tray 32, the connecting lug can more effectively distribute the external forces borne during connection. For example, when subjected to tension, pressure, or torsion, its structure can evenly transmit the force to the tray body, thereby significantly enhancing the stability of the connection, reducing the risk of loosening, deformation, or even breakage of the connection point, and ensuring the reliability and safety of the overall structure during long-term use.

[0103] The presence of the third connecting lug 33 makes the spatial layout of the connecting components more rational. By concentrating the connecting function in the lug area, the random distribution of the second through hole 30 on the surface of the third tray 32 is avoided, thereby freeing up more regular space for the arrangement of other components on the tray, which is conducive to improving the compactness and space utilization of the entire equipment or device.

[0104] Taking the design of three flower baskets as an example, the height of the third connecting lug 33 of the topmost third flower basket 3 can be designed to be relatively small, because there are no other flower baskets above it, and there is no need to consider the spacing between the flower baskets. The specific design can be changed according to actual needs without any restrictions.

[0105] Furthermore, such as Figure 10 As shown, the top of the inner side of the third limiting flange 322 is provided with a third chamfer 323. The third chamfer 323 can play a guiding role (when the vehicle contacts and moves relative to the third limiting flange 322, the third chamfer 323 can play a guiding role); the third chamfer 323 can also effectively reduce the impact force and friction between the vehicle and the third limiting flange 322 at the moment of contact.

[0106] Furthermore, the fixing rod 4 is provided with a handle 42 for easy lifting and placing of cleaning tools.

[0107] Furthermore, such as Figure 1 as well as Figure 11 As shown, the handle part 42 is a rod structure. The upper part of the fixed rod 4 is provided with a mounting hole 41 that passes through itself. The handle part 42 is movably inserted through the mounting hole 41 and is distributed perpendicularly to the fixed rod 4.

[0108] From a gripping perspective, this design makes it easy to grasp; at the same time, the handle 42 is designed to be detachable, allowing for the addition of more baskets without removing the first basket 1, making it more convenient to use.

[0109] Regarding the design of the handle 42, it is not limited to the above-mentioned rod structure design; it can also be a U-shaped handle, a circular hanging ring, or other structures. There are no specific restrictions.

[0110] Furthermore, such as Figure 1 as well as Figure 11 As shown, in terms of the detachable connection design, the connecting hole 10 is a threaded hole, and one end of the fixing rod 4 is provided with an external thread structure 43 that connects to the threaded hole. The threaded connection provides reliable fastening force, ensuring a tight fit between the fixing rod 4 and the connecting hole 10, effectively preventing loosening of the connection due to external forces such as vibration and impact during use. The threaded connection structure has good repeatability; as long as the threads are not damaged, it can maintain relatively stable connection performance during multiple disassembly and reinstallation processes.

[0111] Of course, other detachable structures are also possible, such as pin connections; there are no specific limitations.

[0112] There are at least two fixing rods 4, arranged circumferentially. The circumferential distribution of multiple fixing rods 4 ensures that the external force borne by the connection is evenly distributed across all fixing rods 4, preventing stress concentration in any one area, thereby greatly enhancing the stability and load-bearing capacity of the overall connection structure. This application designs two fixing rods 4. Correspondingly, there are at least two connecting holes 10, each corresponding to one end of a fixing rod 4; and at least two first through holes 20, each corresponding to one end of a fixing rod 4, allowing it to move through.

[0113] When designing a single fixed rod 4, in order to prevent the second basket body 2 from rotating around the fixed rod 4, the cross-section of the fixed rod 4 can be designed as a polygon or an irregular shape, and there are no specific restrictions.

[0114] Furthermore, the fixing rod 4, the first basket body 1, the second basket body 2, and the third basket body 3 are all made of polytetrafluoroethylene material.

[0115] Cleaning tools made of polytetrafluoroethylene (PTFE) have many significant advantages, making them very popular in laboratory and industrial applications.

[0116] 1. Chemical Resistance: PTFE material has extremely high chemical stability, is almost insoluble in any solution, and can resist corrosion from various acids, alkalis, and strong oxidizing agents. This means that cleaning tools made of PTFE can maintain their performance for a long time and are not easily damaged by chemicals.

