Special-shaped light spot wavefront sensing device, measuring instrument and measuring equipment
By setting irregularly shaped marker regions on the microlens array, the problem of difficult spot correspondence during incident wavefront with large curvature was solved, and efficient and accurate wavefront measurement was achieved.
Patent Information
- Application Number
- CN202520576371.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-31
- Publication Date
- 2026-01-27
- Estimated Expiration
- 2035-03-31
AI Technical Summary
Existing Shack-Hartmann wavefront sensors struggle to match the light spot to a reference spot when dealing with large curvature wavefront incidence, making wavefront measurement difficult.
By employing irregularly shaped light spot wavefront sensors, irregularly shaped marking areas are set on the microlens array to form irregularly shaped shadow areas, thereby determining the corresponding positional relationship between the light spot array and the microlens array and avoiding artificial grid division.
This improved the efficiency and accuracy of wavefront measurement, enabling automated wavefront measurement.
Smart Images
Figure CN223841315U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of optical device technology, and in particular to an irregularly shaped light spot wavefront sensor, measuring instrument and equipment. Background Technology
[0002] Shack-Hartmann wavefront sensors allow users to analyze the shape of the wavefront of incident light to identify distortions caused by light passing through various optics or optical components. Wavefront sensors achieve this by using a microlens array to divide the wavefront into a discrete lattice of intensity points. This data can then be used to reconstruct and analyze the wavefront shape using a wave model of light. Beyond analysis, they are increasingly used for real-time wavefront monitoring and control of adaptive optics to eliminate wavefront distortions before image generation. To measure the wavefront of light, we incident light onto the microlens array 1 of the wavefront sensor, as shown... Figure 1 As shown, each microlens collects light that fills its aperture and forms a single focal spot on the imaging device 2 at the focal plane of the microlens array 1. If the wavefront is planar, all focal spots are located directly behind the center of their respective microlenses, coinciding with the optical axis of each microlens. Thus, regularly spaced light spots are formed on the imaging device 2; these spot positions are called reference spot positions, and they collectively constitute a reference spot field. If the wavefront is distorted, the focal spots will deviate from the reference positions. By comparing the positions of the spots in the measured spot field with the positions of the spots in the reference spot field, the shape of the wavefront can be calculated.
[0003] In specific calculations, the pattern is usually divided into a grid array, and the position of the local spot is determined in each grid cell. However, for wavefronts with large curvature, such as oblique incidence or spherical waves with large curvature, the spot may fall into other grids, which makes it difficult to correspond one-to-one with the reference spot. Summary of the Invention
[0004] The technical problem to be solved by this utility model is to provide an irregularly shaped light spot wavefront sensor, measuring instrument and equipment to address the shortcomings of the prior art.
[0005] The technical solution of this utility model to solve the above-mentioned technical problems is as follows: An irregularly shaped light spot wavefront sensor device includes a microlens array and an imaging device. The microlens array is disposed facing the side of the imaging device close to the incident light. The microlens array is divided into a plurality of regularly arranged units. The microlens array includes a plurality of microlenses, each of which is disposed in one of the units. The microlens array includes an irregularly shaped marking region. The irregularly shaped marking region is formed by at least one of the units, so that an irregularly shaped shadow region is formed in the middle or on the periphery of the light spot array formed on the imaging device.
[0006] The beneficial effects of this invention are as follows: The irregularly shaped light spot wavefront sensor of this invention sets an irregularly shaped marker area containing at least one unit on the microlens array. This irregularly shaped marker area can be used as a special marker to accurately determine the reference position, and the corresponding positional relationship between the light spot array and the microlens array can be determined based on the irregularly shaped shadow area on the corresponding imaging device. This avoids the need for manual grid division of the imaging field of the imaging device, and greatly improves the efficiency and accuracy of wavefront measurement.
[0007] Based on the above technical solution, the present invention can be further improved as follows:
[0008] Further: at least one unit in the microlens array is not provided with a microlens, so as to form the irregular mark region on the microlens array.
[0009] The beneficial effect of the above-mentioned further solution is that, by not setting a microlens at at least one unit in the microlens array, the incident light will not be focused when passing through the region, thereby forming a darker irregular shadow area on the imaging device. In this way, the reference position can be determined based on the irregular mark area on the microlens array where no microlens is set, and the corresponding positional relationship between the spot array and the microlens array can be determined based on the corresponding irregular shadow area, thereby automatically realizing wavefront measurement.
