Device for accurately regulating and controlling multi-layer composite coating of composite target material

Abstract

The utility model provides a device for accurately regulating and controlling a multi-layer composite coating of a composite target material, which belongs to the field of vacuum coating and comprises the composite target material and a target seat, the composite target material is arranged on the target seat, and a strip-shaped permanent magnet, a small electromagnetic coil, an annular magnetic pole and a large electromagnetic coil are sequentially arranged below the target seat outwards along the central axis of the target seat. And the strip-shaped permanent magnet, the small electromagnetic coil, the annular magnetic pole and the large electromagnetic coil form a composite magnetic field on the surface of the composite target material, wherein the composite magnetic field is used for regulating and controlling the motion trail of the arc spots on the composite target material. According to the utility model, the regulation and control precision, the preparation efficiency and the diversity for preparing the multilayer coating are improved, and the multilayer nano composite coating with a novel structure, a composite function and better binding force can be obtained.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, specifically to a device for precisely controlling the multilayer composite coating of composite target materials. Background Technology

[0002] With the development of modern industrial technology, especially in the fields of aerospace, precision instruments, and electronic equipment, the requirements for material surface properties are becoming increasingly stringent. Multilayer composite coatings can effectively block the propagation of coating cracks, reduce internal stress in the coating, and improve film-substrate adhesion. They can also combine the advantages of individual single-layer coatings, exhibiting excellent comprehensive performance and are widely used to improve and enhance the properties of substrate materials. However, existing multilayer composite coating preparation technologies have some limitations, particularly in achieving precise control over the thickness and composition of each coating layer.

[0003] Current methods for preparing multilayer composite coatings involve mounting two sets of targets with different compositions on two rows of cathode arc sources, and achieving alternating deposition of the coatings by controlling the opening and closing of the arc power supply and the target gates. During alternating deposition, the time required for the arc power supply current to rise to the set parameter value makes it difficult to guarantee the bonding strength and uniformity between different material layers, and also makes it difficult to precisely control the coating thickness, modulation ratio, modulation period, and other parameters between individual layers. Furthermore, this method requires two rows of cathode arc sources, resulting in low preparation efficiency, and the use of single-component targets limits the diversity of coating performance. Therefore, developing a composite target capable of precisely controlling multilayer composite coatings is of great significance for improving coating performance and expanding its application range. Utility Model Content

[0004] The purpose of this invention is to overcome the shortcomings of existing multilayer composite coating preparation technologies, such as low control precision, low bonding strength between individual layers, and limited coating element composition. It also overcomes the defects of existing multilayer composite coating preparation methods that typically use two rows of cathode arc sources, each with a target material of different composition, resulting in a low coating deposition rate. The invention provides a composite target that can precisely control parameters such as modulation period and modulation ratio, and can use the same target material on both rows of cathode arc sources. This enables the preparation of multilayer composite coatings with more component combinations and better bonding strength, significantly improving the coating deposition rate.

[0005] The technical solution adopted by this utility model is as follows: A device for precisely controlling the multilayer composite coating of a composite target material includes a composite target material and a target base. The composite target material is disposed on the target base. A strip permanent magnet, a small electromagnetic coil, a ring magnetic pole, and a large electromagnetic coil are arranged sequentially outward along the central axis below the target base. The strip permanent magnet, the small electromagnetic coil, the ring magnetic pole, and the large electromagnetic coil form a composite magnetic field on the surface of the composite target material to control the movement trajectory of the arc spot on the composite target material.

[0006] An insulating sleeve is provided under the target base, and the large electromagnetic coil is sleeved on the insulating sleeve.

[0007] The insulating sleeve has a rear cover plate in the middle, and a central magnetic pole mounting base is provided on the rear cover plate. The strip permanent magnet is disposed on the central magnetic pole mounting base.

[0008] The small electromagnetic coil is fitted onto the central magnetic pole mounting base.

[0009] An annular magnetic pole mounting base is provided between the target base and the insulating sleeve. The annular magnetic pole mounting base is provided with a plurality of magnetic poles along the circumference. The plurality of magnetic poles are arranged at equal intervals and in a ring to form the annular magnetic poles.

[0010] The target mount is provided with a water-cooled plate, and the rear cover plate is provided with a water-cooled connector. The end of the water-cooled connector near the rear cover plate is provided with a water-cooled interface for connecting coolant. The water-cooled plate is provided with a connecting hole corresponding to the water-cooled connector, so that coolant flows into the water-cooled plate.