[0117] 2. High-temperature resistance: PTFE can maintain its performance within a temperature range of -260℃ to 260℃, and can even withstand temperatures up to 300℃ for short periods. This makes it suitable for cleaning tasks in various high-temperature environments.

[0118] 3. Non-adhesive: The PTFE surface has excellent non-stick properties, which prevents dirt from adhering to cleaning tools during use, thus simplifying the cleaning process and reducing the risk of contamination.

[0119] 4. Low coefficient of friction: The low coefficient of friction of PTFE means that it has very little resistance when moving or sliding, which not only improves cleaning efficiency but also extends the service life of cleaning tools.

[0120] 5. Wide temperature range applicability: PTFE can maintain good mechanical and physical properties under extreme temperature conditions, which makes it suitable for use in a wide range of temperatures, performing excellently from low to high temperatures.

[0121] 6. Easy to clean: Due to its non-stick and chemical resistance, PTFE cleaning tools are easy to clean and maintain. They can be restored to their surface condition simply by washing with water or using a mild detergent.

[0122] 7. Electrical insulation: PTFE has excellent electrical insulation properties, which is especially important for laboratory environments where it is necessary to prevent the accumulation of static electricity.

[0123] 8. Durability: PTFE material has extremely high durability and anti-aging properties, which enables cleaning utensils made from it to withstand frequent use and harsh conditions.

[0124] In summary, cleaning tools made of polytetrafluoroethylene (PTFE) are widely used in laboratory and industrial fields due to their excellent chemical resistance, high-temperature resistance, non-adhesiveness, low coefficient of friction, wide temperature range applicability, ease of cleaning, electrical insulation, and durability. These properties ensure that they provide efficient and reliable cleaning solutions in a variety of complex and harsh application environments.

[0125] Polytetrafluoroethylene (PTFE) exhibits superior chemical resistance compared to other cleaning tool materials, even surpassing many others. Multiple studies demonstrate that PTFE possesses excellent chemical resistance, resisting virtually all strong acids, alkalis, oxidizing agents, and reducing agents. It remains stable in a temperature range of -200°C to 260°C and is completely unaffected by ultraviolet light.

[0126] PTFE is not only highly resistant to most chemical solvents and corrosive substances, but its chemical inertness also means it hardly reacts with any substances. This property makes PTFE widely used in the chemical industry.

[0127] Cleaning tools made of PTFE material can effectively avoid the highly corrosive effects of chemical solvents, ensuring that the carrier can be cleaned and reducing the impact of impurities such as dust particles, organic matter, process residues, and metal ions adsorbed on the carrier surface on epitaxy.

[0128] For example, in a design application:

[0129] The diameter of the three flower baskets in this application is designed to be 140mm;

[0130] The trays of the three flower baskets are 5mm thick. Connecting lugs are provided on both sides of the tray in the diameter direction. The connecting lugs are in the shape of rings. There are four limiting flanges on the tray, which are arc-shaped with an arc of 30°. There are 17 through holes on the tray, with a diameter of 5mm. There are four protruding pillars on the tray, with a height of 2mm and a diameter of 5mm.

[0131] The limiting flange is designed with a height of 20mm, a width of 5mm, and a chamfer of 2mm.

[0132] The fixing rod 4 is hollow to reduce weight, with an inner diameter of 15mm and an outer diameter of 20mm;

[0133] The first connecting lug 13 has a height of 30mm, and the connecting hole 10 has a height of 20mm; the second connecting lug 23 has a height of 30mm; the third connecting lug 33 has a height of 15mm.

[0134] The handle 42 is 15mm from the top of the fixed rod 4, with a diameter of 10mm and a length of 80mm;

[0135] The total height of the cleaning tools is 270mm.

[0136] Of course, the above design parameters are only one design application example. Those skilled in the art can make appropriate changes and adjustments according to actual needs, without any restrictions.

[0137] The cleaning apparatus for a high-vacuum material growth substrate carrier provided in this application has been described in detail above. For those skilled in the art, there will be changes in the specific implementation method and application scope based on the ideas of the embodiments of this application. Therefore, the content of this specification should not be construed as a limitation of this application.