[0010] Furthermore, at least one unit in the microlens array has a shielding layer on its surface to form the irregularly shaped marking region on the microlens array.
[0011] The beneficial effect of the above-mentioned further scheme is that by setting a shielding layer, the incident light can not pass through the shielding area, thereby forming an irregularly shaped marking area on the microlens array and an irregularly shaped shadow area on the imaging device. Thus, the corresponding positional relationship between the spot array and the microlens array can be determined according to the correspondence between the irregularly shaped marking area and the irregularly shaped shadow area, thereby automatically realizing wavefront measurement.
[0012] Further: At least one unit of the microlens array is provided with a micro-concave lens to form the irregular marking region on the microlens array.
[0013] The beneficial effect of the above-mentioned further solution is that by setting a micro-concave lens in the irregular mark area, the light incident on the area can be refracted to the surrounding area, which can further reduce the background light entering the imaging device and form an irregular shadow area on the imaging device. Thus, the corresponding positional relationship between the light spot array and the microlens array can be determined according to the correspondence between the irregular mark area and the irregular shadow area.
[0014] Furthermore, the irregularly shaped marking region is located at the non-edge of the microlens array.
[0015] The beneficial effect of the above-mentioned further solution is that by placing the irregularly shaped marking area at the non-edge of the microlens array, it can be ensured that the irregularly shaped shadow area falls completely within the field of view of the imaging device.
[0016] Furthermore, the number of the irregularly shaped marker regions is multiple.
[0017] The beneficial effect of the above-mentioned further scheme is that by setting multiple irregularly shaped marker areas, multiple reference positions corresponding to the shadows can be formed, thereby more accurately determining the corresponding positional relationship between the spot array and the microlens array, so as to ensure that the wavefront measurement results are more accurate.
[0018] Furthermore, the irregularly shaped light spot wavefront sensor device also includes an opaque mask, which has at least one through hole for light to pass through, so that the light passing through the through hole forms an irregularly shaped shadow region on the periphery of the light spot array on the imaging device.
[0019] The beneficial effect of the above-mentioned further solution is that, by setting the mask, without changing the structure of the microlens array, only incident light passing through the through hole can illuminate the imaging device through the microlens array, while the outer periphery of the through hole forms a shadow on the corresponding imaging device. In this way, an irregular shadow area can be formed on the periphery of the light spot array on the imaging device, thereby determining the corresponding positional relationship between the light spot array and the microlens array.
[0020] This invention also provides a measuring instrument for optical lenses, including the aforementioned irregularly shaped light spot wavefront sensor.
[0021] This invention also provides a device for measuring laser spots, including the irregularly shaped spot wavefront sensor.
[0022] This invention also provides a measuring device for the optical properties of artificial crystals, including the irregularly shaped light spot wavefront sensor. Attached Figure Description
[0023] Figure 1 This is a schematic diagram of the structure of an existing wavefront sensor;
[0024] Figure 2 This is a schematic diagram of the irregularly shaped light spot wavefront sensor device according to the first embodiment of this utility model;
[0025] Figure 3 This is a schematic diagram of the reference spot array of the imaging device according to the first embodiment of the present invention;
[0026] Figure 4 This is a schematic diagram of the irregularly shaped light spot wavefront sensor device according to the second embodiment of this utility model;
[0027] Figure 5 This is a schematic diagram of the irregularly shaped light spot wavefront sensor device according to the third embodiment of this utility model.
[0028] The attached diagram lists the components represented by each number as follows:
[0029] 1. Microlens array, 2. Imaging device, 3. Irregularly shaped marking area, 4. Irregularly shaped shadow area, 5. Micro-concave lens, 6. Mask, 7. Through hole. Detailed Implementation
[0030] The principles and features of this utility model are described below with reference to the accompanying drawings. The examples given are only for explaining this utility model and are not intended to limit the scope of this utility model.
