Quick die changing tool for monocrystalline silicon graphite supporting seat

Abstract

The utility model discloses a quick die changing tool for a monocrystalline silicon graphite supporting seat, which comprises a base, a plurality of supporting blocks which are arranged on the base and are used for supporting the graphite supporting seat, a plurality of vertical pressing blocks which are arranged on the base and are lifted on the base, and horizontal pressing blocks which are arranged on the base and are positioned on two sides of the graphite supporting seat, a lifting hydraulic cylinder for driving the vertical pressing block to lift is arranged on the base, and a translation hydraulic cylinder for driving the corresponding horizontal pressing block to move is arranged on the base and positioned on the outer side of the graphite supporting seat. The graphite supporting seat is placed on the supporting block of the base, piston rods of the lifting hydraulic cylinder and the translation hydraulic cylinder extend out, the vertical pressing block presses the graphite supporting seat, the graphite supporting seat is pressed through the horizontal pressing block, and accurate positioning of the graphite supporting seat is achieved. Compared with a traditional mode that a graphite supporting seat is fixed through a screw pressing plate, the efficiency is high, and rapid clamping of products and multi-station product machining can be achieved.

Description

Technical Field

[0001] This utility model relates to the field of monocrystalline silicon processing, specifically a quick mold-changing tooling for a monocrystalline silicon graphite support base. Background Technology

[0002] Single-crystal silicon, a single crystal of silicon, is a crystal with a basically complete lattice structure. It has different properties in different directions and is a good semiconductor material.

[0003] In the production of monocrystalline silicon, graphite support bases are required. However, the current mainstream processing method uses screw plates, which has low production efficiency and only produces one piece per station. This method requires too much manual operation time and the product processing dimensions are unstable, making it impossible to guarantee efficient and stable production. Utility Model Content

[0004] The purpose of this invention is to solve the above problems and provide a quick mold-changing fixture for a single-crystal silicon graphite support, which enables rapid clamping and improves processing efficiency.

[0005] The technical solution adopted by this utility model to solve its technical problem is:

[0006] A quick mold-changing fixture for a single-crystal silicon graphite support includes a base, several support blocks disposed on the base for supporting the graphite support, several vertical pressure blocks disposed on the base and moving up and down on the base, and horizontal pressure blocks disposed on the base on both sides of the graphite support. The base is provided with lifting hydraulic cylinders for driving the vertical pressure blocks to move up and down, and the base is provided with translation hydraulic cylinders on the outside of the graphite support for driving the corresponding horizontal pressure blocks to move.

[0007] Furthermore, the vertical pressure block is provided with a rectangular hole, and the piston rod end of the lifting hydraulic cylinder is provided with a plane that mates with the inner wall of the rectangular hole.

[0008] Furthermore, a limiting block is provided on the side of the horizontal pressure block corresponding to the graphite support, and a slot is provided on the side of the limiting block corresponding to the graphite support.

[0009] Furthermore, the horizontal pressure block has a groove on the side corresponding to the graphite support, the limiting block is located in the groove, and a guide rail slider is provided between the limiting block and the inner wall of the groove.

[0010] Furthermore, the horizontal pressure block located inside the graphite support on the base is slidably connected to the base, and the base is provided with a positioning structure for positioning the gap between the two horizontal pressure blocks.

[0011] Furthermore, the horizontal pressure block is provided with an elongated hole, and the horizontal pressure block is connected to the base by screws.

[0012] Furthermore, the positioning structure includes a support frame mounted on the base, a lifting rod mounted on the support frame and raised and lowered on the support frame, and a positioning head mounted at the lower end of the lifting rod. The positioning head is an inverted equilateral triangle when viewed from the side. Several protrusions are provided on both sides of the positioning head, and positioning grooves that cooperate with the protrusions are provided on the inner sides of the two inner horizontal pressure blocks.

[0013] Furthermore, a slider is provided on the outer cylindrical surface of the lifting rod.

[0014] The beneficial effects of this utility model are:

[0015] 1. This utility model includes a base, several support blocks mounted on the base for supporting a graphite support, several vertical pressure blocks mounted on the base and moving up and down on the base, and horizontal pressure blocks mounted on the base on both sides of the graphite support. The base is equipped with lifting hydraulic cylinders for driving the vertical pressure blocks to move up and down, and translation hydraulic cylinders are mounted on the base outside the graphite support to drive the corresponding horizontal pressure blocks to move. When the graphite support is placed on the support blocks of the base, the piston rods of the lifting and translation hydraulic cylinders extend, the vertical pressure blocks press down on the graphite support, and the horizontal pressure blocks also press down on the graphite support, achieving precise positioning of the graphite support. Compared to the traditional method of using screws and pressure plates to fix the graphite support, this method is more efficient, improving the speed of product clamping and multi-station product processing. Only one tooling base is needed, allowing four products to be processed simultaneously. Later, robotic clamping further reduces human intervention time, significantly improving processing efficiency and cost, achieving rapid clamping, and efficient and stable production.