Claims

1. A cleaning tool for a high-vacuum material growth substrate carrier, characterized in that, Includes a fixed rod (4), a first flower basket body (1), and a second flower basket body (2); The first flower basket body (1) and the second flower basket body (2) are stacked from bottom to top; The first basket body (1) is provided with a first holding cavity (11) for holding the vehicle; The second basket body (2) is provided with a second holding cavity (21) for holding the vehicle; The first flower basket body (1) is provided with a connection hole (10) for inserting one end of the fixing rod (4) and detachably connecting it to the fixing rod (4); The second basket body (2) is provided with a first through hole (20) through which one end of the fixing rod (4) can move.

2. The cleaning tool for a high-vacuum material growth substrate carrier according to claim 1, characterized in that, The first basket body (1) includes a first tray (12); The first tray (12) is provided with a plurality of first through holes (121); The first pallet (12) is provided with at least two first protrusions (14) for supporting the vehicle and creating a gap between the vehicle and the first pallet (12); The top of the first tray (12) is provided with at least two first limiting flanges (122) distributed around the center circumference of the first tray (12). At least two of the first limiting flanges (122) and the first tray (12) form the first holding cavity (11); The first tray (12) is provided with a first connecting lug (13); The connecting hole (10) is provided on the first connecting lug (13); The second basket body (2) includes a second tray (22); The second tray (22) is provided with a plurality of second through holes (221); The second pallet (22) is provided with at least two second protrusions (24) for supporting the vehicle and creating a gap between the vehicle and the second pallet (22); The top of the second tray (22) is provided with at least two second limiting flanges (222) distributed around the center circumference of the second tray (22); At least two of the second limiting flanges (222) and the second tray (22) form the second holding cavity (21); The second tray (22) is provided with a second connecting lug (23); The first through hole (20) is formed on the second connecting lug (23).

3. The cleaning tool for a high-vacuum material growth substrate carrier according to claim 2, characterized in that, The top of the inner side of the first limiting flange (122) is provided with a first chamfer (123); The top of the inner side of the second limiting flange (222) is provided with a second chamfer (223).

4. The cleaning tool for a high-vacuum material growth substrate carrier according to claim 1, characterized in that, It also includes the third flower basket body (3); The third flower basket body (3) is stacked on the second flower basket body (2), and the third flower basket body (3) is provided with a second through hole (30) through which one end of the fixing rod (4) can move. The third basket body (3) is provided with a third holding cavity (31) for holding the vehicle.

5. The cleaning tool for a high-vacuum material growth substrate carrier according to claim 4, characterized in that, The third basket body (3) includes a third support plate (32); The third support plate (32) is provided with a plurality of third through holes (321); The third support plate (32) is provided with at least two third protrusions for supporting the vehicle and creating a gap between the vehicle and the third support plate (32). The top of the third tray (32) is provided with at least two third limiting flanges (322) distributed around the center circumference of the third tray (32). At least two of the third limiting flanges (322) and the third support plate (32) form the third holding cavity (31); The third support plate (32) is provided with a third connecting lug (33); The second through hole (30) is formed on the third connecting lug (33).

6. The cleaning tool for a high-vacuum material growth substrate carrier according to claim 5, characterized in that, The top of the inner side of the third limiting flange (322) is provided with a third chamfer (323).

7. The cleaning tool for a high-vacuum material growth substrate carrier according to claim 1, characterized in that, The fixed rod (4) is provided with a handle (42).

8. The cleaning tool for a high-vacuum material growth substrate carrier according to claim 7, characterized in that, The handle (42) is a rod structure; The upper part of the fixing rod (4) is provided with a through mounting hole (41). The handle (42) is movably inserted through the mounting hole (41) and is perpendicular to the fixing rod (4).

9. The cleaning tool for a high-vacuum material growth substrate carrier according to claim 1, characterized in that, The connecting hole (10) is a threaded hole; One end of the fixing rod (4) is provided with an external thread structure (43) that is threadedly connected to the threaded hole. There are at least two fixed rods (4), and they are distributed circumferentially; There are at least two connecting holes (10), which are connected to one end of the fixing rod (4) respectively; There are at least two first through holes (20), which correspond one-to-one for one end of the fixing rod (4) to pass through.

10. The cleaning tool for a high-vacuum material growth substrate carrier according to claim 4, characterized in that, The fixing rod (4), the first basket body (1), the second basket body (2) and the third basket body (3) are all made of polytetrafluoroethylene material.

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