[0011] The water-cooling plate is provided with a coolant flow channel, which is an annular flow channel.

[0012] At least two water-cooling connectors are provided.

[0013] The device for precisely controlling the multilayer composite coating of a composite target material further includes a fixing sleeve and an annular component, wherein the fixing sleeve is fixed to the annular component and the annular component is fixed to the water cooling plate.

[0014] The composite target material includes a target to be fitted and a substrate target material. The target to be fitted and the substrate target material are coaxially arranged, and the target to be fitted is located in the middle of the substrate target material.

[0015] The beneficial effects of this invention are as follows: This invention improves the control precision, preparation efficiency and diversity of multilayer coatings, and can obtain multilayer nanocomposite coatings with novel structures, composite functions and better bonding. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, obtaining other drawings based on these drawings without creative effort still falls within the scope of this utility model.

[0017] Figure 1 This is a schematic diagram of the structure of this utility model;

[0018] Figure 2This is an exploded view of the structure of this utility model;

[0019] Figure 3 This is a schematic diagram of the internal structure of the insulating sleeve of this utility model;

[0020] Figure 4 This is a structural diagram of the composite target material of this utility model;

[0021] Figure 5 This is a schematic diagram of the internal flow channel of the water-cooled plate of this utility model;

[0022] Figure 6 This is a diagram showing the distribution of magnetic field lines in the arc source when the current is positive.

[0023] Figure 7 The diagram shows the vertical component distribution of the magnetic field on the target surface when the current is positive.

[0024] Figure 8 The distribution diagram of the horizontal component of the magnetic field on the target surface when the current is positive;

[0025] Figure 9 This is a diagram showing the distribution of magnetic field lines of the arc source when the current is zero.

[0026] Figure 10 The diagram shows the vertical component distribution of the magnetic field on the target surface when the current is zero.

[0027] Figure 11 This is a diagram showing the distribution of the horizontal component of the magnetic field on the target surface when the current is zero.

[0028] Figure 12 This is a diagram showing the distribution of magnetic field lines in the arc source when the current is negative.

[0029] Figure 13 The diagram shows the vertical component distribution of the magnetic field on the target surface when the current is negative.

[0030] Figure 14 This is a diagram showing the distribution of the horizontal component of the magnetic field on the target surface when the current is negative.

[0031] In the diagram, 1-composite target, 101-target to be fitted, 102-substrate target, 11-fixing sleeve, 12-ring-shaped part, 2-plastic sleeve, 21-water cooling plate, 22-coolant flow channel, 3-target holder, 4-insulating sleeve, 41-large electromagnetic coil, 42-small electromagnetic coil, 43-ring magnetic pole mounting base, 44-strip permanent magnet, 45-center magnetic pole mounting base, 46-water cooling connector, 5-rear cover plate.

[0032] Among them, Figure 2 The large electromagnetic coil 41 and the small electromagnetic coil 42 are not shown in the exploded diagram. Detailed Implementation

[0033] To make the objectives, technical solutions and advantages of this utility model clearer, the utility model will be described in further detail below with reference to the accompanying drawings.

[0034] It should be noted that all uses of "first" and "second" in the embodiments of this utility model are for the purpose of distinguishing two entities or parameters with the same name but different names. It is clear that "first" and "second" are only for the convenience of expression and should not be construed as limiting the embodiments of this utility model. Subsequent embodiments will not explain this in detail.

[0035] The directional and positional terms used in this utility model, such as "up," "down," "front," "back," "left," "right," "inner," "outer," "top," "bottom," and "side," are merely for reference to the accompanying drawings. Therefore, the directional and positional terms used are for the purpose of explaining and understanding this utility model, and not for limiting the scope of protection of this utility model.