[0031] like Figure 2 and Figure 3 As shown, an irregularly shaped light spot wavefront sensor includes a microlens array 1 and an imaging device 2. The microlens array 1 is disposed opposite to the side of the imaging device 2 near the incident light. The microlens array 1 is divided into a plurality of regularly arranged units. The microlens array 1 includes a plurality of microlenses, each of which is disposed in one of the units. The microlens array 1 includes an irregularly shaped marking region 3, which is formed by at least one of the units, so that an irregularly shaped shadow region 4 is formed in the middle or on the periphery of the light spot array formed on the imaging device 2.
[0032] The irregularly shaped light spot wavefront sensor of this invention sets an irregularly shaped marker region 3 containing at least one unit on the microlens array 1. This irregularly shaped marker region 3 can be used as a special marker to accurately determine the reference position, and the corresponding positional relationship between the light spot array and the microlens array 1 can be determined based on the corresponding irregularly shaped shadow region 4. This avoids the need for manual grid division of the imaging field of the imaging device 2, and greatly improves the efficiency and accuracy of wavefront measurement.
[0033] In one or more embodiments of this utility model, the microlens array 1 includes a plurality of microlenses, and the plurality of microlenses are arranged in a regular manner. The distribution rule of the plurality of units is consistent with the arrangement rule of the microlenses. They can be orthogonal, or they can be arranged at equal intervals on the oblique side, or at equal angular intervals on the circumference, etc., which will not be listed here.
[0034] In one or more embodiments of this invention, at least one unit of the microlens array 1 is not provided with a microlens, so that the irregular marking region 3 is formed on the microlens array 1. By not providing a microlens at at least one unit of the microlens array 1, the incident light does not focus when passing through this region, thereby forming a darker irregular shadow region on the imaging device 2. In this way, a reference position can be determined based on the irregular marking region 3 on the microlens array 1 where no microlens is provided, and the corresponding positional relationship between the spot array and the microlens array 1 can be determined based on its corresponding irregular shadow region 4, thereby automatically realizing wavefront measurement.
[0035] Theoretically, irregular marking regions 3 can be formed at any position on the microlens array 1. However, for convenience, one or more of the microlens array 1 can be removed (for example, during the processing, a certain microlens in the microlens array can be left unused, or a microlens in the already processed microlens array can be destroyed) to form irregular marking regions 3.
[0036] Optionally, in one or more embodiments of this invention, at least one unit of the microlens array 1 has a shielding layer on its surface to form the irregularly shaped marking region 3 on the microlens array 1. By setting the shielding layer, light cannot pass through the shielding region, thereby forming the irregularly shaped marking region 3, so as to determine the reference position, and determine the corresponding positional relationship between the light spot array and the microlens array 1 based on its corresponding irregularly shaped shadow region 4, thereby automatically realizing wavefront measurement.
[0037] In practice, the shielding layer can be formed by blackening the surface of at least one unit in the microlens array 1. Ideally, the area of the shielding layer should be equal to the light-transmitting area of the microlens.
[0038] like Figure 4 As shown, optionally, in one or more embodiments of this utility model, a micro-concave lens 5 is provided at at least one unit of the microlens array 1 to form the irregular marking region 3 on the microlens array 1. By providing the micro-concave lens 5 on the irregular marking region 3, the light incident on this region can be refracted to the surroundings, which can further reduce the background light entering the imaging device 2, forming an irregular shadow region 4 on the imaging device 2. Thus, the corresponding positional relationship between the spot array and the microlens array 1 can be determined according to the correspondence between the irregular marking region 3 and the irregular shadow region 4. Here, the size of the concave lens is preferably the same as that of the microlens (convex lens).
[0039] Optionally, in one or more embodiments of this invention, the irregularly shaped marking region 3 is located at a non-edge location of the microlens array 1. By placing the irregularly shaped marking region 3 at a non-edge location of the microlens array 1, it can be ensured that the irregularly shaped shadow region 4 falls completely within the field of view of the imaging device 2.
[0040] In one or more embodiments of this utility model, the number of irregularly shaped marker regions 3 is multiple. By setting multiple irregularly shaped marker regions 3, multiple reference positions can be formed, thereby more accurately determining the corresponding positional relationship between the spot array and the microlens array 1, so as to ensure more accurate wavefront measurement results.
[0041] Here, when there are multiple irregularly shaped marker areas 3, it is preferable to distribute the multiple irregularly shaped marker areas 3 in a dispersed manner to facilitate improved measurement accuracy.