[0016] 2. The positioning structure of this utility model includes a support frame mounted on the base, a lifting rod mounted on the support frame and moving up and down on the support frame, and a positioning head located at the lower end of the lifting rod. The positioning head, viewed from the side, is an inverted equilateral triangle. Several protrusions are provided on both sides of the positioning head, and positioning grooves that mate with the protrusions are provided on the inner sides of the two horizontal pressure blocks. After the horizontal pressure blocks move, the height of the positioning head is adjusted according to the size of the graphite support base so that the corresponding protrusions mate with the positioning grooves, thereby achieving precise fixing of the gap between the two horizontal pressure blocks and facilitating adjustment. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the structure of this utility model;

[0019] Figure 2 This is a schematic diagram showing the cooperation between the positioning mechanism and the horizontal pressure block of this utility model;

[0020] Figure 3 This is a schematic diagram of the horizontal pressure block structure of this utility model;

[0021] Figure 4 This is a schematic diagram of the positioning mechanism of this utility model.

[0022] In the diagram: 1. Base; 2. Support block; 3. Vertical pressure block; 4. Lifting hydraulic cylinder; 5. Horizontal pressure block; 6. Translation hydraulic cylinder; 7. Rectangular hole; 8. Limiting block; 9. Slot; 10. Elongated hole; 11. Support frame; 12. Lifting rod; 13. Positioning head; 14. Protrusion; 15. Positioning groove; 16. Slider. Detailed Implementation

[0023] To enable those skilled in the art to better understand the technical solutions of this utility model, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0024] like Figure 1 As shown, a quick-change tooling for a single-crystal silicon graphite support includes a base 1, several support blocks 2 mounted on the base 1 for supporting the graphite support, several vertical pressure blocks 3 mounted on the base 1 and moving up and down on the base, and horizontal pressure blocks 5 mounted on the base 1 on both sides of the graphite support. The base 1 is equipped with lifting hydraulic cylinders 4 that drive the vertical pressure blocks 3 to move up and down; the cylinder bodies of the lifting hydraulic cylinders 4 are fixed to the base. A translation hydraulic cylinder 6 is located on the base 1 outside the graphite support, driving the corresponding horizontal pressure blocks 5 to move. When the graphite support is placed on the support blocks 2 of the base, the piston rods of the lifting hydraulic cylinders 4 and the translation hydraulic cylinders 6 extend, pressing down on the graphite support by the vertical pressure blocks 3 and the horizontal pressure blocks 5, thus achieving precise positioning of the graphite support. Compared to the traditional method of using screws and pressure plates to fix the graphite support, this method is more efficient and can improve the rapid clamping of products and multi-station product processing. With just one tooling base, four products can be processed simultaneously. The subsequent robotic clamping further reduces human intervention time, significantly improving processing efficiency and cost, and enabling rapid clamping for efficient and stable production.

[0025] like Figure 1As shown, the vertical pressure block 3 is provided with a rectangular hole 7, and the piston rod end of the lifting hydraulic cylinder 4 is provided with a plane that cooperates with the inner wall of the rectangular hole 7 to prevent the vertical pressure block 3 from rotating. The vertical pressure block 3 and the piston rod of the lifting hydraulic cylinder 4 are locked together by screws.

[0026] like Figure 2 As shown, the horizontal pressure block 5 is provided with a limiting block 8 on the side corresponding to the graphite support base, and the limiting block 8 is provided with a slot 9 on the side corresponding to the graphite support base. The slot 9 cooperates with the corresponding protrusion on the graphite support base to realize the positioning of the graphite support base.

[0027] like Figure 3 As shown, the horizontal pressure block 5 has a groove on the side corresponding to the graphite support base, and the limiting block 8 is located in the groove. The limiting block 8 is connected to the inner wall of the groove by a guide rail slider. When different sizes of graphite support bases are fixed, different limiting blocks 8 can be replaced to adapt to different models of graphite support bases.