[0036] Example 1:

[0037] like Figures 1 to 14 The image shown is one embodiment of this utility model:

[0038] A device for precisely controlling the multilayer composite coating of a composite target includes a composite target 1 and a target holder 3. The composite target 1 is disposed on the target holder 3. Specifically, the composite target 1 includes a target to be embedded 101 and a substrate target 102. The target to be embedded 101 and the substrate target 102 are coaxially arranged, and the target to be embedded 101 is located in the middle of the substrate target 102. Below the target holder 3, along its central axis, a strip permanent magnet 44, a small electromagnetic coil 42, a ring magnetic pole, and a large electromagnetic coil 41 are sequentially arranged outwards. The strip permanent magnet 44, the small electromagnetic coil 42, the ring magnetic pole, and the large electromagnetic coil 41 form a composite magnetic field on the surface of the composite target 1 to control the movement trajectory of an arc spot on the composite target 1. That is, by adjusting the current and waveform of the electromagnetic coils, the magnetic field can be finely controlled, thereby improving the control accuracy of the arc spot movement and thus precisely controlling the ablation trajectory of the target material during thin film preparation. In addition, it can effectively enhance the confinement of electrons and ions and improve the ionization rate of the target material.

[0039] Specifically, the arc spot movement is influenced by the magnetic field component parallel to the target surface, and the arc spot is always constrained to the location where the parallel magnetic field component on the target surface is maximum. When the magnetic field on the target surface is large, the arc spot moves towards the outer edge of the target material; when the magnetic field on the target surface decreases, the arc spot moves towards the center of the target material. The transverse magnetic field parallel to the cathode surface plays a decisive role in the movement of the arc spot, while the longitudinal magnetic field perpendicular to the cathode surface plays a certain role in stabilizing the arc. According to the acute angle rule and the principle of maximum magnetic field, the arc spot is preferentially etched at the location where the longitudinal magnetic field is zero and the transverse magnetic field is maximum. Figure 6 , Figure 9 , Figure 12As shown, when the current is positive, the magnetic field generated by the coil is in the same direction as the magnetic field of the permanent magnet in the center. The magnetic field in the center is strengthened and is higher than the magnetic field at the edge. The arc spot is constrained to the center of the target material, that is, the central region of the ablation target material is ablated. When the current is 0A, the magnetic field strength of the center and the edge of the target material is equal. At this time, the middle part of the target material is ablated. When the current is negative, the magnetic field generated by the coil is opposite to the magnetic field in the center, thereby weakening the magnetic field in the center. The magnetic field in the center is weaker than the magnetic field at the edge. At this time, the arc spot is constrained to both ends, and the ablation trajectory extends to the edge of the target material.

[0040] The device also includes a fixing sleeve 11 and an annular member 12. The composite target 1 is fixed to the annular member 12 by the fixing sleeve 11 using a rotating snap-fit ​​structure. A water-cooling plate 21 is provided on the target base 3. A first mounting hole is provided on the water-cooling plate 21. A second mounting hole is provided on the annular member 12 corresponding to the first mounting hole. The annular member 12 is fixed to the water-cooling plate 21 by aligning the first mounting hole and the second mounting hole.

[0041] To form the composite magnetic field, an insulating sleeve 4 is provided under the target base 3, and the large electromagnetic coil 41 is sleeved on the insulating sleeve 4; a rear cover plate 5 is provided in the middle of the insulating sleeve 4, and a central magnetic pole mounting seat 45 is provided on the rear cover plate 5, and the strip permanent magnet 44 is provided on the central magnetic pole mounting seat 45; a small electromagnetic coil 42 is sleeved on the central magnetic pole mounting seat 45; an annular magnetic pole mounting seat 43 is provided between the target base 3 and the insulating sleeve 4, and the annular magnetic pole mounting seat 43 is provided with a plurality of magnetic poles along the circumference, and the plurality of magnetic poles are equally spaced and arranged in a ring to form the annular magnetic pole.

[0042] Furthermore, a water-cooling connector 46 is provided on the rear cover plate 5. One end of the water-cooling connector 46 near the rear cover plate 5 has a water-cooling interface for connecting coolant. A connecting hole is provided on the water-cooling plate 21 corresponding to the water-cooling connector 46, allowing coolant to flow into the water-cooling plate 21. A coolant flow channel 22 is provided inside the water-cooling plate 21, and the coolant flow channel 22 is annular. At least two water-cooling connectors 46 are provided; specifically, in this embodiment, two water-cooling connectors 46 are provided. Coolant flows into the water-cooling plate 21 from the water-cooling interface. Because the water-cooling plate 21 is designed with an annular flow channel, it helps to increase the flow rate of the coolant, thereby effectively reducing the temperature of the target surface and reducing the generation of large particles.