[0042] like Figure 5 As shown, optionally, in one or more embodiments of this utility model, the irregularly shaped light spot wavefront sensor further includes an opaque mask 6. The mask 6 has at least one through-hole 7 for light to pass through. In the figure, the mask 6 is disposed on the side of the microlens array 1 closest to the incident light, but it can also be disposed on the other side of the microlens array 1, so that the light passing through the through-hole 7 forms an irregularly shaped shadow region 4 on the outer periphery of the light spot array formed on the imaging device 2. By setting the mask 6, without changing the structural shape of the microlens array 1, only light passing through the through-hole 7 can pass through the microlens array 1 and illuminate the imaging device 2, while the outer periphery of the through-hole 7 forms a shadow on the corresponding imaging device 2. This forms an irregularly shaped shadow region 4 on the outer periphery of the light spot array formed on the imaging device 2, thereby determining the corresponding positional relationship between the light spot array and the microlens array 1.
[0043] It should be noted that the shape of the through hole 7 can be circular, elliptical, prismatic, or polygonal, thereby aiding in the matching effect.
[0044] In the embodiments of this utility model, regardless of the method used to form the irregularly shaped marker region 3, a set of irregularly shaped light spot arrays will be obtained on the imaging device 2. The irregularly shaped marker region 3 can be used as a special marker for the irregularly shaped light spot array to establish a correspondence with the reference light spot array. Through a simple geometric conversion relationship (the specific conversion process is existing technology and will not be elaborated in detail here, nor is it within the protection scope of this utility model), the local incident direction of each microlens can be obtained, thereby obtaining the wavefront distribution.
[0045] This invention also provides a measuring instrument for optical lenses, including the aforementioned irregularly shaped light spot wavefront sensor.
[0046] This invention also provides a device for measuring laser spots, including the irregularly shaped spot wavefront sensor.
[0047] This invention also provides a measuring device for the optical properties of artificial crystals, including the irregularly shaped light spot wavefront sensor.
[0048] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.
Claims
1. An irregularly shaped light spot wavefront sensor device, characterized in that: The device includes a microlens array (1) and an imaging device (2). The microlens array (1) is disposed opposite to the side of the imaging device (2) near the incident light. The microlens array (1) is divided into a plurality of regularly arranged units. The microlens array (1) includes a plurality of microlenses, each of which is disposed in one of the units. The microlens array (1) includes an irregularly shaped marking region (3). The irregularly shaped marking region (3) is formed by at least one of the units, so that an irregularly shaped shadow region (4) is formed in the middle or on the periphery of the light spot array formed on the imaging device (2).
2. The irregularly shaped light spot wavefront sensor device according to claim 1, characterized in that: At least one unit in the microlens array (1) is not provided with a microlens so as to form the irregular marking region (3) on the microlens array (1).
3. The irregularly shaped light spot wavefront sensor device according to claim 1, characterized in that: At least one unit of the microlens array (1) has a shielding layer on its surface to form the irregular marking region (3) on the microlens array (1).
4. The irregularly shaped light spot wavefront sensor device according to claim 1, characterized in that: At least one unit of the microlens array (1) is provided with a micro-concave lens (5) to form the irregular marking region (3) on the microlens array (1).
5. The irregularly shaped light spot wavefront sensor device according to any one of claims 1-4, characterized in that: The irregularly shaped marking region (3) is located at the non-edge of the microlens array (1).
6. The irregularly shaped light spot wavefront sensor device according to any one of claims 1-4, characterized in that: The number of the irregularly shaped marker regions (3) is multiple.
7. The irregularly shaped light spot wavefront sensor device according to claim 1, characterized in that: It also includes an opaque mask (6) having at least one through hole (7) for light to pass through, such that the light passing through the through hole (7) forms an irregular shadow region (4) on the periphery of the light spot array formed on the imaging device (2).
8. A measuring instrument for optical lenses, characterized in that: The irregularly shaped light spot wavefront sensor device includes any one of claims 1-7.
9. A measuring device for laser spot, characterized in that: The irregularly shaped light spot wavefront sensor device includes any one of claims 1-7.
10. A measuring device for the optical properties of artificial crystals, characterized in that: The irregularly shaped light spot wavefront sensor device includes any one of claims 1-7.