[0028] like Figure 3 As shown, the horizontal pressure block 5 located inside the graphite support on the base 1 is slidably connected to the base 1. The base 1 is provided with a positioning structure for positioning the gap between the two horizontal pressure blocks 5. When a graphite support of a different size is replaced, the horizontal pressure block 5 is moved, and the gap between the two inner horizontal pressure blocks 5 is positioned by the positioning structure to ensure that the center point of the graphite support is fixed.

[0029] like Figure 3 As shown, the horizontal pressure block 5 is provided with an elongated hole 10. The horizontal pressure block 5 is connected to the base 1 by screws, and the horizontal pressure block 5 can move along the elongated hole 10.

[0030] like Figures 2 to 4 As shown, the positioning structure includes a support frame 11 mounted on the base 1, a lifting rod 12 mounted on the support frame 11 and moving up and down on the support frame 11, and a positioning head 13 located at the lower end of the lifting rod 12. The positioning head 13, viewed from the side, is an inverted equilateral triangle. Several protrusions 14 are provided on both sides of the positioning head 13, and positioning grooves 15 that mate with the protrusions 14 are provided on the inner sides of the two inner horizontal pressure blocks 5. After the horizontal pressure blocks 5 move, the height of the positioning head 13 is adjusted according to the size of the graphite support, so that the corresponding protrusions 14 mate with the positioning grooves 15, thereby achieving precise fixing of the gap between the two horizontal pressure blocks 5 and facilitating adjustment.

[0031] like Figure 4 As shown, a slider 16 is provided on the outer cylindrical surface of the lifting rod 12 to prevent the positioning head 13 from rotating.

[0032] In the description of this utility model, it should be noted that the terms "left", "right", "up", "down", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0033] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

Claims

1. A quick-change tooling for a single-crystal silicon graphite support, comprising a base (1), a plurality of support blocks (2) disposed on the base (1) for supporting the graphite support, a plurality of vertical pressure blocks (3) disposed on the base (1) and moving up and down on the base, and horizontal pressure blocks (5) disposed on the base (1) on both sides of the graphite support, characterized in that, The base (1) is provided with a lifting hydraulic cylinder (4) for driving the vertical pressure block (3) to rise and fall, and the base (1) is provided with a translation hydraulic cylinder (6) for driving the corresponding horizontal pressure block (5) to move on the outside of the graphite support.

2. The quick mold-changing fixture for a single-crystal silicon graphite support as described in claim 1, characterized in that, The vertical pressure block (3) is provided with a rectangular hole (7), and the piston rod end of the lifting hydraulic cylinder (4) is provided with a plane that cooperates with the inner wall of the rectangular hole (7).

3. The quick mold-changing fixture for a single-crystal silicon graphite support as described in claim 2, characterized in that, The horizontal pressure block (5) is provided with a limiting block (8) on the side corresponding to the graphite support base, and the limiting block (8) is provided with a slot (9) on the side corresponding to the graphite support base.

4. The quick mold-changing fixture for a single-crystal silicon graphite support as described in claim 3, characterized in that, The horizontal pressure block (5) has a groove on the side corresponding to the graphite support base, and the limiting block (8) is located in the groove. The limiting block (8) is connected to the inner wall of the groove by a guide rail slider.

5. The quick mold-changing fixture for a single-crystal silicon graphite support as described in claim 1, characterized in that, The horizontal pressure block (5) located inside the graphite support on the base (1) is slidably connected to the base (1), and the base (1) is provided with a positioning structure for positioning the gap between the two horizontal pressure blocks (5).

6. The quick mold-changing fixture for a single-crystal silicon graphite support as described in claim 5, characterized in that, The horizontal pressure block (5) is provided with an elongated hole (10), and the horizontal pressure block (5) is connected to the base (1) by screws.

7. The quick mold-changing fixture for a single-crystal silicon graphite support as described in claim 5, characterized in that, The positioning structure includes a support frame (11) mounted on the base (1), a lifting rod (12) mounted on the support frame (11) and raised and lowered on the support frame (11), and a positioning head (13) mounted at the lower end of the lifting rod (12). The positioning head (13) is an inverted equilateral triangle when viewed from the side. Several protrusions (14) are provided on both sides of the positioning head (13). The inner sides of the two horizontal pressure blocks (5) are provided with positioning grooves (15) that cooperate with the protrusions (14).

8. The quick mold-changing fixture for a single-crystal silicon graphite support as described in claim 7, characterized in that, The lifting rod (12) has a slider (16) on its outer cylindrical surface.

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