[0043] Furthermore, this embodiment can also include a driving device, which can be programmed with periodic drive to control the composite electromagnetic field formed by the coil magnetic field and the closed magnetic field. This results in a periodic change in the electromagnetic field, precisely controlling the trajectory and dwell time of the arc spot on the substrate target 102 and the embedded target 101, thereby achieving precise control of the multilayer composite coating. It should be understood that the driving device is generally a current-driven device, a conventional setup in the art, and will not be elaborated further here. To better illustrate how to achieve precise control of the multilayer composite coating through periodic changes in the electromagnetic field, this embodiment provides seven examples. Specifically, taking the AlCr / TiSi composite target as an example, AlCr / TiSi composite targets are installed on both rows of cathode arc sources, where TiSi is the substrate target with a diameter of 150mm and AlCr is the embedded target with a diameter of 80mm. The substrate material is cleaned with an ultrasonic solution for 40 minutes, dried, and then placed in a vacuum chamber.

[0044] Option 1: The base vacuum for coating is 5×10 -3 At a temperature of 450℃, Ar gas was introduced and an ion source bombardment cleaning was performed on the substrate for 30 minutes with a bias voltage of -250V to further remove oxides and contaminants from the substrate surface and improve the film-substrate adhesion. After cleaning, the coating process began with a bias voltage of 80V, a current of 145A, a coating vacuum of 4Pa, a nitrogen flow rate of 850sccm, and a coating time of 90 minutes. Furthermore, the drive device was periodically programmed, with the electromagnetic coil current gradually increasing from 4A to 15A and then decreasing back to 4A within 60 seconds, for 90 cycles. In this scheme, the arc spot is constrained to the core of the target material, i.e., reciprocating circular motion on the AlCr intercalation target, thus enabling the preparation of the AlCr coating.

[0045] Option 2: Set the base vacuum of the coating to 5×10 -3 At a temperature of 450℃, Ar gas was introduced and an ion source bombardment cleaning was performed on the substrate for 30 minutes with a bias voltage of -250V to further remove oxides and contaminants from the substrate surface and improve the film-substrate adhesion. After cleaning, the coating process began with a bias voltage of 40V, a current of 180A, a coating vacuum of 4Pa, a nitrogen flow rate of 850sccm, and a coating time of 90 minutes. Furthermore, the drive device was periodically programmed, with the electromagnetic coil current gradually increasing from -15A to -4A and then decreasing back to -15A within 60 seconds, for 90 cycles. In Scheme Two, the arc spot is constrained at both ends, i.e., reciprocating circular motion on the TiSi substrate target, enabling the preparation of the TiSiN coating.

[0046] Option 3: The base vacuum for coating is 5×10 -3At 450℃, Ar gas was introduced and an ion source bombardment cleaning was performed on the substrate for 30 minutes with a bias voltage of -250V to further remove oxides and contaminants from the substrate surface and improve the film-substrate adhesion. AlCrN coating preparation parameters: bias voltage 80V, current 145A, coating vacuum 4Pa, nitrogen flow rate 850sccm. TiSiN coating preparation parameters: bias voltage 40V, current 180A, coating vacuum 4Pa, nitrogen flow rate 850sccm.

[0047] A periodic drive program was set up for the drive device. One program gradually increased the electromagnetic coil current from 4A to 15A and then gradually decreased it back to 4A within 60 seconds. Another program gradually increased the current from -15A to -4A and then gradually decreased it back to -15A within 60 seconds. The two programs alternated and cycled 100 times. When the current was positive, the arc spot reciprocated in a circular motion on the AlCr intercalation target for 60 seconds, and when the current was negative, the arc spot reciprocated in a circular motion on the TiSi substrate target for 60 seconds. This enabled the preparation of an AlCrN / TiSiN multilayer composite coating.

[0048] Option 4: Building upon Option 3, a periodic drive program is implemented in the drive device. One program gradually increases the electromagnetic coil current from 4A to 15A and then decreases it back to 4A within 80 seconds. Another program gradually increases the current from -15A to -4A and then decreases it back to -15A within 40 seconds. These two programs alternate 100 times. When the current is positive, the arc spot reciprocates in a circular motion on the AlCr composite target for 80 seconds; when the current is negative, the arc spot reciprocates in a circular motion on the TiSi substrate target for 40 seconds. This allows for the fabrication of AlCrN / TiSiN multilayer composite coatings with different modulation ratios.

[0049] Option 5: Building upon Option 3, a periodic drive program is implemented in the drive device. One program gradually increases the electromagnetic coil current from 4A to 15A and then decreases it back to 4A within 120 seconds. Another program gradually increases the current from -15A to -4A and then decreases it back to -15A within 120 seconds. These two programs alternate 50 times. Specifically, when the current is positive, the arc spot reciprocates in a circular motion on the AlCr composite target for 120 seconds; when the current is negative, the arc spot reciprocates in a circular motion on the TiSi substrate target for 120 seconds. This allows for the fabrication of AlCrN / TiSiN multilayer composite coatings with different modulation periods.

[0050] Option 6: Based on Option 3, it provides a variety of target shapes to be embedded. The target can also be rhomboid or rectangular. Other shapes can be selected according to actual needs. The movement trajectory of the arc spot on the composite target of different shapes can be controlled by the periodic change of the magnetic field to meet specific process requirements.

[0051] Option 7: Based on Option 3, two sets of composite targets with different compositions can be installed on the two rows of cathode arc sources, which can realize the alternating deposition of four different compositions of coatings, thereby improving the diversity of coating composition.

[0052] The above-disclosed embodiments are merely preferred embodiments of the present utility model and should not be construed as limiting the scope of the present utility model. Therefore, any equivalent variations made in accordance with the claims of the present utility model shall still fall within the scope of the present utility model.

Claims

1. An apparatus for precisely controlling a multilayer composite coating of a composite target, comprising a composite target (1) and a target holder (3), wherein the composite target (1) is disposed on the target holder (3), characterized in that, Below the target base (3), a strip permanent magnet (44), a small electromagnetic coil (42), a ring magnetic pole and a large electromagnetic coil (41) are arranged outward along its central axis. The strip permanent magnet (44), the small electromagnetic coil (42), the ring magnetic pole and the large electromagnetic coil (41) form a composite magnetic field on the surface of the composite target material (1) to control the movement trajectory of the arc spot on the composite target material (1).

2. The device for precisely controlling the multilayer composite coating of a composite target material according to claim 1, characterized in that, An insulating sleeve (4) is provided under the target base (3), and the large electromagnetic coil (41) is sleeved on the insulating sleeve (4).

3. The device for precisely controlling the multilayer composite coating of a composite target material according to claim 2, characterized in that, The insulating sleeve (4) is provided with a rear cover plate (5) in the middle, and a central magnetic pole mounting seat (45) is provided on the rear cover plate (5). The strip permanent magnet (44) is provided on the central magnetic pole mounting seat (45).

4. The device for precisely controlling the multilayer composite coating of a composite target material according to claim 3, characterized in that, The small electromagnetic coil (42) is fitted onto the central magnetic pole mounting base (45).

5. The device for precisely controlling the multilayer composite coating of a composite target material according to claim 4, characterized in that, An annular magnetic pole mounting base (43) is provided between the target base (3) and the insulating sleeve (4). The annular magnetic pole mounting base (43) is provided with a plurality of magnetic poles along the circumference. The plurality of magnetic poles are arranged at equal intervals and in an annular arrangement to form the annular magnetic poles.

6. The device for precisely controlling the multilayer composite coating of a composite target material according to claim 3, characterized in that, The target base (3) is provided with a water-cooled plate (21), and the rear cover plate (5) is provided with a water-cooled connector (46). The end of the water-cooled connector (46) near the rear cover plate (5) is provided with a water-cooled interface for connecting the coolant. The water-cooled plate (21) is provided with a connecting hole corresponding to the water-cooled connector (46) so that the coolant flows into the water-cooled plate (21).

7. The device for precisely controlling the multilayer composite coating of a composite target material according to claim 6, characterized in that, The water-cooled plate (21) is provided with a coolant flow channel (22), which is an annular flow channel.

8. The device for precisely controlling the multilayer composite coating of a composite target material according to claim 7, characterized in that, At least two water-cooled connectors (46) are provided.

9. The apparatus for precisely controlling the multilayer composite coating of a composite target material according to claim 6, characterized in that, It also includes a fixing sleeve (11) and an annular member (12), wherein the fixing sleeve (11) is fixed on the annular member (12) and the annular member (12) is fixed on the water cooling plate (21).

10. The apparatus for precisely controlling the multilayer composite coating of a composite target material according to claim 1, characterized in that, The composite target (1) includes a target to be fitted (101) and a substrate target (102). The target to be fitted (101) and the substrate target (102) are coaxially arranged, and the target to be fitted (101) is located in the middle of the substrate target (102).

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